WO2003021668A1 - Tableau de connexions, dispositif a semi-conducteur et leur procede de production - Google Patents
Tableau de connexions, dispositif a semi-conducteur et leur procede de production Download PDFInfo
- Publication number
- WO2003021668A1 WO2003021668A1 PCT/JP2001/007555 JP0107555W WO03021668A1 WO 2003021668 A1 WO2003021668 A1 WO 2003021668A1 JP 0107555 W JP0107555 W JP 0107555W WO 03021668 A1 WO03021668 A1 WO 03021668A1
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- WO
- WIPO (PCT)
- Prior art keywords
- wiring board
- producing
- semiconductor device
- basic material
- insulating basic
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/568—Temporary substrate used as encapsulation process aid
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
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- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
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Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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JP2003525905A JPWO2003021668A1 (ja) | 2001-08-31 | 2001-08-31 | 配線基板、半導体装置及びそれらの製造方法 |
PCT/JP2001/007555 WO2003021668A1 (fr) | 2001-08-31 | 2001-08-31 | Tableau de connexions, dispositif a semi-conducteur et leur procede de production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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PCT/JP2001/007555 WO2003021668A1 (fr) | 2001-08-31 | 2001-08-31 | Tableau de connexions, dispositif a semi-conducteur et leur procede de production |
Publications (1)
Publication Number | Publication Date |
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WO2003021668A1 true WO2003021668A1 (fr) | 2003-03-13 |
Family
ID=11737684
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2001/007555 WO2003021668A1 (fr) | 2001-08-31 | 2001-08-31 | Tableau de connexions, dispositif a semi-conducteur et leur procede de production |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPWO2003021668A1 (fr) |
WO (1) | WO2003021668A1 (fr) |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005159354A (ja) * | 2003-11-25 | 2005-06-16 | Internatl Business Mach Corp <Ibm> | 高性能チップ・キャリア基板 |
JP2007506279A (ja) * | 2003-09-18 | 2007-03-15 | クリー インコーポレイテッド | 成形チップの製造方法および装置 |
JP2008172268A (ja) * | 2008-02-28 | 2008-07-24 | Nippon Mektron Ltd | 多層回路基板の製造方法および回路基材 |
JP2010232524A (ja) * | 2009-03-27 | 2010-10-14 | Nitto Denko Corp | 半導体装置の製造方法 |
US7897980B2 (en) | 2006-11-09 | 2011-03-01 | Cree, Inc. | Expandable LED array interconnect |
US8637883B2 (en) | 2008-03-19 | 2014-01-28 | Cree, Inc. | Low index spacer layer in LED devices |
US8878219B2 (en) | 2008-01-11 | 2014-11-04 | Cree, Inc. | Flip-chip phosphor coating method and devices fabricated utilizing method |
US8969908B2 (en) | 2006-04-04 | 2015-03-03 | Cree, Inc. | Uniform emission LED package |
US9024349B2 (en) | 2007-01-22 | 2015-05-05 | Cree, Inc. | Wafer level phosphor coating method and devices fabricated utilizing method |
KR20150055673A (ko) * | 2013-11-13 | 2015-05-22 | 앰코 테크놀로지 코리아 주식회사 | 반도체 패키지 구조물 및 그 제작 방법 |
US9041285B2 (en) | 2007-12-14 | 2015-05-26 | Cree, Inc. | Phosphor distribution in LED lamps using centrifugal force |
US9159888B2 (en) | 2007-01-22 | 2015-10-13 | Cree, Inc. | Wafer level phosphor coating method and devices fabricated utilizing method |
US10295147B2 (en) | 2006-11-09 | 2019-05-21 | Cree, Inc. | LED array and method for fabricating same |
US10505083B2 (en) | 2007-07-11 | 2019-12-10 | Cree, Inc. | Coating method utilizing phosphor containment structure and devices fabricated using same |
