WO2002097405A3 - Ortsaufgelöstes ellipsometrie-verfahren zur quantitativen und/oder qualitativen bestimmung von probenänderungen, biochip und messanordnung - Google Patents

Ortsaufgelöstes ellipsometrie-verfahren zur quantitativen und/oder qualitativen bestimmung von probenänderungen, biochip und messanordnung Download PDF

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Publication number
WO2002097405A3
WO2002097405A3 PCT/EP2002/005895 EP0205895W WO02097405A3 WO 2002097405 A3 WO2002097405 A3 WO 2002097405A3 EP 0205895 W EP0205895 W EP 0205895W WO 02097405 A3 WO02097405 A3 WO 02097405A3
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WO
WIPO (PCT)
Prior art keywords
sample
quantitative
resolution
qualitative analysis
biochip
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Application number
PCT/EP2002/005895
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English (en)
French (fr)
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WO2002097405A2 (de
Inventor
Peter Westphal
Matthias Eberhardt
Original Assignee
Inst Mikrotechnik Mainz Gmbh
Peter Westphal
Matthias Eberhardt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inst Mikrotechnik Mainz Gmbh, Peter Westphal, Matthias Eberhardt filed Critical Inst Mikrotechnik Mainz Gmbh
Priority to AU2002304653A priority Critical patent/AU2002304653A1/en
Priority to US10/478,574 priority patent/US20040142482A1/en
Publication of WO2002097405A2 publication Critical patent/WO2002097405A2/de
Publication of WO2002097405A3 publication Critical patent/WO2002097405A3/de

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/251—Colorimeters; Construction thereof
    • G01N21/253—Colorimeters; Construction thereof for batch operation, i.e. multisample apparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G01N21/553—Attenuated total reflection and using surface plasmons

Abstract

Es wird ein ortsaufgelöstes Ellipsometrieverfahren zur quantitativen und/oder qualitativen Bestimmung von Probenänderungen beschrieben. Die Probe befindet sich auf einem mit mindestens einer Metallschicht versehenen Probenträger. Mittels der ellipsometrischen Messung werden die Parameter Ψ und Δ ermittelt, wobei der Einfallswinkel und/oder die Frequenz der für die ellipsometrischen Messungen verwendeten elektromagnetischen Strahlung derart eingestellt wird, dass in der Metallschicht eine gedämpfte Oberflächenplasmonenresonanz angeregt wird. Die Detektionsempfindlichkeit (δcosΔ)/(Einheit der Probenänderung) wird über die Dicke der Metallschicht eingestellt. Die elektromagnetische Strahlung wird auf der der Probe abgewandten Seite des Probenträgers flächig eingestrahlt und bei mindestens einem Einfallswinkel und mindestens einer Frequenz werden mindestens zwei zeitlich versetzte, simultane, ortsaufgelöste ellipsometrische Messungen an der Probe/den Proben durchgeführt und wenigstens die jeweils dazugehörigen Δ bzw. cosΔ-Werte zur Ermittlung der Probenänderung ausgewertet.
PCT/EP2002/005895 2001-05-30 2002-05-29 Ortsaufgelöstes ellipsometrie-verfahren zur quantitativen und/oder qualitativen bestimmung von probenänderungen, biochip und messanordnung WO2002097405A2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2002304653A AU2002304653A1 (en) 2001-05-30 2002-05-29 High-resolution ellipsometry method for quantitative or qualitative analysis of sample variations, biochip and measuring device
US10/478,574 US20040142482A1 (en) 2001-05-30 2002-05-29 High-resolution ellipsometry method for quantitative or qualitative analysis of sample variations, biochip and measuring device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10126152A DE10126152C2 (de) 2001-05-30 2001-05-30 Ortsaufgelöstes Ellipsometrie-Verfahren zur quantitativen und/oder qualitativen Bestimmung von Probenänderungen, Biochip und Meßanordnung
DE10126152.7 2001-05-30

Publications (2)

Publication Number Publication Date
WO2002097405A2 WO2002097405A2 (de) 2002-12-05
WO2002097405A3 true WO2002097405A3 (de) 2003-11-20

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Country Status (4)

Country Link
US (1) US20040142482A1 (de)
AU (1) AU2002304653A1 (de)
DE (1) DE10126152C2 (de)
WO (1) WO2002097405A2 (de)

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KR101012056B1 (ko) 2008-11-28 2011-02-01 한국표준과학연구원 다채널 타원계측 표면 플라즈몬 공명 측정장치
KR101029473B1 (ko) 2008-11-28 2011-04-18 한국표준과학연구원 초점타원계측 표면 플라즈몬 공명 측정장치
US9110021B2 (en) * 2009-03-10 2015-08-18 Universita Degli Studi Di Padova Sensitivity enhancement in grating coupled surface plasmon resonance by azimuthal control
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KR101105328B1 (ko) 2009-11-23 2012-01-16 한국표준과학연구원 분자 흡착 및 해리 동특성 측정장치 및 측정방법
WO2011106057A2 (en) * 2009-12-04 2011-09-01 Trustees Of Boston University Nanostructure biosensors and systems and methods of use thereof
JP2013181753A (ja) * 2012-02-29 2013-09-12 Nitto Denko Corp Ｓｐｒセンサセルおよびｓｐｒセンサ
KR101383652B1 (ko) * 2012-10-15 2014-04-09 한국표준과학연구원 분자접합특성 및 완충용액 굴절률 동시 측정장치 및 측정방법
TWI498540B (zh) * 2013-05-30 2015-09-01 Univ Nat Cheng Kung 具不對稱粒子形狀之定域化表面電漿共振檢測系統
TWI498541B (zh) 2013-05-30 2015-09-01 Univ Nat Cheng Kung 具不對稱週期粒子排列之定域化表面電漿共振檢測系統
KR102103077B1 (ko) * 2018-08-20 2020-04-22 한국표준과학연구원 고소광계수 표지자와 유전체기판을 이용한 고감도 바이오센서칩, 측정시스템 및 측정방법
CN114371159B (zh) * 2021-05-19 2023-11-07 南京医科大学第二附属医院 一种rna生物芯片及其制备方法与应用

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Also Published As

Publication number Publication date
DE10126152C2 (de) 2003-12-24
AU2002304653A1 (en) 2002-12-09
WO2002097405A2 (de) 2002-12-05
DE10126152A1 (de) 2002-12-12
US20040142482A1 (en) 2004-07-22

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