WO2003019689A2 - Piezomotor mit kupferelektroden - Google Patents
Piezomotor mit kupferelektroden Download PDFInfo
- Publication number
- WO2003019689A2 WO2003019689A2 PCT/EP2002/009502 EP0209502W WO03019689A2 WO 2003019689 A2 WO2003019689 A2 WO 2003019689A2 EP 0209502 W EP0209502 W EP 0209502W WO 03019689 A2 WO03019689 A2 WO 03019689A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- piezomotor
- component
- piezomotor according
- electrode layer
- khz
- Prior art date
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 14
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 14
- 239000010949 copper Substances 0.000 title claims abstract description 14
- 239000000919 ceramic Substances 0.000 claims abstract description 20
- 238000010276 construction Methods 0.000 claims abstract description 8
- 238000001816 cooling Methods 0.000 claims description 10
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 claims description 7
- 238000005452 bending Methods 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 230000002457 bidirectional effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000009499 grossing Methods 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/877—Conductive materials
Definitions
- the present invention relates to a piezomotor with at least one piezoelectric component, which is made in a monolithic multilayer construction from a stack of at least two ceramic layers and in each case one electrode layer arranged between two ceramic layers, the electrode layer containing copper.
- Piezomotors represent an alternative drive concept to small electromagnetic motors, which are usually too loud and too expensive. These piezomotors have at least one piezoelectric component with which vibrations are generated, which are amplified, for example, by a resonance body.
- the previously available piezomotors have the disadvantage that they cannot be operated in the region of the resonance frequencies with the maximum possible field strength for the piezomaterial if this is above 15 kHz, without their performance at these frequencies possibly being irreversibly reduced.
- the piezoelectric components often have a comparatively high specific density, so that in combination with resonance bodies made of aluminum, unfavorable vibration properties result.
- the piezoelectric components in piezomotors according to the prior art are to be installed in such a way that they are exposed to the lowest possible bending moments, which makes the manufacture of the piezomotors more complex and structurally restricts the design of the resonance body and its operation.
- the object was therefore to provide a piezomotor which does not have the disadvantages of the prior art.
- a piezomotor with at least one piezoelectric component, which is made in a monolithic multilayer construction from a stack of at least two ceramic layers and in each case one electrode layer arranged between two ceramic layers, the electrode layer containing copper.
- a piezomotor in the sense of the invention drives a body in a rotational and / or translatory, preferably bidirectional manner and / or sets it in vibration or changes the frictional force between the driven body and the piezomotor.
- the piezomotor preferably executes a cyclically recurring movement. A certain propulsion of the driven body takes place with each cycle, and the propulsion can take place over any distance.
- the piezomotor particularly preferably oscillates in the region of its natural (resonance) frequency.
- the piezomotor very particularly preferably oscillates in the region of at least two different natural frequencies, so that the body to be driven can be moved in two opposite directions.
- each piezoelectric component is suitable for the motor according to the invention, which is made in a monolithic multilayer construction from a stack of at least two ceramic layers and in each case one electrode layer arranged between two ceramic layers, the electrode layer containing copper.
- the copper content of the electrode layer is preferably 20 to 100% by weight, particularly preferably 75 to 99.7% by weight. All cross sections of the piezoelectric component are particularly preferably essentially rectangular and / or cuboid, the corners of the piezoelectric component preferably being rounded.
- Piezoelectric components which are described in DE 10062 672 A1 are also preferably used. This disclosure is hereby introduced as a reference and is therefore considered part of the disclosure.
- the piezoelectric component has 3 - 5000, preferably 4 - 370 and very particularly preferably 50 - 300 electrode layers.
- the layer thickness of the electrode layers is likewise preferably 0.2-100 ⁇ m, very particularly preferably 0.5-6 ⁇ m.
- the piezoelectric component preferably vibrates at a frequency of 15 kHz - 2 MHz, particularly preferably 15 kHz - 750 kHz and very particularly preferably 30 kHz - 110 kHz.
- the piezoelectric component is preferably arranged in the piezomotor according to the invention in such a way that the electrode layers are at least partially in contact with at least one metallic surface.
- This metallic surface can be used on the one hand as an electrical contact and on the other hand for heat dissipation.
- the piezoelectric component can be installed in any piezomotor. This installation is preferably carried out by at least partial positive and / or non-positive connection.
- the motor has a resonance body which interacts with the piezoelectric component and sets the resonance body in vibration and which is preferably made of metal, particularly preferably of aluminum.
- the piezoelectric components are preferably connected to the resonance body by positive and / or non-positive locking, wherein both the ceramic layers and the electrode layers can be at least partially connected to the resonance body.
- the piezoelectric components are very particularly preferably pressed into an opening in the resonance body.
