WO2003096107A1 - Microdispositif d'affichage a cristaux liquides couleur a base de silicium - Google Patents

Microdispositif d'affichage a cristaux liquides couleur a base de silicium Download PDF

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Publication number
WO2003096107A1
WO2003096107A1 PCT/CN2003/000348 CN0300348W WO03096107A1 WO 2003096107 A1 WO2003096107 A1 WO 2003096107A1 CN 0300348 W CN0300348 W CN 0300348W WO 03096107 A1 WO03096107 A1 WO 03096107A1
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WIPO (PCT)
Prior art keywords
liquid crystal
micro
silicon
display device
color
Prior art date
Application number
PCT/CN2003/000348
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English (en)
French (fr)
Inventor
Jianxin Shao
Bin Fan
Original Assignee
Jianxin Shao
Bin Fan
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Filing date
Publication date
Application filed by Jianxin Shao, Bin Fan filed Critical Jianxin Shao
Priority to KR1020047016445A priority Critical patent/KR100689470B1/ko
Priority to EP03727129A priority patent/EP1550899A4/en
Priority to AU2003234977A priority patent/AU2003234977A1/en
Priority to US10/506,264 priority patent/US20050253792A1/en
Priority to JP2004504037A priority patent/JP2005526272A/ja
Publication of WO2003096107A1 publication Critical patent/WO2003096107A1/zh
Priority to HK06100006.6A priority patent/HK1080154A1/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/134309—Electrodes characterised by their geometrical arrangement
    • G02F1/134336—Matrix
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136277—Active matrix addressed cells formed on a semiconductor substrate, e.g. of silicon
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/52—RGB geometrical arrangements

Definitions

  • the present invention relates to the field of optoelectronics, and particularly to a silicon-based liquid crystal color micro display device. Background technique
  • HDTV high-definition television
  • PDP plasma display
  • TFT thin film transistor
  • DMD digital micro-mirror display
  • LCOS display technology is a combination of a very mature silicon-based CMOS process and a liquid crystal filling process, so it has the advantages of high resolution, low cost, and easy to achieve large-scale production. It is favored by people and is recognized As one of the next generation of mainstream display technology.
  • the current LCOS chips are all monochrome.
  • a more complex optical system is usually used.
  • the white light is divided into three primary color lights of red, green, and blue, which are respectively projected on three LCOS chips. These three beams are then combined into a color image.
  • This color display method has disadvantages such as complicated mechanism, high cost, and unstable performance.
  • the pixel shape of the current LCOS chip is square, using this pixel-shaped LCOS chip to directly make a color LCOS device, the display image will be partially stretched and distorted, although this distortion can be achieved through projection optics. System to correct, but after all, it will increase the difficulty of optical design. Summary of the Invention
  • the object of the present invention is to provide a silicon-based liquid crystal color micro display device, which can realize single-chip color display, simplify the optical system, and improve system reliability.
  • a further object of the present invention is to provide a silicon-based liquid crystal color micro display device, which can It is sufficient to substantially eliminate image distortion, so that human distortion is not visible to the naked eye, thereby improving image quality.
  • a silicon-based liquid crystal color micro display device includes a silicon-based chip with an integrated circuit structure, a metal mirror array, a lower liquid crystal alignment layer, a liquid crystal layer, an upper liquid crystal alignment layer, a transparent conductive layer, micro red, green, and blue.
  • a three-primary color filter array and a glass substrate wherein the silicon-based chip, metal mirror array, lower liquid crystal alignment layer, liquid crystal layer, upper liquid crystal alignment layer, transparent conductive layer, and glass substrate are sequentially stacked and arranged Encapsulated in one body, the micro color filter array is located between the upper liquid crystal alignment layer and the glass substrate, and the interval between the two liquid crystal alignment layers is 0.5 ⁇ m to 10 ⁇ m; each of the micro color filter arrays The shape and size of each pixel are the same as or close to the pixels of the metal mirror array, and they are aligned when packaged, showing a one-to-one correspondence relationship; each pixel of the metal mirror array simultaneously serves as a metal electrode and can be used by the underlying silicon.
  • the integrated circuit on the base chip is addressed, and a certain DC voltage or voltage pulse can be added respectively.
  • the silicon-based liquid crystal color micro display device When white linearly polarized light is irradiated to the silicon-based liquid crystal color micro display device, part of the light is reflected back by the micro-filter without changing its polarization direction, while another part of the light passes through the micro-filter and passes through the liquid crystal. After the layer reaches the metal reflective layer of the LCOS substrate, it is reflected back, and the polarization direction of the reflected light will change with the voltage or pulse width applied by the liquid crystal layer. Therefore, by using a polarization beam splitting prism, the partially reflected light can be distinguished from the reflected light that has not passed through the liquid crystal layer. This part of the reflected light that has passed through the liquid crystal layer has undergone liquid crystal modulation and carries image information. Therefore, it can pass directly through an imaging system for color display, while the part of the reflected light that has not passed through the liquid crystal layer is reflected back. The device can recover this part of the light energy and reflect it back for reuse.
