WO2002048777A3 - Micro-actionneur optique, composant optique utilisant le micro-actionneur, et procede de realisation d'un micro-actionneur optique - Google Patents

Micro-actionneur optique, composant optique utilisant le micro-actionneur, et procede de realisation d'un micro-actionneur optique Download PDF

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Publication number
WO2002048777A3
WO2002048777A3 PCT/FR2001/003895 FR0103895W WO0248777A3 WO 2002048777 A3 WO2002048777 A3 WO 2002048777A3 FR 0103895 W FR0103895 W FR 0103895W WO 0248777 A3 WO0248777 A3 WO 0248777A3
Authority
WO
WIPO (PCT)
Prior art keywords
optical
actuator
micro
optical micro
making
Prior art date
Application number
PCT/FR2001/003895
Other languages
English (en)
Other versions
WO2002048777A2 (fr
Inventor
Claire Divoux
Claude Chabrol
Original Assignee
Commissariat Energie Atomique
Claire Divoux
Claude Chabrol
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique, Claire Divoux, Claude Chabrol filed Critical Commissariat Energie Atomique
Priority to US10/433,752 priority Critical patent/US20040091201A1/en
Priority to EP01270800A priority patent/EP1356336A2/fr
Priority to JP2002550027A priority patent/JP2004526177A/ja
Publication of WO2002048777A2 publication Critical patent/WO2002048777A2/fr
Publication of WO2002048777A3 publication Critical patent/WO2002048777A3/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3538—Optical coupling means having switching means based on displacement or deformation of a liquid
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/3552—1x1 switch, e.g. on/off switch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

La présente invention concerne un micro-actionneur optique comportant une cavité (30) ménagée entre au moins une voie optique d'entrée (12, 12a, 12b) et au moins une voie optique de sortie (14, 14a, 14b), la cavité étant apte à contenir au moins un premi er et un deuxième fluides optiques (32, 33, 34, 35), avec des propriétés optiques différentes, et des moyens pour modifier la position d'une interface entre les premier et deuxième fluides optiques par rapport aux voies optiques. Conformément à l'invention, les moyens pour modifier la position de l'interface comportent au moins une chambre, contenant au moins un fluide, en relation fluidique avec la cavité, et des moyens pour modifier le volume de la chambre. Application à la réalisation de commutateurs et de brasseurs optiques.
PCT/FR2001/003895 2000-12-12 2001-12-10 Micro-actionneur optique, composant optique utilisant le micro-actionneur, et procede de realisation d'un micro-actionneur optique WO2002048777A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US10/433,752 US20040091201A1 (en) 2000-12-12 2001-12-10 Optical micro-actuator, optical component using the same, and method for making an optical micro-actuator
EP01270800A EP1356336A2 (fr) 2000-12-12 2001-12-10 Micro-actionneur optique, composant optique utilisant le micro-actionneur, et procede de realisation d'un micro-actionneur optique
JP2002550027A JP2004526177A (ja) 2000-12-12 2001-12-10 光学的マイクロアクチュエータおよびこのマイクロアクチュエータを使用した光学素子ならびに光学的マイクロアクチュエータの製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0016148 2000-12-12
FR0016148A FR2817974B1 (fr) 2000-12-12 2000-12-12 Micro-actionneur optique, composant optique utilisant le micro-actionneur, et procede de realisation d'un micro-actionneur optique

Publications (2)

Publication Number Publication Date
WO2002048777A2 WO2002048777A2 (fr) 2002-06-20
WO2002048777A3 true WO2002048777A3 (fr) 2003-08-14

Family

ID=8857540

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2001/003895 WO2002048777A2 (fr) 2000-12-12 2001-12-10 Micro-actionneur optique, composant optique utilisant le micro-actionneur, et procede de realisation d'un micro-actionneur optique

Country Status (5)

Country Link
US (1) US20040091201A1 (fr)
EP (1) EP1356336A2 (fr)
JP (1) JP2004526177A (fr)
FR (1) FR2817974B1 (fr)
WO (1) WO2002048777A2 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2848477B1 (fr) * 2002-12-17 2006-03-24 Commissariat Energie Atomique Procede et dispositif de confinement d'un liquide
GB2404035A (en) * 2003-07-17 2005-01-19 Dow Corning Ltd Electro-optic gap-cell for waveguide deployment
US7072536B2 (en) * 2003-12-11 2006-07-04 Gary Neal Poovey Light triggered light switch
US7532786B2 (en) 2004-08-30 2009-05-12 Poovey Gary N Light activated optical switch that includes a piezoelectric element with layers of piezoelectric material having different piezoelectric characteristics
FR2889633A1 (fr) * 2005-08-08 2007-02-09 Commissariat Energie Atomique Dispositif d'actionnement a membrane flexible commandee par electromouillage
FR2912514B1 (fr) * 2007-02-12 2009-10-09 Ujf Filiale Soc Par Actions Si Systeme optique transmissif a caracteristiques variables.
US9271706B2 (en) * 2008-08-12 2016-03-01 Covidien Lp Medical device for wound closure and method of use
US9952358B2 (en) * 2015-04-11 2018-04-24 Corning Incorporated Method to prevent emulsion in a liquid lens
EP3411740A1 (fr) * 2016-02-04 2018-12-12 CommScope Connectivity Belgium BVBA Commutateurs optiques intégrés utilisant des liquides deutérés pour bande passante accrue
FR3076292B1 (fr) * 2017-12-28 2020-01-03 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de transfert d'une couche utile sur un substrat support

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4505539A (en) * 1981-09-30 1985-03-19 Siemens Aktiengesellschaft Optical device or switch for controlling radiation conducted in an optical waveguide
DE3523209A1 (de) * 1985-06-28 1987-01-02 Philips Patentverwaltung Optischer schalter
EP0494768A2 (fr) * 1991-01-08 1992-07-15 Nippon Telegraph And Telephone Corporation Système de répartition principal optique automatisé
DE19527566A1 (de) * 1995-07-27 1997-01-30 Sel Alcatel Ag Optischer Umschalter
EP0813088A1 (fr) * 1996-06-14 1997-12-17 Hewlett-Packard Company Commutateurs optiques du type à réflexion interne totale à activation thermique
DE19711559A1 (de) * 1997-03-20 1998-10-01 Inst Mikrotechnik Mainz Gmbh Optischer Mehrfachschalter
EP0880040A2 (fr) * 1997-05-15 1998-11-25 Lucent Technologies Inc. Commutateur optique micro-usiné

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CH159709A (de) * 1931-05-19 1933-01-31 Carl Dr Mueller Vorrichtung zur Beeinflussung von Strahlen durch Formänderung einer spiegelnden Fläche und Verfahren zur Herstellung derselben.
US4121884A (en) * 1976-10-08 1978-10-24 International Standard Electric Corporation Optical fiber switch
US4245886A (en) * 1979-09-10 1981-01-20 International Business Machines Corporation Fiber optics light switch
JPS5872919A (ja) * 1981-10-28 1983-05-02 Ricoh Co Ltd 光スイツチアレイ
FR2524658A1 (fr) * 1982-03-30 1983-10-07 Socapex Commutateur optique et matrice de commutation comprenant de tels commutateurs
US4615580A (en) * 1984-03-05 1986-10-07 Ricoh Company, Ltd. Fiber optic high speed pulse scanner
US4988157A (en) * 1990-03-08 1991-01-29 Bell Communications Research, Inc. Optical switch using bubbles
ATE119241T1 (de) * 1990-07-10 1995-03-15 Westonbridge Int Ltd Ventil, methode zur herstellung dises ventils und mit diesem ventil versehene mikropumpe.
US6407835B1 (en) * 1999-03-05 2002-06-18 Agilent Technologies, Inc. Single site for healing dual optical rings
BR0011982B1 (pt) * 1999-06-28 2009-05-05 estrutura elastomérica, método de atuação de uma estrutura elastomérica, método de controle de fluido ou gás através de uma estrutura elastomérica, método de micro-fabricação de uma estrutura elastomérica, uso de uma membrana flexìvel, uso de camadas elastoméricas unidas, uso de um material elastomérico e estrutura elastomérica micro-fabricada.
US6694071B2 (en) * 2000-09-19 2004-02-17 Newport Opticom, Inc. Method and apparatus for switching optical signals using rotatable optically transmissive microstructure

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4505539A (en) * 1981-09-30 1985-03-19 Siemens Aktiengesellschaft Optical device or switch for controlling radiation conducted in an optical waveguide
DE3523209A1 (de) * 1985-06-28 1987-01-02 Philips Patentverwaltung Optischer schalter
EP0494768A2 (fr) * 1991-01-08 1992-07-15 Nippon Telegraph And Telephone Corporation Système de répartition principal optique automatisé
DE19527566A1 (de) * 1995-07-27 1997-01-30 Sel Alcatel Ag Optischer Umschalter
EP0813088A1 (fr) * 1996-06-14 1997-12-17 Hewlett-Packard Company Commutateurs optiques du type à réflexion interne totale à activation thermique
DE19711559A1 (de) * 1997-03-20 1998-10-01 Inst Mikrotechnik Mainz Gmbh Optischer Mehrfachschalter
EP0880040A2 (fr) * 1997-05-15 1998-11-25 Lucent Technologies Inc. Commutateur optique micro-usiné

Also Published As

Publication number Publication date
FR2817974A1 (fr) 2002-06-14
US20040091201A1 (en) 2004-05-13
WO2002048777A2 (fr) 2002-06-20
FR2817974B1 (fr) 2003-09-12
JP2004526177A (ja) 2004-08-26
EP1356336A2 (fr) 2003-10-29

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