WO2003031675A3 - Verfahren zur diamantbeschichtung von substraten - Google Patents
Verfahren zur diamantbeschichtung von substraten Download PDFInfo
- Publication number
- WO2003031675A3 WO2003031675A3 PCT/EP2002/011226 EP0211226W WO03031675A3 WO 2003031675 A3 WO2003031675 A3 WO 2003031675A3 EP 0211226 W EP0211226 W EP 0211226W WO 03031675 A3 WO03031675 A3 WO 03031675A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- reactive gas
- diamond coating
- coating substrates
- gas mixture
- recipient
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/276—Diamond only using plasma jets
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/279—Diamond only control of diamond crystallography
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/491,858 US7192483B2 (en) | 2001-10-08 | 2002-10-07 | Method for diamond coating substrates |
AU2002346963A AU2002346963A1 (en) | 2001-10-08 | 2002-10-07 | Method for diamond coating substrates |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10149588.9 | 2001-10-08 | ||
DE10149588.9A DE10149588B4 (de) | 2001-10-08 | 2001-10-08 | Verfahren zur Diamantbeschichtung von Substraten |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2003031675A2 WO2003031675A2 (de) | 2003-04-17 |
WO2003031675A3 true WO2003031675A3 (de) | 2003-09-12 |
Family
ID=7701791
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2002/011226 WO2003031675A2 (de) | 2001-10-08 | 2002-10-07 | Verfahren zur diamantbeschichtung von substraten |
Country Status (4)
Country | Link |
---|---|
US (1) | US7192483B2 (de) |
AU (1) | AU2002346963A1 (de) |
DE (1) | DE10149588B4 (de) |
WO (1) | WO2003031675A2 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT413036B (de) * | 2004-06-02 | 2005-10-15 | Boehlerit Gmbh & Co Kg | Hartmetallwendeschneidplatte mit diamantschicht |
DE102004054193A1 (de) * | 2004-11-10 | 2006-06-01 | Thomas Kronenberger | Gegen Abrasion und hohe Flächenpressungen beständige Hartstoffbeschichtung auf nachgiebigen Substraten |
JP4361916B2 (ja) * | 2005-07-05 | 2009-11-11 | 神奈川県 | 金属部材の表面強化方法 |
US8404313B1 (en) | 2006-03-22 | 2013-03-26 | University Of South Florida | Synthesis of nanocrystalline diamond fibers |
US20070257265A1 (en) * | 2006-05-03 | 2007-11-08 | The University Of Chicago | Use of tungsten interlayer to enhance the initial nucleation and conformality of ultrananocrystalline diamond (UNCD) thin films |
US7947329B2 (en) * | 2006-09-11 | 2011-05-24 | Wisconsin Alumni Research Foundation | Methods of applying a nanocrystalline diamond film to a cutting tool |
US8496992B2 (en) * | 2010-12-10 | 2013-07-30 | Southwest Research Institute | Methods of forming nanocomposites containing nanodiamond particles by vapor deposition |
EP2832899A1 (de) * | 2013-08-02 | 2015-02-04 | The Swatch Group Research and Development Ltd. | Diamantbeschichtung und Beschichtungsverfahren zur Aufbringung einer solchen Beschichtung |
JP2024506181A (ja) | 2021-02-09 | 2024-02-09 | エリコン・サーフェス・ソリューションズ・アクチェンゲゼルシャフト,プフェフィコーン | Picvdシステムにおけるアノード過剰成長を抑制するためのアークビーム走査 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2178228A (en) * | 1985-07-01 | 1987-02-04 | Balzers Hochvakuum | An arrangement for the treating of workpieces |
EP0478909A1 (de) * | 1990-09-14 | 1992-04-08 | Balzers Aktiengesellschaft | Verfahren zur Herstellung einer Diamantschicht und Anlage hierfür |
