WO2003096357A3 - Elektrisches widerstands-bauelement auf diamantbasis - Google Patents

Elektrisches widerstands-bauelement auf diamantbasis Download PDF

Info

Publication number
WO2003096357A3
WO2003096357A3 PCT/EP2003/004792 EP0304792W WO03096357A3 WO 2003096357 A3 WO2003096357 A3 WO 2003096357A3 EP 0304792 W EP0304792 W EP 0304792W WO 03096357 A3 WO03096357 A3 WO 03096357A3
Authority
WO
WIPO (PCT)
Prior art keywords
based component
electrically resistant
resistant diamond
electrically
diamond
Prior art date
Application number
PCT/EP2003/004792
Other languages
English (en)
French (fr)
Other versions
WO2003096357A2 (de
Inventor
Peter Gluche
Stephan Ertl
Dirk Grobe
Original Assignee
Gfd Ges Fuer Diamantprodukte M
Rosenberger Hochfrequenztech
Peter Gluche
Stephan Ertl
Dirk Grobe
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gfd Ges Fuer Diamantprodukte M, Rosenberger Hochfrequenztech, Peter Gluche, Stephan Ertl, Dirk Grobe filed Critical Gfd Ges Fuer Diamantprodukte M
Priority to JP2004504244A priority Critical patent/JP2005524986A/ja
Priority to AU2003224148A priority patent/AU2003224148A1/en
Priority to US10/513,864 priority patent/US7393717B2/en
Priority to EP03720555A priority patent/EP1516359A2/de
Publication of WO2003096357A2 publication Critical patent/WO2003096357A2/de
Publication of WO2003096357A3 publication Critical patent/WO2003096357A3/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/20—Resistors
    • H01L28/22—Resistors with an active material comprising carbon, e.g. diamond or diamond-like carbon [DLC]

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Thermistors And Varistors (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Non-Adjustable Resistors (AREA)

Abstract

Elektrisches Widerstands-Bauelement mit elektrisch leitend dotiertem Diamant im Widerstandsbereich sowie ein Verfahren zur Herstellung desselben, wobei der Widerstandsbereich als Widerstandsschicht auf einem Substrat ausgeführt sein kann und das Substrat mindestens teilweise aus elektrisch nichtleitendem Diamant bestehen kann.
PCT/EP2003/004792 2002-05-07 2003-05-07 Elektrisches widerstands-bauelement auf diamantbasis WO2003096357A2 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2004504244A JP2005524986A (ja) 2002-05-07 2003-05-07 ダイヤモンド材料よりなる電気抵抗コンポーネント
AU2003224148A AU2003224148A1 (en) 2002-05-07 2003-05-07 Electrically resistant diamond-based component
US10/513,864 US7393717B2 (en) 2002-05-07 2003-05-07 Diamond-based electrical resistor component
EP03720555A EP1516359A2 (de) 2002-05-07 2003-05-07 Elektrisches widerstands-bauelement auf diamantbasis

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10220360A DE10220360B4 (de) 2002-05-07 2002-05-07 Verwendung eines elektrischen Widerstands-Bauelementes auf Diamantbasis
DE10220360.1 2002-05-07

Publications (2)

Publication Number Publication Date
WO2003096357A2 WO2003096357A2 (de) 2003-11-20
WO2003096357A3 true WO2003096357A3 (de) 2004-02-05

Family

ID=29285171

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2003/004792 WO2003096357A2 (de) 2002-05-07 2003-05-07 Elektrisches widerstands-bauelement auf diamantbasis

Country Status (6)