US10546846B2 (en) | 2010-07-23 | 2020-01-28 | Cree, Inc. | Light transmission control for masking appearance of solid state light sources |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11145325A (ja) * | 1997-11-06 | 1999-05-28 | Yamaichi Electron Co Ltd | Icパッケージ |
JPH11163207A (ja) * | 1997-12-01 | 1999-06-18 | Hitachi Chem Co Ltd | 半導体チップ搭載用基板の製造法および半導体装置 |
JP2000332145A (ja) * | 1999-05-18 | 2000-11-30 | Dainippon Printing Co Ltd | 樹脂封止型半導体装置用の回路部材とそれを用いた樹脂封止型半導体装置および回路部材の製造方法 |
JP2001044589A (ja) * | 1999-07-30 | 2001-02-16 | Nitto Denko Corp | 回路基板 |
-
2001
- 2001-08-31 WO PCT/JP2001/007555 patent/WO2003021668A1/fr active Application Filing
- 2001-08-31 JP JP2003525905A patent/JPWO2003021668A1/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11145325A (ja) * | 1997-11-06 | 1999-05-28 | Yamaichi Electron Co Ltd | Icパッケージ |
JPH11163207A (ja) * | 1997-12-01 | 1999-06-18 | Hitachi Chem Co Ltd | 半導体チップ搭載用基板の製造法および半導体装置 |
JP2000332145A (ja) * | 1999-05-18 | 2000-11-30 | Dainippon Printing Co Ltd | 樹脂封止型半導体装置用の回路部材とそれを用いた樹脂封止型半導体装置および回路部材の製造方法 |
JP2001044589A (ja) * | 1999-07-30 | 2001-02-16 | Nitto Denko Corp | 回路基板 |
Cited By (23)
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US7915085B2 (en) * | 2003-09-18 | 2011-03-29 | Cree, Inc. | Molded chip fabrication method |
JP2007506279A (ja) * | 2003-09-18 | 2007-03-15 | クリー インコーポレイテッド | 成形チップの製造方法および装置 |
US10546978B2 (en) | 2003-09-18 | 2020-01-28 | Cree, Inc. | Molded chip fabrication method and apparatus |
US10164158B2 (en) | 2003-09-18 | 2018-12-25 | Cree, Inc. | Molded chip fabrication method and apparatus |
US9093616B2 (en) | 2003-09-18 | 2015-07-28 | Cree, Inc. | Molded chip fabrication method and apparatus |
US7863526B2 (en) | 2003-11-25 | 2011-01-04 | International Business Machines Corporation | High performance chip carrier substrate |
JP2005159354A (ja) * | 2003-11-25 | 2005-06-16 | Internatl Business Mach Corp <Ibm> | 高性能チップ・キャリア基板 |
JP4528098B2 (ja) * | 2003-11-25 | 2010-08-18 | インターナショナル・ビジネス・マシーンズ・コーポレーション | 高性能チップ・キャリア基板 |
US7886435B2 (en) | 2003-11-25 | 2011-02-15 | International Business Machines Corporation | High performance chip carrier substrate |
US8969908B2 (en) | 2006-04-04 | 2015-03-03 | Cree, Inc. | Uniform emission LED package |
US7897980B2 (en) | 2006-11-09 | 2011-03-01 | Cree, Inc. | Expandable LED array interconnect |
US10295147B2 (en) | 2006-11-09 | 2019-05-21 | Cree, Inc. | LED array and method for fabricating same |
US9159888B2 (en) | 2007-01-22 | 2015-10-13 | Cree, Inc. | Wafer level phosphor coating method and devices fabricated utilizing method |
US9024349B2 (en) | 2007-01-22 | 2015-05-05 | Cree, Inc. | Wafer level phosphor coating method and devices fabricated utilizing method |
US10505083B2 (en) | 2007-07-11 | 2019-12-10 | Cree, Inc. | Coating method utilizing phosphor containment structure and devices fabricated using same |
US9041285B2 (en) | 2007-12-14 | 2015-05-26 | Cree, Inc. | Phosphor distribution in LED lamps using centrifugal force |
US8878219B2 (en) | 2008-01-11 | 2014-11-04 | Cree, Inc. | Flip-chip phosphor coating method and devices fabricated utilizing method |
JP2008172268A (ja) * | 2008-02-28 | 2008-07-24 | Nippon Mektron Ltd | 多層回路基板の製造方法および回路基材 |
US8637883B2 (en) | 2008-03-19 | 2014-01-28 | Cree, Inc. | Low index spacer layer in LED devices |
JP2010232524A (ja) * | 2009-03-27 | 2010-10-14 | Nitto Denko Corp | 半導体装置の製造方法 |
US10546846B2 (en) | 2010-07-23 | 2020-01-28 | Cree, Inc. | Light transmission control for masking appearance of solid state light sources |
KR101631934B1 (ko) | 2013-11-13 | 2016-06-21 | 앰코 테크놀로지 코리아 주식회사 | 반도체 패키지 구조물 및 그 제작 방법 |
KR20150055673A (ko) * | 2013-11-13 | 2015-05-22 | 앰코 테크놀로지 코리아 주식회사 | 반도체 패키지 구조물 및 그 제작 방법 |
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