TWI264626B - Method of regulating the titre of a solution, device for controlling this regulation and system comprising such a device - Google Patents
Method of regulating the titre of a solution, device for controlling this regulation and system comprising such a deviceInfo
- Publication number
- TWI264626B TWI264626B TW091135522A TW91135522A TWI264626B TW I264626 B TWI264626 B TW I264626B TW 091135522 A TW091135522 A TW 091135522A TW 91135522 A TW91135522 A TW 91135522A TW I264626 B TWI264626 B TW I264626B
- Authority
- TW
- Taiwan
- Prior art keywords
- solution
- product
- titre
- controlling
- regulating
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D11/00—Control of flow ratio
- G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
- G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
- G05D11/135—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture
- G05D11/138—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture by sensing the concentration of the mixture, e.g. measuring pH value
Landscapes
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Physics & Mathematics (AREA)
- Detergent Compositions (AREA)
- Accessories For Mixers (AREA)
- Chemical Or Physical Treatment Of Fibers (AREA)
- Control Of Non-Electrical Variables (AREA)
- Agricultural Chemicals And Associated Chemicals (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0115932A FR2833365B1 (fr) | 2001-12-10 | 2001-12-10 | Procede de regulation du titre d'une solution, dispositif de commande de cette regulation et systeme comportant un tel dispositif |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200307198A TW200307198A (en) | 2003-12-01 |
TWI264626B true TWI264626B (en) | 2006-10-21 |
Family
ID=8870292
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW091135522A TWI264626B (en) | 2001-12-10 | 2002-12-09 | Method of regulating the titre of a solution, device for controlling this regulation and system comprising such a device |
Country Status (8)
Country | Link |
---|---|
US (2) | US20050084979A1 (zh) |
EP (1) | EP1459147B1 (zh) |
AT (1) | ATE347128T1 (zh) |
AU (1) | AU2002364442A1 (zh) |
DE (1) | DE60216508T2 (zh) |
FR (1) | FR2833365B1 (zh) |
TW (1) | TWI264626B (zh) |
WO (1) | WO2003050634A2 (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070119816A1 (en) * | 1998-04-16 | 2007-05-31 | Urquhart Karl J | Systems and methods for reclaiming process fluids in a processing environment |
US7980753B2 (en) | 1998-04-16 | 2011-07-19 | Air Liquide Electronics U.S. Lp | Systems and methods for managing fluids in a processing environment using a liquid ring pump and reclamation system |
US7344297B2 (en) * | 1998-04-16 | 2008-03-18 | Air Liquide Electronics U.S. Lp | Method and apparatus for asynchronous blending and supply of chemical solutions |
US7871249B2 (en) | 1998-04-16 | 2011-01-18 | Air Liquide Electronics U.S. Lp | Systems and methods for managing fluids using a liquid ring pump |
US20070109912A1 (en) * | 2005-04-15 | 2007-05-17 | Urquhart Karl J | Liquid ring pumping and reclamation systems in a processing environment |
US8235580B2 (en) | 2006-10-12 | 2012-08-07 | Air Liquide Electronics U.S. Lp | Reclaim function for semiconductor processing systems |
CN104503496B (zh) * | 2014-12-12 | 2017-04-05 | 平顶山华兴浮选工程技术服务有限公司 | 一种矿浆浓度自调节系统及调节方法 |
US20160296902A1 (en) | 2016-06-17 | 2016-10-13 | Air Liquide Electronics U.S. Lp | Deterministic feedback blender |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3074366B2 (ja) * | 1993-02-22 | 2000-08-07 | 東京エレクトロン株式会社 | 処理装置 |
FR2761902B1 (fr) * | 1997-04-11 | 1999-05-14 | Labeille Sa | Systeme de dilution de produits chimiques ultra-purs destine a l'industrie micro-electronique |
FR2764089B1 (fr) * | 1997-05-29 | 1999-07-02 | Air Liquide | Procede de regulation de la teneur d'oxygene de l'eau en sortie d'un appareil de dissolution d'oxygene dans l'eau et appareil pour la mise en ouvre du procede |
KR20010072569A (ko) * | 1998-04-09 | 2001-07-31 | 추후제출 | 자동화 화학공정 제어 시스템 |
TW409312B (en) * | 1999-02-02 | 2000-10-21 | Mosel Vitelic Inc | Systemic concentration adjustment method of the APM solution used in the semiconductor process |
FR2811240B1 (fr) * | 2000-07-05 | 2003-01-03 | Air Liquide | Procede pour la determination de la teneur en peroxyde d'hydrogene de melanges en particulier de melanges abrasifs utilises en electronique et application a la regulation de la concentration desdits melanges |
-
2001
- 2001-12-10 FR FR0115932A patent/FR2833365B1/fr not_active Expired - Fee Related
-
2002
- 2002-12-09 TW TW091135522A patent/TWI264626B/zh not_active IP Right Cessation
- 2002-12-10 WO PCT/FR2002/004250 patent/WO2003050634A2/fr active IP Right Grant
- 2002-12-10 EP EP02799802A patent/EP1459147B1/fr not_active Expired - Lifetime
- 2002-12-10 AT AT02799802T patent/ATE347128T1/de not_active IP Right Cessation
- 2002-12-10 US US10/498,256 patent/US20050084979A1/en not_active Abandoned
- 2002-12-10 AU AU2002364442A patent/AU2002364442A1/en not_active Abandoned
- 2002-12-10 DE DE60216508T patent/DE60216508T2/de not_active Expired - Lifetime
-
2009
- 2009-11-17 US US12/620,449 patent/US20100062610A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
TW200307198A (en) | 2003-12-01 |
EP1459147A2 (fr) | 2004-09-22 |
ATE347128T1 (de) | 2006-12-15 |
WO2003050634A2 (fr) | 2003-06-19 |
WO2003050634A3 (fr) | 2004-02-19 |
EP1459147B1 (fr) | 2006-11-29 |
AU2002364442A8 (en) | 2003-06-23 |
DE60216508T2 (de) | 2007-09-13 |
FR2833365B1 (fr) | 2004-05-14 |
DE60216508D1 (de) | 2007-01-11 |
AU2002364442A1 (en) | 2003-06-23 |
FR2833365A1 (fr) | 2003-06-13 |
US20100062610A1 (en) | 2010-03-11 |
US20050084979A1 (en) | 2005-04-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |