WO2001069190A1 - Spectrometre optique a compensation de l'astigmatisme - Google Patents

Spectrometre optique a compensation de l'astigmatisme Download PDF

Info

Publication number
WO2001069190A1
WO2001069190A1 PCT/EP2001/000742 EP0100742W WO0169190A1 WO 2001069190 A1 WO2001069190 A1 WO 2001069190A1 EP 0100742 W EP0100742 W EP 0100742W WO 0169190 A1 WO0169190 A1 WO 0169190A1
Authority
WO
WIPO (PCT)
Prior art keywords
spectrometer
slit
prism
angle
plane
Prior art date
Application number
PCT/EP2001/000742
Other languages
German (de)
English (en)
Inventor
Helmut Becker-Ross
Günter WESEMANN
Stefan Florek
Original Assignee
Gesellschaft zur Förderung angewandter Optik, Optoelektronik, Quantenelektronik und Spektroskopie e.V.
Gesellschaft zur Förderung der Spektrochemie und angewandten Spektroskopie e.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gesellschaft zur Förderung angewandter Optik, Optoelektronik, Quantenelektronik und Spektroskopie e.V., Gesellschaft zur Förderung der Spektrochemie und angewandten Spektroskopie e.V. filed Critical Gesellschaft zur Förderung angewandter Optik, Optoelektronik, Quantenelektronik und Spektroskopie e.V.
Priority to AU2001231689A priority Critical patent/AU2001231689A1/en
Publication of WO2001069190A1 publication Critical patent/WO2001069190A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/14—Generating the spectrum; Monochromators using refracting elements, e.g. prisms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/04—Slit arrangements slit adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1809—Echelle gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/189—Generating the spectrum; Monochromators using diffraction elements, e.g. grating using at least one grating in an off-plane configuration

Definitions

  • the invention relates to an optical spectrometer with an astigmatic aberration
  • a camera mirror (d) a camera mirror (e) a first entry slit for bundle limitation in the first direction of dispersion, which is located on the optical axis at a first distance from the collimator mirror, and
  • Dispersion direction which is located on the optical axis at a second distance from the collimator mirror, wherein
  • the entry gaps are arranged in such a way that the sagittal image of the first entry gap and the meridional image of the second entry gap are in one
  • the invention further relates to a method for adjusting the gap positions.
  • Optical spectrometers are used for the wavelength-dependent decomposition of light by at least one dispersing element.
  • the spectrum is the intensity distribution depending on the wavelength.
  • monochromators the light of a selected wavelength is directed onto an exit slit.
  • the wavelength at the exit slit can then be varied in the case of monochromators, and an intensity distribution over time or the angle of rotation is obtained, which in each case can again be assigned to a wavelength.
  • the light from a light source is directed through an entrance slit arrangement onto a concave collimator mirror, usually a spherical mirror, a toroid mirror or a paraboloid mirror.
  • a concave collimator mirror usually a spherical mirror, a toroid mirror or a paraboloid mirror.
  • the collimator mirror transforms the light into a parallel bundle.
  • the parallel Bundle is directed onto a dispersing element, for example an Echelle grating.
  • Echelle gratings have a step-shaped surface on which the incident light beam is reflected and diffracted.
  • the light beams diffracted depending on the wavelength are focused into the image plane of the spectrometer by means of a camera mirror.
  • Echelle gratings with a grating groove spacing that is significantly larger than the longest wavelength to be measured usually disperse the light in a high order at a large blaze angle. This creates a spectrum with a superposition of different orders with a comparatively small free spectral range.
  • Spectrometers with internal order separation are also known, in which a further dispersing element is arranged within the beam path, which spectrally decomposes the light transversely to the main dispersion direction of the echelle grating.
  • a further dispersing element is arranged within the beam path, which spectrally decomposes the light transversely to the main dispersion direction of the echelle grating.
  • the known spectrometers are optical, depending on the arrangement and properties
  • Components usually have imaging defects such as coma and / or astigmatism.
  • astigmatism the meridional and sagittal image locations differ.
  • a point-shaped object is sharply imaged in one direction, for example horizontally distorted, at a location which is in front of or behind the location at which the object is sharply depicted in another direction, for example vertically distorted.
  • It is a known method to correct astigmatism in spectrometers by imaging a preferably point-shaped light source in the direction of the collimator by means of spherical and / or toric mirrors in such a way that an astigmatic image is produced at the spectrometer input.
  • This astigmatic image is at one point a horizontally extended "light streak” and somewhat behind it on the optical axis a vertically extended "light streak”.
  • entry slit arrangement consisting of two crossed entry slits arranged one behind the other at a distance.
  • the entry gaps are positioned so that the
  • Beams of light with the dispersion plane i.e. forms with the plane that is perpendicular to the furrows of a diffraction grating or perpendicular to the roof edge of a dispersion prism.
  • the image of the gap appears, which defines the boundary of the gap images in the direction of the main dispersion in the image plane, rotated about the optical axis.
  • the slit images are not oriented perpendicularly to the order lines, ie to the main direction of dispersion in the image plane. If an area detector is used with pixels arranged perpendicular to each other in the row and column directions and the orders with respect to the main dispersion direction are aligned essentially parallel to the detector rows, the slit image is inclined with respect to the column direction of the detector. This leads to a rectangular, perpendicular to the Main direction of dispersion stretched slit image to reduce the achievable spectral resolution of the spectrometer.
  • the object of the invention is to sharply image spectral lines in the image plane of a spectrometer of the type mentioned at the beginning with small grating dimensions. It is a further object of the invention to generate a spectrum with as few image errors as possible, in which the sagittal with the meridional
  • Image plane for selected wavelengths coincides and in which the monochromatic slit images with the best possible image sharpness in
  • Main direction of dispersion is oriented substantially perpendicular to the course of the diffraction orders of the diffraction grating. It is a further object of the invention to provide a method for adjusting the positions of the entry gaps on a
  • the object is achieved in that the grating can be illuminated at an off-plane angle and the first and the second entrance slits are arranged at an angle different from 90 degrees to one another on the optical axis.
  • An anamorphic bundle transformation can be avoided when using an off-plane angle.
  • the grid dimensions can be optimized.
  • the off-plane angle causes the sagittal image of the entrance slit to twist in the image plane. This twist can be changed by changing the
  • the light of one wavelength is then distributed over a minimum number of pixels with the same column coordinate in a row of adjacent detector rows, the Signals can be combined in hardware into a single signal (loss of spectral resolution) (binning).
  • the first and second distances of the entrance slits to the collimator mirror and the angle of the first entry slit about the optical axis are preferably selected such that the sagittal image points for all bundles that pass through the first entry slit are essentially in a line in the image plane of the spectrometer are mapped and that this line runs essentially perpendicular to the first direction of dispersion.
  • the apex and center points of the optical components preferably lie in a plane which defines the main plane of the spectrometer.
  • grating is an Echelle grating with a preferred blaze angle of 76 degrees.
  • a prism which has a prism angle of at least 5 degrees can be used as the second dispersing element.
