WO2003091956A1 - Kontrolleinrichtung zur überwachung der räumlichen bzw. maschinellen abgrenzung von produktionsgütern oder materialien im produktionsablauf mittels transpondertechnologie - Google Patents
Kontrolleinrichtung zur überwachung der räumlichen bzw. maschinellen abgrenzung von produktionsgütern oder materialien im produktionsablauf mittels transpondertechnologie Download PDFInfo
- Publication number
- WO2003091956A1 WO2003091956A1 PCT/EP2003/004328 EP0304328W WO03091956A1 WO 2003091956 A1 WO2003091956 A1 WO 2003091956A1 EP 0304328 W EP0304328 W EP 0304328W WO 03091956 A1 WO03091956 A1 WO 03091956A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- transponder
- container
- base station
- signal
- access
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
-
- G—PHYSICS
- G07—CHECKING-DEVICES
- G07C—TIME OR ATTENDANCE REGISTERS; REGISTERING OR INDICATING THE WORKING OF MACHINES; GENERATING RANDOM NUMBERS; VOTING OR LOTTERY APPARATUS; ARRANGEMENTS, SYSTEMS OR APPARATUS FOR CHECKING NOT PROVIDED FOR ELSEWHERE
- G07C3/00—Registering or indicating the condition or the working of machines or other apparatus, other than vehicles
-
- G—PHYSICS
- G07—CHECKING-DEVICES
- G07C—TIME OR ATTENDANCE REGISTERS; REGISTERING OR INDICATING THE WORKING OF MACHINES; GENERATING RANDOM NUMBERS; VOTING OR LOTTERY APPARATUS; ARRANGEMENTS, SYSTEMS OR APPARATUS FOR CHECKING NOT PROVIDED FOR ELSEWHERE
- G07C9/00—Individual registration on entry or exit
- G07C9/00174—Electronically operated locks; Circuits therefor; Nonmechanical keys therefor, e.g. passive or active electrical keys or other data carriers without mechanical keys
- G07C9/00309—Electronically operated locks; Circuits therefor; Nonmechanical keys therefor, e.g. passive or active electrical keys or other data carriers without mechanical keys operated with bidirectional data transmission between data carrier and locks
-
- G—PHYSICS
- G07—CHECKING-DEVICES
- G07C—TIME OR ATTENDANCE REGISTERS; REGISTERING OR INDICATING THE WORKING OF MACHINES; GENERATING RANDOM NUMBERS; VOTING OR LOTTERY APPARATUS; ARRANGEMENTS, SYSTEMS OR APPARATUS FOR CHECKING NOT PROVIDED FOR ELSEWHERE
- G07C9/00—Individual registration on entry or exit
- G07C9/20—Individual registration on entry or exit involving the use of a pass
- G07C9/28—Individual registration on entry or exit involving the use of a pass the pass enabling tracking or indicating presence
-
- G—PHYSICS
- G07—CHECKING-DEVICES
- G07C—TIME OR ATTENDANCE REGISTERS; REGISTERING OR INDICATING THE WORKING OF MACHINES; GENERATING RANDOM NUMBERS; VOTING OR LOTTERY APPARATUS; ARRANGEMENTS, SYSTEMS OR APPARATUS FOR CHECKING NOT PROVIDED FOR ELSEWHERE
- G07C9/00—Individual registration on entry or exit
- G07C9/20—Individual registration on entry or exit involving the use of a pass
- G07C9/29—Individual registration on entry or exit involving the use of a pass the pass containing active electronic elements, e.g. smartcards
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
Definitions
- Control device for monitoring the spatial or mechanical delimitation of production goods or materials in the production process by means of
- the present invention relates to a method and an apparatus for position control in factory plants using transponders.
- the invention further relates to the use of transponders for such position control in factory plants.
- Position control is to be understood to mean that it is to be recorded and, if necessary, displayed that defined objects are located in areas of the factory facility or are closer to these areas which, due to the existing conditions, they should not be able to reach.
