WO2003106060A2 - Dispositif de nettoyage d'une surface d'une piece - Google Patents
Dispositif de nettoyage d'une surface d'une piece Download PDFInfo
- Publication number
- WO2003106060A2 WO2003106060A2 PCT/FR2003/001768 FR0301768W WO03106060A2 WO 2003106060 A2 WO2003106060 A2 WO 2003106060A2 FR 0301768 W FR0301768 W FR 0301768W WO 03106060 A2 WO03106060 A2 WO 03106060A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- cleaning
- laser
- particles
- part according
- polarized
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
Definitions
- the subject of this invention is a device for cleaning a surface of a part, in particular an optical or electronic part, in order to remove certain so-called contaminating particles which would render it unfit for the service for which it is intended.
- These particles can be mineral or organic in nature.
- One known means for cleaning various objects is the beam of a laser. This technique has been proposed for cleaning facades of monuments, micro-electronic components such as integrated circuits of optical discs, or parts intended for optical uses.
- the beam energy detaches the particles from the surface.
- the means of elimination proposed with the invention is a means of capturing or destroying particles which can take various forms, but which is arranged in front of the surface (and therefore close to it) to produce either an attraction on the particles if the medium is a means of capture, or an immediate elimination of particles if the means is a means of destruction.
- the attraction capture means have the characteristic that their action on the particles does not relax until capture, unlike the action of the scanning means. Some of these means consist of suction means or structures polarized with respect to the part to produce the force of attraction on the detached particles. Destruction means may include the beam of a second laser different from the previous one. The proximity of the means for capturing or destroying the surface to be cleaned guarantees a good result of the process.
- a part to be decontaminated bears the reference 1, and it is placed on a table 2 movable in an XY plane to move the part 1, and more precisely its upper face 3 to be decontaminated, in front of an apparatus which comprises a laser 4 emitting a beam 5 directed towards the face 3, and a suction device 6 comprising a pump 7 and a conduit 8 directed towards the face 3 and more precisely towards the point of arrival of the beam 5; a filter 9 can be added in the duct 8 or downstream of the pump 7.
- the beam 5 detaches the contaminating particles from the face 3, and the suction current attracts them towards the conduit 8 and passes them through the filter 9 where they are definitively retained.
- the complete decontamination process consists of moving the table 2 and the piece 1 of preservation until the entire area to be cleaned of the face 3 has been scanned by the beam 5.
- the suction device is replaced by a tip 10 made of conductive material and therefore capable of being polarized by a voltage generator 11 relative to the part 1.
- the direction of polarization is chosen so that the detached particles and ionized by the energy of the laser 4 are attracted to the tip 10 and deposit on it.
- the distance between tip 10 and face 3 is a few hundred micrometers, for a difference potential from a few tens of volts to a few kilovolts.
- this embodiment is particularly advantageous for parts in relief, and in particular with cavity, since the attraction means can be shaped so as to remain very close to the beam of the laser 5 and to follow it even in narrow cavities.
- All the embodiments of the invention comprising a capture of the particles thus comprise a point-shaped polarization piece which attracts the detached particles from the surface under the best conditions.
- the pointed shape has the other advantage of strengthening the field of polarization where it is required.
- the polarization can be continuous or alternative.
- the application of the field is located where it is useful.
- the end of the conduit 8 comprises polarized plates 15 (which can form the duct or be simply added to it) similar to those of the tip 10.
- the detached particles are sucked into the duct 8 by both the suction force and the electrostatic force, and they can deposit on the plates 15 when this force is sufficient.
- a voltage generator 11 for polarizing the plates 15 relative to the part 1.
- Another means used to prevent contamination includes a second laser, providing energy different from the first and designed to destroy loose particles.
- the first laser 4 can provide a beam 5 per pulse of 0.1 nanosecond to 100 nanoseconds at a rate greater than a few hertz and a wavelength in the ultraviolet
- the second laser will for example be continuous operation at several hundred watts or a few kilowatts.
- the wavelength will be chosen to be best absorbed by the body constituting the particles.
- 5 shows a 'such an arrangement, where next to the first laser 4, a second laser 16 is encountered which emits a beam 17 at grazing incidence above the upper face 3 so as to contact the loose particles that fly at this height.
- the beam 17 is focused in one or two directions and has a focus 18 where it cuts the beam 5 of the first laser 4, so that the energy is most concentrated at the place where the particles are detached and where their destruction is therefore most indicated.
- Certain variants of the invention must also be mentioned. It is thus not necessary that the laser 4 detaching the particles is directed towards the contaminated face 3: FIG. 6 shows that it can very well be directed towards the opposite side of this face, provided that the part 1 is transparent to the beam 5. The laser 4 is then separated from the means for capturing or destroying the particles (which may be the same as previously, for example a second laser 16) by the part 1.
- FIG. 6 shows that it can very well be directed towards the opposite side of this face, provided that the part 1 is transparent to the beam 5.
- the laser 4 is then separated from the means for capturing or destroying the particles (which may be the same as previously, for example a second laser 16) by the part 1.