- the electrode layers are plastically and / or elastically deformed when installed in the resonance body, so that the force and torque transmission between the component and the resonance body is improved and both the piezoelectric component and the resonance body are prestressed.
- the piezoelectric component is particularly preferably installed in the resonator, preferably pressed in, so that it is subjected to bending stress in the unexcited and / or in the excited state at at least one operating frequency.
- the bending stress is preferably perpendicular to the neutral fiber of the electrodes.
- the heat which is generated in the piezoelectric component is dissipated using a heat sink.
- This Heat sink can interact with the ceramic and / or the electrode layers.
- the heat sink preferably has cooling fins which are advantageously soldered to the electrode layers.
- a heat sink that works with a cooling medium, for example air or water.
- the electrode layers are preferably connected to at least one metallic surface.
- This metallic surface is preferably part of the resonance body, so that heat can be dissipated from the piezoelectric component via the resonance body.
- the resonance body has a contact surface which interacts with and drives a body to be driven.
- This contact surface preferably vibrates asymmetrically in several directions, regardless of whether it is in contact with the body to be driven or not.
- the contact surface very particularly preferably carries out an elliptical movement.
- This contact surface also preferably vibrates at different operating frequencies, preferably resonance frequencies, of the piezomotor in different directions, regardless of whether it is in contact with the body to be driven or not, and particularly preferably performs an elliptical movement.
- the contact surface carries out the macroscopic movements required for the respective drive of the body to be driven, so that no additional mechanisms or components are required for the drive thereof.
- the piezomotor very particularly preferably has an embodiment which is described in WO 01 / 41228A1 or in the parallel application with the file number PCT / EP01 / 03245. These patent applications are hereby incorporated by reference and are therefore considered part of the disclosure.
- the piezomotor according to the invention converts more electrical energy into mechanical vibrations with the same efficiency than a structurally identical piezomotor with silver-palladium electrode layers.
- the piezo motor according to the invention can likewise preferably be operated with higher currents than a structurally identical piezo motor with electrode layers made of silver-palladium.
- the piezomotor according to the invention is very particularly preferably operable at two operating frequencies, preferably resonance frequencies, and so much heat can be dissipated at both operating frequencies that the resonance frequencies do not shift due to temperature phenomena.
- This embodiment has the advantage that the piezoelectric components and thus the electric motor according to the invention do not heat up so that the resonance frequencies and thus the operating points of the piezomotors shift and thus the drive power of the piezomotors changes.
- the piezomotor according to the invention has the advantage that it is easier to manufacture.
- the piezomotor according to the invention can be operated at its resonance frequency with significantly higher field strengths on the piezoelectric material than piezomotors according to the prior art, even if this resonance frequency is> 15 kHz, without its performance being irreversibly reduced at these frequencies. This means that this piezomotor can convert more electrical energy into mechanical vibrations with the same efficiency than a structurally identical piezomotor with silver-palladium electrode layers.
- the piezomotor can be equipped with a resonance body made of metal, in particular aluminum, without resulting in unfavorable vibration properties.
- the piezomotor according to the invention a very good mechanical connection can be achieved between the piezoelectric element and the resonance body and the piezoelectric component does not have to be installed in the piezomotor in such a way that it is subjected to the lowest possible bending moments, which makes the manufacture of the piezomotors comparatively simple.
- the piezomotor according to the invention it is often even advantageous to subject the piezoelectric component to a specific bending stress in the installed state or during operation.
- the piezoelectric component of the motor according to the invention can be manufactured with larger dimensional tolerances. In particular, angular deviations of the piezoelectric component can be better balanced.
- the heat which is generated in the piezoelectric component can be dissipated much better than in the case of piezomotors according to the prior art.
- the piezomotor according to the invention has the advantage that it can be operated with higher currents than a piezomotor with silver-palladium electrode layers. This also has the advantage that the motor has less efficiency losses than motors with silver-palladium electrode layers when the ceramic layer thicknesses are reduced.
- Another object of the present invention is a piezoelectric element that has additional metallic cooling surfaces that are integrated into the electrode layers. These cooling surfaces are of only minor importance in the generation of electrical fields.
- the cooling surfaces are preferably made of silver-palladium or copper.
- the electrode layer and thus also the cooling surfaces are preferably produced in one process step, preferably in the screen printing process.
- the cooling surfaces are preferably connected to a collecting electrode.
- the electrode layers and / or the cooling surfaces are preferably at least partially made of copper.
- This piezoelectric element has the advantage that the heat generated is better dissipated.
- the surface of the piezoelectric component turns out to be more flat, so that smoothing of the surface can be omitted and large-area contact between the piezoelectric material and the resonance body occurs.
- the person skilled in the art recognizes that the advantages relating to the flatness of the surface and / or the good contact between the piezoelectric material and the resonance body can also be achieved with non-metallic surfaces.
- Figure 1 shows the piezomotor according to the invention.
- FIG. 2 shows a piezoelectric component according to the prior art.
- FIG. 3 shows a piezoelectric component according to the invention.
- FIG. 1 shows a system 20 consisting of a piezomotor 26 and a driven body 42.
- the piezomotor 26 has a piezoelectric component 22, which converts electrical energy into mechanical vibrations. The electrical energy is conducted to the component 22 via the cables 30.
- the piezoelectric component has a stack of 150 ceramic layers in a monolithic multilayer construction. An electrode layer containing copper is arranged in each case between two ceramic layers. The layer thickness of the electrode layers is 2 ⁇ m in each case.
- the ceramic layers consist of Vibrit ® , a product of Siemens AG, Kunststoff, Federal Republic of Germany. With regard to the manufacture of the piezoelectric components, reference is made to DE 100 62 672 A1. The piezoelectric component vibrates at 30 - 80 kHz.
- the piezoelectric component 22 is clamped with the screw 32 in the resonance body 24.
- the person skilled in the art recognizes that the piezoelectric component 22 can also be pressed into the resonance body 24.
- the electrode layers deform plastically and / or elastically, as a result of which there is very intensive contact between the piezoelectric component and the resonance body. This contact enables a good transmission of the vibrations and a good dissipation of the heat that is generated in the piezoelectric material.
- the resonance body 24 is mounted on a resilient element 50, which is supported on the bearing 50a.
- the resilient element presses the contact surface 44 against the rod 42 to be driven.
- the contact surface 44 executes elliptical movements 100a or 100b which drive the rod 42 in a bidirectional translation.
- the rod 42 is mounted on rollers 46.
- FIG. 2 shows a piezoelectric component 22 according to the prior art.
- the component is made in a monolithic multilayer construction from a stack of a large number of ceramic layers 4.
- An electrode layer 1 is arranged between each two ceramic layers.
- the electrode layers are each connected alternately with the left collecting electrode 5 or to the right collecting electrode 6.
- the insulation area 7 must be selected to be large enough to ensure reliable insulation.
- a disadvantage of this Piezoelectric elements is the poor heat conduction and the irregular shape, which manifests itself in the form of production-related increases in the areas 2, 3.
- FIG. 3 shows a piezoelectric component 22 according to the invention.
- the component is made in a monolithic multilayer construction from a stack of a plurality of ceramic layers 4.
- An electrode layer 1 is arranged between each two ceramic layers.
- the electrode layers 1 are each interrupted by the insulation region 7 into the sections 1 ' and 1 ".
- the electrodes are each connected to the collecting electrodes 5 and 6.
- the sections 1 ' are mainly used for cooling and the layer thickness compensation and not for generating the electric field.
- the length the sections 1 ' can vary due to manufacturing tolerances.
- the electrode layer 1 and thus also its sections 1 ' and 1 " are made of copper.
- the component according to the invention has very good heat dissipation and has very flat surfaces 2, 3, so that smoothing of these surfaces can be omitted.
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02772205A EP1425805A2 (de) | 2001-08-27 | 2002-08-26 | Piezomotor mit kupferelektroden |
AU2002337017A AU2002337017A1 (en) | 2001-08-27 | 2002-08-26 | Piezoelectric motor comprising copper electrodes |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10141820A DE10141820A1 (de) | 2001-08-27 | 2001-08-27 | Piezomotor mit Kupferelektroden |
DE10141820.5 | 2001-08-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2003019689A2 true WO2003019689A2 (de) | 2003-03-06 |
WO2003019689A3 WO2003019689A3 (de) | 2004-01-15 |
Family
ID=7696686
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2002/009502 WO2003019689A2 (de) | 2001-08-27 | 2002-08-26 | Piezomotor mit kupferelektroden |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1425805A2 (de) |
