WO2002027390A2 - A method of forming electrodes or pixel electrodes and a liquid crystal display device - Google Patents
A method of forming electrodes or pixel electrodes and a liquid crystal display device Download PDFInfo
- Publication number
- WO2002027390A2 WO2002027390A2 PCT/EP2001/011166 EP0111166W WO0227390A2 WO 2002027390 A2 WO2002027390 A2 WO 2002027390A2 EP 0111166 W EP0111166 W EP 0111166W WO 0227390 A2 WO0227390 A2 WO 0227390A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- light
- film
- forming
- sensitive film
- recesses
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133553—Reflecting elements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133357—Planarisation layers
Definitions
- a passivation film 8 and a positive type of planarization film 9 having a light-sensitivity may be formed in sequence as illustrated in Figure 3.
- this planarization film 9 represents a light-sensitive film as claimed in this invention.
- the formation of the passivation film 8 below the planarization film 9 can effectively prevent the characteristics of the TFT 100 from deteriorating.
- the planarization film 9 is exposed to light using a photo mask 20.
- the planarization film 9 is exposed to light in such manner that a stronger exposure energy is applied to a region A of the planarization film 9 while a less exposure energy is applied to a region B.
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020027006728A KR20020073134A (en) | 2000-09-27 | 2001-09-26 | A method of forming electrodes or pixel electrodes and a liquid crystal display device |
EP01985760A EP1264208A2 (en) | 2000-09-27 | 2001-09-26 | A method of forming electrodes or pixel electrodes and a liquid crystal display device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000-293686 | 2000-09-27 | ||
JP2000293686A JP2002107744A (en) | 2000-09-27 | 2000-09-27 | Electrode forming method, pixel electrode forming method, and liquid crystal display device |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2002027390A2 true WO2002027390A2 (en) | 2002-04-04 |
WO2002027390A3 WO2002027390A3 (en) | 2002-09-12 |
Family
ID=18776440
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2001/011166 WO2002027390A2 (en) | 2000-09-27 | 2001-09-26 | A method of forming electrodes or pixel electrodes and a liquid crystal display device |
Country Status (6)
Country | Link |
---|---|
US (1) | US20020191122A1 (en) |
EP (1) | EP1264208A2 (en) |
JP (1) | JP2002107744A (en) |
KR (1) | KR20020073134A (en) |
CN (1) | CN1397027A (en) |
WO (1) | WO2002027390A2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003079107A1 (en) * | 2002-03-19 | 2003-09-25 | Koninklijke Philips Electronics N.V. | Semiconductor device manufacturing method, semiconductor device, and liquid crystal display |
WO2004055579A1 (en) * | 2002-12-14 | 2004-07-01 | Koninklijke Philips Electronics N.V. | Manufacture of diffusely reflecting pixel electrodes for a liquid crystal display and grey-tone photomasks therefor |
US8023092B2 (en) | 2007-12-07 | 2011-09-20 | Sony Corporation | Liquid crystal display device and method of manufacturing liquid crystal display device |
US8053174B2 (en) | 2003-02-05 | 2011-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method for wiring |
TWI391777B (en) * | 2007-06-28 | 2013-04-01 | S&S Tech Co Ltd | Process method of gray tone blankmask, and photomask using the same |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4060125B2 (en) * | 2002-05-30 | 2008-03-12 | シャープ株式会社 | Substrate for liquid crystal display device, liquid crystal display device including the same, and manufacturing method thereof |
AU2003283715A1 (en) * | 2002-12-14 | 2004-07-09 | Koninklijke Philips Electronics N.V. | Manufacture of shaped structures in lcd cells, and masks therefor |
JP4194362B2 (en) | 2002-12-19 | 2008-12-10 | 奇美電子股▲ふん▼有限公司 | Liquid crystal display cell and liquid crystal display |
JP4656843B2 (en) * | 2003-01-17 | 2011-03-23 | 株式会社半導体エネルギー研究所 | Method for manufacturing semiconductor device |
US7405033B2 (en) * | 2003-01-17 | 2008-07-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing resist pattern and method for manufacturing semiconductor device |
WO2004070819A1 (en) * | 2003-02-05 | 2004-08-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing display |
