WO2002015245A3 - Plating method and apparatus that creates a differential between additive disposed on a top surface and a cavity surface of a workpiece using an external influence - Google Patents
Plating method and apparatus that creates a differential between additive disposed on a top surface and a cavity surface of a workpiece using an external influence Download PDFInfo
- Publication number
- WO2002015245A3 WO2002015245A3 PCT/US2001/024890 US0124890W WO0215245A3 WO 2002015245 A3 WO2002015245 A3 WO 2002015245A3 US 0124890 W US0124890 W US 0124890W WO 0215245 A3 WO0215245 A3 WO 0215245A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- workpiece
- creates
- differential
- additive
- plating method
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/22—Electroplating combined with mechanical treatment during the deposition
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/34—Pretreatment of metallic surfaces to be electroplated
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
- H01L21/2885—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition using an external electrical current, i.e. electro-deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/7684—Smoothing; Planarisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
- H01L21/76879—Filling of holes, grooves or trenches, e.g. vias, with conductive material by selective deposition of conductive material in the vias, e.g. selective C.V.D. on semiconductor material, plating
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU8119601A AU8119601A (en) | 2000-08-10 | 2001-08-09 | Plating method and apparatus that creates a differential between additive disposed on a top surface and a cavity surface of a workpiece using an external influence |
EP01959666A EP1307905A2 (en) | 2000-08-10 | 2001-08-09 | Plating method and apparatus that creates a differential between additive disposed on a top surface and a cavity surface of a workpiece using an external influence |
KR10-2003-7001967A KR20030040394A (en) | 2000-08-10 | 2001-08-09 | Plating method and apparatus that creates a differential between additive disposed on a top surface and a cavity surface of a workpiece using an external influence |
JP2002520283A JP2004521186A (en) | 2000-08-10 | 2001-08-09 | Plating method and apparatus for creating a difference between a top surface of a workpiece and an additive deposited on a cavity surface using external influences |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US22473900P | 2000-08-10 | 2000-08-10 | |
US60/224,739 | 2000-08-10 | ||
US09/740,701 | 2000-12-18 | ||
US09/740,701 US6534116B2 (en) | 2000-08-10 | 2000-12-18 | Plating method and apparatus that creates a differential between additive disposed on a top surface and a cavity surface of a workpiece using an external influence |
US09/919,788 US6858121B2 (en) | 2000-08-10 | 2001-07-31 | Method and apparatus for filling low aspect ratio cavities with conductive material at high rate |
US09/919,788 | 2001-07-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2002015245A2 WO2002015245A2 (en) | 2002-02-21 |
WO2002015245A3 true WO2002015245A3 (en) | 2002-07-04 |
Family
ID=46204222
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/024890 WO2002015245A2 (en) | 2000-08-10 | 2001-08-09 | Plating method and apparatus that creates a differential between additive disposed on a top surface and a cavity surface of a workpiece using an external influence |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP1307905A2 (en) |
JP (1) | JP2004521186A (en) |
KR (1) | KR20030040394A (en) |
CN (1) | CN1310289C (en) |
AU (1) | AU8119601A (en) |
TW (1) | TW520407B (en) |
WO (1) | WO2002015245A2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101687462B1 (en) * | 2012-02-24 | 2016-12-16 | 제이에프이 스틸 가부시키가이샤 | Metal material, and surface treatment method and device |
CN110453258B (en) * | 2019-06-13 | 2021-10-26 | 佛山市顺德区巴田塑料实业有限公司 | Method for producing electroplated lamp cap |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11238703A (en) * | 1998-02-20 | 1999-08-31 | Nec Corp | Manufacture for semiconductor device |
EP1063696A1 (en) * | 1999-06-22 | 2000-12-27 | Interuniversitair Micro-Elektronica Centrum Vzw | A method for improving the quality of a metal-containing layer deposited from a plating bath |
EP1122989A2 (en) * | 2000-02-01 | 2001-08-08 | Shinko Electric Industries Co. Ltd. | Method of plating for filling via holes |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1075515A (en) * | 1992-02-20 | 1993-08-25 | 海阳县刺绣厂 | A kind of cut work embroidery |
-
2001
- 2001-08-09 AU AU8119601A patent/AU8119601A/en active Pending
- 2001-08-09 EP EP01959666A patent/EP1307905A2/en not_active Withdrawn
- 2001-08-09 KR KR10-2003-7001967A patent/KR20030040394A/en not_active Application Discontinuation
- 2001-08-09 JP JP2002520283A patent/JP2004521186A/en active Pending
- 2001-08-09 CN CNB018155499A patent/CN1310289C/en not_active Expired - Fee Related
- 2001-08-09 WO PCT/US2001/024890 patent/WO2002015245A2/en not_active Application Discontinuation
- 2001-08-10 TW TW090119667A patent/TW520407B/en not_active IP Right Cessation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11238703A (en) * | 1998-02-20 | 1999-08-31 | Nec Corp | Manufacture for semiconductor device |
US6245676B1 (en) * | 1998-02-20 | 2001-06-12 | Nec Corporation | Method of electroplating copper interconnects |
EP1063696A1 (en) * | 1999-06-22 | 2000-12-27 | Interuniversitair Micro-Elektronica Centrum Vzw | A method for improving the quality of a metal-containing layer deposited from a plating bath |
EP1122989A2 (en) * | 2000-02-01 | 2001-08-08 | Shinko Electric Industries Co. Ltd. | Method of plating for filling via holes |
Non-Patent Citations (1)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 13 30 November 1999 (1999-11-30) * |
Also Published As
Publication number | Publication date |
---|---|
WO2002015245A2 (en) | 2002-02-21 |
CN1559081A (en) | 2004-12-29 |
TW520407B (en) | 2003-02-11 |
KR20030040394A (en) | 2003-05-22 |
CN1310289C (en) | 2007-04-11 |
JP2004521186A (en) | 2004-07-15 |
AU8119601A (en) | 2002-02-25 |
EP1307905A2 (en) | 2003-05-07 |
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