  • This solution conveniently implements a single-chip color display solution by setting a miniature color filter in the LCOS chip, greatly simplifies the optical system part of the current color projection device, effectively improves reliability, and reduces Volume, and can greatly reduce costs.
  • the light utilization efficiency is effectively improved, which can greatly reduce the energy consumption of the light source, reduce a series of side effects caused by the light source heating, improve the reliability of the system, and help extend the micro display device. Life.
  • the interval between the two liquid crystal alignment layers of the silicon-based liquid crystal color micro display device is preferably 1 ⁇ m to 6 ⁇ m, and more preferably 2 ⁇ m to 4 ⁇ m.
  • the micro color filter array of the silicon-based liquid crystal color micro display device may be located between the upper liquid crystal alignment layer and the transparent conductive layer, or may be located between the transparent conductive layer and the glass substrate.
  • the micro-color filter array of the silicon-based liquid crystal color micro display device is a combination of micro-filters of three primary colors of red, green, and blue.
  • the shapes of the micro-filters of the three primary colors may be the same or different. They pass through the three primary colors of red, green, and blue, while reflecting light of other wavelengths.
  • Each micro-filter in the micro-filter array can be composed of two or more dielectric thin films of different refractive indexes alternately combined, and the total thickness of the film layer is between 1 micrometer and 5 micrometers.
  • the gap between the micro color filters of the silicon-based liquid crystal color micro display device is about 0.3 to 1 micron, and is plated with a non-transparent coating.
  • the material of the non-transparent coating can be from aluminum, chromium, nickel, copper, and iron. , Zinc, titanium, gold, silver, platinum, tungsten, molybdenum, tantalum, zirconium, carbon, or a combination thereof. This can reduce light leakage, thereby further improving the image quality of the device, increasing image contrast and signal-to-noise ratio, and also protecting the integrated circuits on the silicon substrate from performance degradation caused by strong light exposure and extending the service life.
  • each basic pixel cell shape of the micro color filter array is composed of three elements: red, green, and blue.
  • a rectangular structure composed of rectangular micro-filters with a length-to-width ratio of about 3, and the entire array is a square structure with the square structure as the basic unit.
  • the three red, green, and blue rectangular micro-filters have different widths while maintaining the same total width, so that the red, green, and blue micro-filters have a proper area ratio.
  • each basic pixel unit of the miniature color filter array may also be a hexagonal structure composed of three parallelograms of red, green, and blue parallelograms, and the entire array is formed by the hexagon
  • the structure is that the basic units are closely arranged in a honeycomb manner.
  • the ratio of the equivalent length to the equivalent width of the basic pixel unit formed by them can be close to 1, and Red, green,
  • the blue miniature filter has a suitable area ratio.
  • the shape of the three red, green, and blue micro-filters of each basic pixel unit are rhombuses, and two of the rhombuses each have an internal angle at
  • the image distortion can be eliminated or substantially eliminated to achieve the above-mentioned further object of the present invention; in addition, the system color balance can be adjusted by adjusting the ratio of the area of each pixel. These are all conducive to improving the image quality and simplifying the optical system in the projection device.
  • FIG. 1 is a schematic cross-sectional structure diagram of a silicon-based liquid crystal color micro display device according to the present invention.
  • FIG. 2 is a schematic diagram of a planar arrangement and distribution of a miniature filter array in the prior art (where: a is a product-shaped arrangement; b is a comb-like arrangement).
  • FIG. 3 is a schematic plan view of the arrangement of micro-filter arrays in the silicon-based liquid crystal color micro-display device of the present invention (where: a is a square array; b is a honeycomb array).
  • FIG. 4 is a schematic structural diagram of a basic unit of pixels arranged in a honeycomb shape. detailed description
  • FIG. 1 is a schematic cross-sectional structure diagram of a color micro display device according to the present invention.
  • the silicon-based liquid crystal color micro display device includes a silicon substrate chip with an integrated circuit structure 1, a metal mirror array 2, a lower liquid crystal alignment layer 3, a liquid crystal layer 4, an upper liquid crystal alignment layer 3, a transparent conductive layer 5, and a micro Red, green, and blue three-color color filter array 6, glass substrate 7, wherein the silicon substrate chip 1, metal reflector array 2, lower liquid crystal alignment layer 3, liquid crystal layer 4, upper liquid crystal alignment layer 3
  • the transparent conductive layer 5 and the glass substrate 7 are sequentially stacked and packaged in one body.
