WO2002078558A1 - Dispositif et procede d'ablation au laser de matiere organique et inorganique - Google Patents

Dispositif et procede d'ablation au laser de matiere organique et inorganique Download PDF

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Publication number
WO2002078558A1
WO2002078558A1 PCT/EP2002/003546 EP0203546W WO02078558A1 WO 2002078558 A1 WO2002078558 A1 WO 2002078558A1 EP 0203546 W EP0203546 W EP 0203546W WO 02078558 A1 WO02078558 A1 WO 02078558A1
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WO
WIPO (PCT)
Prior art keywords
laser
plasma
processing
generated
ablation
Prior art date
Application number
PCT/EP2002/003546
Other languages
German (de)
English (en)
Inventor
Wilhelm Brugger
Anton Kasenbacher
Mark Niemz
Thorsten Bauer
Original Assignee
W & H Dentalwerk Bürmoos GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by W & H Dentalwerk Bürmoos GmbH filed Critical W & H Dentalwerk Bürmoos GmbH
Publication of WO2002078558A1 publication Critical patent/WO2002078558A1/fr

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Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B18/18—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves
    • A61B18/20—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves using laser
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B17/00—Surgical instruments, devices or methods, e.g. tourniquets
    • A61B2017/00017—Electrical control of surgical instruments
    • A61B2017/00022—Sensing or detecting at the treatment site
    • A61B2017/00057—Light
    • A61B2017/00061—Light spectrum
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B2018/00636—Sensing and controlling the application of energy
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61C—DENTISTRY; APPARATUS OR METHODS FOR ORAL OR DENTAL HYGIENE
    • A61C1/00—Dental machines for boring or cutting ; General features of dental machines or apparatus, e.g. hand-piece design
    • A61C1/0046—Dental lasers

