WO2002072915A1 - Conditioning agent and use thereof - Google Patents

Conditioning agent and use thereof Download PDF

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Publication number
WO2002072915A1
WO2002072915A1 PCT/JP2001/001936 JP0101936W WO02072915A1 WO 2002072915 A1 WO2002072915 A1 WO 2002072915A1 JP 0101936 W JP0101936 W JP 0101936W WO 02072915 A1 WO02072915 A1 WO 02072915A1
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Prior art keywords
peg
catalyst
palladium
degreasing
formula
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PCT/JP2001/001936
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French (fr)
Japanese (ja)
Inventor
Masami Ishikawa
Satoru Shimizu
Original Assignee
Ebara-Udylite Co., Ltd.
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Application filed by Ebara-Udylite Co., Ltd. filed Critical Ebara-Udylite Co., Ltd.
Priority to PCT/JP2001/001936 priority Critical patent/WO2002072915A1/en
Priority to JP2002571960A priority patent/JP4651266B2/en
Publication of WO2002072915A1 publication Critical patent/WO2002072915A1/en

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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/54Electroplating of non-metallic surfaces
    • C25D5/56Electroplating of non-metallic surfaces of plastics
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/18Pretreatment of the material to be coated
    • C23C18/20Pretreatment of the material to be coated of organic surfaces, e.g. resins
    • C23C18/22Roughening, e.g. by etching
    • C23C18/26Roughening, e.g. by etching using organic liquids
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/381Improvement of the adhesion between the insulating substrate and the metal by special treatment of the substrate

Definitions

  • the present invention relates to a conditioning composition for promoting the adsorption of a palladium-tin tin colloid catalyst on a non-conductive material such as plastic, and more particularly, to the use of a palladium tin tin colloid catalyst at a low concentration.
  • the present invention relates to a conditioning agent, a conditioning composition, and a method for precipitating a palladium-tin tin colloid catalyst on a nonconductive polymer material using the same.
  • a palladium-tin tin colloid catalyst (hereinafter referred to as “Pd—Sn catalyst”) was deposited on the surface of a polymer material to form a metal film on a nonconductive polymer material such as plastic.
  • a so-called plastic plating method has been used in which a so-called catalyzing treatment is performed, and then, if necessary, electroless plating is performed, followed by metal electroplating.
  • the substrate has become conductive.
  • the Pd-Sn catalyst is sufficiently and uniformly adsorbed and deposited in the catalizing process in order to accurately form a metal film on the target portion in the subsequent process. Is needed. And in order to obtain such adsorption 'precipitation, use P It was supposed that the concentration of the d—Sn catalyst solution had to be above a certain level.
  • the present inventor has conducted various studies on the conditions of the catalizing treatment, and the quality of the catalizing treatment is not limited to the Pd-Sn catalyst solution used, but also to the conditioning treatment in the preceding process. I knew it was affected. We have been studying compositions to further enhance the conditioning effect.Conditioning agents using specific polymer components and conditioning compositions prepared by combining these with other specific polymer components Can provide an excellent catalizing effect, and can deposit a Pd—Sn catalyst layer without any problem even if the concentration of the conventional Pd—Sn catalyst solution is about 1 to 3. Completed the present invention by finding that it can provide a conditioning effect did.
  • the first object of the present invention is to provide the following component (A)
  • R represents a saturated or unsaturated alkyl group having 12 to 20 carbon atoms
  • R and R s each represent a lower alkyl group, or represents a lower alkylene group
  • n and m each represent Indicate the number from 5 to 10.
  • R 6 and R 7 each represent a lower alkyl group, and I represents a number from 10 to 100
  • PEG represents a polyethylene glycol group having a molecular weight of 1,000 to 10,000
  • L 2 represents a saturated or unsaturated alkylene group having 12 to 20 carbon atoms
  • p represents 10 From 100
  • One or more polymer compounds represented by By providing a degreasing conditioning agent containing as an active ingredient.
  • the second object of the present invention is to provide the above component (A) and the following component (B),
  • R ' represents hydrogen or a lower alkyl group
  • Y represents halogen, anion sulfate, anion nitrate or anion phosphate
  • q represents a number from 100 to 10,000.
  • R 8 and R 9 represent hydrogen or a lower alkyl group, and r represents a number from 100 to 100,000
  • a further object of the present invention is to treat a non-conductive polymer material with the above-mentioned conditioning agent or conditioning composition, and then to immerse the material in a catalyst that contains a palladium-tin colloid catalyst.
  • An object of the present invention is to provide a method for depositing a palladium-tin tin colloid catalyst on a polymer material.
  • the conditioning agent of the present invention is prepared using a component (A) (first polymer component) selected from high molecular compounds represented by formulas (I) to (III) as an active ingredient.
  • the polymer compound represented by the formula (I) is composed of an acrylate monomer represented by the following formula (VII) and an acrylate monomer represented by the following formula (VI II). It has a structure in which an acid ester quaternary monomer is copolymerized.
  • examples of the ester group R include an alkyl group or an alkenyl group having 12 to 20 carbon atoms, and specific examples thereof include a stearyl group, a palmityl group, and an oleyl group.
  • group R examples of the lower alkyl group ⁇ R 5, a methyl group, Echiru group, a propyl group, an alkyl group having 1 to 4 carbon atoms.
  • examples of the lower alkenyl group include a methylene group and an ethylene group.
  • This polymer compound (I) can be obtained by copolymerizing acrylate ester monomer (VII) and acrylate quaternary monomer (VIII) according to a conventional method.
  • those of the formula (II) have, for example, a structure in which a monomer represented by the following formula (IX) is polycondensed.
  • lower alkyls represented by the formulas R 6 and R 7
  • the alkyl group include an alkyl group having 1 to 4 carbon atoms, such as a methyl group, an ethyl group, and a propyl group.
  • This polymer compound (II) is also obtained by subjecting the monomer (IX) to polycondensation according to a conventional method.
  • the polymer compound (III) has, for example, a structure in which a diamine represented by the formula (X) and polyoxyethylene are condensed, and the group represented by the formula (Ml) the L 2, stearyl group, palmityl group, Oreiru group and the like.
  • the production of the polymer compound (III) is obtained by reacting diamine (X) with polyoxyethylene according to a general method.
  • polymer compounds of the above formulas (I) to (III) are all commercially available, for example, from Nippon Oil & Fats Co., Ltd.
  • the conditioning agent of the present invention is prepared by combining one or more of the above-mentioned polymer compounds (I) to (III) with an appropriate carrier or another component as required.
  • the above-mentioned component (A) may be blended with the conditioning agent so that the concentration in the bath at the time of use is about 0.1 to 20 and preferably "! To about 5 L.
  • the composition comprises, as the first polymer component (A), a component (B) (the second polymer component) selected from the polymer compounds represented by the formulas (IV) to (VI). It is prepared by mixing and formulating in a conventional manner.