  • the figure shows only the case where the micro color filter array 6 is located between the transparent conductive layer 5 and the glass substrate 7, and it can also be located Between the upper liquid crystal alignment layer 3 and the transparent conductive layer.
  • the interval between the two liquid crystal alignment layers 3 is 0.5 ⁇ m to 10
  • the micrometer is preferably 1 micrometer to 6 micrometers, and more preferably 2 micrometers to 4 micrometers.
  • Each of the micro filter arrays 6 is made of a multi-layer dielectric optical film, which transmits red light, green light, and blue light, respectively, and all other spectra in the visible region are highly reflective.
  • the number, shape, size, and arrangement of the pixels of these miniature filter arrays 6 are consistent with the number, shape, size, and arrangement of the pixels of the metal mirror array 2 on the silicon substrate 1 described above.
  • Each of the metal mirror arrays 2 can be used not only as a light reflection layer, but also as a metal electrode, and they can be applied with different voltages respectively by the control of the address driving circuit.
  • the gap 8 between the pixels of the micro-filter array 6 is about 0.3 to 1 micron, and the gap 8 is plated with a non-transparent plating layer, such as aluminum, chromium, nickel, copper, iron, zinc, One of titanium, gold, silver, platinum, tungsten, molybdenum, tantalum, zirconium, and carbon, or a combination thereof, can reduce light leakage.
  • an addressable pixel array is first fabricated by a CMOS process on a silicon substrate 1 having a diagonal size of about 10 mm to 50 mm, and then a metal mirror 2 is plated on each pixel.
  • a transparent glass substrate 7 having the same size as the above-mentioned silicon substrate 1 a combination of photolithography and vacuum coating is used to fabricate red, green, and blue three-color micro-filter arrays 6.
  • a transparent conductive film 5 is plated thereon, and then together with the above-mentioned silicon substrate 1 with the metal mirror element array 2, the The surface is coated with a liquid crystal alignment layer 3 (the material is polyimide or similar material), and after the alignment treatment (mechanical friction or other methods), the two substrates are brought together face to face, with a gap between them. The distance is between 0.5 microns and 10 microns.
  • the liquid crystal 4 is perfused in the middle interval and the periphery is sealed to form a combined device of a micro filter array and an LCOS substrate.
  • FIG. 2 is a schematic diagram of a planar arrangement and distribution of a miniature filter array in the prior art.
  • the shape of each pixel is square, and every three pixels (red, green, blue) are arranged in the shape of a dot (as shown in Figure 2 (a)) or comb-like (as shown in Figure 2 (b)).
  • This method constitutes a basic pixel unit, which in turn constitutes the entire display screen.
  • no matter how the square-shaped pixels are arranged they will cause distortion of the display screen image. For example, when an input screen image with an aspect ratio of 4: 3 is displayed in the font arrangement of FIG. 2 (a), the displayed screen image has an aspect ratio of 1: 1.
  • FIG. 2 is a schematic diagram of a planar arrangement and distribution of a miniature filter array in the prior art.
  • the shape of each pixel is square, and every three pixels (red, green, blue) are arranged in the shape of a dot (as shown in Figure 2 (a)) or comb-like (a
  • the displayed picture image aspect ratio will be distorted to 4: 1. Although this distortion can be transformed by casting Shadow optical system to correct, but this correction will increase the complexity of the projection optical system, increase the cost of the projection optical system, and possibly reduce the picture quality of the projected image.
  • FIG. 3 is a schematic plan view of the arrangement of micro-filter arrays of the silicon-based liquid crystal color micro-display device of the present invention.
  • the shape of each basic pixel unit of the micro-color filter array of the silicon-based liquid crystal color micro-display device is composed of three lengths and widths of red, green, and blue, which is about 3
  • the rectangular structure is composed of rectangular micro-filters, and the entire array is a square structure with the square structure as a basic unit. Therefore, it does not cause distortion of the display screen image.
  • the red, green, and blue pixels are micro-filtered.
  • the light sheet has a proper area ratio and can adjust the tonal balance of the projected image.
  • the current illumination source of projection display systems is usually ultra-high pressure mercury lamps, and the spectral components of red light in the emission spectrum of ultra-high pressure mercury lamps are significantly lower than the spectral components of green and blue light, so red pixels can be appropriately increased by
  • the width of the rectangle is reduced correspondingly to the width of the green and blue pixels, so as to increase the ratio of the area of the red pixels to the total area, so as to perform color compensation and achieve color balance.
  • the pixel shape shown in Figure 3 (a) is only suitable for image display with fewer pixels (ie, lower resolution).