  • the prism is preferably mirrored on one side, so that the beam dispersed by the prism can be directed through the prism again.
  • a particularly compact arrangement can then be achieved in which a high resolution is achieved with small dimensions.
  • a mirror is arranged behind the prism, on which the beam dispersed by the prism can be reflected back into the prism. This makes for larger
  • Prism angle also in a double pass and a higher prism dispersion can be realized without total reflection.
  • a diffraction grating can also be arranged behind the prism, on which the beam dispersed by the prism can be diffracted back into the prism.
  • an increased transverse dispersion can be realized, which has a wavelength dependence that is different from that of the prism dispersion.
  • at least one further prism can be arranged in the beam path in front of the prism.
  • the second dispersing element is a diffraction grating, behind which a prism can be arranged.
  • the camera mirror and collimator mirror are expediently designed as a spherical mirror.
  • spherical mirrors are generally the most cost-effective to produce and are inexpensive to adjust.
  • toroidal mirrors or paraboloidal mirrors whose curvatures match those
  • the slit image of a wavelength in the image plane can be shifted in the direction of dispersion.
  • Element can also be rotatably supported about an axis that is perpendicular to the second dispersion plane.
  • the order in the image plane can be changed by rotating the second dispersing element.
  • the spectrometer can be used as a monochromator.
  • computing means are provided for calculating the angle of rotation from a wavelength and a selected position of the slit image in the image plane, and adjusting means for adjusting the angle of rotation.
  • the actuating means can be a computer-controlled stepper motor. This stepper motor can be used to move a lever arm attached to the dispersing element and thus adjust the wavelength at the exit slit.
  • the dispersing elements are preferably rotatable at the same time. This shortens the positioning times if both the order and the wavelength are set within one order.
  • the exit slit can be replaced by a line detector, which enables a simultaneous measurement of a wavelength with its spectral environment.
  • an area detector is arranged in the exit plane. All surface detectors are conceivable here, such as photo plates, CCD detectors, photodiode arrays or the like.
  • the spectrometer can be used as a spectrograph. The entire wavelength spectrum in question is detected simultaneously in the exit plane. Depending on the arrangement, the wavelengths are distributed over several orders. A wavelength may also occur in 2 or more orders at the same time.
  • the area detector is one
  • Solid state detector formed with a plurality of pixels, in which the signal on all pixels, which can be assigned to the same wavelength, can be combined by the hardware into a single signal. This reduces the amount of data and the readout rate and the transmission rate can be increased.
  • the camera mirror is inclined about a horizontal axis that is perpendicular to the direction of incidence of the light beam. Depending on the focus distances, this angle of inclination serves as a further degree of freedom for the correction of aberrations.
  • At least one of the entrance slits is arranged rotatable about an axis which coincides with the direction of incidence of the light. Then the entry gap arrangement can be adapted to the other circumstances without exchanging the entry gap arrangement.
  • the gap angle can be calculated using computer means, e.g. can be calculated via a computer and adjusting means for adjusting the gap angle can be provided for automation.
  • the gap positions can be adjusted using the following steps: (a) Determination of an exit plane of the spectrometer according to the rules of geometric optics, in particular determination of the course of the diffraction order in the region of a selected monochromatic wavelength in this image plane
  • the light path is reversed in order to determine those slit positions at which the aberrations that occur in the exit plane are compensated for. This applies particularly to those aberrations that act in the direction of the main dispersion direction.
  • the optimum angle of the gap components to one another can be determined with this method.
  • This method can also be used to compensate for errors in which not just one
  • FIG. 3 shows a side view of an Echelle grating in an enlarged view
  • FIG. 8 shows a plan view of the prism arrangement with a plurality of prisms and a plane mirror
  • Fig.l shows a spectrometer 10 according to the invention is shown schematically.
  • the light from a light source 12 is directed onto an entrance slit by means of a lens 14 or a mirror.
  • the entrance slit arrangement 16 essentially consists of two slit masks 18 and 20.
  • the slit masks are perpendicular at a distance arranged to each other along the optical axis 22.
  • the inlet gap arrangement 16 is shown again in detail in FIG.
  • the gap masks 18 and 20 essentially consist of a metal foil, each with a gap opening 24 and 26 of a defined width.
  • a commercially available gap arrangement with adjustable gap jaws can also be used.
  • the gap opening 26 extends essentially vertically at the height of the optical axis.
  • the gap opening 24 is inclined at an angle ⁇ with respect to the horizontal 28. Only light passes through the entrance slit arrangement and passes through both stomata. This is the case with light that runs along the optical axis.
  • means for astigmatic illumination of the entrance slit arrangement can also be used.
  • the light is parallelized by means of a spherical concave mirror 30.
  • the parallel bundle 32 then strikes an Echelle grating 34 where it is dispersed.
  • the grid furrows 44 run horizontally.
  • the dispersion takes place perpendicular to the lattice furrows, i.e. vertically in Fig.l.
  • the parallel light beam 32 falls on the dispersion plane at a very shallow angle on the Echelle grating 34. The angle corresponds approximately to 90 degrees minus the blaze angle of the Echelle grating.
  • 3 shows the Echelle grating 34 again in detail from the side.
  • the Echelle grating 34 comprises stepped grating grooves 44.
  • the grating grooves 44 have a distance d which corresponds to the grating constant.
  • the angle of incidence ⁇ is the angle between the incident beam 32 and the perpendicular 46 to the grating 34.
  • the diffraction angle ⁇ is the angle between the diffracted beam 58 and the
  • Blaze angle 46 B denotes the angle between the vertical 46 on the grid 34 and the vertical 54 on the narrow surfaces of the grid furrows 44. In the present exemplary embodiment, the angles ⁇ , ⁇ and ⁇ B coincide approximately.