  • the lower alkyl group R ′ of the polymer compound (IV) is an alkyl group having 1 to 4 carbon atoms such as a methyl group, an ethyl group, and a propyl group. No.
  • This polymer compound (IV) is commercially available, for example, as PVAD, Diamond Clear (all manufactured by Mitsubishi Chemical Corporation), etc., and can be used.
  • the lower alkyl group of R 8 and R 9 in the polymer compounds (V) and (VI) is also an alkyl group having 1 to 4 carbon atoms such as a methyl group, an ethyl group, and a propyl group. Groups.
  • polymer compounds can be obtained by polymerizing an alkyl vinylamine represented by the following formula (XI), or by further converting the amino group of the polymer to a halogen acid such as hydrochloric acid, sulfuric acid, nitric acid, phosphoric acid or the like. It can be obtained by quaternizing with.
  • a halogen acid such as hydrochloric acid, sulfuric acid, nitric acid, phosphoric acid or the like. It can be obtained by quaternizing with.
  • Component (A) in the conditioning composition of the present invention should be incorporated into the conditioning composition in such an amount that the concentration in the bath at the time of use is about 0.1 to 20 g ZL, particularly about 1 to 5 g ZL.
  • the component (B) is preferably incorporated into the conditioning composition in such an amount that the concentration in the bath at the time of use is about 0.1 to 10 g , particularly about 1 to 5 g ZL. preferable.
  • Conditioning agent or conditioning composition of the present invention As described above, component (A) is used alone, or is prepared by combining component (B) with component (A). If necessary, a suitable carrier or other components may be added. can do.
  • Carriers or other components that can be added to the conditioning agent of the present invention ⁇ conditioning composition include organic amine compounds such as monoethanolamine and triethanolamine, and the like. Examples thereof include inorganic alkali compounds such as sodium hydroxide, sodium carbonate and sodium gay acid, and nonionic surfactants such as nonylphenol ethoxylate and secondary alcohol-ruethoxylate.
  • conditioning agents containing surfactants and surfactants such as organic amine compounds and inorganic surfactants, improve the degreasing power. Therefore, not only as a dedicated conditioner, but also as a degreasing agent. It can also be used as a conditioner.
  • the inside of the box is in a preferable range.
  • the conditioning agent of the present invention thus obtained is, like the conventional conditioner, used for electroless plating and directing without electroless plating.
  • Pd—Sn catalyst is deposited on various nonconductive polymer materials, such as substrates of plastic materials, glass epoxy resin, polyimide resin, etc. It can be used to enhance performance.
  • the conditions for using the conditioning agent and the like of the present invention are not particularly limited, and may be almost the same as those of known ones. However, the amount of the Pd-Sn catalyst contained in the catalyst may be reduced as compared with the conventional one. It is possible.
  • the conditioning agent of the present invention has a concentration of 13 which has been required so far, especially for polyimide resins in which Pd-Sn catalyst is difficult to precipitate. Even if a catalyst with a Pd—Sn catalyst concentration is used, complete precipitation can be obtained. Therefore, by performing conditioning using the conditioning agent of the present invention, the concentration of the catalyst in the subsequent process can be reduced, and as a result, the amount of the Pd—Sn catalyst extracted can be reduced. This is extremely advantageous.
  • the Pd—Sn catalyst is uniformly deposited on the non-conductive polymer material. Another characteristic is that pits and roughness are difficult to see.
  • r-Month resin binder (Table 1) 60 ° C for 5 minutes Soft etch * 1 25 ° C for 1 minute Pre-dip * 2 25 ° C for 1 minute Catalyzer * 3 30 ° C for 5 minutes Accelerator * 4 30 ° C 5 minutes Electroless copper plating * 5 25 ° C 15 minutes
  • Example 2 The same FPC substrate as in Example 1 was drilled with through holes (0.3 mm in hole diameter) as a sample, and the concentration of the catalyst (Pd concentration of the catalyst) was changed in each case of Example 1. The performance of the degreasing conditioner was compared. The processing steps other than the concentration of the catalyst and the measurement of the coverage were performed in the same manner as in Example 1. Table 2 shows the results.
  • Test degreasing conditioner composition The one having the composition was used. Table 3 shows the results. Test degreasing conditioner composition:
  • Trimethylstearylammonium chloride 5 g Monoethanolamine 0 g XL Triethanolamine 5 g / L Secondary alcohol ethoxylate 5 g / L
  • Example 2 the condition of the minimum Pd concentration at which 100% coating was obtained (Pd concentration of 3 Omg gL for the present invention, and 10 Omg gL for the comparative product 1) ), And then electroless copper
  • the substrate that had been subjected to the plating process was subsequently subjected to copper sulfate plating under the following conditions.
  • the finished surface of the obtained substrate was observed with a stereoscopic microscope, and the roughness was compared.
  • Table 4 shows the number of rough pits per cm 2 . Note that roughness and pits with a diameter of 10 m or less are difficult to distinguish, so they are indicated as the number of roughness pits.
  • a degreased conditioner (Product 4 of the present invention) was produced according to the following composition. Since this degreasing conditioner has extremely excellent wettability and permeability, it was particularly suitable for a high-ascent substrate such as a multilayer plate (a substrate having a small through-hole diameter and a large plate thickness).
  • a defatting conditioner (Product 5 of the present invention) was produced according to the following composition. This degreasing conditioner was particularly suitable for direct plating because of its high alkalinity and extremely strong conditioning action.
  • the amount of palladium adsorbed on the sample substrate when the following degreased conditioner was used was compared.
  • the treatment process was the same as in Example 1, and the amount of palladium adsorbed was calculated by dissolving the catalyst adsorbed on the substrate surface after activator with aqua regia and measuring the palladium concentration by atomic absorption. .
  • What As the sample substrate a sample in which the copper foil of a glass epoxy substrate (Matsushita, FR4) was dissolved and removed with nitric acid to expose the epoxy resin surface, and a polyimide film (Toray, Kapton) were used. Table 5 shows the results.
  • Comparative product 2 has a composition generally used at present. Compared to this, it can be seen that inventive products 6 to 8 have a large amount of palladium adsorbed and have excellent palladium adsorption properties. .
  • the co-conditioning agent and the conditioning composition of the present invention have an excellent conditioning effect, and even when a conventional catalyst having a Pd concentration of about 1 to 3 is used, sufficient catalyst precipitation can be obtained. In addition, even after electric plating, the roughness is extremely low and the performance is excellent. Therefore, it can be used advantageously as a pretreatment for plating various plastic materials and substrates as a high-performance and economical alternative to the conventionally used conditioning agents.
  • the conditioning agent of the present invention has an excellent effect on polyimide resins (particularly laser-drilled surfaces) and resins containing glass fibers, which have been considered to be ineffective with conventional conditioning agents. It is extremely useful as a conditioning composition capable of adsorbing a Pd-Sn catalyst even into micropores called through holes and blind via holes provided in a substrate.

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  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
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Abstract

A degreasing conditioning agent which comprises one or more of the following component (A); and a degreasing conditioning agent which further comprises one or more of the following component (B). The degreasing conditioning agents afford satisfactory catalyst deposition even when use is made of a catalyzer solution having a Pd concentration about 1/3 the concentration in the case of a conventional conditioning agent and also the electroplating of a surface thus catalyzed is almost free from roughness or occurrence of pits.

Description

明 細 書 コンディショニング剤およびその利用 技術分野  Description Conditioning agent and its application Technical field
本発明は、 プラスチック等の不電導物上へのパラジウム一スズコロイ ド触媒の吸着を促進させるためのコンディショニング組成物に関し、 更 に詳細には、 低濃度のパラジウム一スズコロイ ド触媒を使用しても十分 なパラジウムスズコロイ ド触媒を析出させることのできるコンデイショ ニング剤、 コンデイショニング組成物およびこれらを利用する不電導性 高分子材料上へのパラジウム一スズコロイ ド触媒の析出方法に関する。 背景技術  The present invention relates to a conditioning composition for promoting the adsorption of a palladium-tin tin colloid catalyst on a non-conductive material such as plastic, and more particularly, to the use of a palladium tin tin colloid catalyst at a low concentration. The present invention relates to a conditioning agent, a conditioning composition, and a method for precipitating a palladium-tin tin colloid catalyst on a nonconductive polymer material using the same. Background art
古くより、 プラスチック等の不電導性高分子材料上へ金属皮膜を形成 させるために、当該高分子材料表面にパラジウム一スズコロイ ド触媒(以 下、 「 P d— S n触媒」 という) を析出させる、 いわゆるキヤタライジ ング処理を行い、 その後必要により無電解めつきを施した後、 金属電気 めっきを施す、いわゆるプラスチックめっき方法が行われてきた。また、 最近のプリント配線板では、 複数のプリント基板を組み合わせ、 多層化 することが通常であり、 これらの基板間にスルホールやブラインドビア ホールを設け、 これらのホール内に析出した金属を介して各基板を導電 させるようになつてきた。  For a long time, a palladium-tin tin colloid catalyst (hereinafter referred to as “Pd—Sn catalyst”) was deposited on the surface of a polymer material to form a metal film on a nonconductive polymer material such as plastic. A so-called plastic plating method has been used in which a so-called catalyzing treatment is performed, and then, if necessary, electroless plating is performed, followed by metal electroplating. Also, in recent printed wiring boards, it is usual to combine a plurality of printed boards to form a multilayer, and to provide a through hole or a blind via hole between these boards, and to provide each through a metal deposited in these holes. The substrate has become conductive.
上記のいずれの方法においても、 後工程において目的とする部分に的 確に金属皮膜を形成させるために、 キヤタライジング処理において、 P d— S n触媒が十分に、 かつ均一に吸着■析出せしめることが必要とさ れている。 そして、 このような吸着 '析出を得るためには、 使用する P d— S n触媒液の濃度は一定以上の濃度でなければならないとされてい た。 In any of the above methods, the Pd-Sn catalyst is sufficiently and uniformly adsorbed and deposited in the catalizing process in order to accurately form a metal film on the target portion in the subsequent process. Is needed. And in order to obtain such adsorption 'precipitation, use P It was supposed that the concentration of the d—Sn catalyst solution had to be above a certain level.
しかしながら、 パラジウム自体極めて高価な金属であり、 P d—S n 触媒液の濃度が高ければ高いほど、 いわゆる 「くみ出し」 によって失わ れる触媒の量が多いため、 経済性の面では大きな問題となっており、 よ リ低い濃度の触媒液でキヤタライジング処理を行うことが強く求められ ている。  However, palladium itself is an extremely expensive metal, and the higher the concentration of the Pd—Sn catalyst solution, the greater the amount of catalyst lost by so-called “pumping”, which poses a major economic problem. Therefore, there is a strong demand for performing the catalizing treatment with a catalyst solution having a lower concentration.
従って、 この分野の課題として、 P d— S n触媒液の濃度を低下させ ながら、 均一な P d— S n触媒層を析出させることのできる手段の提供 が存在していた。 Therefore, as a problem in this field, while reducing the concentration of P d-S n catalyst solution, to provide a means capable of precipitating a uniform P d-S n catalyst layer was present.
また、 従来のコンディショニング剤ではコンデイショニング効果が弱 いとされていたポリイミ ド樹脂 (特にレーザー穴明け面) やガラス繊維 を含む樹脂にも優れたコンデイショニング効果を付与することのできる 手段も求められていた。 発明の開示  There is also a need for a means that can provide an excellent conditioning effect to polyimide resins (particularly laser-drilled surfaces) and resins containing glass fibers, which were considered to have weak conditioning effects with conventional conditioning agents. Had been. Disclosure of the invention
本発明者は、 キヤタライジング処理の条件に関し種々検討を行ってい たところ、 キヤタライジング処理の良否は、 使用する P d—S n触媒液 のみならず、 その前工程のコンディショニング処理にも大きな影響を受 けるものであることを知った。 そして、 よりコンディショニング効果を 高めるための組成物について研究していたところ、 特定の高分子成分を 使用したコンディショニング剤やこれに他の特定の高分子成分を組み合 わせて調製したコンデイショニング組成物は、 優れたキヤタライジング 効果を与えることができ、 従来の P d— S n触媒液の濃度を 1ノ 3程度 としても何ら問題のない P d— S n触媒層を析出しうるという優れたコ ンディショニング効果をできるものであることを見出し、 本発明を完成 した。 The present inventor has conducted various studies on the conditions of the catalizing treatment, and the quality of the catalizing treatment is not limited to the Pd-Sn catalyst solution used, but also to the conditioning treatment in the preceding process. I knew it was affected. We have been studying compositions to further enhance the conditioning effect.Conditioning agents using specific polymer components and conditioning compositions prepared by combining these with other specific polymer components Can provide an excellent catalizing effect, and can deposit a Pd—Sn catalyst layer without any problem even if the concentration of the conventional Pd—Sn catalyst solution is about 1 to 3. Completed the present invention by finding that it can provide a conditioning effect did.
すなわち本発明の第一の目的は、 次の成分 (A)  That is, the first object of the present invention is to provide the following component (A)
( A) 式 (1)、 (I I) または (I I I)  (A) Equation (1), (I I) or (I I I)
Figure imgf000005_0001
Figure imgf000005_0001
(式中、 Rは炭素数 1 2から 2 0の、 飽和または不飽和のアルキル基 を、 R,から Rsはそれぞれ低級アルキル基を、 しは低級アルキレン 基をそれぞれ示し、 nおよび mはそれぞれ 5から 1 0の数を示す) (In the formula, R represents a saturated or unsaturated alkyl group having 12 to 20 carbon atoms, R and R s each represent a lower alkyl group, or represents a lower alkylene group, and n and m each represent Indicate the number from 5 to 10)
Figure imgf000005_0002
Figure imgf000005_0002
(式中、 R6および R7はそれぞれ低級アルキル基を示し、 I は 1 0か ら 1 00の数を示す) (Wherein, R 6 and R 7 each represent a lower alkyl group, and I represents a number from 10 to 100)
PEG- -NH-Lr-NH-PEG- (III) PEG- -NH-Lr-NH-PEG- (III)
(式中、 P E Gは分子量 1 , 00 0から 1 0, 000のポリエチレング リコール基を示し、 L 2は炭素数 1 2から 2 0の、 飽和または不飽 和のアルキレン基を、 pは 1 0から 1 00の数を示す) (Wherein, PEG represents a polyethylene glycol group having a molecular weight of 1,000 to 10,000, L 2 represents a saturated or unsaturated alkylene group having 12 to 20 carbon atoms, and p represents 10 From 100)
で表される高分子化合物の一種または二種以上 を有効成分として含有する脱脂コンデイショニング剤を提供することで め 。 One or more polymer compounds represented by By providing a degreasing conditioning agent containing as an active ingredient.
また本発明の第二の目的は、 上記成分 (A) と下記成分 (B)、  The second object of the present invention is to provide the above component (A) and the following component (B),
(B) 次の式 (IV)、 (V) または (VI)  (B) The following formula (IV), (V) or (VI)
Figure imgf000006_0001
Figure imgf000006_0001
(式中、 R'は水素または低級アルキル基を示し、 Yはハロゲンィォ ン、 硫酸ァニオン、 硝酸ァニオンまたはリン酸ァニオンを示し、 q は 1 00から 1 0, 000の数を示す) (In the formula, R 'represents hydrogen or a lower alkyl group, Y represents halogen, anion sulfate, anion nitrate or anion phosphate, and q represents a number from 100 to 10,000.)
Figure imgf000006_0002
Figure imgf000006_0002
(式中、 R8および R9は水素または低級アルキル基を示し、 rは 1 0 0から 1 0, 000の数を示す) (Wherein, R 8 and R 9 represent hydrogen or a lower alkyl group, and r represents a number from 100 to 100,000)
Figure imgf000006_0003
Figure imgf000006_0003
(式中、 Zはハロゲンイオン、 硫酸ァニオン、 硝酸ァニオンまたはリ ン酸ァ二オンを示し、 R8、 R9および rは前記した意味を有する) で表される高分子化合物の一種または二種以上 (Wherein, Z represents a halogen ion, anion sulfate, anion nitrate or anion phosphate, and R 8 , R 9 and r have the above-mentioned meanings) One or more polymer compounds represented by
を有効成分として含有するコンデイショニング組成物を提供することで ある。 Is to provide a conditioning composition containing as an active ingredient.
更に本発明の目的は、 不電導性高分子材料を上記コンディショニング 剤ないしコンディショニング組成物で処理した後、 これをパラジウム一 スズコロイ ド触媒を含有するキヤタライザ一に浸漬処理することを特徴 とする不電導性高分子材料上へのパラジウム一スズコロイ ド触媒の析出 方法を提供することである。 発明を実施するための最良の形態  A further object of the present invention is to treat a non-conductive polymer material with the above-mentioned conditioning agent or conditioning composition, and then to immerse the material in a catalyst that contains a palladium-tin colloid catalyst. An object of the present invention is to provide a method for depositing a palladium-tin tin colloid catalyst on a polymer material. BEST MODE FOR CARRYING OUT THE INVENTION
本発明のコンディショニング剤は、 式 (I) から (I I I) で表される高 分子化合物から選ばれる成分 (A) (第一の高分子成分) を有効成分と して調製されるものである。  The conditioning agent of the present invention is prepared using a component (A) (first polymer component) selected from high molecular compounds represented by formulas (I) to (III) as an active ingredient.
この成分 (A) のうち、 式 (I) で表される高分子化合物は、 次の式 (VI I) で表されるァク リル酸エステルモノマーと、 式 (VI I I) で表さ れるァクリル酸エステル 4級化物モノマーを共重合させた構造を有する ものである。  Among the components (A), the polymer compound represented by the formula (I) is composed of an acrylate monomer represented by the following formula (VII) and an acrylate monomer represented by the following formula (VI II). It has a structure in which an acid ester quaternary monomer is copolymerized.
Figure imgf000007_0001
Figure imgf000007_0001
Figure imgf000008_0001
Figure imgf000008_0001
(式中、 R、 R,~ R5およびしは前記した意味を有する) (Wherein, R, R, ~ R 5 and L have the above-mentioned meanings)
この高分子化合物 (I) において、 エステル基 Rとしては、 炭素数 1 2から 20のアルキル基またはアルケニル基が挙げられ、 その具体例と しては、 ステアリル基、 パルミチル基、 ォレイル基等が挙げられる。 ま た、 基 R,〜 R5の低級アルキル基の例としては、 メチル基、 ェチル基、 プロピル基等、 炭素数 1から 4のアルキル基が挙げられる。 更に、 し の低級アルケニル基としては、メチレン基、エチレン基等が挙げられる。 In this polymer compound (I), examples of the ester group R include an alkyl group or an alkenyl group having 12 to 20 carbon atoms, and specific examples thereof include a stearyl group, a palmityl group, and an oleyl group. Can be Also, group R, examples of the lower alkyl group ~ R 5, a methyl group, Echiru group, a propyl group, an alkyl group having 1 to 4 carbon atoms. Furthermore, examples of the lower alkenyl group include a methylene group and an ethylene group.
この高分子化合物 (I) は、 常法に従い、 アクリル酸エステルモノマ 一 (VI I) とアクリル酸エステル 4級化物モノマー (VI I I) を共重合さ せることにより得られる。  This polymer compound (I) can be obtained by copolymerizing acrylate ester monomer (VII) and acrylate quaternary monomer (VIII) according to a conventional method.
また、 成分 (A) として用いられる高分子化合物のうち、 式 (I I) の ものは、 例えば次の式 (IX) で表されるモノマーを縮重合させた構造を 有するものである。  Further, among the high molecular compounds used as the component (A), those of the formula (II) have, for example, a structure in which a monomer represented by the following formula (IX) is polycondensed.
Figure imgf000008_0002
Figure imgf000008_0002
(式中、 Xはハロゲン等の脱離基を示し、 R6および R7は前記した意 味を有する) (In the formula, X represents a leaving group such as halogen, and R 6 and R 7 have the meaning described above.)
高分子化合物 (I I) において、 式 R6および R7で示される低級アルキ ル基としては、 メチル基、 ェチル基、 プロピル基等、 炭素数 1から 4の アルキル基が挙げられる。 In the polymer compound (II), lower alkyls represented by the formulas R 6 and R 7 Examples of the alkyl group include an alkyl group having 1 to 4 carbon atoms, such as a methyl group, an ethyl group, and a propyl group.
この高分子化合物 (II) も、 常法従い、 モノマー (IX) を縮重合させ ることにより得られるものである。  This polymer compound (II) is also obtained by subjecting the monomer (IX) to polycondensation according to a conventional method.
更に、 成分 (A) のうち、 高分子化合物 (I I I) は、 例えば式 (X) で 表されるジァミンとポリオキシエチレンを縮合させた構造を有するもの であり、 式 (M l) 中の基 L 2としては、 ステアリル基、 パルミチル基、 ォレイル基等が挙げられる。 Further, among the components (A), the polymer compound (III) has, for example, a structure in which a diamine represented by the formula (X) and polyoxyethylene are condensed, and the group represented by the formula (Ml) the L 2, stearyl group, palmityl group, Oreiru group and the like.
H2N—— L2— N2H ( X ) H 2 N—— L 2 — N 2 H (X)
この高分子化合物 (I I I) の製造は、 一般的な方法に従い、 ジァミン (X) にポリオキシエチレンを反応させることにより得られるものであ る。 The production of the polymer compound (III) is obtained by reacting diamine (X) with polyoxyethylene according to a general method.
なお、 上記の式 (I) から (III) の高分子化合物は、 いずれも市販さ れておリ、 例えば日本油脂株式会社等から入手することができる。  The polymer compounds of the above formulas (I) to (III) are all commercially available, for example, from Nippon Oil & Fats Co., Ltd.
本発明のコンディショニング剤は、 上記高分子化合物 (I) から (I I I) の何れか 1種または 2種以上を、 必要によリ適当な担体あるいは他種成 分と組み合わせることにより調製される。 上記の成分 (A) は、 使用時 の浴中濃度が 0. 1 ~ 20 し程度、 好ましくは "! 〜 5 L程度と なるようコンデイショニング剤に配合すればよい。 また、 本発明のコンディショニング組成物は、 第一の高分子成分であ る成分 (A) に式 (IV) から (VI) で表される高分子化合物から選ばれ る成分 (B) (第二の高分子成分) を常法により混合し、 製剤化するこ とによリ調製される。 第二の高分子成分である成分 (B) のうち、 高分子化合物 (IV) の低 級アルキル基 R'としては、 メチル基、 ェチル基、 プロピル基等、 炭素 数 1から 4のアルキル基が挙げられる。 この高分子化合物 (IV) は、 例 えば、 P VA D、 ダイヤクリア一 (いずれも三菱化学株式会社製) 等と して市販されているので、 これを利用することができる。 The conditioning agent of the present invention is prepared by combining one or more of the above-mentioned polymer compounds (I) to (III) with an appropriate carrier or another component as required. The above-mentioned component (A) may be blended with the conditioning agent so that the concentration in the bath at the time of use is about 0.1 to 20 and preferably "! To about 5 L. The composition comprises, as the first polymer component (A), a component (B) (the second polymer component) selected from the polymer compounds represented by the formulas (IV) to (VI). It is prepared by mixing and formulating in a conventional manner. Of the second polymer component (B), the lower alkyl group R ′ of the polymer compound (IV) is an alkyl group having 1 to 4 carbon atoms such as a methyl group, an ethyl group, and a propyl group. No. This polymer compound (IV) is commercially available, for example, as PVAD, Diamond Clear (all manufactured by Mitsubishi Chemical Corporation), etc., and can be used.
更に、 成分 (B) のうち、 高分子化合物 (V) および (VI) における R8および R9の低級アルキル基としても、 メチル基、 ェチル基、 プロピ ル基等、 炭素数 1から 4のアルキル基が挙げられる。 Further, among the component (B), the lower alkyl group of R 8 and R 9 in the polymer compounds (V) and (VI) is also an alkyl group having 1 to 4 carbon atoms such as a methyl group, an ethyl group, and a propyl group. Groups.
これらの高分子化合物は、 下記式 (XI) で表されるアルキルビニルァ ミンを重合させることにより、 あるいは更にこの重合物のアミノ基を塩 酸等のハロゲン酸や、 硫酸、 硝酸、 リン酸等で 4級化することによリ得 られるものである。  These polymer compounds can be obtained by polymerizing an alkyl vinylamine represented by the following formula (XI), or by further converting the amino group of the polymer to a halogen acid such as hydrochloric acid, sulfuric acid, nitric acid, phosphoric acid or the like. It can be obtained by quaternizing with.
H. R9 H. R 9
>ニく (XI ) > Niku (XI)
R8 NH2 R 8 NH 2
このものも、 例えば、 P VAM (三菱化学株式会社製) 等の商品名で 市販されているので、 これを利用することができる。 This is also commercially available, for example, under the trade name of P VAM (manufactured by Mitsubishi Chemical Corporation), and can be used.
本発明のコンディショニング組成物における成分 (A) は、 使用時の 浴中濃度が 0. 1 〜 20 gZ L程度、 特に 1 〜 5 gZ L程度となる量を コンデイショニング組成物中に配合することが好ましく、また成分(B) は、 使用時の浴中濃度が 0. 1 〜 1 0 g し程度、 特に 1 〜 5 gZ L程 度となる量をコンデイショニング組成物中に配合することが好ましい。 本発明のコンディショニング剤ないしコンディショニング組成物は、 前記したように、 成分 (A) 単独で、 ないしはこれと成分 (B) とを組 合せ使用することによリ調製されるが、 更に必要によリ適当な担体ある いは他種成分を添加することができる。 Component (A) in the conditioning composition of the present invention should be incorporated into the conditioning composition in such an amount that the concentration in the bath at the time of use is about 0.1 to 20 g ZL, particularly about 1 to 5 g ZL. The component (B) is preferably incorporated into the conditioning composition in such an amount that the concentration in the bath at the time of use is about 0.1 to 10 g , particularly about 1 to 5 g ZL. preferable. Conditioning agent or conditioning composition of the present invention, As described above, component (A) is used alone, or is prepared by combining component (B) with component (A). If necessary, a suitable carrier or other components may be added. can do.
本発明のコンディショニング剤ゃコンディショニング組成物 (以下、 「コンディショニング剤等」 という) に配合しうる担体ないし他種成分 と しては、 モノエタノールァミン、 トリエタノールァミン等の有機アミ ン系化合物、 水酸化ナトリウ厶、 炭酸ナトリゥム、 ゲイ酸ナ卜リゥム等 の無機アルカリ化合物、 ノニルフエノールエトキシレート、 2級アルコ —ルェトキシレー卜等のノニオン系界面活性剤等が例示される。  Carriers or other components that can be added to the conditioning agent of the present invention ゃ conditioning composition (hereinafter referred to as “conditioning agent etc.”) include organic amine compounds such as monoethanolamine and triethanolamine, and the like. Examples thereof include inorganic alkali compounds such as sodium hydroxide, sodium carbonate and sodium gay acid, and nonionic surfactants such as nonylphenol ethoxylate and secondary alcohol-ruethoxylate.
これらの成分のうち、 有機アミン系化合物や無機アル力リ化合物等の アル力リ物質や界面活性剤を配合したコンディショニング剤等は、 脱脂 力が向上するので、 専用コンディショナーとしてのみならず、 脱脂コン ディショナ一として使用することもできる。  Of these components, conditioning agents containing surfactants and surfactants, such as organic amine compounds and inorganic surfactants, improve the degreasing power. Therefore, not only as a dedicated conditioner, but also as a degreasing agent. It can also be used as a conditioner.
この脱脂コンディショナーを調製する場合の好ましい成分及びそれら の量範囲を例示すれば次の通リである。  Preferred components for preparing this defatting conditioner and their ranges of amounts are as follows.
成 分 (A) 0. 1 〜 20 gZL ( 1 ~ 5 g / L ) [ 成 分 (B) 0. 1 ~ 1 0 g/L ( 1〜 5 gZ L) ] モノエタノールァミン 2〜 30 g L (5〜 20 gZ L_) トリエタノールァミン 1〜 20 g/ L (2〜 1 0 gZし) 水酸化ナトリゥム 0~ 50 gZし (0〜 20 gZし) 炭酸ナ卜リゥ厶 0〜 50 gZ L (0〜20 gZし) ノ二オン系界面活性剤 0~ 30 g/ L (2〜 "! O gZ L)  Component (A) 0.1 to 20 gZL (1 to 5 g / L) [Component (B) 0.1 to 10 g / L (1 to 5 gZL)] Monoethanolamine 2 to 30 g L (5 to 20 gZ L_) Triethanolamine 1 to 20 g / L (2 to 10 gZ) Sodium hydroxide 0 to 50 gZ (0 to 20 gZ) Sodium carbonate 0 to 50 gZ L (0 to 20 gZ) Nonionic surfactant 0 to 30 g / L (2 to "! O gZ L)
(注) 力ッコ内は好ましい範囲 かく して得られる本発明のコンディショニング剤等は、 従来のコンデ イショナ一と同様、 無電解めつきや、 無電解めつきを行わないダイレク 卜プレーティング法 (D P S法) の前処理として、 種々の不電導性高分 子材料、 例えばプラスチック材料やガラスエポキシ樹脂、 ポリイミ ド樹 脂等の基板などに対し、 P d— S n触媒の析出性を高めるために使用す ることができる。 (Note) The inside of the box is in a preferable range. The conditioning agent of the present invention thus obtained is, like the conventional conditioner, used for electroless plating and directing without electroless plating. As a pretreatment for the plating method (DPS method), Pd—Sn catalyst is deposited on various nonconductive polymer materials, such as substrates of plastic materials, glass epoxy resin, polyimide resin, etc. It can be used to enhance performance.
本発明のコンデイショニング剤等の使用条件も特に制約はなく公知の ものとほぼ同一でよいが、 キヤタライザ一に含まれる P d— S n触媒量 は、 従来のものと比べ、 少なくすることが可能である。  The conditions for using the conditioning agent and the like of the present invention are not particularly limited, and may be almost the same as those of known ones. However, the amount of the Pd-Sn catalyst contained in the catalyst may be reduced as compared with the conventional one. It is possible.
すなわち、 後記実施例で示すように、 本発明のコンディショニング剤 等は、 特に P d— S n触媒が析出しにくいとされるポリイミ ド樹脂に対 しても、 従来要求されていた濃度の 1 3の P d— S n触媒濃度のキヤ タライザ一をもちいても、 完全な析出を得ることができるものである。 従って、 本発明のコンデイショニング剤等でコンディショニングを行 うことにより、後工程のキヤタライザ一の濃度を低下させることができ、 結果的に P d— S n触媒のくみ出し量を低減せしめるので、 経済的に極 めて有利である。  That is, as will be described in Examples below, the conditioning agent of the present invention has a concentration of 13 which has been required so far, especially for polyimide resins in which Pd-Sn catalyst is difficult to precipitate. Even if a catalyst with a Pd—Sn catalyst concentration is used, complete precipitation can be obtained. Therefore, by performing conditioning using the conditioning agent of the present invention, the concentration of the catalyst in the subsequent process can be reduced, and as a result, the amount of the Pd—Sn catalyst extracted can be reduced. This is extremely advantageous.
また、 本発明のコンディショニング剤等を使用した場合、 P d— S n 触媒が均一に不電導性高分子材料に析出するため、 従来のコンディショ ニング剤を用いた場合に比べ、 金属めつき後に、 ピッ トやざらが出にく いという特徴もある。  In addition, when the conditioning agent of the present invention is used, the Pd—Sn catalyst is uniformly deposited on the non-conductive polymer material. Another characteristic is that pits and roughness are difficult to see.
更に、 本発明のコンディショニング剤等を用いると、 幅広いキヤタラ ィザー濃度において、 P d— S n触媒の析出が得られるため、 浴管理上 もメ リツ 卜がある。 実施例  Furthermore, when the conditioning agent of the present invention is used, precipitation of the Pd—Sn catalyst can be obtained in a wide range of catalyst concentrations, and thus there is an advantage in bath management. Example
次に実施例を挙げ、 本発明を更に詳しく説明するが、 本発明はこれら 実施例等に何ら制約されるものではない。 実 施 例 1 Next, the present invention will be described in more detail with reference to examples, but the present invention is not limited to these examples. Example 1
F P C基板 (ポリィミ ド樹脂; 板厚 50 m、 両面銅箔 1 8 m) に レーザーで種々の孔径のスルホールをあけ、 下記の処理工程にて無電解 銅めつきまでを行なった。 無電解銅めつき終了後、 スルホール断面を切 リ開き、 顕微鏡で観察することにより、 スルホール内樹脂の表面の銅の 被覆率を調べた。 なお、 脱脂コンディショナーとしては、 下に示す組成 のものを用いた。 この結果を表 1に示す。 試験脱脂コンディショナー組成:  Through holes of various hole diameters were made on the FPC substrate (polyimide resin; plate thickness: 50 m, double-sided copper foil: 18 m) with a laser, and electroless copper plating was performed in the following processing steps. After the electroless copper plating, the cross section of the through hole was cut open and observed with a microscope to examine the copper coverage on the resin surface in the through hole. The degreasing conditioner used had the following composition. Table 1 shows the results. Test degreasing conditioner composition:
( 本発明品 1 )  (Invention product 1)
式 (I) の高分子 (R = C18H37、 [^〜 ^ メチル、 し=ェチ Polymer of formula (I) (R = C 18 H 37, [^ ~ ^ methyl, teeth = E Ji
レン、 n = 8、 m = 8 ) 5 g / L 式 (IV) の高分子 (R' = C3H7、 Y=- S 03H、 q = 5000 ) Ren, n = 8, m = 8 ) 5 g / L formula (IV) polymer of (R '= C 3 H 7 , Y = - S 0 3 H, q = 5000)
2 gZし モノエタノールァミン 1 0 gZL トリエタノールァミン 5 g L ノニルフエノールエ トキシレート 5 gZ L  2 gZ then monoethanolamine 10 gZL triethanolamine 5 gL nonylphenol ethoxylate 5 gZL
( 本発明品 2 )  (Invention product 2)
式 (I) の高分子 (R = C18H37、 !^〜 ^ニメチル、 し =ェチ レン、 n = 8、 m= 8 ) 5 g / L モノエタノールァミン 1 0 gZL 卜リエタノ一ルァミン 5 L ノニルフエノールエトキシレ一卜 5 gZ L Polymer of formula (I) (R = C 18 H 37,! ^ ~ ^ Nimechiru, teeth = E Ji Ren, n = 8, m = 8 ) 5 g / L monoethanolamine § Min 1 0 GZL Bok Rietano one Ruamin 5 L Nonylphenol ethoxylate 5 gZ L
( 比較品 1 )  (Comparative product 1)
卜リメチルステアリルアンモニゥム 5 gZし 結 Trimethyl stearyl ammonium 5 gZ Conclusion
クロライ ド  Chloride
モノエタノ一リレ" V 1 0 £ /し  Mono-Ethano Lily "V 10 £ /
、 / )  , /)
卜リエタノ一Jレア 5 a- / I ノ ニ Jレっ 1: ノ一ゾしェ 卜キシレ一 卜 5 g し  Trietano I J 5a- / I Non I J 1
処理工程 · Treatment process ·
r- 月兑脂コ ン丁イ ンョナー (表 1 ) 6 0 °C 5分 ソフ 卜エッチ *1 25 °C 1分 プリディップ *2 25 °C 1分 キヤタライザ一 *3 30 °C 5分 ァクセレータ *4 30 °C 5分 無電解銅めつき *5 25 °C 1 5分 r-Month resin binder (Table 1) 60 ° C for 5 minutes Soft etch * 1 25 ° C for 1 minute Pre-dip * 2 25 ° C for 1 minute Catalyzer * 3 30 ° C for 5 minutes Accelerator * 4 30 ° C 5 minutes Electroless copper plating * 5 25 ° C 15 minutes
*1 Ρ Β 2 2 8 (荏原ユージライ ト社製) 1 0 0 gノ L * 1 Ρ Β 2 2 8 (manufactured by Ebara Uji Light Co., Ltd.) 100 g L
*2 : Ρ Β 2 3 2 (荏原ユージライ ト社製) 2 0 0 g / L* 2: Ρ Β 2 3 2 (manufactured by Ebara Uji Light Co., Ltd.) 200 g / L
*3 : Ρ Β 3 1 8 (荏原ユージライ ト社製) m * 3: Ρ Β 3 1 8 (manufactured by Ebara Uji Light) m
( P dとして 30m g/ L)  (30 mg / L as Pd)
*4 : 硫 酸 1 0 0 gノ  * 4: 100 g of sulfuric acid
P B— 44 5 (荏原ユージライ ト社製) 5 m l / P B—44 5 (manufactured by EBARA Yuji Light Co., Ltd.) 5 ml /
*5 : P B 5 0 3 A F (荏原ユージライ ト社製) 1 0 0 m l / * 5: PB503AF (manufactured by Ebara Uji Light Co., Ltd.) 100 ml /
P B 5 0 3 B F (荏原ユージライ ト社製) 1 0 0 m l / PB 503 BF (manufactured by Ebara Uji Light Co., Ltd.) 100 ml /
スルホール内被覆率 (%) 穴 径 Through-hole coverage (%) Hole diameter
(mm ) 本発明品 1 本発明品 2 比較 品 1  (mm) Inventive product 1 Inventive product 2 Comparative product 1
0.2 1 00 80 30 0.2 1 00 80 30
0.3 1 00 1 00 40  0.3 1 00 1 00 40
0.4 1 00 1 00 60  0.4 1 00 1 00 60
1.0 1 00 1 00 60  1.0 1 00 1 00 60
表 1の結果が示すように、 脱脂コンディショナーに成分 (Α) と成分 (Β) を含む本発明品 1 を使用すると、 最も無電解銅めつきが析出しづ らぃポリイミ ド樹脂の 0. 2 mm 0のスルホールに対しても、 標準の 1 ノ 3以下の P d濃度であっても完全に穴内全面が被覆されることが明ら かになつた。 また、 成分 (A) を含む本発明品 2の場合も、 0. 2 mm øのスルホールでは若干劣るものの、 従来使用されていた比較品 1 と比 ベると圧倒的に被覆率が向上していることが認められた。 As shown in the results of Table 1, when the present invention 1 containing the component (Α) and the component (Β) is used in the degreasing conditioner, the electroless copper plating is hardly deposited and the 0.2 mm of polyimide resin is hardly deposited. It was clarified that even for a through hole of 0, the entire surface inside the hole was completely covered even with a standard Pd concentration of 1 to 3 or less. Also, in the case of the product 2 of the present invention containing the component (A), although the through hole of 0.2 mm ø was slightly inferior, the coverage was overwhelmingly improved as compared with the comparative product 1 conventionally used. Was admitted.
実 施 例 2 Example 2
実施例 1 と同じ F P C基板にドリルでスルホール (孔径 0. 3 mm) をあけたものを試料として用い、 キヤタライザ一の濃度 (触媒の P dの 濃度) を変化させた場合の実施例 1の各脱脂コンディショナーの性能を 比較した。 キヤタライザ一濃度以外の各処理工程および被覆率の測定は実施例 1 と同様にして行った。 この結果を表 2に示す。 The same FPC substrate as in Example 1 was drilled with through holes (0.3 mm in hole diameter) as a sample, and the concentration of the catalyst (Pd concentration of the catalyst) was changed in each case of Example 1. The performance of the degreasing conditioner was compared. The processing steps other than the concentration of the catalyst and the measurement of the coverage were performed in the same manner as in Example 1. Table 2 shows the results.
( 結 果 ) 表 2(Result) Table 2
Figure imgf000016_0001
表 2の結果から明らかなように、 従来使用されていた脱脂 'コンディシ ョナ一 (比較品 1 ) では、 穴内を完全に銅で被覆するには、 キヤタラィ ザ一中の P dが 1 0 Om gZ L以上であることが必要であつたが、 本発 明品 1 および 2では、 3 O m gZ Lで穴内を完全に銅で被覆することが できた。 実 施 例 3
Figure imgf000016_0001
As is evident from the results in Table 2, in the conventional degreasing conditioner (comparative product 1), Pd in the catalyst was 10 Om to completely cover the inside of the hole with copper. Although it was necessary to be not less than gZL, in the present invention products 1 and 2, the inside of the hole could be completely covered with copper with 3 O mg gZL. Example 3
R P C基板 (ガラス繊維入リエポキシ樹脂; 板厚 1. 6 mm、 両面銅 ¾ 1 8〃 m) にレーザ一で種々の孔径のスルホールをあけ、 実施例 1 と 結 Laser holes were used to drill throughholes of various hole diameters on an RPC board (glass epoxy resin; board thickness 1.6 mm, copper on both sides ¾18¾m). Conclusion
同様にして無電解銅めつきまでを行い、 スルホール内の樹脂の表面での 銅の被覆率を調べた。 なお、 脱脂コンディショナーとしては、 下に示す In the same manner, electroless copper plating was performed, and the copper coverage on the resin surface in the through hole was examined. The degreasing conditioner is shown below.
\ )  \)
組成のものを用いた。 この結果を表 3に示す。 試験脱脂コンディショナー組成: The one having the composition was used. Table 3 shows the results. Test degreasing conditioner composition:
( 本発明品 3 )  (Invention product 3)
式 (I I) の高分子 (Re= R7=メチル、 20 ) Polymer of formula (II) (R e = R 7 = methyl, 20)
5 g L 式 (VI) の高分子 (R8=メチル、 R9= H Z = C I 、 r = 2000 ) 5 g L 5 g L Polymer of formula (VI) (R 8 = methyl, R 9 = HZ = CI, r = 2000) 5 g L
モノエタノールァミン 1 0 g / L トリエタノールァミン 5 g X L 2級アルコールェトキシレー卜 1 0 gノ L ( 比較品 1 ) Monoethanolamine 10 g / L Triethanolamine 5 g X L Secondary alcohol ethoxylate 10 g L (Comparative product 1)
トリメチルステアリルアンモニゥムクロ ィ ド 5 gノし モノエタノールァミン 0 g X L 卜リエタノールァミン 5 g / L 2級アルコールェトキシレート 5 g / L Trimethylstearylammonium chloride 5 g Monoethanolamine 0 g XL Triethanolamine 5 g / L Secondary alcohol ethoxylate 5 g / L
3 Three
Figure imgf000018_0001
Figure imgf000018_0001
以上の結果が示すように、 本発明品 3の脱脂コンディショナーを使用 すると、 P d濃度が 3 0 m g Lと標準の 1ノ 3の濃度であっても、 一 般的に使用されている R P C基板の O . 3 mm 0の小径スルホールの穴 内全面を銅で被覆できることが明らかとなった。 As shown in the above results, when the degreasing conditioner of the present invention product 3 is used, even if the Pd concentration is 30 mg L and the standard concentration of 1 to 3, the RPC substrate commonly used is used. It became clear that the entire surface of the small through hole of O.3 mm 0 can be covered with copper.
特に、 低パラジウム濃度において、 通常でも被覆が難しいとされるガ ラス繊維上に銅が析出させたことは本発明の脱脂コンディショナ一の性 能が極めて優れたものであることを示すものである。 実 施 例 4  In particular, the deposition of copper on glass fibers, which is usually difficult to coat even at low palladium concentrations, indicates that the performance of the degreasing conditioner of the present invention is extremely excellent. . Example 4
ざらピッ 卜の発生試験 :  Rough pit generation test:
実施例 2の試験で、 1 00%被覆が得られた最低 P d濃度の条件 (本 発明 については、 P d濃度 3 Om gZ L、 比較品 1 については、 P d濃度 1 0 O m gZ L) でコンディショニング処理し、 以下無電解銅め つき処理までおこなった基板について、 引き続き下記条件によリ硫酸銅 めっきを行なった。 得られた基板について、 仕上がり表面を実体顕微鏡 で観察し、 ざらゃピッ トを比較した。 1 c m 2当たりのざらピッ 卜の個 数を表 4に示した。 なお、 直径 1 0 m以下のざらとピッ トは、 区別し にくいため、 合わせてざらピッ ト数として示した。 In the test of Example 2, the condition of the minimum Pd concentration at which 100% coating was obtained (Pd concentration of 3 Omg gL for the present invention, and 10 Omg gL for the comparative product 1) ), And then electroless copper The substrate that had been subjected to the plating process was subsequently subjected to copper sulfate plating under the following conditions. The finished surface of the obtained substrate was observed with a stereoscopic microscope, and the roughness was compared. Table 4 shows the number of rough pits per cm 2 . Note that roughness and pits with a diameter of 10 m or less are difficult to distinguish, so they are indicated as the number of roughness pits.
( 硫酸銅めつき浴組成 )  (Copper sulfate plating bath composition)
硫 酸 銅 7 5 g / L 硫 酸 1 8 0 g / L 塩素イオン 6 0 m g Z L キューブライ ト T H M I 5 m I / L Copper sulfate 75 g / L Sulfuric acid 180 g / L Chloride ion 60 mg Z L Cube light T H M I 5 m I / L
(荏原ユージライ ト (株) 製) (Manufactured by EBARA Yuji Light Co., Ltd.)
( 硫酸銅めつき条件 )  (Copper sulfate plating conditions)
電流密度 3 . 0 A / d m 2 めっき時間 5 0分 めっき温度 2 5 °C 攪 拌 エアレーシヨン ( 結 果 ) Current density 3.0 A / dm 2 Plating time 50 min Plating temperature 25 ° C Stirring air rate (result)
4 Four
Figure imgf000020_0001
Figure imgf000020_0001
以上の結果が示すように、 P d濃度が 3 Om gZ Lである本発明品を 用いてコンデイショニング処理した場合、 最終の硫酸銅めつき後のざら ピッ トが標準と比較して非常に少なかった。 これは、 素材の銅箔表面に 吸着するすずとパラジウムが均一に分散しておリ、 大きな塊が少ないた めであると解釈できる。 実 施 例 5 As shown in the above results, when the conditioning treatment was performed using the product of the present invention having a Pd concentration of 3 Omg gL, the roughness after final copper sulfate plating was much smaller than that of the standard. There were few. This can be interpreted as the fact that the tin and palladium adsorbed on the surface of the copper foil of the material were uniformly dispersed, and that there were few large lumps. Example 5
以下に示す組成により脱脂コンディショナー (本発明品 4) を製造し た。 この脱脂コンディショナーは、 濡れ性、 浸透性が非常に優れるもの であるため、 特に多層板などハイアスぺク 卜基板 (スルホール径が小さ く、 板厚が厚い基板) に適したものであった。  A degreased conditioner (Product 4 of the present invention) was produced according to the following composition. Since this degreasing conditioner has extremely excellent wettability and permeability, it was particularly suitable for a high-ascent substrate such as a multilayer plate (a substrate having a small through-hole diameter and a large plate thickness).
( 組 成 )  (Composition)
式 (I I I) の高分子 ( L2= C16H32、 P E G=分子量 4000の ポリエチレングリコール、 p = 20) 5 g / L 式 (V) の高分子 (R8= H、 R9= H、 r = 500 ) Polymer of formula (III) (L 2 = C 16 H 32 , PEG = polyethylene glycol with molecular weight 4000, p = 20) 5 g / L Polymer of formula (V) (R 8 = H, R 9 = H, r = 500)
2 g / L モノエタノールァミン 1 5 g X L 2 g / L monoethanolamine 15 g X L
2級アルコールエ トキシレート 1 0 g L ノニルフエニルエ トキシレート 5 g / L 実 施 例 6 Secondary alcohol ethoxylate 10 g L Nonylphenyl ethoxylate 5 g / L Example 6
以下に示す組成により脱脂コンディショナー (本発明品 5) を製造し た。 この脱脂コンディショナーは、 アルカリ度が高く、 コンディショニ ング作用が非常に強力なため、 特にダイレク 卜プレーティング用に適し たものであった。  A defatting conditioner (Product 5 of the present invention) was produced according to the following composition. This degreasing conditioner was particularly suitable for direct plating because of its high alkalinity and extremely strong conditioning action.
( 組 成 )  (Composition)
式 ( I ) の高分子 ( R = CBH : R1〜R5=メチル、 ェチレ ン、 n = 8 m = 8 ) 1 o κ L 式 (VI) の高分子 ( R8= C Ha R9= H、 z = c Polymer of formula (I) (R = CBH: R 1 ~R 5 = methyl, Echire emissions, n = 8 m = 8) polymer 1 o kappa L formula (VI) (R 8 = C Ha R 9 = H, z = c
r = 5000 ) 2 g κ L モノエタノールァミン 1 0 g / L 水酸化ナ卜リウム 5 g L ノニルフエノールェ トキシレ 卜 1 0 g / L 実 施 例 7  r = 5000) 2 g κL monoethanolamine 10 g / L sodium hydroxide 5 g L nonylphenol ethoxylate 10 g / L Example 7
以下に示す脱脂コンデイショナ一を使用した場合の、 試料基板上のパ ラジウム吸着量を比較した。 処理工程は、 実施例 1 と同様とし、 パラジ ゥ厶吸着量は、 ァクチべ一ター後に基板表面に吸着した触媒を王水で溶 解し、 原子吸光にてパラジウム濃度を測定することにより算出した。 な お、 試料基板としては、 ガラスエポキシ基板 (松下、 F R 4) の銅箔を 硝酸で溶解除去しエポキシ樹脂表面を露出させた試料、 およびポリィミ ドフィルム (東レ、 カプトン) を用いた。 この結果を表 5に示す。 The amount of palladium adsorbed on the sample substrate when the following degreased conditioner was used was compared. The treatment process was the same as in Example 1, and the amount of palladium adsorbed was calculated by dissolving the catalyst adsorbed on the substrate surface after activator with aqua regia and measuring the palladium concentration by atomic absorption. . What As the sample substrate, a sample in which the copper foil of a glass epoxy substrate (Matsushita, FR4) was dissolved and removed with nitric acid to expose the epoxy resin surface, and a polyimide film (Toray, Kapton) were used. Table 5 shows the results.
( コンディショナー組成 )  (Conditioner composition)
本発明品 6 :  Invention 6:
式 (I) の高分子 (R= C,8H37、 R1~RS=メチル、 ェチレ ン、 n = 8、 m= 8) 2 gZ L モノエタノールァミン 1 0 gZ L トリエタノールァミン 3 g Z LPolymer of formula (I) (R = C, 8 H 37, R 1 ~ R S = methyl, Echire emissions, n = 8, m = 8 ) 2 gZ L monoethanolamine § Min 1 0 gZ L triethanolamine § Min 3 g ZL
2級アルコールエトキシレート 5 gZ L 本発明品 7 : Secondary alcohol ethoxylate 5 gZ L Invention product 7:
式 ( I I) の高分子 ( R6= R7=メチル、 1 = 20) 2 g / L モノエタノールァミン 1 0 gZ L 卜リエタノ一ルァミン 3 gノ LPolymer of formula (II) (R 6 = R 7 = methyl, 1 = 20) 2 g / L monoethanolamine 10 gZ L Triethanolamine 3 g L
2級アルコールエトキシレート 5 g L 本発明品 8 : Secondary alcohol ethoxylate 5 g L Invention product 8:
式 (111) の高分子 ( L2= C2H4、 p = 30、 P E Gの平均分子 量は 600) 2 g / L モノエタノールァミン 1 0 gZ L トリエタノールァミン 3 g LPolymer of formula (111) (L 2 = C 2 H 4 , p = 30, average molecular weight of PEG is 600) 2 g / L monoethanolamine 10 gZL Triethanolamine 3 gL
2級アルコールエトキシレート 5 gZ L 比較品 2 : Secondary alcohol ethoxylate 5 gZ L Comparative product 2:
トリメチルステアリルアンモニゥムクロライ ド 2 gZL  Trimethyl stearyl ammonium chloride 2 gZL
モノエタノールァミン 1 0 gZL  Monoethanolamine 10 gZL
卜リエタノールァミン 3 g L  Triethanolamine 3 g L
2級アルコールェトキシレート 5 g / L ( 結 果 ) Secondary alcohol ethoxylate 5 g / L (Result)
5  Five
Figure imgf000023_0001
比較品 2は、 現在一般的に使用されている組成のものであるが、 これ と比較して本発明品 6 ~ 8は、 パラジウムの吸着量が多く、 パラジウム 吸着性が優れていることが分かる。
Figure imgf000023_0001
Comparative product 2 has a composition generally used at present.Compared to this, it can be seen that inventive products 6 to 8 have a large amount of palladium adsorbed and have excellent palladium adsorption properties. .
特に本発明品 6および 7は、 従来の脱脂コンディショナ一が苦手とす るポリイミ ドに対しても、 非常に優れた作用を示すことが明らかとなつ た。 発明の効果  In particular, it was clarified that the products 6 and 7 of the present invention exhibited an extremely excellent effect even on polyimides, which conventional degreasing conditioners are not good at. The invention's effect
本発明のコシディショニング剤およびコンデイショニング組成物は、 優れたコンディショニング作用を有し、 従来の 1ノ 3程度の P d濃度の キヤタライザ一を使用した場合であっても十分な触媒析出が得られ、 か つその後の電気めつきにおいてもざらゃピッ 卜が極めて少なく性能的に も優れたものである。 従って、 従来使用されたコンディショニング剤に変わる、 高性能で、 経済的なものとして、 各種プラスチック材料や基板等に対するめっきの 前処理として有利に使用できるものである。 The co-conditioning agent and the conditioning composition of the present invention have an excellent conditioning effect, and even when a conventional catalyst having a Pd concentration of about 1 to 3 is used, sufficient catalyst precipitation can be obtained. In addition, even after electric plating, the roughness is extremely low and the performance is excellent. Therefore, it can be used advantageously as a pretreatment for plating various plastic materials and substrates as a high-performance and economical alternative to the conventionally used conditioning agents.
特に、 本発明のコンディショニング剤等は、 従来のコンディショニン グ剤で効果が弱いとされていたポリィミ ド樹脂(特にレーザー穴明け面) やガラス繊維を含む樹脂にも優れた効果があるため、 これらの基板に設 けられるスルホールやブラインドビアホールと呼ばれる微孔内部にまで P d - S n触媒を吸着させることのできるコンディショニング組成物と して極めて有用である。  In particular, the conditioning agent of the present invention has an excellent effect on polyimide resins (particularly laser-drilled surfaces) and resins containing glass fibers, which have been considered to be ineffective with conventional conditioning agents. It is extremely useful as a conditioning composition capable of adsorbing a Pd-Sn catalyst even into micropores called through holes and blind via holes provided in a substrate.

Claims

1. 次の成分 ( A) 1. The following components (A)
(A) 式 (1)、 (I I) または (III) 青 の
Figure imgf000025_0001
(A) Formula (1), (II) or (III)
Figure imgf000025_0001
 Enclosure
(式中、 Rは炭素数 1 2から 20の、 飽和または不飽和のアルキル基 を、 から R5はそれぞれ低級アルキル基を、 しは低級アルキレン 基をそれぞれ示し、 nおよび mはそれぞれ 5から 1 0の数を示す) (Wherein, R represents a saturated or unsaturated alkyl group having 12 to 20 carbon atoms, to R 5 each represents a lower alkyl group, or R 5 represents a lower alkylene group, and n and m each represent 5 to 1 Indicates the number of 0)
Figure imgf000025_0002
Figure imgf000025_0002
(式中、 R6および R7はそれぞれ低級アルキル基を示し、 は 1 0か ら 1 00の数を示す) (Wherein, R 6 and R 7 each represent a lower alkyl group, and represents a number from 10 to 100)
PEG- -NH-Lr-NH-PEG- (III) PEG- -NH-Lr-NH-PEG- (III)
(式中、 P E Gは分子量 1 , 00 0から 1 0, 000のポリエチレング リコール基を示し、 しは炭素数 1 2から 2 0の、 飽和または不飽 和のアルキレン基を、 pは 1 0から 1 00の数を示す) で表される高分子化合物の一種または二種以上 (Wherein, PEG represents a polyethylene glycol group having a molecular weight of 1,000 to 10,000, a saturated or unsaturated alkylene group having 12 to 20 carbon atoms, and p represents (Indicates the number of 100) One or more polymer compounds represented by
を有効成分として含有するコンディショニング剤。 A conditioning agent containing as an active ingredient.
2. 更に、 アルカノールァミンを含有し、 脱脂コンディショナーとして 使用されるものである請求項 1記載のコンディショニング組成物。 2. The conditioning composition according to claim 1, further comprising an alkanolamine, which is used as a degreasing conditioner.
3. 更に、 無機アルカリ物質および またはノニオン系界面活性剤を含 有し、 脱脂コンディショナーとして使用されるものである請求項第 1項 記載の脱脂コンディショニング剤。 3. The degreasing conditioning agent according to claim 1, further comprising an inorganic alkali substance and / or a nonionic surfactant, which is used as a degreasing conditioner.
4. 不電導性高分子材料を次の成分 (A) 4. Non-conductive polymer material is composed of the following components (A)
(A) 式 (l)、 (I I) または (I II)  (A) Formula (l), (I I) or (I II)
Figure imgf000026_0001
Figure imgf000026_0001
(式中、 R、 R,から R5、 u nおよび mはそれぞれ前記の意味を有 する) (Wherein, R, R, to R 5 , un and m have the above-mentioned meanings, respectively)
Figure imgf000026_0002
Figure imgf000026_0002
(式中、 R6、 R7および I はそれぞれ前記した意味を有する) PEG- -NH-Lr-NH-PEG- (III) (Wherein, R 6 , R 7 and I have the meanings described above, respectively) PEG- -NH-Lr-NH-PEG- (III)
(式中、 P E G、 L2および pはそれぞれ前記した意味を有する) で表される高分子化合物の一種または二種以上 (Wherein PEG, L 2 and p have the same meanings as described above), respectively.
を有効成分として含有するコンディショニング剤で処理した後、 これを パラジウム一スズコロイ ド触媒を含有するキヤタライザ一に浸漬処理す ることを特徴とする不電導性高分子材料上へのパラジウム一スズコロイ ド触媒の析出方法。 After treating with a conditioning agent containing palladium-tin as an active ingredient, this is immersed in a catalyst containing a palladium-tin-colloid catalyst. Deposition method.
5. キヤタライザ一中のパラジウム一スズコロイ ド触媒の金属パラジゥ ムに換算した濃度が、 1 00m g /m Lないし 3 0 m g / m Lである請 求項第 4項記載の不電導性高分子材料上へのパラジウム一スズコロイ ド 触媒の析出方法。 5. The non-conductive polymer material according to claim 4, wherein the concentration of the palladium-tin colloid catalyst in the catalyst in terms of metal palladium is from 100 mg / mL to 30 mg / mL. Method for depositing palladium-tin colloid catalyst on top.
6. 次の成分 (A) および (B)、 6. The following components (A) and (B),
(A) 次の式 (l)、 (I I) または (I I I)  (A) The following formula (l), (I I) or (I I I)
Figure imgf000027_0001
Figure imgf000027_0001
(式中、 R、 から R5、 L nおよび mはそれぞれ前記した意味を 有する)
Figure imgf000028_0001
(Wherein, R to R 5 , L n and m each have the meaning described above)
Figure imgf000028_0001
(式中、 R6、 R7および I はそれぞれ前記した意味を有する) (Wherein, R 6 , R 7 and I have the meanings described above, respectively)
PEG—f— NH- L厂 NH- PEG- (III) PEG—f— NH-L-Factory NH-PEG- (III)
(式中、 P E G、 しおよび pはそれぞれ前記した意味を有する) で表される高分子化合物の一種または二種以上、 (Wherein, P EG, p and p have the above-mentioned meanings, respectively)
(B) 次の式 (IV)、 (V) または (VI) (B) The following formula (IV), (V) or (VI)
Figure imgf000028_0002
Figure imgf000028_0002
(式中、 R'は水素または低級アルキル基を示し、 Yはハロゲンィォ ン、 硫酸ァニオン、 硝酸ァニオンまたはリン酸ァニオンを示し、 q は 1 0 0から 1 0, 000の数を示す) (In the formula, R 'represents hydrogen or a lower alkyl group, Y represents halogen, anion sulfate, anion nitrate or anion phosphate, and q represents a number from 100 to 10,000.)
Figure imgf000028_0003
Figure imgf000028_0003
(式中、 R8および Rsは水素または低級アルキル基を示し、 rは 1 0 0から 1 0, O 00の数を示す) (Wherein, R 8 and R s represent hydrogen or a lower alkyl group, and r is 10 0 to 10 0, indicating the number of O 00)
Figure imgf000029_0001
Figure imgf000029_0001
(式中、 Zはハロゲンイオン、 硫酸ァニオン、 硝酸ァニオンまたはリ ン酸ァ二オンを示し、 R8、 R9および rは前記した意味を有する) で表される高分子化合物の一種または二種以上 (In the formula, Z represents a halogen ion, anion sulfate, anion nitrate or anion phosphate, and R 8 , R 9 and r have the same meanings as described above.) that's all
を有効成分として含有するコンデイショニング組成物。 A conditioning composition containing as an active ingredient.
7. 更に、 アルカノールァミンを含有し、 脱脂コンディショナーとして 使用されるものである請求項 6記載のコンディショニング組成物。 7. The conditioning composition according to claim 6, further comprising an alkanolamine, which is used as a degreasing conditioner.
8. 更に、 無機アルカリ物質および またはノニオン系界面活性剤を含 有し、 脱脂コンディショナーとして使用されるものである請求項第 6項 記載の脱脂コンディショニング組成物。 8. The degreasing conditioning composition according to claim 6, further comprising an inorganic alkali substance and / or a nonionic surfactant, and used as a degreasing conditioner.
9. 不電導性高分子材料を次の成分 (A) および (B)、 9. The non-conductive polymer material is composed of the following components (A) and (B),
(A) 次の式 (1)、 (I I) または (111)  (A) The following equation (1), (I I) or (111)
Figure imgf000029_0002
(式中、 R、 R,から R5、 Lu nおよび mはそれぞれ前記した意味を 有する)
Figure imgf000029_0002
(Wherein, R, R, to R 5 , Lu n and m have the above-mentioned meanings, respectively)
Figure imgf000030_0001
Figure imgf000030_0001
(式中、 R6、 R7および I はそれぞれ前記した意味を有する) (Wherein, R 6 , R 7 and I have the meanings described above, respectively)
PEG—H NH-Lr-NH-PEG- (III) PEG—H NH-Lr-NH-PEG- (III)
(式中、 P E G、 L2および pはそれぞれ前記した意味を有する) で表される高分子化合物の一種または二種以上、 (Wherein PEG, L 2 and p have the above-mentioned meanings, respectively)
(B) 次の式 (IV)、 (V) または (VI) (B) The following formula (IV), (V) or (VI)
Figure imgf000030_0002
Figure imgf000030_0002
(式中、 R'、 Yおよび qはそれぞれ前記した意味を有する) (Wherein, R ′, Y and q have the meanings described above, respectively)
Figure imgf000030_0003
Figure imgf000030_0003
(式中、 R8、 R9および rはそれぞれ前記した意味を有する)
Figure imgf000031_0001
(Wherein, R 8 , R 9 and r each have the meaning described above)
Figure imgf000031_0001
(式中、 Z、 R8、 R9および rはそれぞれ前記した意味を有する) で表される高分子化合物の一種または二種以上 (Wherein, Z, R 8 , R 9 and r have the above-mentioned meanings, respectively)
を有効成分として含有するコンディショニング組成物で処理した後、 こ れをパラジウム一スズコロイ ド触媒を含有するキヤタライザ一に浸漬処 理することを特徴とする不電導性高分子材料上へのパラジウム一スズコ ロイ ド触媒の析出方法。 After treating with a conditioning composition containing as an active ingredient, this is immersed in a catalyzer containing a palladium-tin colloid catalyst, wherein the palladium-tin colloid is coated on a nonconductive polymer material. Method of depositing catalyst.
1 0. キヤタライザ一中のパラジウム一スズコロイ ド触媒の金属パラジ ゥムに換算した濃度が、 1 00m g /m Lないし 3 0 m g /m Lである 請求項第 9項記載の不電導性高分子材料上へのパラジウム一スズコロイ ド触媒の析出方法。 10. The non-conductive polymer according to claim 9, wherein the concentration of the palladium-tin tin colloid catalyst in the catalyst in terms of metal palladium is from 100 mg / mL to 30 mg / mL. Method for depositing palladium-tin colloid catalyst on materials.
PCT/JP2001/001936 2001-03-13 2001-03-13 Conditioning agent and use thereof WO2002072915A1 (en)

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Citations (2)

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EP0707093A1 (en) * 1994-10-14 1996-04-17 Macdermid Incorporated Composition and method for selective plating
JP2000282245A (en) * 1999-03-30 2000-10-10 Ebara Udylite Kk CONDITIONER COMPOSITION AND METHOD FOR INCREASING AMOUNT OF Pd-Sn COLLOIDAL CATALYST TO BE ADSORBED USING THE SAME

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GB2155919B (en) * 1984-03-20 1987-12-02 Dearborn Chemicals Ltd A method of inhibiting corrosion in aqueous systems
GB2159511B (en) * 1984-04-25 1988-09-21 Dearborn Chemicals Ltd A method of inhibiting corrosion in aqueous systems
JPH0426771A (en) * 1990-05-22 1992-01-29 Hitachi Chem Co Ltd Pretreating solution for electroless plating
JPH0426770A (en) * 1990-05-22 1992-01-29 Hitachi Chem Co Ltd Electroless plating method
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JP4194189B2 (en) * 1999-09-16 2008-12-10 荏原ユージライト株式会社 Conditioning agent

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0707093A1 (en) * 1994-10-14 1996-04-17 Macdermid Incorporated Composition and method for selective plating
JP2000282245A (en) * 1999-03-30 2000-10-10 Ebara Udylite Kk CONDITIONER COMPOSITION AND METHOD FOR INCREASING AMOUNT OF Pd-Sn COLLOIDAL CATALYST TO BE ADSORBED USING THE SAME

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