Country Link
US (1) US7393717B2 (de)
EP (1) EP1516359A2 (de)
JP (1) JP2005524986A (de)
AU (1) AU2003224148A1 (de)
DE (1) DE10220360B4 (de)
WO (1) WO2003096357A2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7727798B1 (en) 2009-01-27 2010-06-01 National Taipei University Technology Method for production of diamond-like carbon film having semiconducting property
US9867286B2 (en) * 2013-06-25 2018-01-09 National Ict Australia Limited Circuit board comprising an insulating diamond material
CN114038640B (zh) * 2021-09-18 2023-05-23 盛雷城精密电阻（江西）有限公司 一种超高频射频电阻器及其生产方法
CN114023519B (zh) * 2021-09-18 2023-04-07 盛雷城精密电阻（江西）有限公司 一种超高频射频电阻器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5348909A (en) * 1993-03-26 1994-09-20 Lexmark International, Inc. Manufacture of printhead with diamond resistors
WO1999063596A1 (de) * 1998-06-04 1999-12-09 GFD-Gesellschaft für Diamantprodukte mbH Diamantbauelement mit rückseitenkontaktierung und verfahren zu seiner herstellung
US20020044174A1 (en) * 1997-10-02 2002-04-18 Hofer Eberhard P. Microactuator based on diamond

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2695000B2 (ja) * 1989-04-11 1997-12-24 住友電気工業株式会社 サーミスタ及びその製造方法
JPH03131003A (ja) * 1989-10-16 1991-06-04 Kobe Steel Ltd ダイヤモンド薄膜サーミスタ
JPH05299635A (ja) * 1992-04-23 1993-11-12 Kobe Steel Ltd 耐熱性オーミック電極を備えたダイヤモンド薄膜及びその製造方法
DE19514544A1 (de) * 1995-04-20 1996-10-24 Daimler Benz Ag Mikrokühleinrichtung
DE19738512A1 (de) * 1997-09-03 1999-02-18 Daimler Benz Ag Diamantschicht eines mikroelektronischen Bauteils und Verfahren zu deren Herstellung
EP1027727A1 (de) * 1997-10-02 2000-08-16 Merckle Gmbh Mikroaktor auf diamantbasis
WO2001011661A2 (en) * 1999-08-10 2001-02-15 Emc Technology, Inc. Passive electrical components formed on carbon coated insulating substrates
EP1321104A1 (de) * 2001-12-06 2003-06-25 GFD-Gesellschaft für Diamantprodukte MBH Ablationsinstrument und Verfahren zum Schneiden, Fragmentieren und/oder Abtragen von Material

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5348909A (en) * 1993-03-26 1994-09-20 Lexmark International, Inc. Manufacture of printhead with diamond resistors
US20020044174A1 (en) * 1997-10-02 2002-04-18 Hofer Eberhard P. Microactuator based on diamond
WO1999063596A1 (de) * 1998-06-04 1999-12-09 GFD-Gesellschaft für Diamantprodukte mbH Diamantbauelement mit rückseitenkontaktierung und verfahren zu seiner herstellung

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
HANNI W ET AL: "SELECTIVE AREA DEPOSITION OF DIAMOND ON 4 IN SI WAFERS", THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, vol. 236, no. 1/2, 15 December 1993 (1993-12-15), pages 87 - 90, XP000415500, ISSN: 0040-6090 *
See also references of EP1516359A2 *
WERNER M ET AL: "THERMISTOR BASED ON DOPED POLYCRYSTALLINE DIAMOND THIN FILMS", DIAMOND AND RELATED MATERIALS, ELSEVIER SCIENCE PUBLISHERS, AMSTERDAM, NL, vol. 1, no. 5 / 6, 15 April 1992 (1992-04-15), pages 669 - 672, XP000356300, ISSN: 0925-9635 *

Also Published As

Publication number Publication date
DE10220360A1 (de) 2003-11-27
WO2003096357A2 (de) 2003-11-20
US20050224806A1 (en) 2005-10-13
AU2003224148A1 (en) 2003-11-11
US7393717B2 (en) 2008-07-01
JP2005524986A (ja) 2005-08-18
AU2003224148A8 (en) 2003-11-11
DE10220360B4 (de) 2006-09-21
EP1516359A2 (de) 2005-03-23

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