WO2003003032A1 - Procede de charge d'une structure comportant un corps isolant - Google Patents
Procede de charge d'une structure comportant un corps isolant Download PDFInfo
- Publication number
- WO2003003032A1 WO2003003032A1 PCT/FR2002/002236 FR0202236W WO03003032A1 WO 2003003032 A1 WO2003003032 A1 WO 2003003032A1 FR 0202236 W FR0202236 W FR 0202236W WO 03003032 A1 WO03003032 A1 WO 03003032A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electrode
- potential
- faraday cage
- electrons
- charging
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2617—Measuring dielectric properties, e.g. constants
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/305—Contactless testing using electron beams
Definitions
- the present invention relates to a method of charging a structure comprising an insulating body as well as a device for charging such a structure.
- the control of the conditions of load of an insulating body ie the knowledge of the quantity of load and the distribution of the charges then makes it possible to study the phenomenon of decline in potential, from its origin, and the return of potential in time after discharge of the structure.
- These studies make it possible to determine the electrical properties of the body such as the electronic mobility of the insulating material, its conductivity, its dielectric constant. Knowledge of these properties is essential to determine the suitability of new insulating materials for industrial use, for example in the field of capacitors, electric cables, semiconductors, electronic tubes for example.
- the charge can be directly injected by the use of a high energy electron beam.
- atson in document [4] was able to characterize the energy level of the traps in which the injected charges are found.
- Coelho et al. In the patent document [8] have developed a device which makes it possible to measure the mobility of the charges injected into an insulating material. This technique is based on using the beam of an electron microscope to charge the sample.
- Coelho in document [9] also proposed to use the electrostatic mirror method which is described in patent document [10] for a local study of the potential decline on films of a few tens of micrometers.
- the effective energy of the beam decreases as the potential of the electrode increases.
- the number of electrons actually remaining on the electrode depends directly on the energy of the beam. Consequently, the current of the electron beam can no longer be considered to be constant and can vary significantly during the injection until it is canceled out.
- the initial conditions for the potential decline are therefore not precisely known.
- the purpose of the charging method according to the invention is to overcome the drawbacks mentioned above so as to control the quantity and the load distribution at the end of the charge and therefore at the start of the potential decline.
- the process which is the subject of the invention is a process for charging a structure formed by an insulating body sandwiched between two electrodes. It includes the following steps:
- a Faraday cage is placed in contact with one of the electrodes of the structure, the other electrode being brought to a reference potential; - Electrons are introduced from a controlled electron emission device into the Faraday cage, the electrons reaching the electrode with which it is in contact, so as to charge the structure.
- Faraday in a vacuum enclosure in particular to avoid recombination of electrons participating in the charge with ions of the atmosphere prevailing around the structure.
- the potential of the electrode in contact with the Faraday cage can be measured.
- the present invention also relates to a method for discharging a structure formed of an insulating body sandwiched between two electrodes having been previously charged by the preceding charging method, this discharging method comprising a step of short-circuiting the structure.
- the potential of the electrode in contact with the Faraday cage can be measured over time after the complete discharge of the structure.
- the present invention also relates to a device for charging a structure formed by an insulating body sandwiched between two electrodes, characterized in that it comprises a device for the controlled emission of electrons for injecting electrons into a cage. Faraday in contact with one of the electrodes of the structure, the other electrode being brought to a reference potential.
- the device for the controlled emission of electrons it can be placed outside the enclosure.
- the device may include a potential probe to measure, without contact, the potential of the electrode in contact with the Faraday cage.
- the Faraday cage may have a solid side wall, a solid bottom in contact with the electrode of the structure and, opposite the bottom, a cover equipped with an opening to allow the passage of electrons from the controlled emission device. electron. It is preferable to provide a secondary electron detection device, to detect any secondary electrons emerging from the Faraday cage through the opening.
- the height of the cage from the bottom to the cover is advantageously greater than each of its other dimensions to prevent the electrons from going up towards the diaphragm. This thus improves the trapping efficiency of the Faraday cage.
- the surface occupied by the Faraday cage on the electrode is advantageously less than the surface of the electrode.
- the charging device may be able to charge a structure in which the electrode in contact with the Faraday cage is coupled with a guard electrode, in this configuration it preferably includes means for bringing the guard electrode to the same potential that the electrode in contact with the Faraday cage.
- a heating and / or cooling device can be provided to adjust the temperature in the vicinity of the structure.
- the charging device can be adapted to ensure the discharge of the structure, in this configuration it includes means for short-circuiting the structure.
- the short-circuiting means can make an electrical connection between the Faraday cage and the mass of the controlled emission device which corresponds to the reference potential.
- the device can then include a device for measuring the current caused by the discharge of the structure.
- FIG. 1 schematically shows a device for charging a structure formed of an insulating body sandwiched between two electrodes, according to the invention
- FIG. 2 shows a section of a Faraday cage used in the device of Figure 1;
- FIG. 3 shows the evolution of the potential of the first electrode as a function of the quantity of charges deposited on the electrode;
- FIG. 4 shows the change in the quantity of electrons lost as a function of the potential of the first electrode;
- FIG. 5 represents the evolution of the potential of the first electrode as a function of the decay time;
- FIG. 6 represents the evolution of the rate of decline as a function of the time of decline;
- Figure 1 schematically shows a charging device 10 of a structure 1 formed of an insulating body 2 sandwiched between a first electrode 3 and a second electrode 4.
- the material of the insulating body 2 can be chosen from polymers , ceramics based on oxides, nitrides, borides, carbides for example, glasses, these materials being taken alone or in combination.
- the insulating body 2 can be in the form of a thick block, a film or a thin layer, its thickness is chosen so as to obtain an electric field sufficient to inject charges into the insulator.
- the electrodes 3, 4 can be metallic or semiconductor.
- the structure can be produced by known techniques, for example, the insulating body can be obtained by molding, machining, pressing of granules, the electrodes can be produced by pressing, bonding, painting, by chemical vapor deposition, physical vapor deposition or others.
- the structure 1 illustrated in FIG. 1 makes a planar capacitor but it could make a capacitor of more complex geometry, a wound capacitor for example.
- the planar capacitor may include an additional electrode 17 called the guard electrode which is coupled to one of the electrodes. It is located on the same face of the insulating body 2 as the electrode with which it is coupled. Here the guard electrode surrounds the first electrode 3. This guard electrode 17 makes it possible to limit the edge effects.
- the first electrode 3 of the structure 1 is in contact with a Faraday cage 9 which will be described in detail later with reference to FIG. 2.
- the structure 1 and the Faraday cage 9 are, in the example described, placed inside an enclosure 5.
- the structure 1 is located on a sample holder 8 in the enclosure 5.
- the second electrode 4 rests on the sample holder 8, it is brought to a reference potential, generally the potential of the enclosure 5 which is the ground.
- a potential measuring device 11 is provided for measuring the potential of the first electrode 3.
- This device 11 can take the form of a potential probe which makes it possible to make a non-contact measurement of the surface potential of the first electrode 3
- the potential probe 11 is located at near the first electrode 3.
- a potential probe with vibrating capacitor is suitable.
- the Faraday cage 9 cooperates with a controlled electron emission device 6.
- This controlled electron emission device 6 is intended to produce an electron beam 7 controlled inside the Faraday cage 9.
- the electron-controlled emission device 6 is located outside the enclosure 5. It is integral with it.
- the electron beam 7 is injected into the enclosure 5 before reaching the Faraday cage 9.
- the electron beam 7 is preferably focused to control the dimensions of the area bombarded by the electrons and its intensity is adjustable.
- Faraday 9 can no longer come out of it by conventional broadcast. They are led by the conductive material from the Faraday cage 9 to the first electrode 3 with which it is in contact and can thus be distributed over the entire surface of the first electrode 3 and charge the structure 1.
- the Faraday cage 9 traps the electrons and transmits them to structure 1 almost entirely. It is then easy to know the quantity of charges deposited on the first electrode 3 from the value of the current of the electron beam 7 and the injection time in the Faraday cage 9. If the electrons had bombarded directly the electrode 3, a non-negligible part of these would have been re-emitted in enclosure 5, this part would therefore not have participated in the charge of structure 1.
- This device for the controlled emission of electrons 6 can be produced by a scanning electron microscope, a Castaing microprobe or any other assembly having an electronic gun. It is also preferable to provide a system for calibrating the electronic current and a system for controlling the time of emission of the electrons in the enclosure 5, these systems are not shown.
- the maximum charge potential is only limited by the maximum energy of the electron beam 7 and by the maximum reading voltage of the potential probe 11.
- Charging can be done instantaneously continuously or in the form of charge packets, the repetition frequency and the quantity of charges can be varied.
- the enclosure 5 is a vacuum enclosure, which in particular makes it possible to avoid, once the charge is completed, combinations between the electrons and the ions found in the enclosure 5.
- the Faraday cage 9 has a side wall 9-1, for example cylindrical, solid with on one side a solid bottom 9-2 intended to come into electrical contact with the first electrode 3 and on the other a cover 9-3 provided a 9-4 opening to let the electrons enter the Faraday cage.
- the opening is small to prevent the electrons that have entered the Faraday cage from coming out.
- Faraday's cage is metallic, it can be made from non-magnetic stainless steel for example.
- the height H of the Faraday cage is greater than each of its other dimensions: length, width or diameter D in the case of a cylindrical shape as in FIG. 2.
- the surface occupied by the Faraday cage 9 on the first electrode 3 is much smaller than that of the first electrode 3 so as to be negligible.
- a device 13 for detecting a possible secondary emission It could be caused by electrons bombarding the cover at the opening 9-4 when the electron beam 7 is not sufficiently focused.
- the detection device 13 can comprise a pierced plate 13-1 made of a conductive material and means 13-2 for measuring an electric current in this plate 13-1.
- the plate 13-1 is arranged in the enclosure 5 so as to be crossed by the electron beam 7 and is located between the device for the controlled emission of electrons 6 and the Faraday cage 9.
- a heating and / or cooling device 14 can be provided to adjust the temperature in the vicinity of the structure 1. It is then possible to carry out measurements at controlled temperature.
- guard electrode 17 When using a guard electrode 17, it is brought to the same potential as the electrode with which it is coupled, here the first electrode 3 in contact with the Faraday cage. We establishes a zero electric field between them. Means 12 are provided so that they have the same potential. A voltage generator 12 delivers to the guard electrode 17 the same potential as that detected by the potential probe 11, it is connected to the guard electrode 17 and is controlled by the potential measured by the probe 11.
- Measuring the evolution of the potential of the first electrode 3 makes it possible to determine the static capacity of the capacitor thus charged, the dielectric constant of the insulating material of the body 2 and the injection field.
- the potential decline can be measured as a function of time using the potential probe 11.
- the discharge can start when the potential of the first electrode 3 no longer changes.
- the structure is discharged by shorting it.
- the Faraday cage can be brought into contact with the mass of the enclosure 5 or of the electron-controlled emission device 6, which is equivalent.
- the two electrodes of structure 1 are then substantially at the same potential.
- the charging device can be equipped with means 16 for discharging the structure.
- One can make an electrical connection 16-1 provided with a switch 16-2 to electrically connect the Faraday cage 9 with the mass of the controlled emission device 6 of electrons.
- This switch 16-2 is in the open position during charging and in the closed position during discharge.
- a resistor R and a current measuring device 16-3 can be placed in series with the switch 16-2 to measure, during this short-circuiting, the discharge current through the resistor R.
- the variation of the potential over time, at the level of the first electrode 3, is measured using the potential probe 11, this variation reflecting the potential return of the structure 1.
- Example 1 Loading of a polyethylene film and calculation of the static dielectric constant and of the injection field.
- a 46 micrometer thick polyethylene film was obtained from pellets placed in a mold and hot pressed using an 80 mm diameter conductive plate which will serve as a second electrode. It is she who will be put in contact with the sample carrier. A sheet of Kapton was placed at the bottom of the mold so as to facilitate the release of the film. The other side of the film was metallized with gold over a diameter of 50 millimeters so as to form the first electrode which will carry the Faraday cage. A guard electrode was not produced. The film thus metallized was placed in an enclosure similar to that shown in FIG. 1. The electrons were deposited in packs of 5 nC.
- FIG. 3 represents the evolution of the potential V as a function of the quantity of charges Qa deposited on the first electrode.
- V Q d / C ⁇ 2 ⁇
- the charging device therefore makes it possible to determine the static capacity of a capacitor from the law ⁇ 2 ⁇ since the quantity of electrons deposited Q is known with precision.
- the value of the capacitance measured from the original slope is 871 pF which corresponds to a static dielectric constant of 2.31.
- the slope is plotted in dotted lines while the variation curve is in solid line in Figure 3.
- the injection potential Vi corresponds to the potential from which Q p is no longer zero.
- the value of the field of injection Ei by the relation:
- the evolution of the quantity of lost electrons Q p is represented as a function of the potential V of the first electrode.
- the injection potential Vi is around 1200 V, which corresponds to an injection field E of 26 kV / mm.