  • a high blaze angle reduces the intensity of the diffraction pattern to high diffraction orders in the region between the thirtieth and hundredth and thirtieth order concentrated for the wavelengths to be measured.
  • a high diffraction order results in a high resolution.
  • a large diffraction angle which in this case is 76 degrees, is a high resolution.
  • the Echelle grating 34 has a small number of lines of 75 stitches per millimeter in order to achieve the highest possible angular dispersion for wavelengths in the range from 190 nm to 852 nm. Line counts of 25 to 250 stitches per millimeter are typically used. Due to the large angle of incidence, the grating 34 must be correspondingly long if all the radiation is to strike the grating
  • the parallel bundle 32 falls with respect to a plane perpendicular to the
  • the reflected and dispersed beam 58 is directed by a p ⁇ sma 60 with a roof edge 62.
  • the roof edge 62 of the P ⁇ sma 60 runs vertically.
  • the beam 58 is dispersed in the P ⁇ sma 60, strikes a plane mirror 64 behind it and is reflected back into the P ⁇ sma 60.
  • the beam is redispersed there.
  • the beam is dispersed twice in the horizontal direction, that is to say perpendicular to the grating dispersion direction (main dispersion direction) (transverse dispersion).
  • the orders overlapping in the main dispersion direction are pulled apart in a direction perpendicular to the main dispersion direction by the transverse dispersion on the prism 60, which is considerably narrower than the main dispersion.
  • Output plane 72 The spectrum of a continuous radiator is shown schematically in FIG. 5.
  • the wavelengths are distributed in the main dispersion direction in the direction of the Arrow 74.
  • the various orders are pulled apart in the transverse dispersion direction, represented by arrow 76. So the 100th order is 78, e.g. next to the 99th order 80.
  • a frame (not shown) is arranged around the area of the exit plane 72.
  • a detector can be attached to this frame.
  • a charged-coupled device (CCD) detector of a conventional type is arranged in the exit plane.
  • the CCD detector in FIG. 6 is provided with picture elements 84, which are arranged in a rectangular grid in horizontal
  • Detector rows 94 and vertical detector columns 92 are arranged. The detector is aligned such that the detector columns 92 run along the diffraction orders 74 of the Echelle grating 34 in FIG.
  • the slit opening 24, through which the slit image is limited in the main direction of dispersion, can be rotated by an angle ⁇ with respect to the horizontal.
  • the rotation takes place in such a way that the slit images of the different wavelengths are oriented perpendicular to the detector columns 92, in the direction of the detector rows 94.
  • the gap opening 26 in the gap mask 20 runs vertically. This is shown in FIG. 6 using a line spectrum with sharp lines 82. In this case, the stomata in the slit masks are optimally adjusted to each other.
  • Each line 82 extends over two pixels 84 in the same line and in adjacent columns of the detector in the horizontal direction, represented by one
  • the line 96 corresponding to the line 82 in FIG. 6 extends over a plurality of pixels 98, 100, 102 and 104 in different detector lines of the Detector. This makes the evaluation of the spectrum more difficult and the spectral resolution of the spectrometer deteriorates. Furthermore, falsification occurs in some cases in that light from two different lines 95, 96 reaches one and the same detector line 97.
  • the spectrometer works in monochromator mode.
  • the grid 34 is then movable about an axis 106 which runs parallel to the grid furrows.
  • the rotation can take place by means of a computer-controlled stepper motor (not shown).
  • the stepper motor is connected to a lever arm, via which the angle of rotation can be adjusted.
  • the prism 60 can be rotated about an axis parallel to the roof edge 62. This rotation can also be stepper motor controlled.
  • the prism 60 is mounted on a rotating table, e.g. by gluing. The table is in turn connected to a lever arm which is moved by the stepper motor. By rotating the prism 60, an order is shifted in the direction of arrow 76 (FIG. 5) or in the opposite direction.
  • the prism can only be rotated about the axis parallel to the roof edge 62.
  • the mirror 64 can also be coupled to the prism or moved independently of the prism (not shown).
  • Wavelength can be “moved” in a spectrum to a predetermined location in which a detector is arranged. The signal for this one wavelength is then obtained at the detector. Since the spectrum is distributed over many orders, a large spectrum range can be covered in comparatively short positioning times. It is no longer necessary to scan every wavelength, just the right one
  • Order can be set and the relatively short path within the order can be adjusted up to the selected wavelength. Only a limited angular dispersion can be achieved with a prism. However, it may be desirable to pull the orders further apart. This is the case, for example, if a large amount of light is to fall on the detector for each wavelength. Then the prism dispersion can be increased by cascading one or more other prisms. This is shown for two identical prisms in Fig.8. Another prism 110 is arranged between the Echelle grating 34 and the prism 60. As a result, the light is further dispersed and the effective prism angle is composed of the prism angles of the two prisms 60 and 110.
  • the orders are separated with a different dispersion course.
  • Another prism made of a different material is used for this.
  • Embodiment (not shown) achieved.
  • a plane grid is used instead of the plane mirror 64 in FIG.
  • the furrows of this plan grid are oriented parallel to the roof edge 62 of the prism 60.
  • the angle of incidence and the number of lines of the grating are preferably selected such that the distance between adjacent ones produced with the resulting angular dispersion of the grating and prism (or grating and prisms)
  • Orders in the image plane 72 is essentially equidistant for the entire wavelength range to be measured.
  • a prism 112 mirrored on one side can be used. This is shown in Fig.9. However, the maximum prism angle 114 is limited because the light beam 66 is totally reflected in the prism for angles that are too large.
  • optical axis 22 The course of the optical axis 22 is shown again in FIG. 10 on the basis of a lateral representation of the structure of the spectrometer 10. It can be seen that the optical
  • the axis runs essentially in a plane 114 until it meets the mirror 68.
  • the Mirror 68 is tilted somewhat, such that beam 69 runs out of plane 114 at a slight angle.