Definitions

  • the present invention relates to a device for laser ablation of organic and inorganic material with a laser light source, a detection device for detecting at least part of a radiation generated by the plasma caused by the laser ablation, and a processing-side end element with a light-guiding end region ,
  • a device for laser ablation of organic and inorganic material with a laser light source a detection device for detecting at least part of a radiation generated by the plasma caused by the laser ablation
  • a processing-side end element with a light-guiding end region
  • the invention further relates to a method for laser ablation of organic and inorganic material in the non-medical field.
  • Removal or ablation of organic and inorganic material is usually achieved by the action of mechanical means on the material.
  • mechanical means In particular, mechanical drills or similar tools are used.
  • Laser treatment devices are also increasingly used in the medical field, in particular in the dental field.
  • a device for laser ablation is known for example from W096 / 34566, which comprises a system with a CO 2 laser.
  • Another laser treatment device for use in the medical or dental field is known for example from the German patent application (official file number of the DPMA: 100 42220.9). It is also advantageous to check the condition of the material to be processed before and / or during treatment or removal. In the dental field in particular, it is useful to determine whether the area of the tooth to be treated is carious and, in particular, when the carious tooth material has been completely removed in order to prevent unnecessarily healthy tooth material from being removed.
  • a device for the detection of caries, plaque or bacterial infestation of teeth is known for example from DE 195 41 686 AI.
  • an excitation radiation is generated and directed onto the tooth to be examined, as a result of which a fluorescence radiation is produced which is recorded by a detection device.
  • An analysis of the fluorescence spectrum can provide information about the condition of the irradiated area and make it easier to differentiate between healthy and carious tooth areas as well as the detection of caries.
  • a similar device is also known from DE 297 05 934 U1, wherein in addition to the pure diagnostic device that was written in DE 195 41 686 AI, a treatment laser radiation is also generated.
  • the examination and analysis of the area to be treated is carried out by means of the fluorescent radiation generated on the tooth tissue area.
  • Another method for checking the material to be treated, in particular for checking the health status of a tooth area is differential reflectometry.
  • a xenon lamp is provided which irradiates the area of the material to be examined, the light reflected by the irradiated area being detected and evaluated.
  • a disadvantage of all of the aforementioned methods is that, in addition to the treatment laser, a second laser or at least a second light source is required, which only enables the analysis of the material to be treated. It has also been proposed that the radiation which is generated by the plasma caused by the laser ablation be used for an "online” analysis, ie for a simultaneous analysis of the material which has just been leached or removed Described in "Investigation and Spectral Analysis of the Plasma-Induced Ablation Mechanism of Dental Hydroxyapatite", MH Niemz, Applied Physics B 58, 273-281 (1994).
  • a light guide is brought into the vicinity of the area to be treated, a portion of the plasma radiation being passed on by the light guide to a detection device, in particular a spectrometer.
  • a detection device in particular a spectrometer.
  • a disadvantage of such a method is that on the one hand the position of the light guide relative to the treatment area and the processing laser beam and thus to the plasma generated changes, which can lead to fluctuations in the measurement results, and on the other hand that the plasma is also shaped according to the shape of the one to be processed or the area to be treated is partially shielded from the light guide, which can easily occur particularly in the dental field. Strong signal fluctuations due to shadowing, flanks and emigration are the result.
  • Another problem is also to simultaneously bring the treatment device and the light guide of the monitoring device into a good position, which is particularly important in the dental field.
  • the object of the invention is achieved by a device for laser ablation according to claim 1 and a method according to claim 10.
  • Claims 2 to 9 and 11 to 15 relate to particularly advantageous embodiments of the device and the method according to the invention.
  • the device for laser ablation comprises a processing-side end element with a light-guiding end area, the device for laser ablation being designed such that the light-guiding end area both the laser light generated by the laser light source for ablation on a material to be processed and a part the generated plasma radiation forwards to the detection device.
  • a single light-guiding end region can be realized by different elements, for example by a single protective glass, which serves, for example, to cover an interior of the handpiece, in which the ablation laser light and the plasma radiation are guided largely freely, for example. It is also possible for the light-guiding end region to be formed by a single light-guiding fiber, through which both the ablation laser light and the plasma radiation are transmitted and passed on. Other optical elements can also be used as a single light-guiding end region for the transmission and transmission of the ablation laser light and the plasma radiation.
  • the invention therefore provides, on the one hand, a very compact device that can also be used in tight spaces, with a high accuracy of the evaluation of the plasma radiation is ensured, since this is carried out from the lease, from which the treatment laser beam is also irradiated onto the material to be treated, which represents an optimal position for avoiding shadowing.
  • All means and devices known in the prior art can be used as the light-guiding end region, in particular light-guiding fibers, waveguides or also cavities in which the laser beam is directed by means of mirror elements, such as, for example, the handpiece shown in the above-mentioned German patent application 100 42 220.9.
  • the laser light source for generating a laser processing beam is preferably designed such that it can be operated in a pulse mode.
  • Pulsed laser radiation has the advantage that it has a very high intensity and generally leads to shallow depths of penetration and high absorption, which in particular leads to the ablation or removal of material compared to other treatment methods, such as e.g. in the medical field, coagulation is important.