KR102504436B1 (en) * | 2017-12-18 | 2023-03-02 | 삼성디스플레이 주식회사 | Organic light emitting display device |
CN113035916A (en) * | 2021-03-04 | 2021-06-25 | 京东方科技集团股份有限公司 | Display panel, processing method thereof and display device |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5500750A (en) * | 1993-03-24 | 1996-03-19 | Sharp Kabushiki Kaisha | Manufacturing method of reflection type liquid crystal display devices having light shield elements and reflective electrodes formed of same material |
JP2000047201A (en) * | 1998-07-31 | 2000-02-18 | Sanyo Electric Co Ltd | Reflection type liquid crystal display device |
JP2000089217A (en) * | 1998-09-08 | 2000-03-31 | Matsushita Electric Ind Co Ltd | Reflective liquid crystal display device and its manufacture |
JP2000147536A (en) * | 1998-11-11 | 2000-05-26 | Toppan Printing Co Ltd | Reflecting electrode and its manufacture, and reflection type liquid crystal display device |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20000031459A (en) * | 1998-11-06 | 2000-06-05 | 윤종용 | Reflection type lcd and fabrication method thereof |
US6563559B2 (en) * | 2000-02-02 | 2003-05-13 | Sanyo Electric Co., Ltd. | Reflective liquid crystal display having increase luminance for each display pixel |
TWI240811B (en) * | 2000-09-13 | 2005-10-01 | Au Optronics Corp | Manufacturing method of liquid crystal display device |
-
2000
- 2000-09-27 JP JP2000293686A patent/JP2002107744A/en not_active Withdrawn
-
2001
- 2001-09-26 EP EP01985760A patent/EP1264208A2/en not_active Withdrawn
- 2001-09-26 WO PCT/EP2001/011166 patent/WO2002027390A2/en not_active Application Discontinuation
- 2001-09-26 CN CN01804122A patent/CN1397027A/en active Pending
- 2001-09-26 US US10/148,045 patent/US20020191122A1/en not_active Abandoned
- 2001-09-26 KR KR1020027006728A patent/KR20020073134A/en not_active Application Discontinuation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5500750A (en) * | 1993-03-24 | 1996-03-19 | Sharp Kabushiki Kaisha | Manufacturing method of reflection type liquid crystal display devices having light shield elements and reflective electrodes formed of same material |
JP2000047201A (en) * | 1998-07-31 | 2000-02-18 | Sanyo Electric Co Ltd | Reflection type liquid crystal display device |
JP2000089217A (en) * | 1998-09-08 | 2000-03-31 | Matsushita Electric Ind Co Ltd | Reflective liquid crystal display device and its manufacture |
JP2000147536A (en) * | 1998-11-11 | 2000-05-26 | Toppan Printing Co Ltd | Reflecting electrode and its manufacture, and reflection type liquid crystal display device |
Non-Patent Citations (3)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 05, 14 September 2000 (2000-09-14) & JP 2000 047201 A (SANYO ELECTRIC CO LTD), 18 February 2000 (2000-02-18) * |
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 06, 22 September 2000 (2000-09-22) & JP 2000 089217 A (MATSUSHITA ELECTRIC IND CO LTD), 31 March 2000 (2000-03-31) * |
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 08, 6 October 2000 (2000-10-06) -& JP 2000 147536 A (TOPPAN PRINTING CO LTD), 26 May 2000 (2000-05-26) * |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003079107A1 (en) * | 2002-03-19 | 2003-09-25 | Koninklijke Philips Electronics N.V. | Semiconductor device manufacturing method, semiconductor device, and liquid crystal display |
WO2004055579A1 (en) * | 2002-12-14 | 2004-07-01 | Koninklijke Philips Electronics N.V. | Manufacture of diffusely reflecting pixel electrodes for a liquid crystal display and grey-tone photomasks therefor |
US8053174B2 (en) | 2003-02-05 | 2011-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method for wiring |
US8460857B2 (en) | 2003-02-05 | 2013-06-11 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method for wiring |
TWI391777B (en) * | 2007-06-28 | 2013-04-01 | S&S Tech Co Ltd | Process method of gray tone blankmask, and photomask using the same |
US8023092B2 (en) | 2007-12-07 | 2011-09-20 | Sony Corporation | Liquid crystal display device and method of manufacturing liquid crystal display device |
Also Published As
Publication number | Publication date |
---|---|
US20020191122A1 (en) | 2002-12-19 |
CN1397027A (en) | 2003-02-12 |
JP2002107744A (en) | 2002-04-10 |
KR20020073134A (en) | 2002-09-19 |
EP1264208A2 (en) | 2002-12-11 |
WO2002027390A3 (en) | 2002-09-12 |
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