- a preferred application is the semiconductor industry, in which a distinction is often made between copper and non-copper processes.
- FOUPs Front Opening Unified Pod
- H. a combination of, for example, a 300mm wafer cassette with a transport carrier with a secured front door, from which in the copper area (copper production line) can reach the area of the non-copper processes, otherwise contamination of the non-copper production line would be feared.
- the object of the present invention is to provide a technology which enables the position of objects in factory plants to be checked.
- the invention is intended to enable the leaving of the copper area and possibly the approach of a copper FOUP to a non-copper system or vice versa to be recorded and displayed.
- this object is achieved by the features of the independent claim, which relate to a method for position control in factory plants, a corresponding device and the use of transponders for such a method.
- the subclaims relate to particularly advantageous developments of the central idea of the invention. According to the invention, therefore, a method is provided for position control in factory plants, wherein previously controlled areas of a factory plant are defined, whereby defined objects are not to get into these controlled areas. Alternatively, the leaving of a container from an access-controlled area can also be monitored.
- Transponders are attached to containers, the transponders carrying information regarding the contents of the respective container. Furthermore, at least one base station is installed in the access-controlled areas of the factory. Then it is detected and displayed when a container approaches an access-controlled area into which the content of the container identified by an identification of the transponder should not reach according to the predefined definition.
- the access-controlled area can in particular be a machine or a production line to which containers with proper objects are to be fed.
- the method can have the step of detecting an identification signal of a base station by means of a transponder attached to a container. Based on the identification signal, the transponder can then recognize that the associated container is approaching an impermissible area. This impermissible approach can then be displayed directly on the container, for example a FOUP. This display can take place acoustically and / or optically.
- an activation signal of a base station can be detected by a transponder attached to a container.
- the activated transponder then transmits an identification to the base station.
- the base station can then send out an acoustic and / or optical warning signal if the identification of the activated transponder indicates a container which is not permissible for the area belonging to the base station.
- FIGS. 1 and 2 of the accompanying drawings schematically shows a device for position control in factory plants according to the present invention.
- Fig. 2 shows the communication and display device with its components.
- an active and / or passive transponder 2.2 which may itself be able to emit identification signals 5 or the like, can be attached to an object or a container, in particular a FOUP (front opening unified pod).
- a FOUP is the combination of a 300mm wafer cassette with a transport carrier, which has a sealed front door that can have a portable mini environment.
- Such containers and / or objects 1 can either be transported manually as shown in the figure or can be transported automatically in a factory with production lines and / or machines.
- the communication and display device 2 attached to the container and / or object 1 enables the integrated transponder 2.2 to identify the objects accommodated in the container 1 or the objects themselves if the communication and display device 2 is attached directly to them.
- Another element of the invention is a base station with read / transmit function 3, the transmission (scanning) being designated schematically at 4.
- the base station can be connected to a network of base stations, which can be connected to a control computer to ensure area-wide monitoring.
- Such a device can be used, for example, to optically and / or acoustically signal the approach of a FOUP from the copper area, ie a FOUP carrying objects containing copper, to a non-copper machine or non-copper production system directly at the FOUP.
- a special warning device can be attached to the FOUP, which is equipped with an active transponder, for example.
- special base stations 3 are provided, which permanently detect (scan) the access area for inadmissible FOUPs such as FOUPs from the copper area.
- the communication and display device 2 detects this on the FOUP and can output a signal for warning or an instruction for the operator on the integrated display 2.1.
- an active transponder in the communication and display device 2 after scanning ie after receiving and thus activating a signal from the base station 3, can send its data, in particular identification data, back to the base station 3, so that the latter itself emits a warning signal can, or can trigger a warning signal via a data line.
- the method can of course be used accordingly when a FOUP from the copper area is approached to a non-copper system.