- the charging device according to the invention therefore makes it possible to determine the value of the injection field, a quantity which depends on the nature of the first electrode and of the insulating body.
- Example 2 Measurement of the potential decline and calculation of the mobility of the charges and the conductivity depending on the field.
- a 114 micrometer thick polyethylene film is used, obtained according to the procedure described in Example 1.
- An electronic charge of 1 microCoulomb was deposited on the first electrode as in Example 1.
- the decline in potential of the first electrode is then measured as a function of time.
- FIG. 5 represents the evolution of the potential V as a function of the decay time t.
- the rate of decline dV / dt is more often expressed as a function of time, in particular because it can make it possible to determine the transit time T of the charge injected from the first electrode to the second electrode.
- dV / dt is considered constant as can be seen in Figure 6.
- V ⁇ . E ⁇ 7 ⁇
- h being the thickness of the polyethylene film
- ⁇ 0 the intrinsic conductivity at zero field
- ⁇ PF the Poole-Frenkel constant
- k the Boltzman constant
- T the temperature of the structure expressed in Kelvin.
- A is a constant and h, the thickness of polyethylene film, is expressed in micrometers.
- the conductivity of the insulating material of the film was estimated according to the relationship ⁇ l ⁇ . We can see that over a large part of the curve in Figure 7, Poole Frenkel's law is remarkably verified (the experimental slope is 0.07). Thus, in this zone, the variation of the intrinsic conductivity of the insulator is obtained as a function of the electric field applied to the structure.
- Example 3 Measurement of potential return.
- Figure 8 a representation of the potential return measured on a 120 micrometer polyethylene film obtained according to the process described in Example 1.
- the structure of which is part of the film was initially brought to 2084 volts according to the charging process explained in example 1.
- After a certain period of potential decline which brought the structure to a potential of 1565 volts (see example 2) we run -circuit the latter so as to cancel the potential of the upper electrode then we measure, with the potential probe, the new evolution of this potential as a function of time.
- the advantage of the charging and discharging method thus described is that it makes it possible, from the same test, to determine the injection field of the loads and their mobility.
- the initial parameters of the decline that is to say the quantity and the distribution of the charges, are perfectly controlled, which makes it possible to correctly use the measurements of decline and return of potential.
- the charges being injected via an electrode it is possible to study an insulating body in a very thin layer.
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- General Physics & Mathematics (AREA)
- Measurement Of Radiation (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02760363A EP1399747A1 (fr) | 2001-06-29 | 2002-06-27 | Procede de charge d'une structure comportant un corps isolant |
US10/362,212 US6730908B2 (en) | 2001-06-29 | 2002-06-27 | Method for charging a structure comprising an insulating body |
JP2003509162A JP2004521357A (ja) | 2001-06-29 | 2002-06-27 | 絶縁体を含んでいる構造の充電方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0108643A FR2826730B1 (fr) | 2001-06-29 | 2001-06-29 | Procede de charge d'une structure comportant un corps isolant |
FR01/08643 | 2001-06-29 |
Publications (1)
Publication Number | Publication Date |
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WO2003003032A1 true WO2003003032A1 (fr) | 2003-01-09 |
Family
ID=8864940
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/FR2002/002236 WO2003003032A1 (fr) | 2001-06-29 | 2002-06-27 | Procede de charge d'une structure comportant un corps isolant |
Country Status (5)
Country | Link |
---|---|
US (1) | US6730908B2 (fr) |
EP (1) | EP1399747A1 (fr) |
JP (1) | JP2004521357A (fr) |
FR (1) | FR2826730B1 (fr) |
WO (1) | WO2003003032A1 (fr) |
Families Citing this family (10)
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US7443175B2 (en) * | 2006-07-14 | 2008-10-28 | Covidien Ag | Surgical testing instrument and system |
JP2014011374A (ja) * | 2012-07-02 | 2014-01-20 | Nuflare Technology Inc | マスク描画方法、マスク描画装置 |
KR20140028701A (ko) * | 2012-08-30 | 2014-03-10 | 삼성전자주식회사 | 반도체 소자의 검사 방법 및 이에 사용되는 반도체 검사 장비 |
CN102879716A (zh) * | 2012-09-24 | 2013-01-16 | 哈尔滨理工大学 | 金属护层交叉互联下三相电缆主绝缘的在线监测方法及装置 |
CN103630814B (zh) * | 2013-12-11 | 2016-12-07 | 国家电网公司 | 高压电缆在交叉互联下绝缘介质损耗角趋势在线监测方法 |
US11181570B2 (en) * | 2018-06-15 | 2021-11-23 | Rosemount Inc. | Partial discharge synthesizer |
CN108710051B (zh) * | 2018-08-15 | 2023-12-12 | 深圳联合净界科技有限公司 | 一种针对离子风机综合消电能力的检测装置 |
CN109669108B (zh) * | 2018-11-28 | 2022-09-27 | 中国电力科学研究院有限公司 | 长间隙脉冲放电过程中的高能电子检测装置 |
WO2021034820A1 (fr) * | 2019-08-20 | 2021-02-25 | Ascend Performance Materials Operations Llc | Procédé de mesure de la propension à l'attraction statique |
CN113645818B (zh) * | 2021-09-16 | 2022-07-12 | 西安交通大学 | 一种永磁铁和法拉第笼消除循环水中电荷的箝位装置 |
Citations (2)
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EP0398269A2 (fr) * | 1989-05-15 | 1990-11-22 | Nissin Electric Company, Limited | Appareil d'implantation ionique |
WO2000020851A1 (fr) * | 1998-10-06 | 2000-04-13 | University Of Washington | Systeme de detection a faisceau de particules chargees |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5329129A (en) * | 1991-03-13 | 1994-07-12 | Mitsubishi Denki Kabushiki Kaisha | Electron shower apparatus including filament current control |
DE29720776U1 (de) * | 1997-11-22 | 1998-01-15 | Skf Gmbh | Befestigungsvorrichtung für Riemenrollen |
JP3805565B2 (ja) * | 1999-06-11 | 2006-08-02 | 株式会社日立製作所 | 電子線画像に基づく検査または計測方法およびその装置 |
FR2794823B1 (fr) * | 1999-06-14 | 2001-08-10 | Skf France | Dispositif de fixation pour galet a roulement et galet a roulement comportant un tel dispositif |
US7078690B2 (en) * | 2002-02-04 | 2006-07-18 | Applied Materials, Israel, Ltd. | Monitoring of contact hole production |
-
2001
- 2001-06-29 FR FR0108643A patent/FR2826730B1/fr not_active Expired - Fee Related
-
2002
- 2002-06-27 EP EP02760363A patent/EP1399747A1/fr not_active Withdrawn
- 2002-06-27 WO PCT/FR2002/002236 patent/WO2003003032A1/fr not_active Application Discontinuation
- 2002-06-27 US US10/362,212 patent/US6730908B2/en not_active Expired - Fee Related
- 2002-06-27 JP JP2003509162A patent/JP2004521357A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0398269A2 (fr) * | 1989-05-15 | 1990-11-22 | Nissin Electric Company, Limited | Appareil d'implantation ionique |
WO2000020851A1 (fr) * | 1998-10-06 | 2000-04-13 | University Of Washington | Systeme de detection a faisceau de particules chargees |
Non-Patent Citations (3)
Title |
---|
CRISCI A ET AL: "SURFACE-POTENTIAL DECAY DUE TO SURFACE CONDUCTION", EUROPEAN PHYSICAL JOURNAL APPLIED PHYSICS, EDP SCIENCES, LES ULIS, FR, vol. 4, no. 1, 1998, pages 107 - 116, XP000873207, ISSN: 1286-0042 * |
DAS-GUPTA D K: "CHARGE DECAY ON POLYMER SURFACES", JOURNAL OF ELECTROSTATICS, ELSEVIER SCIENCE PUBLISHERS B.V. AMSTERDAM, NL, vol. 23, no. 1 INDEX, 1 April 1989 (1989-04-01), pages 331 - 340, XP000117666, ISSN: 0304-3886 * |
DAS-GUPTA D K: "SURFACE CHARGE DECAY ON INSULATING FILMS", PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON PROPERTIES AND APPLICATIONS OF DIELECTRIC MATERIALS. BEIJING, SEPT. 12 - 16, 1988, NEW YORK, IEEE, US, vol. 2 CONF. 2, 12 September 1988 (1988-09-12), pages 602 - 605, XP000075915 * |
Also Published As
Publication number | Publication date |
---|---|
EP1399747A1 (fr) | 2004-03-24 |
US20030183764A1 (en) | 2003-10-02 |
FR2826730A1 (fr) | 2003-01-03 |
FR2826730B1 (fr) | 2003-09-05 |
US6730908B2 (en) | 2004-05-04 |
JP2004521357A (ja) | 2004-07-15 |
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