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

La présente invention concerne un spectromètre optique présentant une aberration astigmatique et contenant un réseau pour la dispersion dans un premier sens de dispersion et un second élément de dispersion pour la dispersion dans un second sens de dispersion, ce dernier formant un angle avec le premier sens de dispersion. Ce spectromètre comprend un miroir de collimateur, un miroir de caméra et un ensemble de fentes d'entrée. Une première fente d'entrée et une seconde fente d'entrée servent à la délimitation des faisceaux. Les fentes d'entrée sont disposées de telle sorte que l'image sagittale de la première fente d'entrée et l'image méridionale de la seconde fente d'entrée coïncident dans un plan d'image du spectromètre. Le réseau peut être éclairé selon un angle hors plan et la première et la seconde fente d'entrée sont disposées sur l'axe optique et forment un angle différent de 90 °C. La première et la seconde distance séparant les fentes d'entrée du miroir de collimateur et l'angle de la première fente d'entrée par rapport à l'axe optique peuvent être choisis de telle sorte que les points d'image sagittaux de tous les faisceaux qui passent par la première fente d'entrée soient sensiblement représentés dans une ligne, dans le plan d'image du spectromètre, cette ligne s'étendant sensiblement verticalement par rapport au premier sens de dispersion.
PCT/EP2001/000742 2000-03-10 2001-01-24 Spectrometre optique a compensation de l'astigmatisme WO2001069190A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001231689A AU2001231689A1 (en) 2000-03-10 2001-01-24 Optical spectrometer having an astigmatism compensation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10011462A DE10011462C2 (de) 2000-03-10 2000-03-10 Optisches Spektrometer mit Astigmatismuskompensation
DE10011462.8 2000-03-10

Publications (1)

Publication Number Publication Date
WO2001069190A1 true WO2001069190A1 (fr) 2001-09-20

Family

ID=7634077

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2001/000742 WO2001069190A1 (fr) 2000-03-10 2001-01-24 Spectrometre optique a compensation de l'astigmatisme

Country Status (3)

Country Link
AU (1) AU2001231689A1 (fr)
DE (1) DE10011462C2 (fr)
WO (1) WO2001069190A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110736541A (zh) * 2019-09-19 2020-01-31 杭州远方光电信息股份有限公司 一种光谱仪
CN111183342A (zh) * 2017-11-30 2020-05-19 安捷伦科技有限公司 多色仪系统和方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009059280A1 (de) * 2009-12-22 2011-06-30 Leibniz-Institut für Analytische Wissenschaften-ISAS-e.V., 44139 Spektrometeranordnung
US10488254B2 (en) 2016-01-14 2019-11-26 Analytik Jena Ag Spectrometer with two-dimensional spectrum

