WO2002084210A1 - Microscope-sonde a balayage muni d'une cellule liquide - Google Patents

Microscope-sonde a balayage muni d'une cellule liquide Download PDF

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Publication number
WO2002084210A1
WO2002084210A1 PCT/RU2002/000153 RU0200153W WO02084210A1 WO 2002084210 A1 WO2002084210 A1 WO 2002084210A1 RU 0200153 W RU0200153 W RU 0200153W WO 02084210 A1 WO02084210 A1 WO 02084210A1
Authority
WO
WIPO (PCT)
Prior art keywords
cantilever
deρzhaτel
κanτileveρa
κanτileveροm
unit
Prior art date
Application number
PCT/RU2002/000153
Other languages
English (en)
Russian (ru)
Inventor
Mikhail Evgenievich Alekseev
Viktor Alexandrovich Bykov
Sergei Alexeevich Saunin
Original Assignee
Zakrytoe Aktsionernoe Obschestvo 'nt-Mdt'
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zakrytoe Aktsionernoe Obschestvo 'nt-Mdt' filed Critical Zakrytoe Aktsionernoe Obschestvo 'nt-Mdt'
Publication of WO2002084210A1 publication Critical patent/WO2002084210A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/12—Fluid environment
    • G01Q30/14—Liquid environment

Definitions

  • the invention is related to nanotechnology, and more
  • a scanning probe (SZ ⁇ ) with an electric cell is known that contains a mechanical unit with the proximity systems of the probe, which
  • s ⁇ de ⁇ z haschy ⁇ li ⁇ u with ⁇ ez ⁇ s ⁇ ane ⁇ m with magni ⁇ nym de ⁇ zha ⁇ elem ⁇ b ⁇ aztsa, de ⁇ zha ⁇ el ⁇ an ⁇ ileve ⁇ a, vy ⁇ lnenny as ⁇ iches ⁇ i ⁇ z ⁇ achn ⁇ y ⁇ izmy with ⁇ an ⁇ ileve ⁇ m, s ⁇ yazhenny with gene ⁇ a ⁇ m ⁇ lebany and us ⁇ an ⁇ vlenny on ⁇ ve ⁇ n ⁇ s ⁇ i ⁇ izmy ⁇ d ⁇ i ⁇ si ⁇ vannym ugl ⁇ m, u ⁇ l ⁇ nenie,
  • the first drawback of the indicated device is that the sample is secured on the piezo scanner. This is subject to the fact that it is not possible to use this equipment in conjunction with this. 2
  • the disadvantage is due to the fact that the magnetic pickup of the sample is located on the piezo scanner, which increases its mass and, as indicated above, reduces the resolution.
  • the fifth drawback is that, in this case, the consolidation of the rubber ring is in the case of a loss of storage, which
  • the objective of the invention is to expand the functional capabilities of the NWS and to increase its disruptive equipment.
  • the posed problem is achieved in that, in the case of a scanning zandy microscope with a liquid cell, containing a plate with a fuselage, it is available 3
  • a generator of vibrations can be maintained, but at least one source of oscillation is installed in the reservoir.
  • the oscillation generator may also contain two electric devices that are disconnected from the source of voltage 0.
  • the magnetic parts 2 and magnets 3 are installed on the ground and with gaps between 5 hours.
  • the magnetic catch is made by sectioning with, at the same time, two sections 2, located on a non-magnetic flange 1, with an interconnect.
  • the intermediate flange 1 is mounted on the element 22 with the opening of 23, and is fastened on the piezo 24.
  • an elastic membrane 28 is installed, locked, for example, rings 29 and 30. If there is 20, there is a gap inlet 31 and a drain 32 inlet 20 Resume 20 Included 6
  • the 33 generators can contain the 34, 35, 36, 37, 38, 39, 40 sources located at Res. 20, as shown in FIG. 3-6.
  • FIG. 7 an embodiment of the generator of vibrations in the form of two elec- trodes 41 and 42, which are located in the reservoir 20 and the excluded source, is shown.
  • an SZ ⁇ block diagram is shown, it contains a laser unit 12, a photo block 15, a scan unit 24, and a pairing system 25 and a power supply are disconnected.
  • the device operates the following way. With the help of the spring 10, the chandelier 11 is installed on one of the rotations of 8 or 9 of the prism 7 in the zone of intersection of the optical
  • ⁇ b ⁇ azets 27 de ⁇ zha ⁇ ele 26 and us ⁇ anavlivayu ⁇ ⁇ li ⁇ u 6 ⁇ la ⁇ mu 19.
  • P ⁇ sle e ⁇ g ⁇ ⁇ susches ⁇ vlyayu ⁇ ge ⁇ me ⁇ izatsiyu zhid ⁇ s ⁇ n ⁇ y yachey ⁇ i ⁇ u ⁇ em ⁇ izhima memb ⁇ any 28 ⁇ ⁇ eze ⁇ vua ⁇ u 20 is ⁇ lz ⁇ vaniem ⁇ ltsa 29 bay ⁇ ne ⁇ n ⁇ g ⁇ ⁇ ychazhn ⁇ g ⁇ 5 or clip (not on che ⁇ ezha ⁇ ⁇ azany).
  • cantilever use efficient sources, and for stirring and calculating - magnetically.

