WO2003050634A3 - Procede de regulation du titre d'une solution, dispositif de commande de cette regulation et systeme comportant un tel dispositif - Google Patents

Procede de regulation du titre d'une solution, dispositif de commande de cette regulation et systeme comportant un tel dispositif Download PDF

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Publication number
WO2003050634A3
WO2003050634A3 PCT/FR2002/004250 FR0204250W WO03050634A3 WO 2003050634 A3 WO2003050634 A3 WO 2003050634A3 FR 0204250 W FR0204250 W FR 0204250W WO 03050634 A3 WO03050634 A3 WO 03050634A3
Authority
WO
WIPO (PCT)
Prior art keywords
solution
product
titer
controlling
time
Prior art date
Application number
PCT/FR2002/004250
Other languages
English (en)
Other versions
WO2003050634A2 (fr
Inventor
Herve Dulphy
Christophe Martin
Original Assignee
Air Liquide Electronics Sys
Herve Dulphy
Christophe Martin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide Electronics Sys, Herve Dulphy, Christophe Martin filed Critical Air Liquide Electronics Sys
Priority to DE60216508T priority Critical patent/DE60216508T2/de
Priority to EP02799802A priority patent/EP1459147B1/fr
Priority to AU2002364442A priority patent/AU2002364442A1/en
Priority to US10/498,256 priority patent/US20050084979A1/en
Publication of WO2003050634A2 publication Critical patent/WO2003050634A2/fr
Publication of WO2003050634A3 publication Critical patent/WO2003050634A3/fr
Priority to US12/620,449 priority patent/US20100062610A1/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/135—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture
    • G05D11/138—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture by sensing the concentration of the mixture, e.g. measuring pH value

Landscapes

  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Physics & Mathematics (AREA)
  • Detergent Compositions (AREA)
  • Accessories For Mixers (AREA)
  • Control Of Non-Electrical Variables (AREA)
  • Agricultural Chemicals And Associated Chemicals (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)

Abstract

L'invention concerne un procédé de régulation du titre d'une solution, dans lequel une quantité prédéterminée d'un produit contenu dans la solution est ajoutée dans la solution selon un intervalle de temps, dit intervalle d'ajout, proportionnel au produit du coefficient temporel D de dégradation dudit produit en solution et au volume total Vt de la solution au moment de l'ajout. Elle concerne également un dispositif de commande de la régulation du titre d'une solution, cette solution contenant un produit, comportant des moyens (10) pour commander l'injection d'une quantité prédéterminée dudit produit dans ladite solution selon un intervalle de temps, dit intervalle d'ajout, proportionnel au produit du coefficient temporel D de dégradation dudit produit en solution et au volume total Vt de la solution au moment de l'ajout.
PCT/FR2002/004250 2001-12-10 2002-12-10 Procede de regulation du titre d'une solution, dispositif de commande de cette regulation et systeme comportant un tel dispositif WO2003050634A2 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE60216508T DE60216508T2 (de) 2001-12-10 2002-12-10 Verfahren zur konzentrationsregelung einer lösung, vorrichtung zum kontrollieren dieser regelung, und system mit einer solchen vorrichtung
EP02799802A EP1459147B1 (fr) 2001-12-10 2002-12-10 Procede de regulation du titre d'une solution, dispositif de commande de cette regulation et systeme comportant un tel dispositif
AU2002364442A AU2002364442A1 (en) 2001-12-10 2002-12-10 Method for regulating the titer of a solution, device for controlling said regulation and system comprising such a device
US10/498,256 US20050084979A1 (en) 2001-12-10 2002-12-10 Method of regulating the titer of a solution, device for controlling said regulation, and system comprising such a device
US12/620,449 US20100062610A1 (en) 2001-12-10 2009-11-17 Method of regulating the titration of a solution, device for controlling said regulation and system comprising such a device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR01/15932 2001-12-10
FR0115932A FR2833365B1 (fr) 2001-12-10 2001-12-10 Procede de regulation du titre d'une solution, dispositif de commande de cette regulation et systeme comportant un tel dispositif

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/620,449 Division US20100062610A1 (en) 2001-12-10 2009-11-17 Method of regulating the titration of a solution, device for controlling said regulation and system comprising such a device

Publications (2)

Publication Number Publication Date
WO2003050634A2 WO2003050634A2 (fr) 2003-06-19
WO2003050634A3 true WO2003050634A3 (fr) 2004-02-19

Family

ID=8870292

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2002/004250 WO2003050634A2 (fr) 2001-12-10 2002-12-10 Procede de regulation du titre d'une solution, dispositif de commande de cette regulation et systeme comportant un tel dispositif

Country Status (8)

Country Link
US (2) US20050084979A1 (fr)
EP (1) EP1459147B1 (fr)
AT (1) ATE347128T1 (fr)
AU (1) AU2002364442A1 (fr)
DE (1) DE60216508T2 (fr)
FR (1) FR2833365B1 (fr)
TW (1) TWI264626B (fr)
WO (1) WO2003050634A2 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7344297B2 (en) 1998-04-16 2008-03-18 Air Liquide Electronics U.S. Lp Method and apparatus for asynchronous blending and supply of chemical solutions
US7871249B2 (en) 1998-04-16 2011-01-18 Air Liquide Electronics U.S. Lp Systems and methods for managing fluids using a liquid ring pump
US7980753B2 (en) 1998-04-16 2011-07-19 Air Liquide Electronics U.S. Lp Systems and methods for managing fluids in a processing environment using a liquid ring pump and reclamation system
US20070119816A1 (en) * 1998-04-16 2007-05-31 Urquhart Karl J Systems and methods for reclaiming process fluids in a processing environment
US20070109912A1 (en) * 2005-04-15 2007-05-17 Urquhart Karl J Liquid ring pumping and reclamation systems in a processing environment
US8235580B2 (en) 2006-10-12 2012-08-07 Air Liquide Electronics U.S. Lp Reclaim function for semiconductor processing systems
CN104503496B (zh) * 2014-12-12 2017-04-05 平顶山华兴浮选工程技术服务有限公司 一种矿浆浓度自调节系统及调节方法
US20160296902A1 (en) 2016-06-17 2016-10-13 Air Liquide Electronics U.S. Lp Deterministic feedback blender

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0881555A1 (fr) * 1997-05-29 1998-12-02 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Procédé de régulation de la teneur d'oxygène de l'eau en sortie d'un appareil de dissolution d'oxygène dans l'eau et appareil pour la mise en oeuvre de procédé
WO1999053121A1 (fr) * 1998-04-09 1999-10-21 Dj Parker Company, Inc. Doing Business As Parker Systems Systeme automatise de commande de procedes chimiques
TW409312B (en) * 1999-02-02 2000-10-21 Mosel Vitelic Inc Systemic concentration adjustment method of the APM solution used in the semiconductor process
US6146008A (en) * 1997-04-11 2000-11-14 Labeille S.A. System for diluting ultrapure chemicals which is intended for the microelectronics industry
FR2811240A1 (fr) * 2000-07-05 2002-01-11 Air Liquide Procede pour la determination de la teneur en peroxyde d'hydrogene de melanges en particulier de melanges abrasifs utilises en electronique et application a la regulation de la concentration desdits melanges

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3074366B2 (ja) * 1993-02-22 2000-08-07 東京エレクトロン株式会社 処理装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6146008A (en) * 1997-04-11 2000-11-14 Labeille S.A. System for diluting ultrapure chemicals which is intended for the microelectronics industry
EP0881555A1 (fr) * 1997-05-29 1998-12-02 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Procédé de régulation de la teneur d'oxygène de l'eau en sortie d'un appareil de dissolution d'oxygène dans l'eau et appareil pour la mise en oeuvre de procédé
WO1999053121A1 (fr) * 1998-04-09 1999-10-21 Dj Parker Company, Inc. Doing Business As Parker Systems Systeme automatise de commande de procedes chimiques
TW409312B (en) * 1999-02-02 2000-10-21 Mosel Vitelic Inc Systemic concentration adjustment method of the APM solution used in the semiconductor process
US20020001850A1 (en) * 1999-02-02 2002-01-03 Jui-Ping Li Method for automatically adjusting concentration of solution used in semiconductor manufacturing process
FR2811240A1 (fr) * 2000-07-05 2002-01-11 Air Liquide Procede pour la determination de la teneur en peroxyde d'hydrogene de melanges en particulier de melanges abrasifs utilises en electronique et application a la regulation de la concentration desdits melanges

Also Published As

Publication number Publication date
FR2833365A1 (fr) 2003-06-13
AU2002364442A8 (en) 2003-06-23
TW200307198A (en) 2003-12-01
ATE347128T1 (de) 2006-12-15
WO2003050634A2 (fr) 2003-06-19
US20100062610A1 (en) 2010-03-11
AU2002364442A1 (en) 2003-06-23
US20050084979A1 (en) 2005-04-21
EP1459147A2 (fr) 2004-09-22
FR2833365B1 (fr) 2004-05-14
TWI264626B (en) 2006-10-21
DE60216508D1 (de) 2007-01-11
DE60216508T2 (de) 2007-09-13
EP1459147B1 (fr) 2006-11-29

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