WO2002030163A1 - Appareil pour maitriser l'electricite statique a l'aide de particules ultra-fines - Google Patents

Appareil pour maitriser l'electricite statique a l'aide de particules ultra-fines Download PDF

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Publication number
WO2002030163A1
WO2002030163A1 PCT/KR2001/001579 KR0101579W WO0230163A1 WO 2002030163 A1 WO2002030163 A1 WO 2002030163A1 KR 0101579 W KR0101579 W KR 0101579W WO 0230163 A1 WO0230163 A1 WO 0230163A1
Authority
WO
WIPO (PCT)
Prior art keywords
ultra
high voltage
static electricity
fine particles
capillary
Prior art date
Application number
PCT/KR2001/001579
Other languages
English (en)
Inventor
Kang-Ho Ahn
Kwang-Young Kim
Bong-Am Choi
Jin-Hong Ahn
Original Assignee
Ace Lab. Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ace Lab. Inc. filed Critical Ace Lab. Inc.
Priority to AU2001292382A priority Critical patent/AU2001292382A1/en
Publication of WO2002030163A1 publication Critical patent/WO2002030163A1/fr

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/025—Discharge apparatus, e.g. electrostatic spray guns

Definitions

  • the present invention relates to an apparatus for controlling static electricity, and more particularly, to an apparatus for controlling static electricity using highly charged ultra-fine particles with positive and negative polarities, which are generated by Electro-Hydrodynamic Atomization (EHDA) or Electrospraying.
  • EHDA Electro-Hydrodynamic Atomization
  • corona discharge has been currently applied to a conventional apparatus for controlling static electricity by ionizing air.
  • the apparatus using the corona discharge causes the air around the apparatus to pass through a corona discharge area so that the air is charged.
  • the static electricity is controllably neutralized by increasing the electrical conductivity of the air.
  • Air is generally a nonconductor of electricity through which the electricity cannot flow.
  • the electrical conductivity of the air is also increased.
  • the apparatus for controlling the static electricity using such corona discharge is a well-known technique, the detailed explanation of the constitution and operation thereof will be omitted.
  • a high voltage of 5 kV or higher should be applied to corona discharge electrodes.
  • the electrodes corrode and wear away due to any sputtering phenomenon, collisions of fine particles present at the corona discharge area by any electromagnetic induction thereof, and the like.
  • This problem causes an ultra-clean room such as a semiconductor fabrication line to be contaminated by the particles.
  • An object of the present invention is to provide an apparatus for controlling static electricity using ultra-fine particles, wherein the static electricity is easily controlled and its control efficiency is improved by using the highly charged ultra-fine particles.
  • Another object of the present invention is to provide an apparatus for controlling static electricity using ultra-fme particles, wherein no ozone which is harmful to the human body and is adversely affected to processes applicable to the apparatus is generated.
  • a further object of the present invention is to provide an apparatus for controlling static electricity using ultra-fine particles, wherein there is neither corrosion and wear of electrodes nor contamination by the thus generated particles.
  • an apparatus for controlling static electricity using ultra-fine particles comprises one or more capillaries connected to a liquid supply for allowing the particles to be sprayed and discharged from tips thereof, high voltage generating means connected to the capillaries for applying high voltages thereto, and including first high voltage generator for applying positive voltage and second high voltage generator for applying negative voltages, to generate highly charged ultra-fine particles, one or more ground electrodes disposed to be spaced apart from the capillaries by a predetermined distance for creating an electric field in cooperation with the high voltage generating means, and a control means connected with the first and second high voltage generators for controlling the voltages applied to the capillaries.
  • FIG. 1 is a view showing the constitution of an embodiment of an apparatus for controlling static electricity using ultra-fine particles according to the present invention.
  • FIG. 2 is an enlarged view of a portion of the apparatus shown in FIG. 1, for illustrating how highly charged ultra-fme particles with positive and negative polarities are generated and the static electricity is controlled by means of the particles in the apparatus for controlling the static electricity using the ultra-fine particles according to the present invention.
  • FIG. 3 is a view showing the constitution of another embodiment of an apparatus for controlling static electricity using ultra-fine particles according to the present invention.
  • FIGS. 4a to 4c are graphs for showing various waveforms of positive and negative voltages applied to the apparatus for controlling the static electricity using the ultra-fme particles according to the present invention.
  • FIGS. 1 and 2 show the constitution of a first embodiment of an apparatus for controlling static electricity using ultra-fine particles according to the present invention.
  • the apparatus for controlling the static electricity according to the present invention includes an electro-hydrodynamic atomizer 10 for generating highly charged ultra-fine particles with positive and negative polarities.
  • the electro-hydrodynamic atomizer 10 includes a syringe pump 12 for allowing a liquid such as water or NaCl solution to be supplied while regulating its flow rate, and two capillaries 14a, 14b to which the liquid is supplied from the syringe pump 12 and which are securely mounted within hollow cylinders 13a, 13b, respectively.
  • the syringe pump 12 has been employed in the present embodiment, other known liquid supply may be used as the pump, and the capillaries 14a, 14b may be substituted for containers with orifices.
  • a nozzle 15 for allowing the ultra-fine particles to be created and then sprayed is formed at a lower end of each of the capillaries 14a, 14b, and a ground electrode 20 is positioned at a lower end of each of the hollow cylinders 13a, 13b.
  • the cylindrical ground electrode 20 is positioned at the lower end of each of the hollow cylinders 13a, 13b in the present embodiment, the ground electrode may merely be spaced apart from the nozzle 15 by a predetermined distance to create an electric field in cooperation with high voltage generators.
  • the ground electrode may take various shapes such as flat and perforated plates.
  • the capillary 14a is connected with a first high voltage generator 30 for applying high positive voltage to the capillary
  • the capillary 14b is connected with a second high voltage generator 32 for applying high negative voltage to the capillary.
  • the first and second high voltage generators 30, 32 are connected with a controller 40 for controlling the voltages applied to the capillaries 14a, 14b.
  • the ultra-fine particles are generated while the liquid droplets take a conical shape at a constant voltage area and are changed to a cone-jet mode (where a jet is shot out) at the peak of the cone. At this time, the generated particles are much highly charged.
  • the highly charged ultra-fine particles with positive polarity are sprayed from the nozzle 15 of the capillary 14a, while the highly charged ultra-fine particles with negative polarity are sprayed from the nozzle 15 of the capillary 14b.
  • a target object 50 on which the static electricity should be controlled, is positioned below the nozzle 15.
  • a blower (not shown) may be disposed above the capillaries 14a, 14b, if necessary.
  • the apparatus for controlling the static electricity includes a single capillary 14.
  • a nozzle 15 for allowing the ultra-fine particles to be sprayed similarly to the constitution of the aforementioned the first embodiment is formed at a lower end of the capillary 14, and a ground electrode 20 is positioned at a lower end of a hollow cylinder 13.
  • the capillary 14 is connected with both first and second high voltage generators 30, 32 for applying high positive and negative voltages, respectively.
  • the high voltage generators 30, 32 are connected with a controller 40.
  • FIG. 4a to 4c show various waveforms of voltages applied to the capillaries 14, 14a, 14b by the operation of the first and second high voltage generators 30, 32 and the controller 40.
  • FIG. 4a shows a waveform of voltage in a state where the positive and negative voltages are simultaneously applied
  • FIG. 4b shows a waveform of voltage in a state where the positive and negative voltages are alternately applied
  • FIG. 4c shows a waveform of voltage in a state where the positive and negative voltages are alternately applied during T ! and T 3 respectively, with predetermined pause intervals corresponding to periods of time T 2 , T 4 .
  • the waveform of voltage shown in FIG. 4a may be applied when two or more capillaries are used.
  • the ultra-fine particles with positive polarity are created and then discharged from the capillary 14a, while the ultra-fine particles with negative polarity are created and then discharged from the capillary 14b.
  • the positive and negative voltages are alternately applied as shown in FIGS. 4b and 4c.
  • the positive voltage is applied to the capillary 14 during a predetermined period of time so that the ultra-fine particles with positive polarity are discharged from the capillary 14.
  • the negative voltage is applied to the capillary 14 during a predetermined period of time so that the ultra-fine particles with negative polarity are discharged from the capillary 14.
  • the generation of the ultra-fine particles by the electro-hydrodynamic atomizer 10 of the embodiment shown in FIG. 1 will be explained.
  • the high positive and negative voltages shown in FIG. 4a are applied to the capillaries 14a, 14b by the first and second high voltage generators 30, 32, respectively.
  • strong electric potential difference (between positive and negative voltages) is generated between the ground electrode 20 and the surface of the liquid at the nozzle 15.
  • the balance between the surface tension of the liquid and the electrostatic force is broken on the surface of the liquid, and the surface of the liquid is consequently broken.
  • the ultra-fine liquid particles with positive polarity are discharged from the nozzle 15 of the capillary 14a, while the ultra-fine liquid particles with negative polarity are discharged from the nozzle 15 of the capillary 14b.
  • the particles created as such are extremely fine in the order of about several nanometers to several tens of nanometers.
  • the particles are highly charged with positive and negative polarities so that their quantity of electric charge reaches the Rayleigh charge limit. Since the highly charged ultra- fine particles tends to carry out Brown motion, they do not move along their stream line but perform random motion, so that they are diffused to the air while moving downwardly.
  • the positive and negative ultra-fine particles to be diffused downwardly to the air become higher in density, the electrical conductivity of the air becomes higher.
  • the static electricity generated on the surface of the target object 50 which is positioned in a space where the electrical conductivity of the air has become higher is leaked or neutralized through the air. Accordingly, the static electricity on the surface of the object is completely removed.
  • the ultra-fme particles serve to carry out a further humidifying action.
  • the apparatus for controlling the static electricity according to the present invention carries out the humidifying action as well as the static electricity control action, in a case where the water is used as the solution.
  • the apparatus for controlling the static electricity using the ultra-fine particles according to the present invention there is an remarkable advantage in that the static electricity can be easily removed by creating the highly charged ultra-fine particles and then diffusing them to the air to increase the electrical conductivity of the ambient air. Further, ozone, which is adversely affected to the human body or processes applicable to the apparatus, is not generated. Unlikely the prior arts, there is no corrosion and wear of the electrodes, and there is also no contamination source of particles, which are deposited on, accumulated on and scattered again from the electrodes. Further, the electrodes need not cleaned or replaced.
  • the static electricity can be controlled in the present invention several times higher than the prior arts so that the static electricity can be effectively removed. Furthermore, in a case where the water is used as the solution for generating the ultra-fine particles, a further humidifying effect is provided.
  • the apparatus having the above constitution and advantages according to the present invention can be used wherever there is any damage due to static electricity, for example, the human body's shock due to the static electricity, particles contamination due to the suction force of the static electricity, or breakage or performance deterioration of any mechanism due to ESD (Electrostatic Discharge).
  • the apparatus may be used for removing the static electricity or providing a further humidifying effect during the semiconductor and liquid crystal display fabrication process.

Landscapes

  • Electrostatic Spraying Apparatus (AREA)

Abstract

L'invention concerne un appareil permettant de maîtriser l'électricité statique, qui utilise des particules ultra-fines à polarité positive et des particules ultra-fines à polarité négative. Il comporte également au moins un capillaire pour diffuser un liquide provenant d'une amenée de liquide. Un générateur haute tension à polarité positive et un générateur haute tension à polarité négative sont reliés au capillaire. En outre, une électrode de masse est éloignée du capillaire afin de former un champ électrique en coopération avec les générateurs haute tension. L'électricité statique est facilement maîtrisée grâce aux particules ultra-fines à polarité positive et aux particules ultra-fines à polarité négative.
PCT/KR2001/001579 2000-09-22 2001-09-20 Appareil pour maitriser l'electricite statique a l'aide de particules ultra-fines WO2002030163A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001292382A AU2001292382A1 (en) 2000-09-22 2001-09-20 Apparatus for controlling static electricity using ultra-fine particles

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2000-0055808A KR100394371B1 (ko) 2000-09-22 2000-09-22 초미세입자를 이용한 정전기 제어장치
KR2000/55808 2000-09-22

Publications (1)

Publication Number Publication Date
WO2002030163A1 true WO2002030163A1 (fr) 2002-04-11

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Country Status (3)

Country Link
KR (1) KR100394371B1 (fr)
AU (1) AU2001292382A1 (fr)
WO (1) WO2002030163A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004076057A1 (fr) * 2003-02-26 2004-09-10 Astrazeneca Ab Appareil de generation de poudre et procede de production de poudre
EP1666156A1 (fr) * 2003-05-27 2006-06-07 Matsushita Electric Works, Ltd. Particule d'eau chargee et procede de creation d'un environnement dans lequel une brume de particule d'eau chargee est dispersee
CN107223365A (zh) * 2016-07-28 2017-09-29 大科防静电技术咨询（深圳）有限公司 静电电荷减少系统

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100947028B1 (ko) 2008-03-28 2010-03-11 한국과학기술원 비전도체 정전분무장치 및 정전분무 방법
KR101784669B1 (ko) 2016-01-13 2017-10-12 제주대학교 산학협력단 롤투롤 기반의 다층 적층 방법
KR101923446B1 (ko) 2017-02-02 2018-11-30 한국철도기술연구원 미세먼지 집진시스템

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4821508A (en) * 1985-06-10 1989-04-18 Gt-Devices Pulsed electrothermal thruster
US5222663A (en) * 1990-07-25 1993-06-29 Imperial Chemical Industries Plc Electrostatic spraying device and method using an alternating polarity high potential
US5765761A (en) * 1995-07-26 1998-06-16 Universtiy Of Georgia Research Foundation, Inc. Electrostatic-induction spray-charging nozzle system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4821508A (en) * 1985-06-10 1989-04-18 Gt-Devices Pulsed electrothermal thruster
US5222663A (en) * 1990-07-25 1993-06-29 Imperial Chemical Industries Plc Electrostatic spraying device and method using an alternating polarity high potential
US5765761A (en) * 1995-07-26 1998-06-16 Universtiy Of Georgia Research Foundation, Inc. Electrostatic-induction spray-charging nozzle system

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004076057A1 (fr) * 2003-02-26 2004-09-10 Astrazeneca Ab Appareil de generation de poudre et procede de production de poudre
EP1666156A1 (fr) * 2003-05-27 2006-06-07 Matsushita Electric Works, Ltd. Particule d'eau chargee et procede de creation d'un environnement dans lequel une brume de particule d'eau chargee est dispersee
EP1666156A4 (fr) * 2003-05-27 2008-10-01 Matsushita Electric Works Ltd Particule d'eau chargee et procede de creation d'un environnement dans lequel une brume de particule d'eau chargee est dispersee
US7473298B2 (en) 2003-05-27 2009-01-06 Panasonic Electric Works, Co., Ltd. Charged water particle, and method for creating environment where mist of charged water particle is dispersed
CN107223365A (zh) * 2016-07-28 2017-09-29 大科防静电技术咨询（深圳）有限公司 静电电荷减少系统
CN107223365B (zh) * 2016-07-28 2019-03-22 大科防静电技术咨询（深圳）有限公司 静电电荷减少系统

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Publication number Publication date
KR100394371B1 (ko) 2003-08-09
KR20020023057A (ko) 2002-03-28
AU2001292382A1 (en) 2002-04-15

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