EP0724026A1 (de) * | 1995-01-25 | 1996-07-31 | Balzers Aktiengesellschaft | Verfahren zur reaktiven Schichtabscheidung |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62133068A (ja) * | 1985-12-03 | 1987-06-16 | Toshiba Tungaloy Co Ltd | ダイヤモンド被覆部材 |
US4851254A (en) * | 1987-01-13 | 1989-07-25 | Nippon Soken, Inc. | Method and device for forming diamond film |
JPH02167891A (ja) * | 1988-12-20 | 1990-06-28 | Citizen Watch Co Ltd | ダイヤモンド膜気相合成装置 |
US5204144A (en) * | 1991-05-10 | 1993-04-20 | Celestech, Inc. | Method for plasma deposition on apertured substrates |
US5989511A (en) * | 1991-11-25 | 1999-11-23 | The University Of Chicago | Smooth diamond films as low friction, long wear surfaces |
US5772760A (en) * | 1991-11-25 | 1998-06-30 | The University Of Chicago | Method for the preparation of nanocrystalline diamond thin films |
DE4204650C1 (de) * | 1992-02-15 | 1993-07-08 | Hoffmeister, Helmut, Dr., 4400 Muenster, De | |
US5753045A (en) * | 1995-01-25 | 1998-05-19 | Balzers Aktiengesellschaft | Vacuum treatment system for homogeneous workpiece processing |
US5679404A (en) * | 1995-06-07 | 1997-10-21 | Saint-Gobain/Norton Industrial Ceramics Corporation | Method for depositing a substance with temperature control |
US5762715A (en) * | 1995-06-07 | 1998-06-09 | Saint-Gobain/Norton Industrial Ceramics Corporation | Segmented substrate for improved ARC-JET diamond deposition |
US6173672B1 (en) * | 1997-06-06 | 2001-01-16 | Celestech, Inc. | Diamond film deposition on substrate arrays |
CH694699A5 (de) * | 1999-04-29 | 2005-06-15 | Balzers Hochvakuum | Verfahren zur Herstellung von Silizium. |
DE10018143C5 (de) * | 2000-04-12 | 2012-09-06 | Oerlikon Trading Ag, Trübbach | DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems |
-
2001
- 2001-10-08 DE DE10149588.9A patent/DE10149588B4/de not_active Expired - Lifetime
-
2002
- 2002-10-07 US US10/491,858 patent/US7192483B2/en not_active Expired - Lifetime
- 2002-10-07 AU AU2002346963A patent/AU2002346963A1/en not_active Abandoned
- 2002-10-07 WO PCT/EP2002/011226 patent/WO2003031675A2/de not_active Application Discontinuation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2178228A (en) * | 1985-07-01 | 1987-02-04 | Balzers Hochvakuum | An arrangement for the treating of workpieces |
EP0478909A1 (de) * | 1990-09-14 | 1992-04-08 | Balzers Aktiengesellschaft | Verfahren zur Herstellung einer Diamantschicht und Anlage hierfür |
EP0724026A1 (de) * | 1995-01-25 | 1996-07-31 | Balzers Aktiengesellschaft | Verfahren zur reaktiven Schichtabscheidung |
US5902649A (en) * | 1995-01-25 | 1999-05-11 | Balzers Aktiengesellschaft | Vacuum treatment system for homogeneous workpiece processing |
Non-Patent Citations (1)
Title |
---|
NAOTO OHTAKE ET AL: "DIAMOND FILM PREPARATION BY ARC DISCHARGE PLASMA JET CHEMICAL VAPOR DEPOSITION IN THE METHANE ATMOSPHERE", JOURNAL OF THE ELECTROCHEMICAL SOCIETY, ELECTROCHEMICAL SOCIETY. MANCHESTER, NEW HAMPSHIRE, US, vol. 137, no. 2, 1 February 1990 (1990-02-01), pages 717 - 722, XP000213605, ISSN: 0013-4651 * |
Also Published As
Publication number | Publication date |
---|---|
US20050016444A1 (en) | 2005-01-27 |
AU2002346963A1 (en) | 2003-04-22 |
DE10149588A1 (de) | 2003-04-10 |
US7192483B2 (en) | 2007-03-20 |
WO2003031675A2 (de) | 2003-04-17 |
DE10149588B4 (de) | 2017-09-07 |
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