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Microscoopes, Condenser (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

L'invention se rapporte aux nanotechnologies et plus particulièrement aux dispositifs permettant l'analyse et la modification de la surface des échantillons dans un milieu liquide. Le microscope-sonde à balayage muni d'une cellule liquide comprend une plaque avec un scanner piézo-électrique, un support de console qui contient un prisme optiquement transparent avec une console couplée à un oscillateur, un support d'échantillon, un organe de prise magnétique, une unité optique de poursuite de la console, qui comprend une unité laser et une unité de photorécepteur munie de systèmes de déplacement d'alignement, un système de poursuite, une unité de rapprochement préliminaire de la console et de l'échantillon, un réservoir comportant un joint d'étanchéité qui contient un liquide et dans lequel sont placés le support de console et le support d'échantillon et, enfin, une plate-forme. Le support de console se présente comme un joint intermédiaire non magnétique et l'organe de prise magnétique est constitué de plusieurs sections.
PCT/RU2002/000153 2001-04-12 2002-04-02 Microscope-sonde a balayage muni d'une cellule liquide WO2002084210A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
RU2001109728 2001-04-12
RU2001109728/28A RU2210731C2 (ru) 2001-04-12 2001-04-12 Сканирующий зондовый микроскоп с жидкостной ячейкой

Publications (1)

Publication Number Publication Date
WO2002084210A1 true WO2002084210A1 (fr) 2002-10-24

Family

ID=20248320

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/RU2002/000153 WO2002084210A1 (fr) 2001-04-12 2002-04-02 Microscope-sonde a balayage muni d'une cellule liquide

Country Status (2)

Country Link
RU (1) RU2210731C2 (fr)
WO (1) WO2002084210A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006012893A1 (fr) 2004-08-05 2006-02-09 Jpk Instruments Ag Dispositif pour recevoir un echantillon d'essai
WO2006046924A1 (fr) * 2004-10-28 2006-05-04 Nanofactory Instruments Ab Puce en porte-a-faux microfabriquee
WO2008031618A1 (fr) * 2006-09-15 2008-03-20 Westfälische Wilhelms-Universität Münster dispositif de palpage de la surface d'un échantillon recouverte par un LIQUIDE
EP1950764A1 (fr) * 2007-01-23 2008-07-30 Nambition GmbH Cellule de fluide pour microscopie à sonde à balayage ou spectroscopie de force
WO2010089620A1 (fr) * 2008-01-22 2010-08-12 Nanosurf Ag Système de détection optique pour cantilevers micromécaniques, notamment dans des microscopes à sonde locale
US20140289910A1 (en) * 2011-11-15 2014-09-25 National University Corporation Kanazawa University Sealed afm cell

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4935634A (en) * 1989-03-13 1990-06-19 The Regents Of The University Of California Atomic force microscope with optional replaceable fluid cell
EP0564088A1 (fr) * 1992-03-04 1993-10-06 Topometrix Microscope à force atomique avec système d'optique et support pour un cantilever
US5750989A (en) * 1995-02-10 1998-05-12 Molecular Imaging Corporation Scanning probe microscope for use in fluids

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4935634A (en) * 1989-03-13 1990-06-19 The Regents Of The University Of California Atomic force microscope with optional replaceable fluid cell
EP0564088A1 (fr) * 1992-03-04 1993-10-06 Topometrix Microscope à force atomique avec système d'optique et support pour un cantilever
US5750989A (en) * 1995-02-10 1998-05-12 Molecular Imaging Corporation Scanning probe microscope for use in fluids

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006012893A1 (fr) 2004-08-05 2006-02-09 Jpk Instruments Ag Dispositif pour recevoir un echantillon d'essai
US8506909B2 (en) 2004-08-05 2013-08-13 Jpk Instruments Ag Device for receiving a test sample
WO2006046924A1 (fr) * 2004-10-28 2006-05-04 Nanofactory Instruments Ab Puce en porte-a-faux microfabriquee
US7586105B2 (en) 2004-10-28 2009-09-08 Nanofactory Instruments Ab Microfabricated cantilever chip
WO2008031618A1 (fr) * 2006-09-15 2008-03-20 Westfälische Wilhelms-Universität Münster dispositif de palpage de la surface d'un échantillon recouverte par un LIQUIDE
US8332960B2 (en) 2006-09-15 2012-12-11 Westfalische Wilhems-Universitat Munster Device for scanning a sample surface covered with a liquid
EP1950764A1 (fr) * 2007-01-23 2008-07-30 Nambition GmbH Cellule de fluide pour microscopie à sonde à balayage ou spectroscopie de force
WO2008089889A1 (fr) * 2007-01-23 2008-07-31 Nambition Gmbh Cellules fluides pour la microscopie par sonde à balayage ou la spectroscopie de force
WO2010089620A1 (fr) * 2008-01-22 2010-08-12 Nanosurf Ag Système de détection optique pour cantilevers micromécaniques, notamment dans des microscopes à sonde locale
US20140289910A1 (en) * 2011-11-15 2014-09-25 National University Corporation Kanazawa University Sealed afm cell
US9110093B2 (en) * 2011-11-15 2015-08-18 National University Corporation Kanazawa University Sealed AFM cell

Also Published As

Publication number Publication date
RU2210731C2 (ru) 2003-08-20

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