  • Figure 3 (b) shows the pixel shape and arrangement of a color LCOS device suitable for more pixel (ie higher resolution) image display.
  • the shape of the three red, green, and blue pixels of the micro-color filter array of the silicon-based liquid crystal color micro display device are parallelograms, and the shape of each basic pixel unit is three parallels of red, green, and blue.
  • a hexagonal structure composed of quadrangular micro-filters, and the entire array is closely arranged in a honeycomb manner with the hexagonal structure as a basic unit.
  • the proportion of pixels of each color in the total display area can be changed, so that color compensation can be performed and tone balance can be adjusted.
  • the advantage of this honeycomb arrangement is that the side lengths of the parallelograms of each pixel are close to each other, so it is beneficial to make it denser to get more pixels and higher resolution.
  • FIG. 4 is a specific configuration of the arrangement shown in FIG. 3 (b).
  • the red, green, and blue micro-filters of each basic pixel unit are rhombic in shape, and the side length is usually between 4 ⁇ 10 microns.
  • the two rhombuses of green pixel 9 and blue pixel 10 have the same shape, and each has an internal angle between 50 ° and 56 °, preferably about 53 °, and the other pixel, red pixel 11, has An inner angle is between 70 ° and 78 °, preferably about 74 °. In this way, after the hexagonal basic pixel units are arranged in a honeycomb structure, the ratio of the equivalent length and equivalent width of each basic pixel unit is very close to 1, that is, this structure will not bring graphics Distortion.
  • the side lengths of the rhombuses of each pixel are equal, which is beneficial to the further integration of the device.
  • the area of the red pixel 11 is slightly larger than the area of the green pixel 9 and the blue pixel 10 (the area of the red pixel is about 1.11 times the area of the green pixel), which helps to improve the The visual effect of lack of red component in the projected image caused by weak light spectral energy.
