WO2003085456A3 - Verfahren und vorrichtung zum abbilden einer maske auf einem substrat - Google Patents

Verfahren und vorrichtung zum abbilden einer maske auf einem substrat Download PDF

Info

Publication number
WO2003085456A3
WO2003085456A3 PCT/EP2003/003775 EP0303775W WO03085456A3 WO 2003085456 A3 WO2003085456 A3 WO 2003085456A3 EP 0303775 W EP0303775 W EP 0303775W WO 03085456 A3 WO03085456 A3 WO 03085456A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
imaging
mask
distortions
optical unit
Prior art date
Application number
PCT/EP2003/003775
Other languages
English (en)
French (fr)
Other versions
WO2003085456A2 (de
Inventor
Roland Kaplan
Juergen Sollner
Original Assignee
Heidelberg Instruments Mikrotechnik Gmbh
Roland Kaplan
Juergen Sollner
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heidelberg Instruments Mikrotechnik Gmbh, Roland Kaplan, Juergen Sollner filed Critical Heidelberg Instruments Mikrotechnik Gmbh
Priority to AU2003227607A priority Critical patent/AU2003227607A1/en
Priority to JP2003582582A priority patent/JP2005527848A/ja
Priority to EP03725009A priority patent/EP1493060A2/de
Priority to US10/511,226 priority patent/US20050122495A1/en
Priority to CA002482155A priority patent/CA2482155A1/en
Publication of WO2003085456A2 publication Critical patent/WO2003085456A2/de
Publication of WO2003085456A3 publication Critical patent/WO2003085456A3/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70991—Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

Die Erfindung bezieht sich auf ein Verfahren zum Abbilden einer Maske (1) auf einem Substrat (2), wobei mittels einer Beleuchtungseinheit (8) und einer optischen Einheit (9) die Maske (1) auf dem Substrat (2) abgebildet wird. Ferner bezieht sich die Erfindung auf eine Vorrichtung zur Durchführung des Verfahrens. Das Verfahren und die Vorrichtung sollen dahingehend ausgebildet werden, dass eine präzise Abbildung der Maske (1) und deren kleinen Strukturen auf dem Substrat (2) mit hoher Funktionssicherheit erreicht wird, wobei Verzerrungen des Substrats (2) korrigiert werden sollen. Es wird vorgeschlagen, dass die Beleuchtungseinheit (8) und die optische Einheit (9) relativ zur Maske (1) und dem Substrat (2) bewegt werden, dass Verzerrungen des Substrats (2) erfasst werden, und dass in Abhängigkeit der erfassten Verzerrungen mittels der optischen Einheit (9) die Abbildung der Maske (1) verzerrt und den Verzerrungen des Substrats (2) angepasst wird.
PCT/EP2003/003775 2002-04-11 2003-04-11 Verfahren und vorrichtung zum abbilden einer maske auf einem substrat WO2003085456A2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
AU2003227607A AU2003227607A1 (en) 2002-04-11 2003-04-11 Method and device for imaging a mask onto a substrate
JP2003582582A JP2005527848A (ja) 2002-04-11 2003-04-11 基板の上にマスクを結像させる方法および装置
EP03725009A EP1493060A2 (de) 2002-04-11 2003-04-11 Verfahren und Vorrichtung zum Abbilden einer Maske auf einem Substrat
US10/511,226 US20050122495A1 (en) 2002-04-11 2003-04-11 Method and device for imaging a mask onto a substrate
CA002482155A CA2482155A1 (en) 2002-04-11 2003-04-11 Method and device for imaging a mask onto a substrate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10216096 2002-04-11
DE10216096.1 2002-04-11

Publications (2)

Publication Number Publication Date
WO2003085456A2 WO2003085456A2 (de) 2003-10-16
WO2003085456A3 true WO2003085456A3 (de) 2004-02-26

Family

ID=28684962

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2003/003775 WO2003085456A2 (de) 2002-04-11 2003-04-11 Verfahren und vorrichtung zum abbilden einer maske auf einem substrat

Country Status (8)

Country Link
US (1) US20050122495A1 (de)
EP (1) EP1493060A2 (de)
JP (1) JP2005527848A (de)
CN (1) CN1659478A (de)
AU (1) AU2003227607A1 (de)
CA (1) CA2482155A1 (de)
DE (1) DE10317050A1 (de)
WO (1) WO2003085456A2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004013886A1 (de) * 2004-03-16 2005-10-06 Carl Zeiss Smt Ag Verfahren zur Mehrfachbelichtung, Mikrolithografie-Projektionsbelichtungsanlage und Projektionssystem
JP5134767B2 (ja) * 2005-04-19 2013-01-30 株式会社オーク製作所 描画データ補正機能を有する描画装置
JP5218049B2 (ja) * 2006-05-31 2013-06-26 株式会社ニコン 露光装置及び露光方法
DE102006038455A1 (de) 2006-08-16 2008-02-21 Carl Zeiss Smt Ag Optisches System für die Halbleiterlithographie
WO2008107955A1 (ja) 2007-03-02 2008-09-12 Advantest Corporation マルチコラム電子ビーム露光用マスク、マルチコラム電子ビーム露光用マスクを用いた電子ビーム露光装置及び露光方法
WO2008122419A1 (de) 2007-04-05 2008-10-16 Heidelberg Instruments Mikrotechnik Gmbh Verfahren und vorrichtung zum abbilden einer programmierbaren maske auf einem substrat
JP2011514969A (ja) * 2008-03-10 2011-05-12 ハイデルベルク・インストルメンツ・ミクロテヒニツク・ゲー・エム・ベー・ハー 変位のための方法および装置
DE102009020320A1 (de) * 2008-11-19 2010-05-20 Heidelberg Instruments Mikrotechnik Gmbh Verfahren und Vorrichtung zur Steigerung der Auflösung und/oder der Geschwindigkeit von Belichtungssystemen
JP5506634B2 (ja) * 2010-11-05 2014-05-28 株式会社アドテックエンジニアリング 位置合わせ用照明装置及び該照明装置を備えた露光装置
US10197920B2 (en) * 2011-11-16 2019-02-05 Nak Hoon SEONG Linear light source generating device, exposure having linear light source generating device, and lenticular system used for linear light source generating device
US9360778B2 (en) * 2012-03-02 2016-06-07 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for lithography patterning
CN105745579B (zh) * 2013-09-25 2019-02-22 Asml荷兰有限公司 束传输设备和方法
EP3286907A1 (de) * 2015-04-24 2018-02-28 OCE-Technologies B.V. Verfahren zur herstellung einer position eines medienobjekts auf einer flachbettoberfläche eines druckers
DE102015225262A1 (de) * 2015-12-15 2017-06-22 Carl Zeiss Smt Gmbh Optisches System, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage
US9945730B2 (en) * 2016-09-02 2018-04-17 Cymer, Llc Adjusting an amount of coherence of a light beam
CN108941942B (zh) * 2018-09-06 2023-09-22 广西中科蓝谷半导体科技有限公司 一种光刻机小工件卡具的使用方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3910048A1 (de) * 1989-03-28 1990-08-30 Heidelberg Instr Gmbh Laser Un Verfahren zur herstellung oder inspektion von mikrostrukturen auf grossflaechigen substraten
US5625436A (en) * 1993-11-11 1997-04-29 Nikon Corporation Scanning type exposure apparatus and exposure method
EP1037266A1 (de) * 1997-10-07 2000-09-20 Nikon Corporation Verfahren und vorrichtung zur projektionsbelichtung

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5739898A (en) * 1993-02-03 1998-04-14 Nikon Corporation Exposure method and apparatus
US5999244A (en) * 1995-11-07 1999-12-07 Nikon Corporation Projection exposure apparatus, method for correcting positional discrepancy of projected image, and method for determining image formation characteristic of projection optical system
US6833904B1 (en) * 1998-02-27 2004-12-21 Nikon Corporation Exposure apparatus and method of fabricating a micro-device using the exposure apparatus
JP2001215718A (ja) * 1999-11-26 2001-08-10 Nikon Corp 露光装置及び露光方法
US6873400B2 (en) * 2000-02-02 2005-03-29 Nikon Corporation Scanning exposure method and system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3910048A1 (de) * 1989-03-28 1990-08-30 Heidelberg Instr Gmbh Laser Un Verfahren zur herstellung oder inspektion von mikrostrukturen auf grossflaechigen substraten
US5625436A (en) * 1993-11-11 1997-04-29 Nikon Corporation Scanning type exposure apparatus and exposure method
EP1037266A1 (de) * 1997-10-07 2000-09-20 Nikon Corporation Verfahren und vorrichtung zur projektionsbelichtung

Also Published As

Publication number Publication date
EP1493060A2 (de) 2005-01-05
JP2005527848A (ja) 2005-09-15
WO2003085456A2 (de) 2003-10-16
CN1659478A (zh) 2005-08-24
AU2003227607A1 (en) 2003-10-20
CA2482155A1 (en) 2003-10-16
US20050122495A1 (en) 2005-06-09
DE10317050A1 (de) 2003-11-20

Similar Documents

Publication Publication Date Title
WO2003085456A3 (de) Verfahren und vorrichtung zum abbilden einer maske auf einem substrat
WO2006063070A3 (en) All surface data for use in substrate inspection
EP1956431A4 (de) Belichtungsvorrichtung, belichtungsverfahren und bauelemente-herstellungsverfahren
WO2007077719A8 (ja) 撮像装置およびその画像処理方法
WO1998044718A3 (en) High-precision-resolution image acquisision apparatus and method
EP1098167A3 (de) Apparat zur Montagegenauigkeitsmessung einer Montagevorrichtung und Verfahren zur Montagegenauigkeitsmessung einer Montagevorrichtung
WO2003021352A1 (fr) Reticule et procede de mesure de caracteristiques optiques
WO2002079959A3 (en) Method and apparatus for determining throttle settings
WO2008136067A1 (ja) 木材の検査方法及び装置及びプログラム
EP2335549A3 (de) Vorrichtung zur Bildgebung bei einem operativen Eingriff
WO2006095110A3 (fr) Procédé pour commander une action, notamment une modification de netteté, à partir d'une image numérique en couleurs
WO2006086051A3 (en) Method and apparatus for tracking a movable object
WO2007072376A3 (en) Color matching for display system for shops
WO2008058671A8 (de) Projektions-vorrichtung mit verbesserter projektionseigenschaft
WO2005069729A3 (en) A device method and system for the application of content on to the surface of a beverage
WO2006003373A3 (en) Immersion photolithography system
AU2001268010A1 (en) Method and apparatus for providing a substrate with viscous medium and use of jetting means for the correction of application errors
WO2004106945A1 (ja) 電子部品試験装置
WO2004106945A3 (ja) 電子部品試験装置
EP1404127A4 (de) Bilderfassungsvorrichtung, verfahren zur verwendung der vorrichtung und steuerprogramm dafür
EP1249372A3 (de) Halter für ein Bauteil mit geringen Abmessungen an einem Stossfänger
WO2006088262A3 (en) Image-drawing method, image-drawing device, image-drawing system, and correction method
CA2477810A1 (en) Improvements in or relating to infra red camera calibration
EP1826813A4 (de) Bühneneinrichtung und belichtungsvorrichtung
WO2006070355A3 (en) Device, system, and method for programmable in vivo imaging

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NI NO NZ OM PH PL PT RO RU SD SE SG SK SL TJ TM TN TR TT TZ UA UG US UZ VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PT RO SE SI SK TR

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
WWE Wipo information: entry into national phase

Ref document number: 2003725009

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 2003582582

Country of ref document: JP

Ref document number: 2482155

Country of ref document: CA

WWE Wipo information: entry into national phase

Ref document number: 20038128969

Country of ref document: CN

WWP Wipo information: published in national office

Ref document number: 2003725009

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 10511226

Country of ref document: US

REG Reference to national code

Ref country code: DE

Ref legal event code: 8642

WWW Wipo information: withdrawn in national office

Ref document number: 2003725009

Country of ref document: EP