  • the pulse duration and pulse repetition frequency can generally be controlled over a wide range, but it is of course also possible to use a laser light source which operates in a cw (continuous wave) operating mode.
  • the device for laser ablation according to the invention has a beam splitter for coupling out part of the laser light generated for treatment (processing beam), as a result of which a reference beam is generated.
  • processing beam a beam splitter for coupling out part of the laser light generated for treatment
  • a coupling of approximately 1% to approximately 40% of the laser beam generated preferably takes place; in a particularly preferred embodiment, approximately 10% of the intensity of the laser beam generated is coupled out for the reference laser beam.
  • the proportion of the output decoupled very much depends on the field of application, with a tendency that only a lower relative proportion is decoupled at higher output.
  • the outcoupled reference laser beam can in particular be passed on to the detection device in order to take into account possible fluctuations in intensity of the treatment laser beam, which are also reflected in the reference laser beam with a constant relative proportion of the outcoupling, in the evaluation.
  • the device for laser ablation preferably further comprises a frequency-converting element through which the outcoupled reference beam is guided, the frequency of the outcoupled reference beam being changed.
  • a potassium dihydrogen phosphate crystal (KDP crystal) which leads to a frequency doubling of the laser light passing through it, is particularly suitable as the frequency-converting element.
  • Such a frequency-converting element makes it possible, for example, that the reference beam is not only forwarded directly to the detection device, but is first directed to the material to be processed, from there essentially due to the changed frequency and the completely different interaction with the material to be treated is substantially completely reflected and then passed on to the detection device.
  • This has the advantage that the fluctuations in the intensity of the plasma radiation which may be caused by the geometry and / or the positioning of the end element are also taken into account. This enables an even more precise monitoring of the ablation and a significantly improved analysis of the material that has just been removed.
  • a device is also provided for coupling at least a part of the reference beam into the processing beam, which is particularly important in the process described above, in which the reference beam passes through a frequency-converting element.
  • a device is also provided for decoupling the part of the plasma radiation passed on from the light-guiding end region and / or the reference beam reflected by the material to be treated, for passing it on to the detection device.
  • Such devices preferably use mirror devices that are particularly tuned to the wavelength and are, for example, transparent to the wavelength of the reference beam but highly reflective to the wavelength of the processing or treatment laser beam, or else mirror elements that are transparent to light of a certain wavelength in one direction are designed to be highly reflective for light of the same wavelength that is incident on them from the other direction.
  • a spectrometer is preferably used as the detection device, particular embodiments further comprising a preferably automatic analysis device or evaluation device.
  • the spectrometer or the evaluation devices can be forwarded to a computer for automatic analysis and evaluation of the measurement data, the measurement data being able to be output directly without any delay, be it by means of optical or acoustic displays and output elements.
  • an automatic control which, for example, automatically interrupts the irradiation of the processing laser light onto the material to be processed if the spectrometer and the connected evaluation device given measured values which, for example in the dental field, indicate that essentially healthy tooth material is being removed.
  • the device for laser ablation preferably comprises a scanner device with which the fine positioning of the processing beam and / or the reference beam can be controlled.
  • the scanner device can scan certain scanning patterns automatically or manually in a controlled manner and thereby enables on the one hand a fine adjustment and on the other hand a uniform, controlled removal of an area to be treated.
  • the invention further relates to a method for laser ablation of organic and inorganic materials in the non-medical field according to claim 10.
  • the advantages of such a method essentially correspond to the advantages of the device according to the invention already described above, the method being used in wide areas of technology, can be used in particular for surface treatment etc.
  • the detection device which runs in a preferably narrow solid angle essentially in the same direction or anti-parallel to the incident processing laser beam, reliable and low-fluctuation measurements are generated.
  • the solid angle is essentially conical, the conical tip lying essentially where the machining laser beam strikes the material to be machined, from where the solid angle opens.
  • the conical solid angle within which the emitted plasma radiation is received by the light-guiding end region and passed on to the detection device, is preferably formed symmetrically to the incident processing laser beam. It should be noted that the solid angle is of course not a strictly mathematically defined solid angle, in particular the cone tip is not point-shaped, but comprises at least one surface which essentially corresponds to the diameter of the incident processing laser beam at this point.
  • the solid angles are preferably in a range from 1 ° to 20 °, in particular in a range from 5 ° to 10 °, the solid angles need not be fixed to a single fixed value by the device itself, since the solid angle in particular, for example by the distance of the laser ablation device, ie in particular the end region of the device from the material to be processed, and also through the numerical aperture of the optical elements used.
  • Figure 1 main elements of a first embodiment of an inventive device for laser ablation
  • Figure 2 shows the corresponding main elements of a device for laser ablation according to the prior art
  • Figure 3 shows in more detail some elements of a second embodiment of a device for laser ablation according to the invention.
  • FIG. 2 shows schematically some main elements of a device for laser ablation according to the prior art.
  • a laser light 212 of a specific wavelength is emitted as a processing beam from a laser light source 210.
  • the processing beam 212 passes through one or more intermediate elements 220, which are shown here only schematically as a “black box”, these in particular comprising a scanner, mirror elements, etc. sen.
  • a device according to the prior art further comprises a processing-side end element 222, which emits the processing beam 212 onto the material to be treated.
  • Part of the generated plasma radiation 240 is passed from an optical fiber 250, which is brought close to the treatment area of the material 230, to a spectrometer 260, by means of which the spectral composition of the plasma radiation is analyzed, thereby drawing conclusions about the state of the material to be treated can be drawn.
  • FIG 1 shows very schematically the main components of a device for laser ablation according to the present invention.
  • a laser light source 110 emits a processing beam 112, which is emitted onto the material 130 to be treated via intermediate elements 120 and a processing-side end element 122.
  • the plasma radiation 140 is then decoupled from an optical element 152, which is in itself placed anywhere in the beam path, and is fed via a light guide 154 to a detection device, here a spectrometer 160.
  • the optical element 152 is transparent to the wavelength of the treatment laser beam, so that on the one hand the treatment laser beam 112 from the laser light source 110 can pass through the optical element 152 to the intermediate elements 120 unhindered, and on the other hand no possibly partially reflected light of this wavelength via the light guide 154 to the Spectrometer 160 is guided so that an influence or disturbance of the measurement and evaluation of the plasma radiation is avoided.
  • FIG. 3 shows some elements of a second embodiment of a device for laser ablation according to the invention in somewhat more detail.
  • a laser light source 310 emits a processing beam 312, which is irradiated into the arrangement shown schematically at the top right in FIG.
  • a beam splitter 372 couples out a fixed relative portion of the irradiated machining beam, in the embodiment shown about 10%, whereby a reference beam 314 is generated.
  • the processing beam 312, which has now been reduced in intensity to approximately 90%, is directed by a highly reflecting mirror (HR mirror) 374 to a further HR mirror 382, which in turn the processing beam 312 via further intermediate elements 320, which are also shown in FIG
  • HR mirror highly reflecting mirror
  • further intermediate elements 320 which are also shown in FIG
  • these embodiment for example, include scanners, and a light-guiding end region 324 of the machining-side end element 322 is directed onto the material to be machined, which is not shown in FIG.
  • the light-guiding end region 324 is only shown schematically here, but in the embodiment shown here, in which the processing beam 312 and also the plasma radiation 340 are guided essentially freely, in particular by means of a cover or a cover glass, which can be realized, for example covers a handpiece interior. In principle, however, it is also possible that this light-guiding end region 324 is merely the open interior of the machining-side end element 322, but usually elements, such as a handpiece, are closed, for example by the protective glass mentioned above, in order in particular to avoid contamination, etc.
  • the reference beam 314 coupled out by the beam splitter 372 passes through a frequency converter 392, which in this embodiment is a potassium dihydrogen phosphate (KH 2 PO) KDP crystal, which leads to a frequency doubling of the reference beam 314.
  • the frequency-doubled reference beam 316 is reflected by a mirror device 386 and directed onto a further mirror device 384.
  • the mirror device 384 has a small hole or a narrow opening 385 through which the frequency-doubled reference beam 316 passes so that it strikes the mirror device 382 behind it.
  • the mirror device 382 is a dielectric mirror device which, as mentioned above, reflects the light of the wavelength of the processing beam, but is transparent to light of the frequency-doubled reference radiation, so that in the mirror device 382 the frequency-doubled reference beam 316 is coupled into the processing beam 312 and is emitted together via the intermediate elements 320 and the machining-side end element 322 onto the material to be treated, not shown here.
  • ablation creates a plasma, the light of which is radiated in a spectrally broadband manner from the material 130, 230 to be treated (hereinafter referred to as plasma radiation 340).
  • the plasma radiation 340 passes (parallel to the reflected frequency-doubled reference radiation 316) essentially anti-parallel to the incident processing laser beam 312 through the light-guiding end region 324, the processing-side end element 322, the intermediate elements 320 and then strikes the mirror device 382, which is relevant to the wavelengths the plasma radiation 340 (as for the wavelength of the frequency-doubled reference laser beam) is also transparent, so that the plasma radiation 340 with the reflected frequency-doubled reference laser radiation 316 from the mirror device 384 is highly reflective with respect to the frequency-doubled reference radiation 316 and the plasma radiation 340 is (HR mirror) to which spectrometer 360 is fed for analysis and evaluation.
  • the mirror device 386 is also a dielectric mirror device which is highly reflective for the wavelength of the frequency-doubled reference beam 316 (HR mirror), while it is transparent for non-frequency-doubled components which may not have been converted by the frequency converter 392. so that this residual radiation is coupled out in the mirror device 386.
  • the mirror device 384 provided with the opening 385 represents a very inexpensive and also reliable solution, the size of the opening 385 being selected such that the light reflected by the mirror device 386 passes directly through the opening 385, while the plasma radiation 340 generated on the material to be processed and the reflected frequency-doubled reference radiation 316 have a larger beam diameter, so that the losses caused by the radiation which are not guided through the hole 385 by the mirror device 384 into the spectrometer 360, can be neglected.
  • mirror device 384 instead of the mirror device 384 provided with the opening 385, it is also possible to provide a mirror device which is transparent to the light of the frequency-doubled reference radiation 316 in one direction, namely from right to left in FIG. 3, while it is in the other direction , in Figure 3 from left to right, is highly reflective, which, for example could also be realized by polarization-sensitive layers.
  • the effect is used that the light coming from the laser is very highly polarized, while the plasma radiation is essentially not polarized.
  • Such a mirror device increases the accuracy of the measurement results even further, but accepts greater costs.
  • the harmonic frequency of the corresponding laser light source can of course also be used.

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  • Health & Medical Sciences (AREA)
  • Surgery (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Medical Informatics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Otolaryngology (AREA)
  • Molecular Biology (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Laser Beam Processing (AREA)
  • Dental Tools And Instruments Or Auxiliary Dental Instruments (AREA)

Abstract

Dispositif d'ablation au laser de matière organique et inorganique, destiné à être utilisé en particulier dans le domaine de la médecine dentaire, qui comporte une source de lumière laser, un dispositif destiné à la détection d'au moins une partie d'un rayonnement produit par le plasma provoqué par l'ablation au laser, et un élément terminal côté traitement doté d'une zone terminale guidant la lumière. Ledit dispositif est ainsi conçu que la zone terminale guidant la lumière transmet au dispositif de détection aussi bien la lumière laser produite par la source de lumière laser pour l'ablation sur une matière à traiter, qu'une partie au moins du rayonnement du plasma produit. La présente invention concerne en outre un procédé d'ablation au laser de matière organique et inorganique dans le domaine non médical, selon lequel un faisceau laser de traitement est produit et un plasma est ensuite produit lors de l'ablation de la matière par le faisceau laser de traitement. Au moins une partie du rayonnement produit par le plasma est guidé vers un dispositif de détection, et pour l'essentiel, la partie du rayonnement du plasma produit transmise au dispositif de détection est la partie qui est émise dans un angle solide également parcouru par le faisceau de traitement envoyé sur la matière à traiter.
PCT/EP2002/003546 2001-03-29 2002-03-28 Dispositif et procede d'ablation au laser de matiere organique et inorganique WO2002078558A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10115426.7 2001-03-29
DE2001115426 DE10115426C2 (de) 2001-03-29 2001-03-29 Vorrichtung und Verfahrens zur Laser-Ablation von organischem und anorganischem Material

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WO2002078558A1 true WO2002078558A1 (fr) 2002-10-10

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DE102010028270B4 (de) * 2010-04-27 2015-02-05 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren zur Ermittlung der Laser-Bearbeitbarkeit von Blechen, Verfahren zum Laserbearbeiten von Blechen sowie Anordnungen und Computerprogrammprodukt zur Durchführung der genannten Verfahren
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DE10115426A1 (de) 2002-10-17

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