- FIG. 7 shows that at the device previous can be added a device for observing the phenomenon which may consist of an additional laser 18 emitting a beam 19 of illumination which is diffused towards an optical device which may include a deflection mirror 20 and a lens 21 which focuses this beam towards a camera 22.
- This device makes it possible in particular to visualize the particles then to destroy them by following, in the image, the result of cleaning. So it is not always necessary to sweep the whole surface but to direct the beam only on the particles when these are rare.
- a means for capturing or eliminating particles similar to the previous ones is added to the device, but has not been shown here for reasons of clarity. It should be noted that the beams laser are not necessarily perpendicular to the surfaces to be cleaned or observed.
- the tips 25 depend on a common support 26 and are all directed parallel to the surface to be decontaminated from the part 1 Screw or friction adjustments of the points 25 in the holes of the common support 26 make it possible to separately adjust the advance of each of the points 25 and therefore to place them all at the desired distance from the surface of the part 1 even if it is in relief, so as to establish a sufficient field without risking a scratching of the surface and also according to the nature of the field, that of the particles and the conditions of execution of the process.
- the source 27 of the field can be different for each of the points 25 or common. As before, it can be thermal, electric, alternative or continuous.
- This embodiment can be used with effect in microelectronics, on laminated substrates and composed of etched layers. Peaks
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Cleaning In General (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03760019A EP1511582A2 (fr) | 2002-06-13 | 2003-06-12 | Dispositif de nettoyage d'une surface d'une piece |
US10/516,277 US20060154495A1 (en) | 2002-06-13 | 2003-06-12 | Device for cleaning the surface of a component |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0207263 | 2002-06-13 | ||
FR0207263A FR2840837B1 (fr) | 2002-06-13 | 2002-06-13 | Dispositif de nettoyage d'une surface d'une piece |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2003106060A2 true WO2003106060A2 (fr) | 2003-12-24 |
WO2003106060A3 WO2003106060A3 (fr) | 2004-04-01 |
Family
ID=29595192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/FR2003/001768 WO2003106060A2 (fr) | 2002-06-13 | 2003-06-12 | Dispositif de nettoyage d'une surface d'une piece |
Country Status (4)
Country | Link |
---|---|
US (1) | US20060154495A1 (fr) |
EP (1) | EP1511582A2 (fr) |
FR (1) | FR2840837B1 (fr) |
WO (1) | WO2003106060A2 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2740533C1 (ru) * | 2020-07-13 | 2021-01-15 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Сибирский государственный университет геосистем и технологий" | Устройство оптической очистки твердой поверхности от наночастиц |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005005709B4 (de) * | 2005-01-31 | 2009-06-10 | Technische Universität Dresden | Einrichtung zur Bearbeitung von Materialoberflächen |
WO2011072992A1 (fr) | 2009-12-15 | 2011-06-23 | Exxonmobil Chemical Patents Inc. | Régulation thermique d'un procédé d'oligomérisation et réacteur |
JP5858426B2 (ja) * | 2012-05-21 | 2016-02-10 | 株式会社日本製鋼所 | パーティクル捕集機構付きレーザアニール装置 |
CN104475402B (zh) * | 2014-11-29 | 2016-12-07 | 宁波江东思犒技术服务有限公司 | 用于磁钢的双面激光清洗装置 |
ES2636715B2 (es) * | 2017-06-07 | 2018-02-12 | Sitexco Girona, S.L. | Máquina de limpieza de rodillos anilox por láser y procedimiento para autoajuste del punto focal láser al diámetro del rodillo anilox. |
CN109092804A (zh) * | 2018-10-15 | 2018-12-28 | 南京集萃激光智能制造有限公司 | 一种电子元件激光清洗装置及其清洗方法 |
CN113690280B (zh) * | 2021-08-11 | 2023-11-28 | 深圳市华星光电半导体显示技术有限公司 | 阵列基板的修复方法和阵列基板 |
CN114131211B (zh) * | 2021-11-10 | 2024-05-24 | 苏州热工研究院有限公司 | 激光去污与切割复合系统及激光去污与切割方法 |
CN114904846B (zh) * | 2022-05-10 | 2023-08-25 | 郑州机械研究所有限公司 | 焊丝/焊带激光清洗设备及其贵金属回收模块 |
CN116000020A (zh) * | 2022-12-05 | 2023-04-25 | 苏州天准科技股份有限公司 | 板面复合清洁设备和复合清洁检测方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2752325A1 (fr) * | 1996-08-06 | 1998-02-13 | Cogema | Procede et dispositif de depouissierage de pastilles de combustible nucleaire au moyen d'un faisceau laser |
JP2002035709A (ja) * | 2000-07-25 | 2002-02-05 | Japan Steel Works Ltd:The | レーザクリーニング処理におけるパーティクルの捕集装置及び捕集方法 |
US20020023902A1 (en) * | 2000-07-24 | 2002-02-28 | Allen Susan Davis | Method and apparatus for removal of minute particles from a surface using thermophoresis to prevent particle redeposition |
-
2002
- 2002-06-13 FR FR0207263A patent/FR2840837B1/fr not_active Expired - Fee Related