- the transponder of the communication and display device 2 on the FOUP 1 can therefore be designed to perform the following functions:
- the base station 3 uses the identification data of the transponder to recognize which special FOUP it is and can therefore, depending on the FOUP type detected, the corresponding one Initiate measures or further process or forward the received identification data from the transponder, - the base station 3 can estimate the distance from the base station 3 from the FOUP 1 on the basis of the received signal strength during transmission starting from the transponder. Accordingly, it can take measures, such as, for example, notices, warnings and alarms or blocks, which depend on the distance between the FOUP 1 and the base station 3 which is recognized on the basis of the signal strength,
- the base station 3 can send data to the FOUP 1 in order to carry out an update / update of the transponder on the FOUP,
- the data of the transponder can alternatively be read out and further processed on the container 1 itself, the data of the transponder, that is to say the identification data stored in it, can alternatively be displayed directly on the FOUP 1 by means of an LCD display 2.1,
- the identification data in the transponder can be read out by the operator using a special mobile reading device, which assists handling by reliable identification by the user,
- the data is preferably transmitted from the transponder 2.2 back to the base station using a higher frequency than the reverse transmission, as this allows a longer range.
- UHF is particularly suitable for data transmission from the transponder back to the base station.
- the transponder 2.2 can be equipped with three mutually orthogonal antennas, so that the detection of a signal from the
- Base station becomes independent of position.
- Transponder 2.2 back to base station 3 can then be used automatically that of the three orthogonally aligned antennas that the
- the transponder 2.2 itself can also estimate or calculate the distance to the base station 1 in order to trigger distance-dependent measures.
- the transponder can have emergency running properties. If an actually active transponder has a fault or an exhaustion of its energy supply, it can continue to function - but with a reduced range - by gaining the energy required for the following own transmission process from the received electromagnetic signal in the sense of a passive transponder. Such techniques are in themselves well known from the prior art and are not to be explained further here.
- the transponder 2.2 can estimate the distance to the base station on the basis of the signal strength and to transmit a corresponding "standard signal" back to the base station.
- This "standard signal” can, if necessary, be combined with the identification signal with regard to the objects or containers assigned to the transponder.
- the communication and display device 2 on the FOUP 1 can also contain operating elements 2.3 in order to start processes triggered by the operator. This includes reading out and simultaneously displaying the transponder data on the display 2.1. Furthermore, the updating of the transponder data can be started via the closest base station and the network behind it via the operating elements 2.3. In addition to the transponder data, it is also possible to transmit instructions for the operator, which can then be shown on the display 2.1 on the FOUP 1. Alternatively and / or additionally, the exact position data of the FOUP 1 can be determined in the communication and display device 2 by means of a positioning system, such as GPS, and then transmitted to the base station with the transponder data. The base station sends the position data to the central control computer for further processing via the connected network.
- a positioning system such as GPS
- the base stations 3 and communication and display devices 2 can be used to guide the FOUPs 1 through the individual process steps outside of the automated transport system of the factory.
- Control and optimization of the production process controls and controls a central factory control the utilization of the individual machines and the path of the individual production goods through the process flow by means of an automated transport system.
