WO2002067278A3 - Electrolytic capacitors and method for making them - Google Patents

Electrolytic capacitors and method for making them Download PDF

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Publication number
WO2002067278A3
WO2002067278A3 PCT/IL2002/000140 IL0200140W WO02067278A3 WO 2002067278 A3 WO2002067278 A3 WO 2002067278A3 IL 0200140 W IL0200140 W IL 0200140W WO 02067278 A3 WO02067278 A3 WO 02067278A3
Authority
WO
WIPO (PCT)
Prior art keywords
film
making
valve
oxides
superimposed
Prior art date
Application number
PCT/IL2002/000140
Other languages
French (fr)
Other versions
WO2002067278A2 (en
Inventor
Dina Katsir
Zvi Finkelstein
Original Assignee
Acktar Ltd
Dina Katsir
Zvi Finkelstein
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Acktar Ltd, Dina Katsir, Zvi Finkelstein filed Critical Acktar Ltd
Priority to EP02700547A priority Critical patent/EP1382048A4/en
Priority to JP2002566510A priority patent/JP4390456B2/en
Priority to AU2002233612A priority patent/AU2002233612A1/en
Publication of WO2002067278A2 publication Critical patent/WO2002067278A2/en
Publication of WO2002067278A3 publication Critical patent/WO2002067278A3/en
Priority to US10/646,229 priority patent/US6865071B2/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/004—Details
    • H01G9/04—Electrodes or formation of dielectric layers thereon
    • H01G9/042—Electrodes or formation of dielectric layers thereon characterised by the material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/15—Solid electrolytic capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
    • H05K1/162—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/0029—Processes of manufacture
    • H01G9/0032—Processes of manufacture formation of the dielectric layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/0029—Processes of manufacture
    • H01G9/0036—Formation of the solid electrolyte layer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03—Metal processing
    • H05K2203/0315—Oxidising metal

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

A method for making an integrated electrolytic capacitor wherein a substrate (40) is coated with at least one sequence of each of the following layers: a vacuum deposited film (42) having a high specific surface area, which is selected from the group consisting of valve metals and mixtures of valve metals with valve metal oxides; superimposed on the film having a high specific surface area, at least one dielectric film (46) comprising a substance selected from the group consisting of valve metal oxides, their complex oxides with at least one rare earth metal and their complex oxides with at least one alkaline earth metal; and a solid electrolyte film (48) superimposed on the at least one film.
PCT/IL2002/000140 1998-03-03 2002-02-21 Electrolytic capacitors and method for making them WO2002067278A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP02700547A EP1382048A4 (en) 2001-02-22 2002-02-21 Electrolytic capacitors and method for making them
JP2002566510A JP4390456B2 (en) 2001-02-22 2002-02-21 Electrolytic capacitor and manufacturing method thereof
AU2002233612A AU2002233612A1 (en) 2001-02-22 2002-02-21 Electrolytic capacitors and method for making them
US10/646,229 US6865071B2 (en) 1998-03-03 2003-08-22 Electrolytic capacitors and method for making them

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IL141592A IL141592A (en) 2001-02-22 2001-02-22 Electrolytic capacitors and method for making them
IL141592 2001-02-22

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US09/033,664 Continuation-In-Part US6287673B1 (en) 1998-03-03 1998-03-03 Method for producing high surface area foil electrodes

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US10/646,229 Continuation-In-Part US6865071B2 (en) 1998-03-03 2003-08-22 Electrolytic capacitors and method for making them

Publications (2)

Publication Number Publication Date
WO2002067278A2 WO2002067278A2 (en) 2002-08-29
WO2002067278A3 true WO2002067278A3 (en) 2002-12-27

Family

ID=11075164

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2002/000140 WO2002067278A2 (en) 1998-03-03 2002-02-21 Electrolytic capacitors and method for making them

Country Status (5)

Country Link
EP (1) EP1382048A4 (en)
JP (1) JP4390456B2 (en)
AU (1) AU2002233612A1 (en)
IL (1) IL141592A (en)
WO (1) WO2002067278A2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7388740B2 (en) * 2003-03-31 2008-06-17 Toyo Aluminium Kabushiki Kaisha Foil for negative electrode of capacitor and process for producing the same
US7149076B2 (en) 2003-07-15 2006-12-12 Cabot Corporation Capacitor anode formed of metallic columns on a substrate
JP4561428B2 (en) * 2004-07-05 2010-10-13 住友金属鉱山株式会社 Porous valve metal thin film, manufacturing method thereof, and thin film capacitor
JP4561293B2 (en) * 2004-10-08 2010-10-13 住友金属鉱山株式会社 Thin film capacitor, circuit component having thin film resistor, and manufacturing method thereof
IL173121A (en) * 2006-01-12 2011-07-31 Dina Katsir Electrodes, membranes, printing plate precursors and other articles including multi-strata porous coatings
JP2008258230A (en) * 2007-03-31 2008-10-23 Nippon Chemicon Corp Solid electrolytic capacitor
CN101981636B (en) * 2008-04-08 2013-09-11 株式会社村田制作所 Capacitor and method for manufacturing the same
US8654509B2 (en) 2010-02-15 2014-02-18 Panasonic Corporation Electrode foil, process for producing same, and capacitor using electrode foil
JP5692726B2 (en) * 2010-08-31 2015-04-01 国立大学法人 鹿児島大学 Method for producing aluminum thin film
JP2023516903A (en) * 2020-02-06 2023-04-21 サラス・マイクロ・デバイス・インコーポレイテッド Modified Metal Foil Capacitor and Method for Manufacturing Modified Metal Foil Capacitor

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4309810A (en) * 1979-08-09 1982-01-12 International Standard Electric Corporation Porous metal films
JPH01119012A (en) * 1987-10-30 1989-05-11 Marcon Electron Co Ltd Solid electrolytic capacitor
US4970626A (en) * 1987-07-30 1990-11-13 Matsushita Electric Industrial Co., Ltd. Electrolytic capacitor and method of preparing it
US5357399A (en) * 1992-09-25 1994-10-18 Avx Corporation Mass production method for the manufacture of surface mount solid state capacitor and resulting capacitor
US5482743A (en) * 1992-02-14 1996-01-09 Satma Manufacturing a plate for an electrode of an electrolytic condenser
US5571158A (en) * 1991-08-06 1996-11-05 Biotronik Mess- Und Therapiegeraete Gmbh & Co. Ingenieurbuero Berlin Stimulation Electrode
US6325831B1 (en) * 1998-04-20 2001-12-04 Becromal S.P.A. Process for the production of an anode for an electrolytic capacitor

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4895548A (en) * 1972-03-17 1973-12-07
JPS6057693B2 (en) * 1979-05-29 1985-12-16 松下電器産業株式会社 metal oxide capacitor
US4453199A (en) 1983-06-17 1984-06-05 Avx Corporation Low cost thin film capacitor
US5851871A (en) 1987-12-23 1998-12-22 Sgs-Thomson Microelectronics, S.R.L. Process for manufacturing integrated capacitors in MOS technology
JP2764745B2 (en) * 1989-07-21 1998-06-11 オムロン株式会社 Hybrid circuit board and method of manufacturing the same
JP3155750B2 (en) * 1990-06-08 2001-04-16 日本ケミコン株式会社 Method for producing aluminum electrode for electrolytic capacitor
JPH0444204A (en) * 1990-06-08 1992-02-14 Nippon Chemicon Corp Aluminum electrode for electrolytic capacitor
US5589416A (en) 1995-12-06 1996-12-31 Lucent Technologies Inc. Process for forming integrated capacitors
US6287673B1 (en) * 1998-03-03 2001-09-11 Acktar Ltd. Method for producing high surface area foil electrodes
IT1307557B1 (en) * 1999-04-14 2001-11-14 Becromal Spa ELECTRODES FOR ELECTROLYTIC CAPACITORS AND THEIR MANUFACTURING PROCESS BY VACUUM VAPORATION.

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4309810A (en) * 1979-08-09 1982-01-12 International Standard Electric Corporation Porous metal films
US4970626A (en) * 1987-07-30 1990-11-13 Matsushita Electric Industrial Co., Ltd. Electrolytic capacitor and method of preparing it
JPH01119012A (en) * 1987-10-30 1989-05-11 Marcon Electron Co Ltd Solid electrolytic capacitor
US5571158A (en) * 1991-08-06 1996-11-05 Biotronik Mess- Und Therapiegeraete Gmbh & Co. Ingenieurbuero Berlin Stimulation Electrode
US5482743A (en) * 1992-02-14 1996-01-09 Satma Manufacturing a plate for an electrode of an electrolytic condenser
US5357399A (en) * 1992-09-25 1994-10-18 Avx Corporation Mass production method for the manufacture of surface mount solid state capacitor and resulting capacitor
US6325831B1 (en) * 1998-04-20 2001-12-04 Becromal S.P.A. Process for the production of an anode for an electrolytic capacitor

Also Published As

Publication number Publication date
AU2002233612A1 (en) 2002-09-04
IL141592A (en) 2007-02-11
WO2002067278A2 (en) 2002-08-29
JP2004524686A (en) 2004-08-12
JP4390456B2 (en) 2009-12-24
IL141592A0 (en) 2002-03-10
EP1382048A2 (en) 2004-01-21
EP1382048A4 (en) 2008-05-28

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