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4690559A (en) * 1984-07-02 1987-09-01 Jenoptik Jena Gmbh Optical system for spectral analysis devices
JPH0972785A (ja) * 1995-09-04 1997-03-18 Yanagimoto Kk 分光計の焦点調整システム

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD256060A3 (de) * 1984-08-20 1988-04-27 Zeiss Jena Veb Carl Echelle-spektrometer
DD226962B1 (de) * 1984-07-02 1987-05-06 Zeiss Jena Veb Carl Optisches system fuer echelle-spektrometer
DD260326B5 (de) * 1987-05-04 1993-11-25 Zeiss Carl Jena Gmbh Justierbare echelle-spektrometer-anordnung und verfahren zu dessen justage
DD292078A5 (de) * 1990-02-15 1991-07-18 ���k���������������@����@�����@���@�������������k�� Fchelle-polychromator
US5719672A (en) * 1996-09-26 1998-02-17 Varian Associates, Inc. Echelle spectrometer with a shaped oriented slit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4690559A (en) * 1984-07-02 1987-09-01 Jenoptik Jena Gmbh Optical system for spectral analysis devices
JPH0972785A (ja) * 1995-09-04 1997-03-18 Yanagimoto Kk 分光計の焦点調整システム

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 07 31 July 1997 (1997-07-31) *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111183342A (zh) * 2017-11-30 2020-05-19 安捷伦科技有限公司 多色仪系统和方法
US11579459B2 (en) 2017-11-30 2023-02-14 Agilent Technologies, Inc. Polychromator systems and methods
CN110736541A (zh) * 2019-09-19 2020-01-31 杭州远方光电信息股份有限公司 一种光谱仪

Also Published As

Publication number Publication date
DE10011462C2 (de) 2002-05-08
DE10011462A1 (de) 2001-09-27
AU2001231689A1 (en) 2001-09-24

Similar Documents

Publication Publication Date Title
EP1754032B1 (fr) Spectrometre-echelle a mise en valeur amelioree du detecteur par l'utilisation de deux ensembles spectrometres
EP2516975B1 (fr) Appareil spectrometrique
EP1336084B1 (fr) Procede d'analyse de spectres d'echelles
WO2017121583A1 (fr) Spectromètre à spectre bidimensionnel
EP0098429B1 (fr) Monochromateur
DE102009003413B4 (de) Echelle-Spektrometeranordnung mit interner Vordispersion
EP0442596B1 (fr) Polychromateur échelle
DE19961908C2 (de) Hochauflösendes Littrow-Spektrometer und Verfahren zur quasi-simultanen Bestimmung einer Wellenlänge und eines Linienprofils
DE3614639C2 (fr)
EP2158460B1 (fr) Système de spectromètre
DE102017130772A1 (de) Spektrometeranordnung, Verfahren zur Erzeugung eines zweidimensionalen Spektrums mittels einer solchen
EP0587683B1 (fr) Polychromateur a echelle
DE10011462C2 (de) Optisches Spektrometer mit Astigmatismuskompensation
DE4410036B4 (de) Zweistrahl-Polychromator
EP3578938A1 (fr) Dispositif formant spectromètre
DE10347862B4 (de) Hochauflösendes Spektrometer
DE1923005A1 (de) Monochromator
DE102022110651B4 (de) Kompaktes optisches Spektrometer
DE10247742B4 (de) Hochauflösendes Spektrometer
DE102022131700A1 (de) Optische interferometrische Messvorrichtung und Verfahren
DD256060A3 (de) Echelle-spektrometer
DD296552A5 (de) Spektrograf
DD287335A5 (de) Beugungsgitter
DD223244A1 (de) Optisches system fuer spektralgeraete

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CR CU CZ DE DK DM DZ EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG US UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG

DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
121 Ep: the epo has been informed by wipo that ep was designated in this application
REG Reference to national code

Ref country code: DE

Ref legal event code: 8642

122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP