WO2003065926A2 - Biomoniteur portable a circuit integre mince souple - Google Patents

Biomoniteur portable a circuit integre mince souple Download PDF

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Publication number
WO2003065926A2
WO2003065926A2 PCT/US2002/022617 US0222617W WO03065926A2 WO 2003065926 A2 WO2003065926 A2 WO 2003065926A2 US 0222617 W US0222617 W US 0222617W WO 03065926 A2 WO03065926 A2 WO 03065926A2
Authority
WO
WIPO (PCT)
Prior art keywords
sensor module
flexible
silicon
sensor
flexible substrate
Prior art date
Application number
PCT/US2002/022617
Other languages
English (en)
Other versions
WO2003065926A3 (fr
Inventor
Volkan H. Ozguz
Abbas Khashayar
Original Assignee
Irvine Sensors Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Irvine Sensors Corporation filed Critical Irvine Sensors Corporation
Priority to AU2002365422A priority Critical patent/AU2002365422A1/en
Priority to EP02805694A priority patent/EP1451873A4/fr
Publication of WO2003065926A2 publication Critical patent/WO2003065926A2/fr
Publication of WO2003065926A3 publication Critical patent/WO2003065926A3/fr

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Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6801—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
    • A61B5/683—Means for maintaining contact with the body
    • A61B5/6832—Means for maintaining contact with the body using adhesives
    • A61B5/6833—Adhesive patches
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0002—Remote monitoring of patients using telemetry, e.g. transmission of vital signals via a communication network
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0002—Remote monitoring of patients using telemetry, e.g. transmission of vital signals via a communication network
    • A61B5/0004—Remote monitoring of patients using telemetry, e.g. transmission of vital signals via a communication network characterised by the type of physiological signal transmitted
    • A61B5/0006—ECG or EEG signals
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/25—Bioelectric electrodes therefor
    • A61B5/279—Bioelectric electrodes therefor specially adapted for particular uses
    • A61B5/296—Bioelectric electrodes therefor specially adapted for particular uses for electromyography [EMG]
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/316—Modalities, i.e. specific diagnostic methods
    • A61B5/389—Electromyography [EMG]
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2560/00—Constructional details of operational features of apparatus; Accessories for medical measuring apparatus
    • A61B2560/04—Constructional details of apparatus
    • A61B2560/0406—Constructional details of apparatus specially shaped apparatus housings
    • A61B2560/0412—Low-profile patch shaped housings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • H01L23/5388—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates for flat cards, e.g. credit cards
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

  • the instant invention relates generally to sensor systems for detecting physiological characteristics, and more specifically to a sensor system comprising a thin flexible ambulatory/self contained bio-sensor module in a form similar to an adhesive bandage for sensing physiologically modulated signals from the body, and a method of making such a sensor system and module.
  • Sensor systems have been used to detect a variety of physiological characteristics.
  • Most of the sensor systems for detecting and recording electromagnetic signals from the body comprise sensor modules with rigid circuitry to which electrodes are connected.
  • Use of rigid circuitry is due to the rigid nature of conventional microcircuit materials such as silicon and printed circuit board materials. The result is that the circuitry is inflexible, if not bulky, and is unsuitable for comfortably adhering and conforming to a localized portion of a human body.
  • many of the sensor systems of the past for detecting physiological characteristics employ data and/or power lines that extend from the electrodes to the processor or power supply. These lines unavoidably get in the way of normal activity, even during monitoring of a sleeping subject body.
  • the instant invention overcomes the deficiencies of the past and fills a long standing need with a sensor system comprising a thin flexible ambulatory/self contained bio-sensor module.
  • the sensor system includes the sensor module for collecting data during monitoring and a receiver module for receiving, processing, analyzing, and storing the data.
  • the sensor module transmits the collected data by an integral RF transmitter or by a physically connectable integral port of the sensor module, which is removably connected to the receiver module for downloading after monitoring.
  • the sensor module can be made in appearance similar to an adhesive bandage and can be analogously adhered to the skin of a subject body in a convenient manner.
  • the sensor module has no wires or cords extending to monitoring/receiving equipment. Therefore, there are no encumbering lines to entangle the limbs and torso of a subject body being monitored. As such, the subject body is free to walk and move about without interrupting the monitoring process, and without the sensor system or module interrupting the normal activities of the subject body. In this way, the subject person's bodily characteristics that are being monitored are closer to, if not the same as, what they would be during regular activities. Thus, the characteristics being monitored will more accurately reflect those characteristics that the subject body normally has, and will record the physiological responses of the subject body to his or her normal environment.
  • the bio-sensor system of the instant invention permits a subject person to not only be at home or work, but also to remain unencumbered by cords or battery packs.
  • the sensor module is self-contained and has a low profile. Even with the added bulk of the thin flexible battery for the power supply, the sensor module is approximately as convenient as wearing an adhesive bandage.
  • the small size and wireless aspects of the instant sensor module avoid the noise that normally sullies the signal of past systems.
  • the systems of the past have more noise because they have longer circuit paths between the monitoring circuitry and the physiological interface elements and longer circuit paths between the monitoring circuitry and the noise creating power supplies.
  • the sensor module has an integral power supply such that the signal remains clean and free from noise.
  • the sensor module and system overcome the deficiency of past systems including the inability of past systems to sense signals of very small amplitude.
  • the instant sensor module and system are extremely sensitive and can accurately detect electromagnetic or other physiologically modulated signals from the body that heretofore were not possible to accurately detect due to the noise levels that are normally present in the conventional systems.
  • the instant sensor system includes a flexible sensor module and a receiver module.
  • the flexible sensor module functions as a wireless or "untethered" data collection device that can be attached on the skin of a subject body and collect physiological data without need for physical connection to other electronics during the collection period.
  • the flexible sensor module can be conformed to any of a variety of curved surfaces due its flexibility.
  • the sensor module has a flexible thin sheet of silicon comprising circuitry, a flexible power source, and a flexible support substrate.
  • the silicon, power source, and flexible substrate are integrated as layers of the sensor module. The layers can be placed together in the form of an adhesive bandage.
  • a physiological interface element is connected to the sensor module.
  • the physiological interface element comprises electrodes that protrude from the flexible substrate for contacting the skin of a subject body.
  • other physiological interface elements such as optical sources and associated detectors can be implemented as well.
  • the sensor system also includes one of an RF receiver with a wireless port for continuously or intermittently receiving data, or a physical port from which the sensor module is accessed for intermittently downloading data that is temporarily stored in a suitable memory contained in the sensor module.
  • the receiver module can comprise an intermediate transceiver separate from a subsequent destination of the data processing and analysis device.
  • the intermediate transceiver could be worn on the subject body remote from the sensor module, for example. Signals from multiple sensor modules can be received in the intermediate transceiver and rearranged in time or otherwise processed to form a composite signal that is retransmitted to the data processing and analysis device as a single signal.
  • the intermediate transceiver can make the data conform to the wireless Internet transmission standard or some other standard.
  • the sensor module further comprises a single integrated circuit on an active surface of the flexible thin sheet of silicon.
  • the sensor module further includes a plurality of integrated circuits on an active surface of one or more thin sheets of silicon, and metallization on a surface of the flexible substrate facing the thin sheet of silicon.
  • the metallization connects the circuits to each other.
  • Each of the layers including the silicon is separately flexible along a respective entire width and entire length. Each of the layers remains flexible along the respective width and entire length when the sensor module is in its assembled configuration.
  • the sensor system includes at least one sensor module and at least one physically separate data storage and/or analysis device.
  • the system will include a plurality of similar sensor modules to be simultaneously placed at a variety of selected locations on the skin of the subject body for simultaneously collecting data by each of the sensor modules.
  • the sensor system can be characterized as a bio data monitoring system having a sensor module in the form of a thin, flexible bio data collection device.
  • the sensor module has a length, a width, and a thickness.
  • the sensor module also has a plurality of layers of materials including a silicon layer. The layers are stacked in a thickness direction. Each of the layers is flexible and bendable out of a regular plane of the sensor module about both a lengthwise axis and a widthwise axis.
  • the bio data monitoring system further has a data receiving and processing device that is physically separate from the sensor module as described above.
  • the layers of the sensor module include a nonconductive flexible substrate, a silicon layer in the form of a thin flexible sheet of silicon comprising an integrated circuit, and a bonding layer of anisotropic epoxy that bonds the silicon to the flexible substrate.
  • the sensor module includes electrodes on a surface of the flexible substrate opposite the anisotropic epoxy layer. The sensor module also has metallization on the flexible substrate connecting the electrodes to the integrated circuitry.
  • An aspect of the invention in one of its simplest forms is an improved biomedical sensor module suitable for application to the skin of a subject body, in which the improvement over past devices comprises a flexible thin sheet of silicon comprising circuitry.
  • Another aspect in accordance with the instant invention, includes a method of monitoring a physiological characteristic.
  • One of the steps of this method is positioning a flexible, sensor module on the skin of a subject body to be monitored. After positioning the sensor module, data is collected through the skin for a predetermined period of time. Then the data is analyzed on a device that is physically separate from the sensor module. It should be noted that the steps of collecting and analyzing can further comprise monitoring by at least one of EKG, EMG, EEG, blood sugar, blood pulse, or blood pressure.
  • the step of positioning can comprise adhering the sensor module to the skin by adhesive pads on the sensor module.
  • the method of monitoring can further include subsequent steps of removing the adhesive pads from the sensor module and heating the sensor module in an autoclave for sterilization after the data has been transferred to the receiver module.
  • Another aspect, in accordance with the instant invention includes a method of making a sensor system comprising a flexible sensor module.
  • the method of of making the system includes the method of making the flexible sensor module.
  • the method of making the flexible sensor module comprises grinding an inactive side of a silicon layer on which an IC resides until the silicon becomes thin and flexible.
  • the sensor module is further formed by mounting the silicon layer on a flexible substrate of polyimide by an anisotropic conductive epoxy intermediate layer. Another layer is added by covering the silicon layer and the flexible substrate with a thin flexible battery.
  • the method of making the sensor system includes providing a data analysis device for processing the data. It should be noted that the instant invention advantageously entails thinning the silicon layer to a degree at which the fracture strength actually increases with decreasing thickness.
  • the instant invention overcomes the deficiencies of cracking and breaking of thin silicon that is expected as silicon becomes increasingly thin.
  • the instant invention overcomes the need for stiff substrate material that is normally used to support thin silicon to prevent breaking of the silicon and destruction of any micro-circuitry thereon.
  • the sensor system is a bio data monitoring kit with at least one flexible sensor module as described above.
  • the electrodes can be rigid or flexible. All of the other elements of the sensor module are flexible.
  • the kit can include a separate data receiving and/or processing and analysis device.
  • the system kit will include software for downloading onto the processor.
  • a kit moreover, can include one or more sensor module in the form of adhesive bandages.
  • FIG. 1 is a top plan view of an exemplary sensor module in accordance with the invention.
  • FIG. 2a is a schematic representation of the sensor system in accordance with the preferred embodiment of the invention.
  • FIG. 2b is a schematic representation of the sensor system in accordance with an alternative embodiment of the invention.
  • FIG. 2c is a perspective view of software for the system
  • FIG. 3a is a perspective view of the sensor module
  • FIG. 3b is an exploded perspective view of the sensor module
  • FIG. 3c is a sectional view taken along lines 3c-3c of FIG. 3a;
  • FIG. 3d is a sectional view taken along lines 3d-3d of FIG. 3a;
  • FIG. 3e is a perspective view of the sensor module in a twisted configuration;
  • FIG. 3f is a cross sectional view taken along lines 3f-3f in FIG. 3b;
  • FIG. 4 is a graph depicting the relationship between fracture strength and thickness;
  • FIG. 5 is a schematic representation of internal stresses on an element experiencing bending forces
  • FIG. 6 is an exemplary edge view showing the flexibility of thinned silicon
  • FIG. 7 is a top plan view of the sensor module adhered at a specific location on the skin
  • FIG. 8 is a perspective schematic representation of the placement of a sensor module in accordance with the invention in a probe.
  • FIG. 9 is a block diagram of the circuitry that may be integrated onto the thinned silicon substrate.
  • FIG. 1 shows an exemplary preferred embodiment of a sensor module 10 adhered to the skin 15 of a subject body 20 to be monitored.
  • the sensor module 10 can be a single sensor module, (or one of a plurality of sensor modules), of the sensor system 30 shown in FIG. 2a in accordance with a preferred embodiment of the invention.
  • the sensor module 10 is completely unobtrusive, is self-contained, and is void of the monitor wires and other encumbrances that have conventionally entangled arms 35 and other parts of the subject body 20 during monitoring.
  • the system 30 can incorporate continuous transmission by
  • the sensor module 10 has at least one antenna 50 metalized onto a flexible substrate 55 for transmitting and/or receiving RF signals.
  • thin flexible silicon substrates 60, 65, 70 having respective integrated circuits 71 , 72, 73 are bonded to the flexible substrate 55 by an anisotropic epoxy layer 75 or the like.
  • the metallization 77 is applied to the flexible substrate 55 and extends between the anisotropic layer 75 and the flexible substrate 55. The metallization 77 interconnects the ICs 71 , 72, 73 to each other and to the antenna 50.
  • the metallization 77 further extends through the flexible substrate 55 and connects the ICs 71 , 72, 73 to the electrodes 80 disposed on an underside 85 of the flexible substrate 55 for contact with the skin 15 of the subject body 20.
  • the preferred metalization 77 is formed during one or more process steps or from discrete conductors.
  • FIG. 2b incorporates memory in the ICs 71 , 72, 73 for storing data during monitoring.
  • This alternative embodiment includes a port 86 on the sensor module 10 and a mating connection 87 connected to a PC 88 for physically connecting the sensor module 10 to the PC 88 or other processor for downloading, analyzing, and archiving collected data.
  • the memory device can be a non-volatile memory in case power is lost to the sensor module.
  • the system includes software 89 for controlling input, storage, and analysis of the collected data on the processor 88.
  • the software may be provided on a CD, floppy, or any storage media as generally indicated in FIG. 2c. It is contemplated that the invention can be provided as a kit having one or more of the components of the system 30, and may include software 89. Of course, the software 89 will be included in kits that comprise the complete sensor system 30. While the silicon substrates 60, 65, 70 are shown separately with separate respective ICs 71 , 72, 73, it is to be expressly understood that the ICs 71 , 72, 73, can be integrated as one IC on a single silicon substrate. Doing this would provide cost advantages.
  • a single circuit could incorporate both of the embodiments so that a user could selectively implement monitoring by continuous RF transmission, or by storage and subsequent retrieval by physical connection of the sensor module to the PC 88 or the like for downloading data captured during a period of monitoring.
  • the electrodes 80 are oriented to extend longitudinally in a width-wise direction of the sensor module 10, other types, configurations, and orientations of electrodes are considered to be within the spirit and scope of the invention.
  • orienting a pair of electrodes 90 to extend longitudinally relative to the sensor module 10 and positioning them along lateral edges as shown in FIG. 2 has been contemplated:
  • other types of physiological data detectors can be used.
  • the sensor system 30 detects bioelectric signals created by muscle movement and transmits the signals 40 in support of EMG monitoring.
  • the circuits 71 , 72, 73 are configured to detect very small electromagnetic signals.
  • a similar sensor module can be used to detect and digitize other physiological characteristics such as an EKG (from the heart), an EEG (from the brain), pulse rate , blood pressure, and blood sugar levels.
  • Other techniques such as new non-linear techniques for analyzing the frequency spectrum of the EMG signal can be incorporated to monitor other physiological characteristics such as during non-static contractions of muscles. These techniques can be used to detect the presence of foreign chemicals in the subject body 20.
  • different physiological characteristics can be simultaneously monitored at respective positions on the body 20.
  • the subject body 20 can be monitored during normal activity without interruption or discomfort. Furthermore, since the sensor module 10 is unobtrusive and ambulatory, monitoring can be carried out without signal abnormalities due to subject reaction to irritation from the device. Still further, the sensor module 10 avoids the signals being adversely affected by subject reaction to the unnatural environment in which conventional monitoring is carried out. Due to the flexibility, the electrode positioning, and the secure adhesive bandage configuration of the sensor module, signal distortion during muscle contraction is also avoided. This is because the electrodes are held secured against separation from the skin 15 by the adhesive pads 91.
  • the perspective view of the sensor module 10 shown in FIG. 3a illustrates the thin structure of the various layers, and of the overall sensor module 10.
  • the flexible substrate 55 is preferably in the form of a polyimide, and is electrically non-conductive and flexible. However other flexible non-conducting substrates can be substituted.
  • the flexible substrate 55 supports the other layers of the sensor module 10. This is perhaps best shown in FIGS. 3b and 3c. For example, the next superjacent layer is the anisotropic epoxy 75 shown in the sectional view of FIG. 3c.
  • metallization 77 Disposed between portions of the flexible substrate 55 and the anisotropic epoxy 75 is metallization 77, which is best shown in the exploded perspective view of FIG. 3b.
  • the next superjacent layer to the anisotropic epoxy 75 is the thin flexible silicon 60, 65, 70.
  • the silicon 60, 65, 70 is bonded to the flexible substrate 55 by the anisotropic epoxy layer 75.
  • the anisotropic epoxy layer 75 has properties preventing electrical conduction therethrough in one direction while permitting electrical conduction therethrough in the other direction.
  • the thickness 95 of the thin silicon substrates 60, 65, 70 is in the range from 10 to 50 microns.
  • the preferred thickness is approximately 25 microns since it is roughly in the middle of the operable range.
  • the sum 100 of the thicknesses of the flexible substrate 55, the metallization 77, the anisotropic epoxy 75, and the silicon substrates 60, 65, 70, is in the range in from 75 to 100 microns.
  • the metallization 77 is typically integral with and forms part of the layer of the flexible substrate 55.
  • a flexible, thin battery 105 overlays the silicon substrates 60, 65, 70 and their respective ICs 71, 72, 73. As shown in FIGS.
  • the battery 105 preferably also covers the flexible substrate 55 and the metallization 77.
  • the battery is connected to the ICs by the metallization 77.
  • the electrodes 80 are located on a lower surface 85 of the flexible substrate 55 and are connected through the flexible substrate 55 to the metallization 77.
  • the metallization 77 in turn connects the electrodes 80 to the ICs 71 , 72, 73.
  • the electrodes 80 may comprise any of a variety of electrically conductive materials. However, in the preferred embodiment, the electrodes 80 are formed of silver wire.
  • Adhesive pads 91 are also disposed on the underside 85 of the flexible substrate. The adhesive pads 91 are located analogously to adhesive portions of a conventional adhesive bandage.
  • the adhesive pads 91 and electrodes 80 can be covered by a peel away or other protective cover 115 in a conventional manner. Furthermore, the adhesive pads 91 can be formed of double-sided adhesive for application before and removal after each use so that the sensor module can be used repeatedly.
  • the sensor module can be sterilized in an autoclave, for example, between uses. Alternatively, the sensor modules are made disposable and are discarded after monitoring a particular subject body 20 for purposes of good hygiene.
  • FIGS. 3a-3c All of the materials and layers described above in relation to FIGS. 3a-3c are flexible except for the electrodes 80.
  • the elements remain flexible when assembled together as indicated by the dashed lines of FIGS 3c and 3d, which show bent configurations of the sensor module 10.
  • the dashed lines in FIG. 3c depict bending about a lateral axis 118 shown in FIG. 3a.
  • the lateral axis extends orthogonally to a longitudinal axis 120 also shown in FIG. 3a.
  • the dashed lines of FIG. 3d depict bending about the longitudinal axis 120. Bending about these axes 118, 120 is facilitated by all of the materials except for the electrodes.
  • the extension of the electrodes 80 in a length-wise direction is minimal as shown in FIG. 3c.
  • bending about the lateral axis 118 is substantially not inhibited by the electrodes 80. Bending about the longitudinal axis 120 is only inhibited slightly in regions where the electrodes 80 are connected to the sensor module 10. Furthermore, the electrodes 80 are spaced far enough apart to permit flexure about both a longitudinal and a transverse axis, and twisting of the sensor module about a longitudinal axis 120, for example, as shown in FIG. 3e.
  • the active side of the silicon sheets 60, 65, 70 faces the anisotropic layer 75.
  • the reroute metallization 125 provides electrical connections from the circuits 71 , 72, 73 to selected positions on the anisotropic layer 75, which in turn provide electrical connections with metallization 77 on the flexible substrate 55.
  • the length of the sensor module is in the range from 30 to 60 mm, and the width is in the range from 10 to 20 mm.
  • the regularly small width dimension of the sensor module 10 further renders the localized inhibition of bending of little consequence.
  • the electrodes can be made of a flexible material or can be modified to be shorter than is depicted in the Figures.
  • the materials for the sensor module can be selected from a variety of available flexible materials.
  • the material on which the ICs are formed is more limited. While organic polymer semi-conducting substrates can be used to provide flexibility, they are not the preferred material. This is because they do not have consistent and uniform electronic properties throughout the substrate. The superior electronic properties of the crystalline-structured, traditional silicon semiconductors are preferred. At conventional thicknesses, however, silicon is rigid and not flexible. Hence, utilization of a silicon substrate in its conventional form would defeat the purpose of providing a flexible sensor module in accordance with the instant invention. However, in accordance with the graph shown in FIG. 4, the fracture strength of silicon actually increases with decreasing thickness for a certain range of low thicknesses.
  • the instant invention takes advantage of this physical characteristic by thinning silicon to a range from 10 to 50 microns while maintaining the integrity of the integrated circuits 71, 72, 73 on an active surface of the silicon 60, 65, 70. As such, flexibility of a sheet of silicon 130 is achieved as shown in FIG. 5. The integrity of any integrated circuits on the silicon sheet 130 is maintained unless the silicon sheet 130 is actually folded.
  • the instant invention also takes advantage of a mechanical property of many solids and laminants. This property is shown in FIG. 6. Simply stated, it is that when a solid or laminant 133 that is resistant to internal shearing is bent, internal shearing reaction forces are set up within the solid. For example, as shown in the FIG.
  • the silicon substrates 60, 65, 70 are located generally in a central plane.
  • the overlying battery 105 takes up some of the internal stress as do the underlying flexible substrate 55 and the epoxy 75. Additional layers and specific materials can be added as needed to provide a zero stress plane substantially through the silicon substrates 60, 65, 70. Specifically, it has been found that an addition of a polyimide coating on an upper surface of the silicon substrates 60, 65, 70 can sometimes help to center the silicon substrates 60, 65, 70 on the zero stress plane 150.
  • FIG. 7 shows an exemplary application of the sensor module 10 at a specific location on a subject body 20. In this location, the muscle movement that opens and closes the eyelid is monitored.
  • FIG. 8. depicts a sensor module 157 that is uniquely used to form part of a probe
  • the sensor module 10 Since the sensor module 10 is flexible, it can be conformed to a curved surface like the cylinder of probe 160. As shown, the sensor module 157 is oriented so that the plane or curve of the device is parallel to the longitudinal axis 165 of the probe 160. In this particular case, the probe has a cylindrical, protective shell into which the sensor module preferably can be inserted in a rolled configuration. This embodiment can be specifically applied with the sensor module 157 in the form of a pill to be swallowed, a probe for insertion, or a bullet that can penetrate a subject body, for example.
  • FIG. 9 is a block diagram showing circuitry 170 that could be incorporated into the thin silicon substrates 60, 65, 70.
  • the precise circuitry configuration is not critical to an understanding of the invention. However, it is to be generally understood that the circuitry will include a microprocessor 175, a ROM 180 for storing a program to be implemented, a RAM 185 for storing of data, and a transmitter or transceiver 190 for transmitting data by RF signals to a remote receiver. An optional I/O interface could be used instead of or in addition to the transmitter 190.
  • the circuitry also includes the electrodes 80 for front end analog data collection. The electrodes 80 are connected to an analog/digital converter 195 to convert the analog signals to digital signals to be processed in the microprocessor 175.

Abstract

Système capteur (30) qui possède un module capteur (10) et un module récepteur (45). Le module capteur (10) fonctionne à la manière d'un dispositif sans fil de collecte de données et possède une feuille mince souple de silicium (60, 65, 70) comportant des circuits (71, 72, 73), une source de puissance souple (105), et un substrat de support souple (55). Le silicium, la source de puissance et le substrat de support souple sont intégrés en tant que couches du module capteur (10). Lesdites couches sont réunies sous forme d'un pansement adhésif (10). Plusieurs électrodes (80) sont connectées au module capteur (10) et font saillie par rapport au substrat souple (55) de manière à être placées en contact avec la peau du corps (20) d'un sujet. Le module récepteur (45) comporte soit un récepteur RF doté d'un port sans fil pour la réception en continu de données (40), soit un port physique E / S (87) auquel le module capteur (10) peut être physiquement connecté en vue du téléchargement des données stockées à partir dudit module capteur (10).
PCT/US2002/022617 2001-07-16 2002-07-16 Biomoniteur portable a circuit integre mince souple WO2003065926A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2002365422A AU2002365422A1 (en) 2001-07-16 2002-07-16 Wearable biomonitor with flexible thinned integrated circuit
EP02805694A EP1451873A4 (fr) 2001-07-16 2002-07-16 Biomoniteur portable a circuit integre mince souple

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US30535301P 2001-07-16 2001-07-16
US60/305,353 2001-07-16

Publications (2)

Publication Number Publication Date
WO2003065926A2 true WO2003065926A2 (fr) 2003-08-14
WO2003065926A3 WO2003065926A3 (fr) 2004-06-10

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PCT/US2002/022617 WO2003065926A2 (fr) 2001-07-16 2002-07-16 Biomoniteur portable a circuit integre mince souple

Country Status (3)

Country Link
EP (1) EP1451873A4 (fr)
AU (1) AU2002365422A1 (fr)
WO (1) WO2003065926A2 (fr)

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EP1707112A1 (fr) * 2005-03-30 2006-10-04 Lifescan, Inc. Pièce adhesive de mesure de la fluorescence
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WO2011076871A1 (fr) 2009-12-23 2011-06-30 Delta, Dansk Elektronik, Lys Og Akustik Dispositif de surveillance destiné à être fixé à la surface d'un sujet
WO2011157278A1 (fr) 2010-06-18 2011-12-22 Coloplast A/S Adhésif sensible à la pression perméable
EP2412306A2 (fr) 2005-03-09 2012-02-01 Coloplast A/S Dispositif adhésif tridimensionnel auquel est intégré un système micro-électronique
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WO2013053996A1 (fr) * 2011-10-13 2013-04-18 Stoat Technologies Oy Appareil et procédé de mesure de la fréquence cardiaque
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US9788735B2 (en) 2002-03-25 2017-10-17 Masimo Corporation Body worn mobile medical patient monitor
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US9967040B2 (en) 2016-07-21 2018-05-08 Intel Corporation Patch system for in-situ therapeutic treatment
US10039186B2 (en) 2016-09-16 2018-07-31 Intel Corporation Stretchable and flexible electrical substrate interconnections
US10285617B2 (en) 2013-06-06 2019-05-14 Lifelens Technologies, Llc Modular physiologic monitoring systems, kits, and methods
US11076792B2 (en) 2014-07-30 2021-08-03 Lifesignals, Inc. ECG patch and methods of use
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US11622723B2 (en) 2016-03-22 2023-04-11 Lifesignals, Inc. Systems and methods for physiological signal collection
US11918364B2 (en) 2013-09-25 2024-03-05 Bardy Diagnostics, Inc. Extended wear ambulatory electrocardiography and physiological sensor monitor
US11963780B2 (en) 2023-04-28 2024-04-23 Bardy Diagnostics, Inc. System for coil-based implantable physiological monitor energy transmission

