WO2003084009A1 - Dispositif laser solide - Google Patents

Dispositif laser solide Download PDF

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Publication number
WO2003084009A1
WO2003084009A1 PCT/JP2003/000230 JP0300230W WO03084009A1 WO 2003084009 A1 WO2003084009 A1 WO 2003084009A1 JP 0300230 W JP0300230 W JP 0300230W WO 03084009 A1 WO03084009 A1 WO 03084009A1
Authority
WO
WIPO (PCT)
Prior art keywords
laser
solid
lens effect
crystal
laser device
Prior art date
Application number
PCT/JP2003/000230
Other languages
English (en)
Japanese (ja)
Inventor
Nobuaki Iehisa
Original Assignee
Kataoka Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kataoka Corporation filed Critical Kataoka Corporation
Priority to AU2003203164A priority Critical patent/AU2003203164A1/en
Publication of WO2003084009A1 publication Critical patent/WO2003084009A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08072—Thermal lensing or thermally induced birefringence; Compensation thereof

Definitions

  • laser light is emitted by exciting a solid laser active medium by a laser diode (LD) or a light source such as a lamp.
  • a solid-state laser device thermal lens compensation stabilizes the output of the solid-state laser and greatly enhances the beam quality. It also relates to solid-state laser devices. Background technology
  • the laser active medium most widely used in the market is a rod-type Nd: YAG crystal, which is an average.
  • the Nd: YAG crystal 1 is excited by the LD light 3 emitted from the LD 2, which is an excitation source, and the total reflection mirror 5 forming the laser resonator 4 is formed.
  • the 1.06 m light emitted from the Nd: YAG crystal 1 is selectively amplified between the Nd: YAG crystal 1 and the output coupling mirror 6, and the output coupling mirror 6 Nd: YAG
  • the laser beam 7 is emitted.
  • the output of the Nd: YAG laser according to the application is controlled by a DC stabilizing power supply 8 electrically coupled to the LD 2, and the desired Nd: YAG laser is controlled.
  • a constant LD excitation current corresponding to the laser output is configured to be supplied to the LD.
  • the Nd: YAG crystal 1 and LD2 must be either directly or with a constant peripheral area.
  • the temperature is controlled via the cooling medium supplied from the cooling medium supply device 9 so that the temperature becomes the temperature.
  • the safety shutter 10 irradiates the beam damper 11 with the same laser light 7. It is.
  • the Nd YAG laser beam 7 is transmitted by the incident light condensing optical system 12 to the transmission optical fiber 13 having a core diameter of 0.3 mm.
  • the laser beam emitted from the optical fiber 13 was focused so as to satisfy the above conditions, and was suitable for processing on the workpiece 15 placed on the CNC table 14.
  • the light is converged or condensed by the emission / collection optical system 16 so as to form a beam, and the desired laser processing is performed. .
  • the Nd YAG crystal excited by the LD light
  • all the absorbed energy is emitted to the outside of the crystal as laser light energy.
  • the energy loss due to the quantum defect (Quan tum Defect) effect mainly becomes thermal energy, and the energy inside the crystal is reduced. It is stored in In general, the amount of heat accumulated inside this is about 30 to 40% of the LD light energy absorbed inside the crystal (Reference: Spri nger Series in Opt iCal Sciences, Walter Koechner ner “SolidSt at e Laser Engineer, 5th Edition, pp406-407”). Therefore, as described above, the periphery of the crystal is efficiently cooled by the cooling medium, so that the laser oscillation efficiency is not reduced and the crystal is not thermally broken. I am doing it.
  • the output stability of the laser oscillator changes only by increasing or decreasing the laser output level. Rather, the beam quality also changed as the level increased or decreased.
  • the Nd: YAG laser device is provided with a Nd: YAG laser device for compensating for the convex thermal lens effect that occurs in a steady state of the rated maximum laser output level.
  • a Nd: YAG laser device for compensating for the convex thermal lens effect that occurs in a steady state of the rated maximum laser output level.
  • the Nd: YAG laser light output the amount of the convex heat lens effect generated inside the crystal is generated.
  • the compensation amount becomes excessive and the laser output power becomes small.
  • the Nd: YAG laser light output immediately after excitation by the LD is low, and while the output is unstable, it is removed as the internal temperature of the crystal rises.
  • the output of the Nd: YAG laser light increased, and after a few seconds to a few minutes, the laser light was gradually output stably.
  • the Nd: YAG laser light output which is a controlled object, is measured, and the result is measured. Feed to the control command system by feed-in control to increase or decrease the LD excitation current so that the deviation from the target set value of the output is minimized.