  • a non-transparent coating layer (such as aluminum, chromium, nickel, copper, iron, zinc, titanium, gold,
  • a material of silver, platinum, tungsten, molybdenum, tantalum, zirconium, or carbon, or a combination thereof, can reduce light leakage, thereby further improving the image quality of the device, and improving image contrast and signal-to-noise ratio.

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  • Mathematical Physics (AREA)
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Description

一种硅基液晶彩色微显示器件 技术领域
本发明涉及光电领域， 特别是涉及一种硅基液晶彩色微显示器件。 背景技术
近年来， 高清晰度电视（HDTV)的技术发展非常迅速， 发展起了许 多新型的显示技术， 如： 等离子体显示（PDP)技术、薄膜晶体管（TFT) 显示技术、数字微反射镜显示（DMD)技术、以及硅基液晶反射式（LCOS) 显示技术等等。 其中， LCOS显示技术由于是由已非常成熟的硅基底 CMOS工艺和液晶灌装工艺组合而成的， 因而具有分辨率高、 成本低、 容易实现大规模生产等优点， 受到人们的青睐， 被公认为是下一代的主 流显示技术之一。
但目前的 LCOS芯片都是单色的， 要实现彩色显示， 通常是采用一 套较复杂的光学系统， 先将白色光分成红、 绿、 蓝三基色光， 分别投射 到三块 LCOS芯片上， 然后再将这三束光合成彩色图像。 这种彩色显示 方法有着机构较复杂、 成本较高、 性能不够稳定等缺点。 另外由于目前 LCOS芯片的象元形状都是正方形， 利用这种象元形状的 LCOS芯片直 接做成彩色 LCOS器件， 其显示图像会有部分被拉伸而发生失真， 虽然 这种失真可以通过投影光学系统来加以矫正， 但毕竟会增加光学设计的 难度。 发明内容
本发明目的在于提供一种硅基液晶彩色微显示器件， 它能够实现单 芯片彩色显示， 简化光学系统， 提高系统可靠性。
本发明进一步的目的在于提供一种硅基液晶彩色微显示器件， 它能 够基本上消除图像失真， 使得人的肉眼观察不到图像的畸变， 从而提高 图像质量。
本发明的目的通过如下技术方案来实现：
一种硅基液晶彩色微显示器件， 包括带有集成电路结构的硅基底芯 片、 金属反射镜列阵、 下液晶定向层、 液晶层、 上液晶定向层、 透明导 电层、 微型红、 绿、 蓝三基色彩色滤光片列阵、 玻璃基片， 其中所述硅 基底芯片、 金属反射镜列阵、 下液晶定向层、 液晶层、 上液晶定向层、 透明导电层、 玻璃基片依次层叠设置并封装于一体， 所述微型彩色滤光 片列阵位于上液晶定向层和玻璃基片之间， 两个液晶定向层之间的间隔 为 0.5微米〜 10微米； 微型彩色滤光片列阵的每个象元形状、 尺寸均与金 属反射镜列阵的象元相同或接近， 封装时对准， 呈一一对应关系； 其金 属反射镜列阵的各象元同时作为金属电极并可由其底下硅基底芯片上的 集成电路进行寻址， 可以分别加上一定的直流电压或电压脉冲。
当白色线偏振光照射到该硅基液晶彩色微显示器件时， 一部分光被 微型滤光片反射回去， 并且不改变其偏振方向， 而另一部分光则透过微 型滤光片， 并穿过液晶层到达 LCOS基片的金属反射层上后， 再被反射 回去， 该反射光的偏振方向会随液晶层所加的电压或脉冲宽度不同而发 生变化。 因此， 采用一个偏振分光棱镜， 可将该部分反射光与没有经过 液晶层的反射光区分开来。 这部分经过液晶层的反射光由于已经过液晶 调制， 带有图像信息， 因而可直接经过一成像系统， 作彩色显示用， 而 那部分没有经过液晶层的反射光则被反射回去， 通过一定的装置可将该 部分光能量回收， 并反射回来重复利用。
该方案通过将微型彩色滤光片设置在 LCOS芯片之中， 方便地实现 了单芯片的彩色显示方案， 大大简化了目前彩色投影装置中的光学系统 部分， 有效地提高了可靠性， 减小了体积， 并可大大降低成本。 同时通 过回收利用反射回去的光能量， 有效地提高了光的利用效率， 从而可以 大大降低光源的能耗， 减少由于光源发热引起的一系列副作用， 提高系 统的可靠性， 有利于延长微显示器件的使用寿命。 上述方案中， 硅基液晶彩色微显示器件的两个液晶定向层之间间隔 优选为 1微米〜 6微米， 更优选为 2微米〜 4微米。
上述方案中， 硅基液晶彩色微显示器件的微型彩色滤光片列阵可以 位于上液晶定向层与透明导电层之间， 也可以位于透明导电层与玻璃基 片之间。