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US10219706B2 (en) 2002-03-25 2019-03-05 Masimo Corporation Physiological measurement device
US10335033B2 (en) 2002-03-25 2019-07-02 Masimo Corporation Physiological measurement device
US9788735B2 (en) 2002-03-25 2017-10-17 Masimo Corporation Body worn mobile medical patient monitor
US11484205B2 (en) 2002-03-25 2022-11-01 Masimo Corporation Physiological measurement device
US9872623B2 (en) 2002-03-25 2018-01-23 Masimo Corporation Arm mountable portable patient monitor
US10213108B2 (en) 2002-03-25 2019-02-26 Masimo Corporation Arm mountable portable patient monitor
US9795300B2 (en) 2002-03-25 2017-10-24 Masimo Corporation Wearable portable patient monitor
US10869602B2 (en) 2002-03-25 2020-12-22 Masimo Corporation Physiological measurement communications adapter
EP2412306A3 (fr) * 2005-03-09 2012-11-21 Coloplast A/S Dispositif adhésif tridimensionnel auquel est intégré un système micro-électronique
EP2412306A2 (fr) 2005-03-09 2012-02-01 Coloplast A/S Dispositif adhésif tridimensionnel auquel est intégré un système micro-électronique
EP1707113A1 (fr) * 2005-03-30 2006-10-04 Lifescan, Inc. Procédé de surveillance d'une boulette fluorescente à implantation
EP1707114A1 (fr) * 2005-03-30 2006-10-04 Lifescan, Inc. Kit analytique de mesure de la fluorescence
EP1707112A1 (fr) * 2005-03-30 2006-10-04 Lifescan, Inc. Pièce adhesive de mesure de la fluorescence
US8287451B2 (en) 2005-05-19 2012-10-16 Industrial Technology Research Institute Flexible biomonitor with EMI shielding and module expansion
CN100450432C (zh) * 2005-06-13 2009-01-14 财团法人工业技术研究院 软性生理监控装置
JP2009536228A (ja) * 2006-05-05 2009-10-08 コロプラスト アクティーゼルスカブ 架橋ポリアルキレンオキシド及び親水性吸水剤を含む感圧接着剤組成物
US8076528B2 (en) 2006-05-05 2011-12-13 Coloplast A/S Pressure sensitive adhesive composition comprising cross-linked polyalkylene oxide and water absorbent hydrophilic agents
EP1878654A1 (fr) * 2006-07-14 2008-01-16 Johnson Outdoors, Inc. Ordinateur de plongée doté d'un moniteur du rythme cardiaque
US7310549B1 (en) 2006-07-14 2007-12-18 Johnson Outdoors Inc. Dive computer with heart rate monitor
US9597034B2 (en) 2007-05-24 2017-03-21 Hmicro, Inc. Flexible wireless patch for physiological monitoring and methods of manufacturing the same
US8718742B2 (en) 2007-05-24 2014-05-06 Hmicro, Inc. Integrated wireless patch for physiological monitoring
US8710130B2 (en) 2007-07-06 2014-04-29 Coloplast A/S Permeable pressure sensitive adhesive
EP3121225A1 (fr) 2007-07-06 2017-01-25 Coloplast A/S Autoadhésif perméable
WO2009055415A3 (fr) * 2007-10-24 2009-07-16 Hmicro Inc Patch sans fil flexible pour surveillance physiologique et procédés de fabrication associés
US8628020B2 (en) 2007-10-24 2014-01-14 Hmicro, Inc. Flexible wireless patch for physiological monitoring and methods of manufacturing the same
WO2009055415A2 (fr) * 2007-10-24 2009-04-30 Hmicro, Inc. Patch sans fil flexible pour surveillance physiologique et procédés de fabrication associés
US9265435B2 (en) 2007-10-24 2016-02-23 Hmicro, Inc. Multi-electrode sensing patch for long-term physiological monitoring with swappable electronics, radio and battery, and methods of use
EP2319389A1 (fr) * 2008-04-03 2011-05-11 Olympus Medical Systems Corporation Unité d'antenne et appareil de réception pour appareil médical à capsule
EP2106737A1 (fr) * 2008-04-03 2009-10-07 Olympus Medical Systems Corporation Unité d'antenne et appareil de réception pour appareil médical à capsule
US8624078B2 (en) 2008-12-18 2014-01-07 Coloplast A/S Permeable pressure sensitive adhesive