  • a knock control method However, it is necessary to supply an excessive LD current to compensate for the deviation of the laser output, so that the LD is destroyed and the life is greatly shortened. I was reluctant. Also, even if the laser output could be made almost constant without deteriorating the reliability of LD by this method, It was impossible to achieve constant control up to the room quality.
  • the present invention provides a laser which is generated when the output of a solid laser, which is a problem in the LD-excited solid laser device described above, is increased or decreased.
  • the feedback of the laser output can be obtained.
  • a laser device capable of stably maintaining a laser output without performing knock control and maintaining a constant beam quality.
  • it is intended to provide a laser processing device capable of always obtaining a stable processing quality.
  • the present invention has a concave-shaped heat lens effect inside the laser resonator that is proportional to the output level of the laser light.
  • a concave-shaped heat lens effect inside the laser resonator that is proportional to the output level of the laser light.
  • FIG. 1 is a configuration diagram of a laser processing apparatus according to an embodiment of the present invention.
  • FIG. 2 is a schematic diagram of a convex thermal lens compensation optical element according to one embodiment of the present invention.
  • FIG. 3 is a configuration diagram of the laser processing apparatus in the configuration of the conventional example. Best mode for carrying out the invention
  • Nd Either Tsu Oh in YAG les chromatography
  • the rate of change dn / dt force refractive Oriritsu you pair crystal temperature 7. 3 X 10- 6 / k, on whether we diameter Direction centered axis direction
  • dn / dt is negative, it can produce the same amount as Nd: YAG laser crystal, and it emits Nd: YAG laser light to a certain extent. If there is a transparent optical material that absorbs, a concave thermal lens effect will be generated in response to the laser output, contrary to the above crystal. What you can do is clear.
  • the 0CK-433 manufactured by the same company having a theoretical constant is poured into the optical cell shown in Fig. 2 to produce a convex lens compensation optical element, and the compensation optical element is manufactured.
  • Element 17 was placed in the laser resonator as shown in FIG.
  • n 1.46 at 589 nm up to 0CK-433 (100)
  • a flat plate 102 of 20 mm in outer diameter and 6.54 mm in thickness made of quartz having the same refractive index is used.
  • the outer surfaces of both flat plates 102 that come into contact with the atmosphere are provided with a non-reflective coating at 1 ⁇ 06 ⁇ m to reflect laser light. The rate has been reduced.
  • these flat plates 102 are retained.
  • the aluminum retaining ring 103 is installed on the outer circumference to make it easier.
  • the gap between the quartz flat plates 102 is the overall absorption length and affects both the loss and the amount of concave lens generated, so 0.1 mm to 5.00 mm
  • various types of adaptive optics elements 17 were manufactured, and the optimum gap length was experimentally determined while repeating trial and error.
  • the optimum gap is 0.5 to 0.7 mm, the convex heat generated almost completely inside the laser crystal A concave thermal lens effect that counteracts the lens effect occurs, and the maximum rated laser output before or after the insertion of the adaptive optics element is also reduced by 5% or less.
  • the output will be equivalent to 10, 20, 30, 40, 50, 75, and 100% of the rated maximum output.
  • the stability at the force level is less than 3.5, ⁇ 3.0, 1.5, ⁇ 1.2, ⁇ 1.0, ⁇ 0.8, and 0.8 earth, respectively, but has the optimal gap.
  • the compensation optical element 17 is disposed, stable results are obtained at a laser output level of 10 to 100 mm, which is ⁇ 0.8% or less in all cases.
  • the laser output level is 30 mm 'mrad or less at the laser output level of 10 to 100%, and the high output level As a result, it was possible to significantly improve the beam quality.
  • the flat plate gap and the like are optimized only for 0CK-433 manufactured by Nye Optical Products, to stabilize the laser output and beam.
  • the quality has been improved, but by using a gel or liquid optical material other than 0 CK-433, the optimal gap between the flat plates has been adjusted. Also, the same improvement as in the present embodiment can be expected.
  • the laser active medium is an Nd: YAG laser having an Nd: YAG crystal
  • the medium is a solid crystal composed of a single solid crystal such as Yb: YAG, Nd: YV04, or a solid crystal composed of a combination thereof, or a ceramic. Even in the case of a crystal, the same effect as in the present embodiment can be expected.
  • the present invention has the configuration described above, it is not only possible to greatly improve the accuracy and high speed of laser processing, but also to increase the warm air. This also eliminates the need for rotation, and can provide a laser device that can contribute to resource saving.