- the FOUPs become one using a transport system
- FOUP 1 can be displayed.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Networks & Wireless Communication (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Mobile Radio Communication Systems (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2003239820A AU2003239820A1 (en) | 2002-04-25 | 2003-04-25 | Controlling device for monitoring the spatial or mechanical delimitation of producer goods or materials in the production cycle by using transponder technology |
KR10-2004-7008376A KR20040101990A (ko) | 2002-04-25 | 2003-04-25 | 생산 사이클의 생산자 상품 또는 재료의 공간적 또는기계적인 범위를 트랜스폰더 기술로 모니터링하는 제어 장치 |
JP2004500256A JP2005524155A (ja) | 2002-04-25 | 2003-04-25 | アクセス管理方法及びその装置並びに移動管理方法 |
US10/509,664 US20050177272A1 (en) | 2002-04-25 | 2003-04-25 | Controlling device for monitoring the spatial or mechanical delimitation of producer goods or materials in the production cycle by using of transponder technology |
EP03732295A EP1497798A1 (de) | 2002-04-25 | 2003-04-25 | Kontrolleinrichtung zur überwachung der räumlichen bzw. maschinellen abgrenzung von produktionsgütern oder materialien im produktionsablauf mittels transpondertechnologie |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10218624 | 2002-04-25 | ||
DE10218624.3 | 2002-04-25 | ||
DE10301076A DE10301076A1 (de) | 2002-04-25 | 2003-01-14 | Kontrolleinrichtung zur Überwachung der räumlichen bzw. maschinellen Abgrenzung von Produktionsgütern oder Materialien im Produktionslauf mittels Transpondertechnologie |
DE10301076.9 | 2003-01-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2003091956A1 true WO2003091956A1 (de) | 2003-11-06 |
Family
ID=29271573
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2003/004328 WO2003091956A1 (de) | 2002-04-25 | 2003-04-25 | Kontrolleinrichtung zur überwachung der räumlichen bzw. maschinellen abgrenzung von produktionsgütern oder materialien im produktionsablauf mittels transpondertechnologie |
Country Status (6)
Country | Link |
---|---|
US (1) | US20050177272A1 (de) |
EP (1) | EP1497798A1 (de) |
JP (1) | JP2005524155A (de) |
CN (1) | CN1647119A (de) |
AU (1) | AU2003239820A1 (de) |
WO (1) | WO2003091956A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3040508A1 (de) * | 2014-12-29 | 2016-07-06 | Sandvik Mining and Construction Oy | Zonendurchgangskontrolle an Arbeitsplatz |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4743508B2 (ja) * | 2005-11-29 | 2011-08-10 | 横河電機株式会社 | プラント制御システム |
US20080061939A1 (en) * | 2006-08-01 | 2008-03-13 | Davis John S | Method and apparatus for determining ordering of RFID tagged objects |
US9356822B2 (en) * | 2012-10-30 | 2016-05-31 | Kla-Tencor Corporation | Automated interface apparatus and method for use in semiconductor wafer handling systems |
US10790177B2 (en) * | 2017-11-14 | 2020-09-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Systems, devices, and methods for using a real time environment sensor in a FOUP |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4888473A (en) * | 1987-06-11 | 1989-12-19 | Fluoroware, Inc. | Wafer disk location monitoring system and tagged process carriers for use therewith |
US5119104A (en) * | 1990-05-04 | 1992-06-02 | Heller Alan C | Location system adapted for use in multipath environments |
EP0716399A1 (de) * | 1994-12-07 | 1996-06-12 | van der Valk, Josephus Wilhelmus Maria | Genehmigungscodeträgernssystem |
EP0724236A2 (de) * | 1991-07-29 | 1996-07-31 | Bio Medic Data Systems, Inc. | Programmierbarer Transponder |
EP0833026A1 (de) * | 1996-09-27 | 1998-04-01 | Valeo Electronique | Funkfernbedienungen mit zwei Reichweiten für ein Kraftfahrzeug |
US6138058A (en) * | 1998-01-06 | 2000-10-24 | Jenoptik Infab, Inc. | Method for electronically tracking containers to avoid misprocessing of contents |
EP1136955A2 (de) * | 2000-03-20 | 2001-09-26 | Philips Corporate Intellectual Property GmbH | Anordnung für ein Zugangssicherungssystem |
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GB1512857A (en) * | 1974-09-13 | 1978-06-01 | Bally Mfg Corp | Monitoring system for use with amusement game devices |
JPS59174678U (ja) * | 1983-05-10 | 1984-11-21 | 株式会社日立ホームテック | 物体接近警報装置 |
JPH08172376A (ja) * | 1994-12-16 | 1996-07-02 | Matsushita Electric Ind Co Ltd | ワイヤレス再生装置 |
US5708423A (en) * | 1995-05-09 | 1998-01-13 | Sensormatic Electronics Corporation | Zone-Based asset tracking and control system |
JP3941194B2 (ja) * | 1997-11-28 | 2007-07-04 | 神鋼電機株式会社 | キャリア用載置装置 |
JP3628212B2 (ja) * | 1999-06-21 | 2005-03-09 | 大日本スクリーン製造株式会社 | 基板搬入・搬出装置及びこれを用いた基板処理装置 |
US6195009B1 (en) * | 1999-11-15 | 2001-02-27 | Hector Irizarry | Child monitoring device adapted for use with an electronic surveillance system |
US6566997B1 (en) * | 1999-12-03 | 2003-05-20 | Hid Corporation | Interference control method for RFID systems |
JP4246420B2 (ja) * | 2000-09-14 | 2009-04-02 | 平田機工株式会社 | Foupオープナ及びfoupオープナのマッピング方法 |
US6600418B2 (en) * | 2000-12-12 | 2003-07-29 | 3M Innovative Properties Company | Object tracking and management system and method using radio-frequency identification tags |
JP2002203263A (ja) * | 2000-12-28 | 2002-07-19 | Toshiba Corp | 立ち入り範囲管理システム |
US6703935B1 (en) * | 2001-05-14 | 2004-03-09 | Amerasia International Technology, Inc. | Antenna arrangement for RFID smart tags |
-
2003
- 2003-04-25 AU AU2003239820A patent/AU2003239820A1/en not_active Abandoned
- 2003-04-25 JP JP2004500256A patent/JP2005524155A/ja active Pending
- 2003-04-25 EP EP03732295A patent/EP1497798A1/de not_active Withdrawn
- 2003-04-25 CN CNA038090767A patent/CN1647119A/zh active Pending
- 2003-04-25 US US10/509,664 patent/US20050177272A1/en not_active Abandoned
- 2003-04-25 WO PCT/EP2003/004328 patent/WO2003091956A1/de not_active Application Discontinuation
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4888473A (en) * | 1987-06-11 | 1989-12-19 | Fluoroware, Inc. | Wafer disk location monitoring system and tagged process carriers for use therewith |
US4888473B1 (en) * | 1987-06-11 | 1996-10-15 | Fluoroware Inc | Wafer disk location monitoring system and tagged process carrier for use therewith |
US5119104A (en) * | 1990-05-04 | 1992-06-02 | Heller Alan C | Location system adapted for use in multipath environments |
EP0724236A2 (de) * | 1991-07-29 | 1996-07-31 | Bio Medic Data Systems, Inc. | Programmierbarer Transponder |
EP0716399A1 (de) * | 1994-12-07 | 1996-06-12 | van der Valk, Josephus Wilhelmus Maria | Genehmigungscodeträgernssystem |
EP0833026A1 (de) * | 1996-09-27 | 1998-04-01 | Valeo Electronique | Funkfernbedienungen mit zwei Reichweiten für ein Kraftfahrzeug |
US6138058A (en) * | 1998-01-06 | 2000-10-24 | Jenoptik Infab, Inc. | Method for electronically tracking containers to avoid misprocessing of contents |
EP1136955A2 (de) * | 2000-03-20 | 2001-09-26 | Philips Corporate Intellectual Property GmbH | Anordnung für ein Zugangssicherungssystem |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3040508A1 (de) * | 2014-12-29 | 2016-07-06 | Sandvik Mining and Construction Oy | Zonendurchgangskontrolle an Arbeitsplatz |
WO2016107743A1 (en) * | 2014-12-29 | 2016-07-07 | Sandvik Mining And Construction Oy | Zone passage control in worksite |
AU2015373587B2 (en) * | 2014-12-29 | 2019-05-09 | Sandvik Mining And Construction Oy | Zone passage control in worksite |
US10429853B2 (en) | 2014-12-29 | 2019-10-01 | Sandvik Mining And Construction Oy | Zone passage control in worksite |
Also Published As
Publication number | Publication date |
---|---|
CN1647119A (zh) | 2005-07-27 |
EP1497798A1 (de) | 2005-01-19 |
JP2005524155A (ja) | 2005-08-11 |
US20050177272A1 (en) | 2005-08-11 |
AU2003239820A1 (en) | 2003-11-10 |
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