硅基液晶彩色微显示器件的微型彩色滤光片列阵是由红、 绿、 蓝三 基色的微型滤光片组合而成， 这三基色的微型滤光片的形状可以相同， 也可以不相同， 它们分别透过红、 绿、 蓝三基色光， 而对其它波长的光 则均为反射。 微型滤光片列阵中的每一个微型滤光片可以由两种或两种 以上的不同折射率的介质薄膜交替组合而成，其膜层总厚度在 1微米〜 5 微米之间。
硅基液晶彩色微显示器件的微型彩色滤光片之间的间隙约在 0.3〜1 微米之间， 并镀有非透明镀层， 非透明镀层的材料可以是从铝、 铬、 镍、 铜、 铁、 锌、 钛、 金、 银、 铂、 钨、 钼、 钽、 锆、 碳中选择的一种材料 或它们的组合物。 这样可以减少漏光， 从而进一步改善该器件的图像质 量， 提高图像对比度和信噪比， 还可以保护硅基片上的集成电路， 使其 免受强光照射而引起的性能衰退， 延长使用寿命。
另外， 为了更好地实现本发明的目的， 在本发明的硅基液晶彩色微 显示器件中， 微型彩色滤光片列阵的每个基本象素单元形状均为由红、 绿、 蓝三个长与宽之比约为 3的长方形微型滤光片组成的正方形结构， 且整个列阵为以该正方形结构为基本单元紧密排列而成的方形结构。 其 中红、 绿、 蓝三个长方形微型滤光片在保持宽度的总和不变前提下各自 的宽度不同， 使红、 绿、 蓝微型滤光片具有合适的面积比。
微型彩色滤光片列阵的每个基本象素单元形状也可以是由红、 绿、 蓝三个平行四边形的微型滤光片组成的六边形结构， 且整个列阵为以该 六边形结构为基本单元呈蜂窝状方式紧密排列而成。 同样， 通过调节红、 绿、 蓝三个微型滤光片的平行四边形的内角度值和边长， 可以使得它们 所构成的基本象素单元的等效长度与等效宽度之比接近 1， 且红、 绿、 蓝微型滤光片具有合适的面积比。 例如， 每个基本象素单元的红、 绿、 蓝三个微型滤光片的形状均为菱形， 且其中有两个菱形各有一个内角在
50°〜56°之间， 而另一个菱形则有一个内角在 70°〜78°之间。
利用以上基本象素单元结构中等效长度与等效宽度的比是或接近是
1， 可以消除或者基本消除图像失真变形， 实现本发明的上述进一步的目 的； 另外通过调节各象元面积的比值可以对系统色平衡进行调节。 这些 都有利于提高图像质量， 简化投影装置中的光学系统。
本发明的各项优点都将推进 LCOS显示技术在台式电脑、 家用电视 机、 商用投影系统以及头戴式显示装置等方面的广泛应用。 附图说明
图 1为本发明的硅基液晶彩色微显示器件的截面结构示意图。
图 2为现有技术中的微型滤光片列阵的平面排列分布示意图（其中： a为品字型排列； b为梳状排列）。
图 3为本发明的硅基液晶彩色微显示器件中的微型滤光片列阵的平 面排列分布示意图 （其中： a为正方形排列； b为蜂窝状排列）。
图 4为一种蜂窝状排列的象素基本单元的结构示意图。 具体实施方式
下面结合附图详细阐述本发明。
图 1是本发明的彩色微显示器件的截面结构示意图。该硅基液晶彩色 微显示器件， 包括带有集成电路结构的硅基底芯片 1、金属反射镜列阵 2、 下液晶定向层 3、液晶层 4、上液晶定向层 3、透明导电层 5、微型红、绿、 蓝三基色彩色滤光片列阵 6、 玻璃基片 7， 其中所述硅基底芯片 1、 金属 反射镜列阵 2、 下液晶定向层 3、液晶层 4、 上液晶定向层 3、透明导电层 5、 玻璃基片 7依次层叠设置并封装于一体， 图中仅示出微型彩色滤光片 列阵 6位于透明导电层 5和玻璃基片 7之间的情况，其也可以位于上液晶 定向层 3与透明导电层之间。两个液晶定向层 3之间的间隔为 0.5微米〜 10 微米， 优选为 1微米〜 6微米， 更优选为 2微米〜 4微米。 微型滤光片列 阵 6的每一片均由多层介质光学薄膜制成，分别透过红光、绿光、和蓝光， 而对可见区域其它光谱则均为高反射。这些微型滤光片列阵 6的象元的数 量、形状、尺寸和排列方式均与上述硅基底 1上的金属反射镜列阵 2的象 元的数量、 形状、 尺寸和排列方式相一致， 形成一一对应关系。 金属反射 镜列阵 2中的每一个不仅可作光的反射层， 同时也是金属电极， 可通过寻 址驱动电路的控制使它们分别加上不同的电压。另外，在微型滤光片列阵 6的各象元之间的间隙 8约在 0.3〜1微米之间， 间隙 8上镀有非透明镀层， 如铝、 铬、 镍、 铜、 铁、 锌、 钛、 金、 银、 铂、 钨、 钼、 钽、 锆、 碳中 的一种材料或者它们的组合物， 可以减少漏光。
制作时首先在一块对角线尺寸约为 10毫米〜 50毫米大小的硅基底 1 上用 CMOS工艺制作可寻址的象元阵列， 然后在各象元上镀上金属反射 镜 2。另外在一块与上述硅基底 1尺寸相仿的透明玻璃基底 7上，用光刻 和真空镀膜相结合的方法， 制作上红、 绿、 蓝三色微型滤光片列阵 6。 将该彩色微型滤光片列阵 6作平面化处理后， 在其上再镀上一层透明导 电膜 5，然后再与上述带有金属反射镜象元列阵 2的硅基底 1一起，在其 表面均涂布上一层液晶定向层 3 (材料为聚酰亚胺或类似材料）， 并经过 定向处理（机械磨擦或其它方法）后， 将这两块基底面对面的合在一起， 中间间隔距离在 0.5微米至 10微米之间。 在中间间隔中灌注进液晶 4， 并将周边密封， 即制成微型滤光片列阵与 LCOS基片的组合器件。