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

La présente invention a trait à un dispositif laser solide pour effectuer l'oscillation laser par l'excitation de cristal de néodyme:grenat d'yttrium et d'aluminium qui constitue un milieu actif laser à l'état solide ou une source lumineuse d'une lampe ou analogue. Par la disposition au sein d'un résonateur laser d'un élément optique de compensation dans lequel la génération d'un effet de lentille thermique concave est modifiée proportionnellement au niveau de sortie du faisceau laser oscillé, l'effet de lentille thermique convexe généré au sein du cristal de néodyme:grenat d'yttrium et d'aluminium est compensé et une plage dynamique est étendue, permettant ainsi d'obtenir une luminosité élevée du faisceau de laser émis et une émission laser stable.
PCT/JP2003/000230 2002-03-29 2003-01-14 Dispositif laser solide WO2003084009A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003203164A AU2003203164A1 (en) 2002-03-29 2003-01-14 Solid state laser device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002/97202 2002-03-29
JP2002097202A JP2003298161A (ja) 2002-03-29 2002-03-29 固体レーザ装置

Publications (1)

Publication Number Publication Date
WO2003084009A1 true WO2003084009A1 (fr) 2003-10-09

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PCT/JP2003/000230 WO2003084009A1 (fr) 2002-03-29 2003-01-14 Dispositif laser solide

Country Status (3)

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JP (1) JP2003298161A (fr)
AU (1) AU2003203164A1 (fr)
WO (1) WO2003084009A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007095723A (ja) * 2005-09-27 2007-04-12 Konoshima Chemical Co Ltd 固体レーザー
CN101414727B (zh) * 2008-12-05 2010-06-02 长春理工大学 晶体透镜自适应补偿热透镜激光谐振腔
CN103959578A (zh) * 2011-05-09 2014-07-30 通快激光标记系统公司 用于产生经频率转换的激光射束的激光谐振器

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4231538B1 (ja) 2007-12-12 2009-03-04 株式会社片岡製作所 レーザ加工機

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59195892A (ja) * 1983-04-20 1984-11-07 Nec Corp 固体レ−ザ発振器
JPH0212981A (ja) * 1988-06-30 1990-01-17 Komatsu Ltd 圧電レンズ挿入型固体レーザ共振器
JPH05167146A (ja) * 1991-12-13 1993-07-02 Mitsubishi Electric Corp 固体レーザ装置
JPH05167147A (ja) * 1991-12-16 1993-07-02 Mitsubishi Electric Corp 固体レーザ装置
JPH09298333A (ja) * 1996-05-09 1997-11-18 Mitsubishi Electric Corp 固体受動ｑスイッチブロックとその製造方法、および固体ｑスイッチレーザ発振器、ならびに固体レーザ装置
JPH10284775A (ja) * 1997-04-09 1998-10-23 Toshiba Corp 固体レーザ装置
US6327294B1 (en) * 1997-10-24 2001-12-04 Mitsubishi Denki Kabushiki Kaisha Solid-state laser apparatus
US20020021724A1 (en) * 2000-06-23 2002-02-21 Heinz Weber Compensation of thermal optical effects

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59195892A (ja) * 1983-04-20 1984-11-07 Nec Corp 固体レ−ザ発振器
JPH0212981A (ja) * 1988-06-30 1990-01-17 Komatsu Ltd 圧電レンズ挿入型固体レーザ共振器
JPH05167146A (ja) * 1991-12-13 1993-07-02 Mitsubishi Electric Corp 固体レーザ装置
JPH05167147A (ja) * 1991-12-16 1993-07-02 Mitsubishi Electric Corp 固体レーザ装置
JPH09298333A (ja) * 1996-05-09 1997-11-18 Mitsubishi Electric Corp 固体受動ｑスイッチブロックとその製造方法、および固体ｑスイッチレーザ発振器、ならびに固体レーザ装置
JPH10284775A (ja) * 1997-04-09 1998-10-23 Toshiba Corp 固体レーザ装置
US6327294B1 (en) * 1997-10-24 2001-12-04 Mitsubishi Denki Kabushiki Kaisha Solid-state laser apparatus
US20020021724A1 (en) * 2000-06-23 2002-02-21 Heinz Weber Compensation of thermal optical effects

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
GRAF T. ET AL.: "Laser resonator with balanced thermal lenses", OPTICS COMMUNICATIONS, vol. 190, no. 1/6, 1 April 2001 (2001-04-01), pages 327 - 331, XP004233787 *
KOCH R. ET AL.: "Self-adaptive optical elements for compensation of thermal lensing effects in diode end-pumped solid state lasers - proposal and preliminary experiments", OPTICS COMMUNICATIONS, vol. 140, no. 1/3, 15 July 1997 (1997-07-15), pages 158 - 164, XP004082613 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007095723A (ja) * 2005-09-27 2007-04-12 Konoshima Chemical Co Ltd 固体レーザー
JP4705831B2 (ja) * 2005-09-27 2011-06-22 神島化学工業株式会社 固体レーザー
CN101414727B (zh) * 2008-12-05 2010-06-02 长春理工大学 晶体透镜自适应补偿热透镜激光谐振腔
CN103959578A (zh) * 2011-05-09 2014-07-30 通快激光标记系统公司 用于产生经频率转换的激光射束的激光谐振器

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JP2003298161A (ja) 2003-10-17
AU2003203164A1 (en) 2003-10-13

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