WO2001075411A1 - Film de detection et capteur optique utilisant ce film de detection - Google Patents

Film de detection et capteur optique utilisant ce film de detection Download PDF

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Publication number
WO2001075411A1
WO2001075411A1 PCT/JP2001/002887 JP0102887W WO0175411A1 WO 2001075411 A1 WO2001075411 A1 WO 2001075411A1 JP 0102887 W JP0102887 W JP 0102887W WO 0175411 A1 WO0175411 A1 WO 0175411A1
Authority
WO
WIPO (PCT)
Prior art keywords
detection film
optical sensor
detection
film
degradation
Prior art date
Application number
PCT/JP2001/002887
Other languages
English (en)
Japanese (ja)
Inventor
Kazuhiro Mitani
Teruyuki Kobayashi
Takayuki Kamemura
Nobuo Uotani
Yuji Itoh
Original Assignee
Showa Denko K.K.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko K.K. filed Critical Showa Denko K.K.
Priority to AU44715/01A priority Critical patent/AU4471501A/en
Publication of WO2001075411A1 publication Critical patent/WO2001075411A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/28—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication
    • G01D5/30—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication the beams of light being detected by photocells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/008—Transducers other than those covered by groups H04R9/00 - H04R21/00 using optical signals for detecting or generating sound

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Laminated Bodies (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)

Abstract

L'invention concerne un film de détection destiné à être utilisé dans un capteur optique, comprenant une structure multicouche dont une couche de réflexion et une couche de protection. Ce film de détection n'entraîne ni une diminution des forces mécaniques due à des facteurs extérieurs, tels que la pression physique, la température et l'humidité, ni la dégradation des propriétés du capteur optique. L'invention concerne également un capteur optique utilisant ce film de détection.
PCT/JP2001/002887 2000-04-04 2001-04-03 Film de detection et capteur optique utilisant ce film de detection WO2001075411A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU44715/01A AU4471501A (en) 2000-04-04 2001-04-03 Detection film and optical sensor using detection film

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2000101655 2000-04-04
JP2000-101655 2000-04-04
JP2000-135590 2000-05-09
JP2000135590 2000-05-09

Publications (1)

Publication Number Publication Date
WO2001075411A1 true WO2001075411A1 (fr) 2001-10-11

Family

ID=26589391

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2001/002887 WO2001075411A1 (fr) 2000-04-04 2001-04-03 Film de detection et capteur optique utilisant ce film de detection

Country Status (2)

Country Link
AU (1) AU4471501A (fr)
WO (1) WO2001075411A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006105859A (ja) * 2004-10-07 2006-04-20 Tem-Tech Kenkyusho:Kk フッ素樹脂薄膜ダイヤフラム圧力センサおよびその製造方法
JP2007129536A (ja) * 2005-11-04 2007-05-24 Kenwood Corp 電気音響変換器用振動板、電気音響変換器用振動板の製造方法及び電気音響変換器
WO2018061705A1 (fr) * 2016-09-27 2018-04-05 国立大学法人香川大学 Capteur de pression, capuchon d'endoscope, endoscope et dispositif de mesure de pression

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57196109A (en) * 1981-05-27 1982-12-02 Omron Tateisi Electronics Co Optical detector for physical amount
JPS61191932A (ja) * 1985-02-20 1986-08-26 Hitachi Cable Ltd 光フアイバ圧力センサ
JPS63127700A (ja) * 1986-11-18 1988-05-31 Matsushita Electric Ind Co Ltd 音響センサ
US4926696A (en) * 1986-11-19 1990-05-22 Massachusetts Institute Of Technology Optical micropressure transducer
US5247490A (en) * 1992-06-04 1993-09-21 Martin Marietta Corporation Pressure-compensated optical acoustic sensor
JPH08292113A (ja) * 1995-04-21 1996-11-05 Mitsubishi Materials Corp 圧力センサー及びその製造方法
JPH11183199A (ja) * 1997-12-25 1999-07-09 Merutekku:Kk フォトセンサー用スケール
DE19835947A1 (de) * 1998-08-08 2000-02-17 Sennheiser Electronic Optisches Mikrofon
JP3068528U (ja) * 1999-10-27 2000-05-12 日本セラミック株式会社 光信号を利用したマイクロフォン

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57196109A (en) * 1981-05-27 1982-12-02 Omron Tateisi Electronics Co Optical detector for physical amount
JPS61191932A (ja) * 1985-02-20 1986-08-26 Hitachi Cable Ltd 光フアイバ圧力センサ
JPS63127700A (ja) * 1986-11-18 1988-05-31 Matsushita Electric Ind Co Ltd 音響センサ
US4926696A (en) * 1986-11-19 1990-05-22 Massachusetts Institute Of Technology Optical micropressure transducer
US5247490A (en) * 1992-06-04 1993-09-21 Martin Marietta Corporation Pressure-compensated optical acoustic sensor
JPH08292113A (ja) * 1995-04-21 1996-11-05 Mitsubishi Materials Corp 圧力センサー及びその製造方法
JPH11183199A (ja) * 1997-12-25 1999-07-09 Merutekku:Kk フォトセンサー用スケール
DE19835947A1 (de) * 1998-08-08 2000-02-17 Sennheiser Electronic Optisches Mikrofon
JP3068528U (ja) * 1999-10-27 2000-05-12 日本セラミック株式会社 光信号を利用したマイクロフォン

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006105859A (ja) * 2004-10-07 2006-04-20 Tem-Tech Kenkyusho:Kk フッ素樹脂薄膜ダイヤフラム圧力センサおよびその製造方法
JP2007129536A (ja) * 2005-11-04 2007-05-24 Kenwood Corp 電気音響変換器用振動板、電気音響変換器用振動板の製造方法及び電気音響変換器
WO2018061705A1 (fr) * 2016-09-27 2018-04-05 国立大学法人香川大学 Capteur de pression, capuchon d'endoscope, endoscope et dispositif de mesure de pression
JPWO2018061705A1 (ja) * 2016-09-27 2019-07-04 国立大学法人 香川大学 圧力センサ、内視鏡フード、内視鏡および圧力測定装置

Also Published As

Publication number Publication date
AU4471501A (en) 2001-10-15

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