WO2002013271A3 - Integrierte elektronische schaltung mit wenigstens einer induktivität und verfahren zu ihrer herstellung - Google Patents

Integrierte elektronische schaltung mit wenigstens einer induktivität und verfahren zu ihrer herstellung Download PDF

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Publication number
WO2002013271A3
WO2002013271A3 PCT/DE2001/002970 DE0102970W WO0213271A3 WO 2002013271 A3 WO2002013271 A3 WO 2002013271A3 DE 0102970 W DE0102970 W DE 0102970W WO 0213271 A3 WO0213271 A3 WO 0213271A3
Authority
WO
WIPO (PCT)
Prior art keywords
electronic circuit
integrated electronic
inductor
producing
same
Prior art date
Application number
PCT/DE2001/002970
Other languages
English (en)
French (fr)
Other versions
WO2002013271A2 (de
Inventor
Joerg Berthold
Dieter Sewald
Marc Tiebout
Original Assignee
Infineon Technologies Ag
Joerg Berthold
Dieter Sewald
Marc Tiebout
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies Ag, Joerg Berthold, Dieter Sewald, Marc Tiebout filed Critical Infineon Technologies Ag
Publication of WO2002013271A2 publication Critical patent/WO2002013271A2/de
Publication of WO2002013271A3 publication Critical patent/WO2002013271A3/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/10—Inductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5227—Inductive arrangements or effects of, or between, wiring layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Coils Or Transformers For Communication (AREA)

Abstract

Die Erfindung betrifft eine integrierte elektronische Schaltung mit einem Halbleitersubstrat und wenigstens zwei Induktivitäten. Erfindungsgemäss zeichnet die integrierte elektronische Schaltung sich dadurch aus, dass die Induktivitäten Achsen aufweisen, die sich im Wesentlichen parallel zu wenigstens einer Strukturebene des Halbleitersubstrats erstrecken.
PCT/DE2001/002970 2000-08-04 2001-08-03 Integrierte elektronische schaltung mit wenigstens einer induktivität und verfahren zu ihrer herstellung WO2002013271A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10038232 2000-08-04
DE10038232.0 2000-08-04

Publications (2)

Publication Number Publication Date
WO2002013271A2 WO2002013271A2 (de) 2002-02-14
WO2002013271A3 true WO2002013271A3 (de) 2002-11-28

Family

ID=7651412

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2001/002970 WO2002013271A2 (de) 2000-08-04 2001-08-03 Integrierte elektronische schaltung mit wenigstens einer induktivität und verfahren zu ihrer herstellung

Country Status (2)

Country Link
TW (1) TW516213B (de)
WO (1) WO2002013271A2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6639298B2 (en) 2001-06-28 2003-10-28 Agere Systems Inc. Multi-layer inductor formed in a semiconductor substrate
US6667536B2 (en) * 2001-06-28 2003-12-23 Agere Systems Inc. Thin film multi-layer high Q transformer formed in a semiconductor substrate
US7486167B2 (en) 2005-08-24 2009-02-03 Avago Technologies General Ip (Singapore) Pte. Ltd. Cross-coupled inductor pair formed in an integrated circuit
DE102005050484B4 (de) * 2005-10-21 2010-01-28 Atmel Automotive Gmbh Monolithisch integrierbare Schaltungsanordnung
US10270401B2 (en) 2014-10-20 2019-04-23 Richwave Technology Corp. Two-stage electromagnetic induction transformer

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5576680A (en) * 1994-03-01 1996-11-19 Amer-Soi Structure and fabrication process of inductors on semiconductor chip
US5884990A (en) * 1996-08-23 1999-03-23 International Business Machines Corporation Integrated circuit inductor
US6008102A (en) * 1998-04-09 1999-12-28 Motorola, Inc. Method of forming a three-dimensional integrated inductor
US6031445A (en) * 1997-11-28 2000-02-29 Stmicroelectronics S.A. Transformer for integrated circuits

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5576680A (en) * 1994-03-01 1996-11-19 Amer-Soi Structure and fabrication process of inductors on semiconductor chip
US5884990A (en) * 1996-08-23 1999-03-23 International Business Machines Corporation Integrated circuit inductor
US6031445A (en) * 1997-11-28 2000-02-29 Stmicroelectronics S.A. Transformer for integrated circuits
US6008102A (en) * 1998-04-09 1999-12-28 Motorola, Inc. Method of forming a three-dimensional integrated inductor

Also Published As

Publication number Publication date
WO2002013271A2 (de) 2002-02-14
TW516213B (en) 2003-01-01

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