AU (1) | AU2002337017A1 (de) |
DE (1) | DE10141820A1 (de) |
WO (1) | WO2003019689A2 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1516983A1 (de) * | 2003-09-18 | 2005-03-23 | Aug. Winkhaus GmbH & Co. KG | Schliesszylinder |
EP2082907A1 (de) | 2005-12-06 | 2009-07-29 | Bayerische Motoren Werke Aktiengesellschaft | Vorrichtung zum Bewegen eines Verstellteils in einem Kraftfahrzeug |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005014163B4 (de) * | 2005-03-29 | 2015-09-17 | Continental Automotive Gmbh | Piezoelektrische Aktoreinheit mit verbesserter Wärmeleitfähigkeit sowie Kraftstoffinjektor |
DE102006031233B4 (de) * | 2006-07-06 | 2012-02-16 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Stellvorrichtung mit einer Reihenschaltung aus einem Linearaktuator und einer Feder |
DE102012202074A1 (de) * | 2012-02-13 | 2013-08-14 | Siemens Aktiengesellschaft | Verfahren zur Herstellung eines Ultraschalltransducers und Ultraschalltransducer |
DE102014101512A1 (de) | 2014-02-06 | 2015-08-06 | Marco Systemanalyse Und Entwicklung Gmbh | Piezoelektrische Stellvorrichtung |
JP7491713B2 (ja) | 2020-03-27 | 2024-05-28 | Tdk株式会社 | 圧電素子、圧電アクチュエータ、および圧電トランス |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5162692A (en) * | 1986-10-26 | 1992-11-10 | Olympus Optical Company Limited | Ultrasonic oscillator and ultrasonic motor using the same |
US5416375A (en) * | 1992-06-15 | 1995-05-16 | Olympus Optical Co., Ltd. | Ultrasonic motor |
US6114798A (en) * | 1996-03-25 | 2000-09-05 | Canon Kabushiki Kaisha | Stacked element and vibration drive device |
DE19946834A1 (de) * | 1999-09-30 | 2001-05-03 | Bosch Gmbh Robert | Piezoaktor und ein Verfahren zu dessen Herstellung |
WO2001041228A1 (de) * | 1999-11-29 | 2001-06-07 | Creaholic Sa | Piezoelektrischer antrieb |
WO2001045138A2 (de) * | 1999-12-16 | 2001-06-21 | Epcos Ag | Piezoelektrisches bauelement |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3309239A1 (de) * | 1983-03-15 | 1984-09-20 | Siemens AG, 1000 Berlin und 8000 München | Piezoelektrischer motor |
JP3432321B2 (ja) * | 1995-01-31 | 2003-08-04 | 太平洋セメント株式会社 | 積層セラミックス圧電体素子 |
DE19626671C1 (de) * | 1996-07-03 | 1997-10-16 | Fraunhofer Ges Forschung | Piezoelektrischer Leistungsaktor mit Kühlung und Verfahren zu seiner Herstellung |
DE19860001C2 (de) * | 1998-12-23 | 2001-10-04 | Epcos Ag | Piezoelektrisches Bauelement, Verfahren zu dessen Herstellung und Verwendung eines derartigen Bauelements |
US6351057B1 (en) * | 1999-01-25 | 2002-02-26 | Samsung Electro-Mechanics Co., Ltd | Microactuator and method for fabricating the same |
DE10035168A1 (de) * | 2000-07-19 | 2002-02-07 | Siemens Ag | Stellantrieb, Ventil sowie Verfahren zum Herstellen eines Stellantriebs |
-
2001
- 2001-08-27 DE DE10141820A patent/DE10141820A1/de not_active Withdrawn
-
2002
- 2002-08-26 AU AU2002337017A patent/AU2002337017A1/en not_active Abandoned
- 2002-08-26 EP EP02772205A patent/EP1425805A2/de not_active Withdrawn
- 2002-08-26 WO PCT/EP2002/009502 patent/WO2003019689A2/de not_active Application Discontinuation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5162692A (en) * | 1986-10-26 | 1992-11-10 | Olympus Optical Company Limited | Ultrasonic oscillator and ultrasonic motor using the same |
US5416375A (en) * | 1992-06-15 | 1995-05-16 | Olympus Optical Co., Ltd. | Ultrasonic motor |
US6114798A (en) * | 1996-03-25 | 2000-09-05 | Canon Kabushiki Kaisha | Stacked element and vibration drive device |
DE19946834A1 (de) * | 1999-09-30 | 2001-05-03 | Bosch Gmbh Robert | Piezoaktor und ein Verfahren zu dessen Herstellung |
WO2001041228A1 (de) * | 1999-11-29 | 2001-06-07 | Creaholic Sa | Piezoelektrischer antrieb |
WO2001045138A2 (de) * | 1999-12-16 | 2001-06-21 | Epcos Ag | Piezoelektrisches bauelement |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1516983A1 (de) * | 2003-09-18 | 2005-03-23 | Aug. Winkhaus GmbH & Co. KG | Schliesszylinder |
EP2082907A1 (de) | 2005-12-06 | 2009-07-29 | Bayerische Motoren Werke Aktiengesellschaft | Vorrichtung zum Bewegen eines Verstellteils in einem Kraftfahrzeug |
Also Published As
Publication number | Publication date |
---|---|
DE10141820A1 (de) | 2003-03-20 |
WO2003019689A3 (de) | 2004-01-15 |
AU2002337017A1 (en) | 2003-03-10 |
EP1425805A2 (de) | 2004-06-09 |
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