US9249343B2 (en) 2008-12-18 2016-02-02 Coloplast A/S Permeable pressure sensitive adhesive
EP2896356A1 (fr) 2009-12-23 2015-07-22 DELTA, Dansk Elektronik, Lys & Akustik Système de surveillance
EP3150114A1 (fr) 2009-12-23 2017-04-05 DELTA, Dansk Elektronik, Lys & Akustik Dispositif de surveillance destiné à être fixé à la surface de la peau
US9521970B2 (en) 2009-12-23 2016-12-20 Biotelemetry Technology Aps Monitoring device for attachment to a surface of a subject
WO2011076886A2 (fr) 2009-12-23 2011-06-30 Delta, Dansk Elektronik, Lys Og Akustik Dispositif de surveillance
WO2011076884A2 (fr) 2009-12-23 2011-06-30 Delta, Dansk Elektronik, Lys Og Akustik Système de surveillance
WO2011076871A1 (fr) 2009-12-23 2011-06-30 Delta, Dansk Elektronik, Lys Og Akustik Dispositif de surveillance destiné à être fixé à la surface d'un sujet
EP2523639A1 (fr) * 2010-01-11 2012-11-21 Card Guard Scientific Survival Ltd. Pansement adhésif et procédé de contrôle d'informations concernant le patient
EP3210580A1 (fr) * 2010-01-11 2017-08-30 Card Guard Scientific Survival Ltd. Pansement adhésif et procédé de commande d'informations concernant le patient
EP2523639A4 (fr) * 2010-01-11 2014-06-11 Card Guard Scient Survival Ltd Pansement adhésif et procédé de contrôle d'informations concernant le patient
US8871993B2 (en) 2010-06-18 2014-10-28 Coloplast A/S Permeable pressure sensitive adhesive
WO2011157278A1 (fr) 2010-06-18 2011-12-22 Coloplast A/S Adhésif sensible à la pression perméable
WO2013053996A1 (fr) * 2011-10-13 2013-04-18 Stoat Technologies Oy Appareil et procédé de mesure de la fréquence cardiaque
WO2014047032A1 (fr) * 2012-09-18 2014-03-27 Worcester Polytechnic Institute Fabrication et utilisation d'électrodes épidermiques
US9833193B2 (en) 2012-10-12 2017-12-05 Biotelemetry Technology Aps Monitoring device
US10285617B2 (en) 2013-06-06 2019-05-14 Lifelens Technologies, Llc Modular physiologic monitoring systems, kits, and methods
US11284831B2 (en) 2013-06-06 2022-03-29 Lifelens Technologies, Llc Modular physiologic monitoring systems, kits, and methods
US11925471B2 (en) 2013-06-06 2024-03-12 Lifelens Technologies, Llc Modular physiologic monitoring systems, kits, and methods
US11918364B2 (en) 2013-09-25 2024-03-05 Bardy Diagnostics, Inc. Extended wear ambulatory electrocardiography and physiological sensor monitor
US11076792B2 (en) 2014-07-30 2021-08-03 Lifesignals, Inc. ECG patch and methods of use
US11622723B2 (en) 2016-03-22 2023-04-11 Lifesignals, Inc. Systems and methods for physiological signal collection
US9954309B2 (en) 2016-07-20 2018-04-24 Intel Corporation Magnetic detachable electrical connections between circuits
WO2018017205A1 (fr) * 2016-07-20 2018-01-25 Intel Corporation Surveillance du bien-être à l'aide d'un système de timbre
US9967040B2 (en) 2016-07-21 2018-05-08 Intel Corporation Patch system for in-situ therapeutic treatment
US10039186B2 (en) 2016-09-16 2018-07-31 Intel Corporation Stretchable and flexible electrical substrate interconnections
CN114544046A (zh) * 2021-12-22 2022-05-27 浙江清华柔性电子技术研究院 压力传感器及其制备方法
CN114544046B (zh) * 2021-12-22 2023-12-19 浙江清华柔性电子技术研究院 压力传感器的制备方法
US11963780B2 (en) 2023-04-28 2024-04-23 Bardy Diagnostics, Inc. System for coil-based implantable physiological monitor energy transmission

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WO2003065926A3 (fr) 2004-06-10
AU2002365422A1 (en) 2003-09-02
EP1451873A2 (fr) 2004-09-01
AU2002365422A8 (en) 2003-09-02
EP1451873A4 (fr) 2007-01-17

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