WO2003042340A1 - Elements coupants et lubrifiants pour cable de sciage - Google Patents

Elements coupants et lubrifiants pour cable de sciage Download PDF

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Publication number
WO2003042340A1
WO2003042340A1 PCT/US2001/043996 US0143996W WO03042340A1 WO 2003042340 A1 WO2003042340 A1 WO 2003042340A1 US 0143996 W US0143996 W US 0143996W WO 03042340 A1 WO03042340 A1 WO 03042340A1
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composition
polyelectrolyte
cutting
neutralized
weight percent
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PCT/US2001/043996
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English (en)
Inventor
Irl R. Ward
Amy Ann Heller
Danielle Anne French
Susan Jane Broadway
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Ppt Research, Inc.
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Priority to PCT/US2001/043996 priority Critical patent/WO2003042340A1/fr
Publication of WO2003042340A1 publication Critical patent/WO2003042340A1/fr

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    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M169/00—Lubricating compositions characterised by containing as components a mixture of at least two types of ingredient selected from base-materials, thickeners or additives, covered by the preceding groups, each of these compounds being essential
    • C10M169/04—Mixtures of base-materials and additives
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/02—Water
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/04—Elements
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/04—Elements
    • C10M2201/041—Carbon; Graphite; Carbon black
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/06—Metal compounds
    • C10M2201/062—Oxides; Hydroxides; Carbonates or bicarbonates
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/10—Compounds containing silicon
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/10—Compounds containing silicon
    • C10M2201/105—Silica
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/02—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/08—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds containing monomers having an unsaturated radical bound to a carboxyl radical, e.g. acrylate type
    • C10M2209/084—Acrylate; Methacrylate
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/02—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/08—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds containing monomers having an unsaturated radical bound to a carboxyl radical, e.g. acrylate type
    • C10M2209/086—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds containing monomers having an unsaturated radical bound to a carboxyl radical, e.g. acrylate type polycarboxylic, e.g. maleic acid
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
    • C10M2209/104—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only
    • C10M2209/1045—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only used as base material
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
    • C10M2209/108—Polyethers, i.e. containing di- or higher polyoxyalkylene groups etherified
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/12—Polysaccharides, e.g. cellulose, biopolymers
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2217/00—Organic macromolecular compounds containing nitrogen as ingredients in lubricant compositions
    • C10M2217/04—Macromolecular compounds from nitrogen-containing monomers obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2217/046—Polyamines, i.e. macromoleculars obtained by condensation of more than eleven amine monomers
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2221/00—Organic macromolecular compounds containing sulfur, selenium or tellurium as ingredients in lubricant compositions
    • C10M2221/02—Macromolecular compounds obtained by reactions of monomers involving only carbon-to-carbon unsaturated bonds
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2020/00—Specified physical or chemical properties or characteristics, i.e. function, of component of lubricating compositions
    • C10N2020/01—Physico-chemical properties
    • C10N2020/04—Molecular weight; Molecular weight distribution
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2020/00—Specified physical or chemical properties or characteristics, i.e. function, of component of lubricating compositions
    • C10N2020/01—Physico-chemical properties
    • C10N2020/055—Particles related characteristics
    • C10N2020/06—Particles of special shape or size
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2040/00—Specified use or application for which the lubricating composition is intended
    • C10N2040/20—Metal working
    • C10N2040/22—Metal working with essential removal of material, e.g. cutting, grinding or drilling

Definitions

  • This invention relates to a novel cutting and lubricating composition for use with an apparatus for cutting workpieces of hard and brittle material such as semiconductor ingots of silicon, germanium, gallium arsenide or glass or other brittle materials, such as granite block, or ceramics or steel parts into a multiplicity of thin sheets, slices, wafers, or precision machined parts with abrasive particles which are kept in suspension.
  • hard and brittle material such as semiconductor ingots of silicon, germanium, gallium arsenide or glass or other brittle materials, such as granite block, or ceramics or steel parts into a multiplicity of thin sheets, slices, wafers, or precision machined parts with abrasive particles which are kept in suspension.
  • the cutting apparatus referred to as a “wiresaw” or “wire-web” usually comprises a row of fine wires arranged parallel to each other and at a fixed pitch. A workpiece is pressed against these fine wires having diameters in the order of 0.15-0.2 millimeters running in parallel with one another in the same direction, while an abrasive suspension fluid is supplied between the workpiece and the wires, thereby slicing the workpiece into wafers by an abrasive grinding action.