-
2003
- 2003-06-12 WO PCT/FR2003/001768 patent/WO2003106060A2/fr not_active Application Discontinuation
- 2003-06-12 EP EP03760019A patent/EP1511582A2/fr not_active Withdrawn
- 2003-06-12 US US10/516,277 patent/US20060154495A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2752325A1 (fr) * | 1996-08-06 | 1998-02-13 | Cogema | Procede et dispositif de depouissierage de pastilles de combustible nucleaire au moyen d'un faisceau laser |
US20020023902A1 (en) * | 2000-07-24 | 2002-02-28 | Allen Susan Davis | Method and apparatus for removal of minute particles from a surface using thermophoresis to prevent particle redeposition |
JP2002035709A (ja) * | 2000-07-25 | 2002-02-05 | Japan Steel Works Ltd:The | レーザクリーニング処理におけるパーティクルの捕集装置及び捕集方法 |
Non-Patent Citations (1)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 2002, no. 06, 4 juin 2002 (2002-06-04) & JP 2002 035709 A (JAPAN STEEL WORKS LTD:THE), 5 février 2002 (2002-02-05) * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2740533C1 (ru) * | 2020-07-13 | 2021-01-15 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Сибирский государственный университет геосистем и технологий" | Устройство оптической очистки твердой поверхности от наночастиц |
Also Published As
Publication number | Publication date |
---|---|
EP1511582A2 (fr) | 2005-03-09 |
FR2840837A1 (fr) | 2003-12-19 |
WO2003106060A3 (fr) | 2004-04-01 |
FR2840837B1 (fr) | 2004-11-26 |
US20060154495A1 (en) | 2006-07-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1511582A2 (fr) | Dispositif de nettoyage d'une surface d'une piece | |
EP2836332B1 (fr) | Dispositif et methode de nano-usinage par laser | |
WO2015055779A1 (fr) | Methode et dispositif de micro-usinage par laser | |
EP1236052B1 (fr) | Test electrique de l'interconnexion de conducteurs electriques sur un substrat | |
FR2755151A1 (fr) | Procede et appareil pour rectifier des lignes conductrices sur un substrat | |
EP3804052A1 (fr) | Procédés et systèmes pour la génération d'impulsions laser de forte puissance crête | |
US10644188B2 (en) | Laser epitaxial lift-off GaAs substrate | |
EP0550335B1 (fr) | Système permettant de maîtriser la forme d'un faisceau de particules chargées | |
FR3076290A1 (fr) | Dispositif de detection micro ou nanomecanique de particules | |
EP0298817B1 (fr) | Procédé et dispositif de production d'électrons utilisant un couplage de champ et l'effet photoélectrique | |
FR2620277A1 (fr) | Modulateur optique | |
FR2786938A1 (fr) | Dispositif de generation d'un faisceau laser de puissance, de haute qualite | |
EP3928599A1 (fr) | Procédé d'assemblage de composants mettant en oeuvre un prétraitement des bossages de brasure permettant un assemblage par brasage sans flux et sans résidu | |
FR2764729A1 (fr) | Procede de fabrication d'espaceurs pour ecran plat de visualisation | |
BE1026479B1 (fr) | Système et méthode de maintien en position pour l’usinage et/ou le soudage par rayonnement laser | |
Engelsberg | Particle Removal from Semiconductor Surfaces Using a Photon-Assisted, Gas-Phase Cleaning Process | |
RU2740533C1 (ru) | Устройство оптической очистки твердой поверхности от наночастиц | |
FR2806171A1 (fr) | Source a peu de photons commandable | |
FR2985087A1 (fr) | Support comportant un porte-substrat electrostatique | |
WO2003050927A2 (fr) | Dispositif d'emission de lumiere a micro-cavite et procede de fabrication de ce dispositif | |
EP3994714A1 (fr) | Generateur pulse de particules chargees electriquement et procede d'utilisation d'un generateur pulse de particules chargees electriquement | |
Kaassamani | Polarization Spectroscopy of High Order Harmonic Generation in Semiconductors | |
FR2828024A1 (fr) | Source laser compacte ultrabreve a spectre large | |
FR3116013A1 (fr) | Nettoyage d’un élément optique d’un dispositif de fabrication additive | |
Huang et al. | Research of the laser cleaning technique based on opto-acoustic effect |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A2 Designated state(s): US |
|
AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PT RO SE SI SK TR |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
WWE | Wipo information: entry into national phase |
Ref document number: 2003760019 Country of ref document: EP |
|
ENP | Entry into the national phase |
Ref document number: 2006154495 Country of ref document: US Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 10516277 Country of ref document: US |
|
WWP | Wipo information: published in national office |
Ref document number: 2003760019 Country of ref document: EP |
|
WWP | Wipo information: published in national office |
Ref document number: 10516277 Country of ref document: US |
|
WWW | Wipo information: withdrawn in national office |
Ref document number: 2003760019 Country of ref document: EP |