图 2为现有技术中微型滤光片列阵的平面排列分布示意图。 每个象 元的形状均为正方形， 每三个象元（红、 绿、 蓝） 以品字型（如图 2 (a) 所示） 或者梳状 （如图 2 (b) 所示）排列方式组成一个基本象素单元， 进而构成整个显示画面。但这种正方形形状的象元无论以何种方式排列， 均会带来显示画面图像的失真变形。如一个长宽比为 4: 3的输入画面图 像， 在以图 2 (a) 的品字型排列方式显示画面时， 其显示出的画面图像 长宽比变形为 1 : 1。 而在以图 2 (b) 的梳状排列方式显示画面时， 则其 显示出的画面图像长宽比会变形为 4: 1。 虽然这种失真变形可以通过投 影光学系统来加以矫正， 但是这种矫正会增加投影光学系统的复杂性， 增加投影光学系统的成本， 还有可能降低投影图像的画面质量。
为了减小图像失真， 必须改变原有设计的象元形状， 本发明给出了 基本上无失真的彩色 LCOS器件的象元形状和排列方式。 图 3为本发明 的硅基液晶彩色微显示器件的微型滤光片列阵的平面排列分布示意图。 如图 3 (a) 所示， 硅基液晶彩色微显示器件的微型彩色滤光片列阵的每 个基本象素单元形状均为由红、 绿、 蓝三个长与宽之比约为 3的长方形 微型滤光片组成的正方形结构， 整个列阵为以该正方形结构为基本单元 紧密排列而成的方形结构。 因而， 它不会引起显示画面图像的变形失真。
而且， 在保持这红、 绿、 蓝三个象元的宽度之和不变（等于其长度） 的前提下， 通过适当改变这三个象元的宽度之比， 使红、 绿、 蓝微型滤 光片具有合适的面积比， 可以调整投影图像的色调平衡。 例如： 目前的 投影显示系统的照明光源通常为超高压汞灯， 而超高压汞灯的发射光谱 中红光的光谱分量明显低于绿光和蓝光的光谱分量， 因此可以通过适当 增加红色象元的长方形的宽度， 相应减小绿色和蓝色象元的宽度， 以提 高红色象元的面积占总面积的比例， 从而进行色补偿， 达到色平衡。
附图 3 (a) 所示的象元形状的一个缺点是长宽比的比值过高。 对于 微型显示器件来说，其象元形状的最小尺度受到微电子加工工艺的限制。 特别是对于微型液晶显示器件来说， 其象元形状的最小尺度还受到液晶 分子尺度的限制。 显然， 长宽比过高的象元形状不利于显示器件的进一 步集成。 因此， 如附图 3 (a) 所示的象元形状只适用于较少象素 （即较 低分辨率） 的图像显示。
附图 3 (b) 所示的是一种适合于较多象素 （即较高分辨率） 图像显 示的彩色 LCOS器件的象元形状和排列方式。 硅基液晶彩色微显示器件 的微型彩色滤光片列阵的红、 绿、 蓝三个象元的形状均为平行四边形， 每个基本象素单元形状均为由红、 绿、 蓝三个平行四边形的微型滤光片 组成的六边形结构， 且整个列阵为以该六边形结构为基本单元呈蜂窝状 方式紧密排列而成。 通过调整这基本象素单元的六边形的内角度值和各边长， 可'以使其 等效长度和等效宽度之比接近于 1， 因而基本上消除了显示画面的变形 失真， 人的肉眼不能察觉图像的畸变。 而且通过调整这基本象素单元的 六边形的内角度值和各边长， 可以改变各颜色的象元在总显示面积中所 占的比例， 从而可以进行色补偿， 调整色调平衡。 这种蜂窝状排列结构 的优点是各象元的平行四边形的边长长度接近，因此有利于做得更密集， 以得到更多象素， 更高分辨率。
附图 4是图 3 (b)所示排列结构的一种具体构形， 它的每个基本象素 单元的红、 绿、 蓝三个微型滤光片的形状均为菱形， 边长通常在 4~10微 米之间。 绿色象元 9、 蓝色象元 10的两个菱形的形状相同， 各有一个内角 在 50°〜56°之间， 优选为 53°左右， 而另一个象元， 即红色象元 11则有一 个内角在 70°〜78°之间， 优选为 74°左右。 这样， 这个六边形的基本象素 单元在以蜂窝状结构排列起来后， 其每个基本象素单元的等效长度和等效 宽度之比非常接近于 1， 即这个结构不会带来图形失真变形。 而且， 各象 元菱形的边长相等， 有利于器件的进一步集成。 另外， 红色象元 11的面积 比绿色象元 9和蓝色象元 10的面积略大（红色象元的面积约是绿色象元面 积的 1.11倍），这有助于改善由于照明光源中红光光谱能量较弱引起的投影 图像中红色分量缺乏的视觉效果。
另外，在微型滤光片之间的间隙 12上（间隙距离约在 0.3~1微米之间） 镀上一层非透明镀层， 如铝、铬、镍、 铜、 铁、 锌、 钛、 金、 银、铂、 钨、 钼、 钽、 锆、 碳中的一种材料或者它们的组合物， 可以减少漏光， 从而进 一步改善该器件的图像质量， 提高图像对比度和信噪比。
尽管以上结合附图详细描述了本发明的具体实施方式， 但本发明不局 限于此。 本发明的范围由所附权利要求来限定。

Claims

权利要求书
1. 一种硅基液晶彩色微显示器件， 包括： 带有集成电路结构的硅基 底芯片、 金属反射镜列阵、 下液晶定向层、 液晶层、 上液晶定向层、 透 明导电层、 微型彩色滤光片列阵、 玻璃基片， 其特征在于，
a)所述硅基底芯片、 金属反射镜列阵、 下液晶定向层、 液晶层、 上 液晶定向层、 透明导电层、 玻璃基片依次层叠设置并封装于一体， 所述 微型彩色滤光片列阵位于上液晶定向层和玻璃基片之间， 两个液晶定向 层之间间隔为 0.5微米〜 10微米；
b)所述微型彩色滤光片列阵的象元形状、 尺寸与所述金属反射镜列 阵的象元形状、 尺寸相同或接近， 且呈一一对应关系；
c) 所述金属反射镜列阵的各象元同时作为金属电极并由其底下硅基 底芯片上的集成电路进行寻址， 以于其上分别加上一定的直流电压或电 压脉冲。
2. 如权利要求 1所述的硅基液晶彩色微显示器件， 其特征在于， 所 述两个液晶定向层之间间隔为 1微米〜 6微米。
3. 如权利要求 2所述的硅基液晶彩色微显示器件， 其特征在于， 所 述两个液晶定向层之间间隔为 2微米〜 4微米。
4. 如权利要求 1所述的硅基液晶彩色微显示器件， 其特征在于， 所 述微型彩色滤光片列阵位于上液晶定向层与透明导电层之间。
5. 如权利要求 1所述的硅基液晶彩色微显示器件， 其特征在于， 所 述微型彩色滤光片列阵位于透明导电层与玻璃基片之间。
6. 如权利要求 4或 5所述的硅基液晶彩色微显示器件,其特征在于， 所述微型彩色滤光片列阵是由红、绿、蓝三基色的微型滤光片组合而成， 且其中的每个微型滤光片均由两种或两种以上的不同折射率的介质薄膜 交替组合而成， 其膜层总厚度在 1微米〜 5微米之间。
7. 如权利要求 4或 5所述的硅基液晶彩色微显示器件,其特征在于， 所述微型彩色滤光片之间的间隙约在 0.3~1微米之间， 并镀有非透明镀 层， 非透明镀层的材料是从铝、 铬、 镍、 铜、 铁、 锌、 钛、 金、 银、 铂、 钨、 钼、 钽、 锆、 碳中选择的一种材料或它们的组合物。
8. 如权利要求 4或 5所述的硅基液晶彩色微显示器件,其特征在于， 所述微型彩色滤光片列阵的每个基本象素单元形状均为由红、 绿、 蓝三 个长与宽之比约为 3的长方形微型滤光片组成的正方形结构， 且整个列 阵为以该正方形结构为基本单元紧密排列而成的方形结构。
9. 如权利要求 8所述的硅基液晶彩色微显示器件， 其特征在于， 所 述红、 绿、 蓝三个长方形微型滤光片在保持宽度的总和不变前提下各自 的宽度不同， 使红、 绿、 蓝微型滤光片具有合适的面积比。
10.如权利要求 4或 5所述的硅基液晶彩色微显示器件,其特征在于， 所述微型彩色滤光片列阵的每个基本象素单元形状均为由红、 绿、 蓝三 个平行四边形的微型滤光片组成的六边形结构， 且整个列阵为以该六边 形结构为基本单元呈蜂窝状方式紧密排列而成。
11. 如权利要求 10所述的硅基液晶彩色微显示器件， 其特征在于， 所述红、 绿、 蓝三个微型滤光片的平行四边形的内角度值和边长可以调 节， 使得它们所构成的基本象素单元的等效长度与等效宽度之比接近 1， 且红、 绿、 蓝微型滤光片具有合适的面积比。
12.如权利要求 11中所述的硅基液晶彩色微显示器件，其特征在于， 每个基本象素单元的红、 绿、 蓝三个微型滤光片的形状均为菱形， 且其 中有两个菱形各有一个内角在 50°〜56°之间，而另一个菱形则有一个内角 在 70°〜78°之间。
PCT/CN2003/000348 2002-05-14 2003-05-14 Microdispositif d'affichage a cristaux liquides couleur a base de silicium WO2003096107A1 (fr)

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EP03727129A EP1550899A4 (en) 2002-05-14 2003-05-14 SILICON COLOR LIQUID CRYSTAL DISPLAY MICRODISPOSITIVE
AU2003234977A AU2003234977A1 (en) 2002-05-14 2003-05-14 A silicon-based color liquid crystal display microdevice
US10/506,264 US20050253792A1 (en) 2002-05-14 2003-05-14 Silicon-based color liquid crystal display microdevice
JP2004504037A JP2005526272A (ja) 2002-05-14 2003-05-14 シリコン・ベースのカラー液晶表示デバイス
HK06100006.6A HK1080154A1 (zh) 2002-05-14 2006-01-03 一種硅基液晶彩色微顯示器件

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AU2003234977A1 (en) 2003-11-11
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