  • the liquid suspended abrasive particles are coated onto the moving "web” or wire through a circulation system which drops a "blanket-curtain” of the abrasive suspensions onto the "web” just before the wire-web impacts the workpiece.
  • the abrasive particles carried by the liquid are transferred via the coated wires to produce a grinding or cutting effect.
  • the above described splitting units or machines, called wiresaws are described in U.S. Pat. Nos. 3,478,732, 3,525,324, 5,269,275 and 5,270,271, which are incorporated by reference.
  • the cutting apparatus may also comprise a series of wires inter-looped or entwined together in a braided loop configuration. This configuration can be used for the cutting of granite block or silicon ingots. The workpiece is pressed against the braided wire and the cutting process is augmented by the abrasive particles as described above.
  • Achieving an optimum cutting quality depends on a combination of parameters, the quality of the abrasive fluid and the force with which the workpiece is pressed against the set of abrasive coated wires.
  • composition which provides a uniform supply of homogeneously dispersed abrasive material without abrasive particle agglomeration or "hard-cake" formation from suspension fall-out so that the workpiece is more efficiently cut by the abrasive grains or grit in the composition.
  • the composition should have excellent lubricity and heat transfer properties to remove the frictional heat generated at the cutting site thereby increasing working life of the wire and avoiding downtime.
  • the composition should provide a stable suspension of abrasive particles. However, if stored for a long period and separation occurs, only a gentle agitation should be required to restore the suspension.
  • the present invention relates to a cutting and lubricating composition for use with an apparatus for cutting workpieces of a hard and brittle material such as semiconductor materials, magnetic materials, ceramics, granite block, solar energy components, and the like. Further, such compositions are effective and useful for the precision cutting of metal or ceramic parts as components for tools, automotive, machine or other type devices. Other applications of this invention can be easily conceived by those skilled in the art when the suspension benefits of this invention provide advantageous performance results, such as in the grinding of hard substrates.
  • the lubricating composition which may contain up to 70% (wt/wt) of an abrasive material preferably comprises: a) from about 0.0 to 10 weight percent of an ionized surfactant; b) from about 86 to 99.5 weight percent of a non-aqueous, non-ionic, polar solvent such as polyalkylene glycols or the co-glycols thereof, and c) an organic electrolyte or polyelectrolyte with a repeating chain pendant group having the same charge on the repeating chain pendant group as said surfactant and present in an amount to cause a sufficient electrostatic repulsive force between said abrasive particles and the surrounding liquid medium containing said polyelectrolyte to prevent both hard-cake settling and particle agglomeration of said particles when such particle suspension is subjected to stagnant storage over an extended time period at ambient or elevated temperature.
  • Thickeners may be added to the composition, which includes carboxylmethylcellulose, ethylcellulose, polysaccharides, and the like, familiar to those skilled in the art. Additionally or optionally, dispersing solvents or suspension agents such as those described in U.S. Patent # 6,054,422 and including but not limited to, tripropglene glycol methyl ether, DPM, NMP, DMAC, DAM, and the like can be added as needed for viscosity adjustment, better slurry rinseability, etc.
  • a preferred substantially non-aqueous lubricating/suspension composition comprises: a) from about 0.0 to 1 weight percent of an anionic surfactant; b) from about 0.1 to 4 weight percent of an anionic organic polyelectrolyte or electrolyte, c) from about 91 to 99.5 weight percent of a polyethylene glycol solvent, and d) from about 0.0 to about 5% percent water, with the proviso that the electrolyte or polyelectrolyte is in the neutralized form ranging in pH from about 4.5 to about 8.0, preferably less than 7.
  • a lubricating carrier composition which comprises: a) about 93.5 to 99 weight percent of polyethylene glycols wherein said polyethylene glycols consist of a molecular weight of from about 200 to 600; and whereby the viscosity of the composition is about 50-300 cps under room temperature conditions (25°C) , b) about 0.1 to 0.5 weight percent of a fluorinated anionic surfactant, c) about 0.4-3.0 weight percent of an anionic polyelectrolyte neutralized to a pH of about 4.5-6.0, and d) about 0.5-5.0 weight percent of water
  • abrasive particle material is dispersed and suspended in the carrier/lubricating composition.
  • Yet another object of the invention is to provide a cutting and lubricating composition wherein the abrasive cutting material is suspended in the composition and remains suspended without hard- cake formation or particle agglomeration even over long periods of stagnant storage.
  • Yet a still further object is to provide high quality sliced sheets or wafers suitable for semiconductor and solar devices.
  • Fig. 1 illustrates comparative viscosities of a composition of the inventions
  • Fig. 2 illustrates comparative viscosities of another composition of the invention.
  • the present invention combines the general "charged particle” principles of "Zeta Potentials” and “Stern/Diffuse Layers” of charged particles with a new unique principle of creating an overall REPULSIVE CHARGED MEDIUM inside the polar, but non-ionic solvent "carrier/lubricating” system.
  • electrolytes or more preferably, polyelectrolytes in order to accomplish the task of creating an electrostatic repulsive solvent medium out of non-ionic solvents such as polyethylene glycol (PEG) or even “mineral oils”. Since the force of charge repulsion in an inert uncharged medium between two particles of the same charge type is simply defined by the classical physics equation:
  • the abrasive particles such as SiC, not only repel each other, but are also constantly being repelled by the charged polyelectrolytic species within the medium.
  • SOFT SETTLE characteristics defined as the ability of the suspension to prevent the settling out or agglomeration of grit particles into a "hard" cake at the bottom of a container on stagnant storage over time, are greatly enhanced by the inclusion of charged polyelectrolytes within the solvent system over that of solvent alone or non-polar solvent and a dispersing solvent.
  • repeating monomer units of "negatively charged” organic polyelectrolytes (anionic PE) suitable for dispersion or dissolution in this non-ionic medium include but are not limited to pH neutralized:
  • alkylacryloxy sulfonic acids ie: 2-methacryloxyethylsulfonic acid
  • Preferred anionic polyelectrolytes include polyacrylic acid (PAA) having a molecular weight of about 1,000-10,000, polyacrylic acid-co-maleic acid (PACM) having a molecular weight of about 2000- 6000 and the like.
  • PAA polyacrylic acid
  • PAM polyacrylic acid-co-maleic acid
  • any neutralized form of a poly - carboxylic, phosphoric, sulfonic, sulfinic, etc. acid which can be readily dispersed, suspended or dissolved in a non-ionic, non- aqueous, moderately viscous medium such as PEG or an oil such as mineral oil and the like will function suitably as the source for the negatively charged species within the solvent medium.
  • Multi- dentate monomeric electrolytes such as EDTA and its analogs may also function within this invention, although polyelectrolytes are functionally superior.
  • the "non-neutralized” form of the above anionic electrolytes or polyelectrolytes ie: anionic PE in the free acid state
  • anionic PE in the free acid state do not function in this invention and have been shown not to enhance the Soft Settle characteristics of PEG suspensions of SiC. Only the "neutralized” form of the anionic PE or electrolyte will properly function.
  • a novel suspension and/or lubricating "carrier” composition increases the efficiency and productivity of abrasion-type slicing units for slicing ingots made of brittle and hard material providing quality components for semiconductor, glass, ceramic and photocell wafer or sheet substrate.
  • the lubricating composition of this invention maintains abrasive particles in non-agglomerating suspension to allow a more uniform delivery of these abrasive particles to the wedge-shaped spaces which are formed between the wire and the workpiece, or alternatively, at both ends of the cutting portion, with the result that the machinery accuracy and efficiency are greatly improved.
  • the lubricating composition provides lubrication to the slicing wire and absorbs the frictional heat generated at the cutting surfaces.
  • said glycols are selected from the group consisting of polyethylene glycol, polypropylene glycol, polyisobutylene glycol and their coglycols; and wherein said glycols consist of (on a total formulation weight percent basis) from about 80 to 99.5 weight percent of a glycol having a molecular weight of about 200-600, most preferably of about 200-400, whereby the viscosity ranges from about 50 to 300 cps, optionally d) from about 0.0-20.0 weight percent of a dispersing or suspension solvent other than the polyalkylene glycols such as those described in U.S. Patent #6,054,422 and including, but not limited to, di- or tri-glycol monomethyl ether, NMP, DMAC and the like, and e) less than 10% by weight of water.
  • a dispersing or suspension solvent other than the polyalkylene glycols
  • the abrasive material suitable for use in the above-recited composition may include diamond, silica, tungsten carbide, silicon carbide, boron carbide, silicon nitride, aluminum oxide or other hard grit "powder" material.
  • One of the most preferred abrasive materials is silicon carbide.
  • mean or average particle sizes range from .about 5-50 microns; and preferably from 10-30 microns, depending on the international "FEPA or JIS" grade designations of the grit powder.
  • the concentrations of the abrasive material in the suspensions medium typically may range from about 20 to 70 weight percent, preferably about 25 to 60 weight and most preferably about 35-55 weight percent.
  • polar solvents which are useful as suspension or dispersing agents include alcohols, amides, esters, ethers, ketones, glycol ethers or sulfoxides.
  • examples of polar solvents are dimethyl sulfoxide, dimethyl aceta ide (DMAC) , N-methyl pyrrolidone (NMP) , (gamma) butyrolactone, di (ethylene glycol) ethyl ether, di (propylene glycol) methyl ether, tri (propylene glycol) monomethyl ether and the like.
  • a preferred suspension component of the present invention involves the combination of polyethylene glycol (PEG) having a molecular weight of 200-400, (i.e. total formulation weight of about 80-99%) .
  • the PEG base may comprise about 80 to 92 weight percent of the 200-600 (based on total formulation weight percent) and about 1 to 6 weight percent PEG 1000-2000 (based on total formulation weight percent) preferably about 85 to 90 weight percent PEG 400 and about 2 to 10 weight percent PEG 1500, and most preferably about 87-93 weight percent PEG 400 and about 3-8 weight percent PEG 1500.
  • a thickening agent in amounts up to about 10 percent by weight, advantageously a polysaccharide or a polysaccharide derivative, may be used to help ensure a more constant viscosity and stability of the lubricant dispersion over a wide temperature range, and for reducing the separation of the solids in the suspension during long stagnant conditions when viscosity requirements of the suspension allow.
  • Suitable examples include xanthan gum, rhamsan gum or an alkyl-cellulose such as hydroxymethylcellulose, carboxymethylcellulose, and the like.
  • cationic polyelectrolytes can accomplish the same principle.
  • the long chain, multiple charged CATIONIC polyelectrolyte is efficiently attracted to the negatively charged SiC particles to form a tight electrostatic bonded "shell" all around the particle.
  • the cationic polyelectrolyte like the ANIONIC PE, has many charged pendant moieties along the polymer chain, those parts of the chain which are not adsorbed onto the particle surface electrostatically stick out from the particle as a positively charged "hair” or “string” into the non-ionic PEG medium.
  • the cationic PE's are most strongly charged under neutral to acidic conditions. This is because the most common type of CATIONIC PE'S are QUATERNARY AMMONIUM SALTS of various acrylates, acrylamides, methacryloxy, etc., polymers. Such "poly salts” typically will have a GENERAL repeating unit structure of the form:
  • R alkyl or H
  • Ri monomeric repeating unit of PE polymer as exampled above
  • R polymer chain separating unit
  • R ⁇ H, alkyl
  • the suspensions according to the invention are very stable and, in many cases, even after long storage it is unnecessary to agitate the abrasive slurry before application to the wire cutting machines. However, if there is "separation" of the suspensions, only mild agitation is required to restore the slurry into a uniform suspension. Usually the action of the pump or spray to supply the cutting machine is sufficient to provide the necessary agitation following some initial recirculation.
  • the surfactants which can be used in the present compositions are the water soluble anionic or cationic surfactants.
  • Suitable anionic surface active agents include, for example, modified siloxanes and polysiloxane such as TEGOPREN 5863 and 5840, alkali metal, or more preferably non-metal salts of alkyl substituted benzene sulfonic acids, alkali metal or non-metal salts of long chain fatty sulphates, alkali metal or non-metal ether sulphates derived from alcohols and alkali phenols, alkali metal or non-metal sulpho-succinates, alkali metal or non-metal sarcosinates and alkali metal or non-metal taurides.
  • modified siloxanes and polysiloxane such as TEGOPREN 5863 and 5840
  • alkali metal or more preferably non-metal salts of alkyl substituted benzene sulfonic acids, alkali metal or non-metal salts of long chain fatty sulphates, alkali metal or non-
  • Preferred anionic surfactants include water miscible or dispersable alkyl dimethylamine oxides having 12 to 25 carbon atoms such as N,N-dimethyl-l-tetradecanamine oxide and N,N-dimethyl-l- octadecanamine oxide, sodium lauroyl sarcosinate, diphenyl ether sulfonates such as the alkali metal, or more preferably non-metal salts of hexadecyl diphenyl ether disulfonic acid, dodecyl diphenyl ether disulfonic and decyl diphenyl ether disulfonic acid, preferably Cio-Ci ⁇ alkylbenzene sulfonates.
  • anionic surfactants which may be used include mixtures of C10-C13 linear sodium alkylbenzene sulfonate marketed by De Soto or Stepan Corporation (a C 11-17 linear alkybenzene sulfonate) .
  • Calsoft F90 of Pilot Corporation (a C x o-C ⁇ 3 sodium linear alkylaryl sulfonate)
  • Witconate 90F of Witco Corporation (a C i2 sodium alkylaryl sulfonate containing 1.7% free oil and 3.0% S0 4 )
  • Nansa HS 80PF of Albright & Wilson Ltd. Stepan Agent S-1509-65 of Stepan Corporation (a C13 calcium dodecylbenzene sulfonate) , FC 170, FC-99, FC-95 which are fluorinated surfactants sold by 3M corporation.
  • FSO-series of fluorinated surfactants sold by Dupont are also suitable.
  • Cationic surfactants which can be used in practicing the present invention include stearyl dimethyl benzyl ammonium chloride, coconut dimethyl benzyl ammonium chloride, cetyl pyridinium chloride, and cetyl tri ethyl ammonium chloride.
  • preferred surfactants for use herein are the fluorinated surfactants mentioned above, sodium and potassium alkyl naphthalene sulfonates having one or two alkyl groups containing about 1 to about 6 carbons each, and paraffin sulfonates having the formula RSOsM, wherein R is a primary or secondary alkyl group containing from about 8 to about 22 carbon atoms (preferably about 12 carbon atoms), and M is an alkali metal.
  • alkylene glycols and coglycols which can be used in the invention are commercially available from Aldrich, Union Carbide and others.
  • the "Soft-Settle Tool” essentially measures the resistance (in grams) to slurry penetration of a blunt-ended rod down to a predetermined depth or distance from a standard configuration shaped container bottom.
  • a special conical-shaped standard tube is used to exacerbate the "Hard-Settle” propensity of the slurry, thereby distinguishing a "good” suspension carrier from a poor one.
  • the tube contains a standard level of 15% grit (SiC) .
  • the level of grit chosen is arbitrary, but should be at a level for convenient tool measurement. 15% grit by weight is such a level.
  • the anionic polyelectrolytes can be neutralized by alkali metal bases such as sodium hydroxide or potassium hydroxide or by non-metallic alkyl ammonium hydroxides, for example, tetraalkylammonium hydroxide, preferably, tetramethyammonium hydroxide (TMAH) .
  • alkali metal bases such as sodium hydroxide or potassium hydroxide
  • non-metallic alkyl ammonium hydroxides for example, tetraalkylammonium hydroxide, preferably, tetramethyammonium hydroxide (TMAH) .
  • non-metallic hydroxides are preferred when low carrier viscosities and slurry viscosities are desirable.
  • the carrier viscosities are generally greater than 100 cps and the slurry viscosities are generally greater than about 300-350 cps.
  • the metal hydroxides are advantageously used to neutralize the anionic polyelectrolytes when the carrier is PEG 400 and anionic fluorinated or non-ionic surfactant is utilized.
  • the resulting compositions have excellent viscosity maintenance with elevated temperatures.
  • Example 1 A lubricating "carrier" composition for use with a multi-wire saw for cutting hard material was prepared by admixing the following ingredients:
  • the pH of the composition was in the range of 4.7-5.5.
  • the composition had a viscosity between 60-90 cps at 25° C and a slurry viscosity with 47.1% SiC of about 240-290 cps at 25° C.
  • FIG. 1 illustrates the comparative viscosities of the composition of this example designated as SSL-160 at various temperatures as compared with PEG200 and PEG400.
  • Example 2 A lubricating "carrier" composition was prepared for use with a multi-wire saw for cutting hard material wherein the grit content can be reduced about 1/3, namely, to about 35% SiC.
  • the viscosity of the composition was between about 175-250 cps at 25° C.
  • the slurry viscosity with 35% SiC was between 400-500 cps at 25°C.
  • FIG. 2 illustrates the comparative viscosities of the composition of the example designated as SSL-162 at various temperatures as compared with PEG200 and PEG400. *The average molecular weight of the PACM was about 2500-5000.
  • Example 3 A lubricating composition for use with a multi-wire saw for cutting hard material containing an anionic surfactant and an anionic polyelectrolyte was prepared by admixing the following ingredients.
  • Fluoroalkyl surfactant* 0.5 - 1
  • the fluorinated surfactant was a combination of amine salts of perfluoroalkyl sulfonates which was sold by 3M Corporation under the trademark FC-99, FC-98 and FC-95.
  • Other usable surfactants are the "Zonyl” series sold by Dupont Corporation under the trademarks FSO-Series and FSN-Series.
  • compositions containing 47-50% grit contain soft setting characteristics with a SSR of less than 25 after 35 days.
  • PAA neutralized polyacrylic acid
  • PACM neutralized polyacrylic acid - co-maleic acid
  • TGME tripropylene glycol monomethyl ether

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Organic Chemistry (AREA)
  • Lubricants (AREA)

Abstract

L'invention concerne une composition coupante et lubrifiante contenant des particules abrasives et servant à couper des pièces dures et cassantes au moyen d'un câble de sciage ou d'un autre outil coupant ou abrasif. Cette composition provoque une répulsion électrostatique et stérique entre les particules abrasives, ce qui permet de maintenir ces dernières en suspension sans produire de dépôts durs provenant des retombées de cette suspension.
PCT/US2001/043996 2001-11-14 2001-11-14 Elements coupants et lubrifiants pour cable de sciage WO2003042340A1 (fr)

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101928630A (zh) * 2010-05-19 2010-12-29 兰溪市德圣龙电子材料有限公司 一种太阳能硅片的线切割砂浆的制作方法
CN101948710A (zh) * 2010-09-03 2011-01-19 兰溪市德圣龙电子材料有限公司 一种新太阳能硅片的线切割砂浆的制作方法
WO2011034439A1 (fr) 2009-09-17 2011-03-24 Rec Wafer Norway As Sciage de bloc en tranches utilisant des fils revêtus de diamant
WO2011044716A1 (fr) * 2009-10-16 2011-04-21 Dow Global Technologies Llc Fluides de coupe à performances améliorées
WO2011044717A1 (fr) * 2009-10-16 2011-04-21 Dow Global Technologies Llc Suspension de polycarboxylate greffé avec un polyalkylène glycol et agent de dispersion pour liquides et suspensions de coupe
WO2011116956A1 (fr) * 2010-03-23 2011-09-29 Schott Solar Ag Milieux séparateurs fluides et leur utilisation
CN107603693A (zh) * 2017-09-26 2018-01-19 合肥新汇成微电子有限公司 一种半导体晶圆切割液
CN107760414A (zh) * 2017-10-24 2018-03-06 深圳市奥科宝特种油剂有限公司 一种陶瓷磨削液及其制备方法
CN109652193A (zh) * 2019-01-25 2019-04-19 广州科卢斯流体科技有限公司 一种亚稳定型半导体金刚线切割液
CN113502186A (zh) * 2021-07-06 2021-10-15 大连奥首科技有限公司 一种基于csp封装技术的led芯片切割液及其使用方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3948784A (en) * 1975-03-24 1976-04-06 Nalco Chemical Company Treatment of industrial grinding and cutting lubricants
US5230819A (en) * 1991-10-30 1993-07-27 Basf Corp. Diphosphonates as corrosion inhibitors for antifreeze coolants and other functional fluids
US5635112A (en) * 1993-06-09 1997-06-03 Nalco Chemical Company Hydrophobically-modified demulsifiers for oil-in-water systems
US5651648A (en) * 1996-02-22 1997-07-29 Virginia Tech Intellectual Properties, Inc. Method for reducing ceramic tool wear and friction in machining/cutting applications
US6043201A (en) * 1996-09-17 2000-03-28 Minnesota Mining And Manufacturing Company Composition for cutting and abrasive working of metal
US6054422A (en) * 1999-02-19 2000-04-25 Ppt Research, Inc. Cutting and lubricating composition for use with a wire cutting apparatus
US6228816B1 (en) * 1998-01-09 2001-05-08 Nof Corporation Aqueous cutting fluid, aqueous cutting agent, and process for cutting hard brittle materials with the same

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3948784A (en) * 1975-03-24 1976-04-06 Nalco Chemical Company Treatment of industrial grinding and cutting lubricants
US5230819A (en) * 1991-10-30 1993-07-27 Basf Corp. Diphosphonates as corrosion inhibitors for antifreeze coolants and other functional fluids
US5635112A (en) * 1993-06-09 1997-06-03 Nalco Chemical Company Hydrophobically-modified demulsifiers for oil-in-water systems
US5651648A (en) * 1996-02-22 1997-07-29 Virginia Tech Intellectual Properties, Inc. Method for reducing ceramic tool wear and friction in machining/cutting applications
US6043201A (en) * 1996-09-17 2000-03-28 Minnesota Mining And Manufacturing Company Composition for cutting and abrasive working of metal
US6228816B1 (en) * 1998-01-09 2001-05-08 Nof Corporation Aqueous cutting fluid, aqueous cutting agent, and process for cutting hard brittle materials with the same
US6054422A (en) * 1999-02-19 2000-04-25 Ppt Research, Inc. Cutting and lubricating composition for use with a wire cutting apparatus

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011034439A1 (fr) 2009-09-17 2011-03-24 Rec Wafer Norway As Sciage de bloc en tranches utilisant des fils revêtus de diamant
CN102648067A (zh) * 2009-09-17 2012-08-22 瑞科晶片挪威公司 使用金刚石涂覆的线材将块状体切割成晶片
US8980809B2 (en) 2009-10-16 2015-03-17 Dow Global Technologies Llc Cutting fluids with improved performance
US9920273B2 (en) 2009-10-16 2018-03-20 Dow Global Technologies Llc Polyalkylene glycol-grafted polycarboxylate suspension and dispersing agent for cutting fluids and slurries
WO2011044717A1 (fr) * 2009-10-16 2011-04-21 Dow Global Technologies Llc Suspension de polycarboxylate greffé avec un polyalkylène glycol et agent de dispersion pour liquides et suspensions de coupe
WO2011044716A1 (fr) * 2009-10-16 2011-04-21 Dow Global Technologies Llc Fluides de coupe à performances améliorées
US9217118B2 (en) 2009-10-16 2015-12-22 Dow Global Technologies Llc Polyalkylene glycol-grafted polycarboxylate suspension and dispersing agent for cutting fluids and slurries
CN102712863A (zh) * 2009-10-16 2012-10-03 陶氏环球技术有限责任公司 用于切削液和浆料的聚亚烷基二醇接枝的聚羧酸酯(盐)悬浮和分散剂
WO2011116956A1 (fr) * 2010-03-23 2011-09-29 Schott Solar Ag Milieux séparateurs fluides et leur utilisation
CN101928630A (zh) * 2010-05-19 2010-12-29 兰溪市德圣龙电子材料有限公司 一种太阳能硅片的线切割砂浆的制作方法
CN101948710A (zh) * 2010-09-03 2011-01-19 兰溪市德圣龙电子材料有限公司 一种新太阳能硅片的线切割砂浆的制作方法
CN107603693A (zh) * 2017-09-26 2018-01-19 合肥新汇成微电子有限公司 一种半导体晶圆切割液
CN107760414A (zh) * 2017-10-24 2018-03-06 深圳市奥科宝特种油剂有限公司 一种陶瓷磨削液及其制备方法
CN107760414B (zh) * 2017-10-24 2020-07-10 深圳市奥科宝特种油剂有限公司 一种陶瓷磨削液及其制备方法
CN109652193A (zh) * 2019-01-25 2019-04-19 广州科卢斯流体科技有限公司 一种亚稳定型半导体金刚线切割液
CN109652193B (zh) * 2019-01-25 2021-10-08 广州科卢斯流体科技有限公司 一种亚稳定型半导体金刚线切割液
CN113502186A (zh) * 2021-07-06 2021-10-15 大连奥首科技有限公司 一种基于csp封装技术的led芯片切割液及其使用方法

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