WO2001053842A1 - Procede d'inspection d'un panneau a cristaux liquides a matrice passive et dispositif permettant une telle inspection, ainsi que procede d'inspection d'un panneau d'affichage a plasma et dispositif permettant une telle inspection - Google Patents

Procede d'inspection d'un panneau a cristaux liquides a matrice passive et dispositif permettant une telle inspection, ainsi que procede d'inspection d'un panneau d'affichage a plasma et dispositif permettant une telle inspection Download PDF

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Publication number
WO2001053842A1
WO2001053842A1 PCT/JP2001/000289 JP0100289W WO0153842A1 WO 2001053842 A1 WO2001053842 A1 WO 2001053842A1 JP 0100289 W JP0100289 W JP 0100289W WO 0153842 A1 WO0153842 A1 WO 0153842A1
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WO
WIPO (PCT)
Prior art keywords
electrode
self
electrodes
measured
measuring
Prior art date
Application number
PCT/JP2001/000289
Other languages
English (en)
Japanese (ja)
Inventor
Shogo Ishioka
Shuji Yamaoka
Original Assignee
Oht Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oht Inc. filed Critical Oht Inc.
Publication of WO2001053842A1 publication Critical patent/WO2001053842A1/fr

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Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing

Definitions

  • the present invention relates to a method and an apparatus for detecting a circuit sickle, and more particularly to a simple matrix type liquid crystal panel or a plasma display.
  • the present invention relates to a method and an apparatus for inspecting a disconnection of an electrode constituting a tunnel. Background art
  • one of a pair of opposing electrodes is provided with a plurality of linear so-called scanning electrodes extending in the row direction, and the other substrate is arranged in a column direction (perpendicular to the scanning electrodes).
  • An image is formed by providing a plurality of so-called signal electrodes and supplying by these.
  • a signal whose 3 ⁇ 4E changes with time is applied to an electrode that is the 3 ⁇ 4a of the test, and the probe is applied by a probe through a capacitance interposed between the probe and the non-wormworm probe.
  • Signal is detected, and a disconnection of mm is detected based on the mm ⁇ of the signal. It is.
  • This inspection method has the advantage that it is sufficient to provide a work pad at one end of the electrode.
  • an inspection method for inspecting disconnection of a plurality of electrodes of a simple matrix type liquid crystal panel for inspecting disconnection of a plurality of electrodes of a simple matrix type liquid crystal panel
  • a measurement step of measuring 3 ⁇ 4E by supplying n i self-voltages to a plurality of ftit self-electrodes which are orthogonal to the ftinaiied electrodes, and
  • the self-selected electrode force is measured from one end of the knitting to the fitn self-electrode where the measurement is performed in the nirf self-measurement process.
  • a simple matrix-type liquid crystal panel detection method that includes m is described.
  • the sukumi ® is measured at the most distant position from one end of the ai selected among the plurality of tif self electrodes orthogonal to the measured s3 ⁇ 4. You can also.
  • the SEE is determined in the self-measurement step. From the measured ⁇ 3 ⁇ 4 @, the process of measuring ⁇ 3 ⁇ 4 ⁇ ⁇ by supplying the fill in order for each electrode located at one end of the ⁇ , and the range of the ⁇ measured by the ⁇ in a predetermined range.
  • a simple matrix type liquid crystal This is a test method for inspecting the disconnection of multiple electrodes of a cell, and selects one of the terrible electrodes, the gap, and supplies a part of the selected electrodes that changes over time.
  • the measurement process for measuring the voltage appearing due to the supply of the above-mentioned ⁇ , and the measurement process for measuring the nervousness Based on whether 3 ⁇ 4 ⁇ is a force within a predetermined range, a wire break occurs in the part from the part of the electrode force s selected from itirfSl to the part of the electrode from which the voltage was measured in the it self-measuring step.
  • an inspection method for inspecting disconnection of a plurality of electrodes of a simple matrix type liquid crystal panel wherein one of the Strt self electrodes is selected and a shift is selected.
  • a step of providing a time-varying 3 ⁇ 4 ⁇ a measuring step of measuring ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ By comparing the measured values of each tooth with each other, it is possible to determine the level of power due to the disconnection of the selected electrode.
  • fltrt itself can be measured for the knitting electrodes included in the region where the disconnection is expected and expected among the electrodes orthogonal to the fttrf scale.
  • an inspection method for detecting disconnection of a plurality of electrodes included in a plasma display panel wherein one of the ftirl electrodes is measured by iS; Supplying a time-varying voltage to the electrodes, and a tilt force of a plurality of tilt electrodes perpendicular to the selected electrode.
  • the measurement process for measuring the turbulence and the fluency measured the power within the predetermined range, the electrodes selected from the brute force and the tiit self-measurement process from one end of the knitting
  • a determination process for stimulating whether or not a force causing a disconnection is detected in a portion before reaching the measured disgusting electrode, and a plasma display panel inspection method that includes a method including the following.
  • a plasma display there is provided a plasma display.
  • a method for detecting a disconnection of a plurality of electrodes of the panel comprising selecting one of the forces of knitting, and providing a time-dependent change to a part of iii.
  • the café 31 The measuring process of measuring the length of a plurality of electrodes that are orthogonal to the selected electrode. Based on the applied force and the force within the predetermined range, the electrode selected from the tiff self-force to the knitted self-electrode, which measured the color in the measurement process from the partial force, was used. In this part, a judgment process for judging whether or not a force causing a disconnection and a method for inspecting a plasma display panel using a tree as a barrier are used.
  • an inspection method for detecting disconnection of a plurality of electrodes of a plasma display panel wherein any one of ilirt itself is selected and changes with time when measured.
  • an inspection apparatus for inspecting disconnection of a plurality of electrodes of a simple matrix type liquid crystal panel, wherein one end of one disgusting electrode selected from tin electrodes is selected.
  • Means to supply the changing The measuring means for measuring the L, the shear force, and the mti-R of the multiple electrodes perpendicular to the measured electrode, , Based on the power in the predetermined taa, the electrode selected from the fitnai is the part from the one end to the knitting electrode whose voltage is measured by the sin self measuring means,
  • a simple matrix type liquid crystal panel comprising a fiber for determining whether or not a wire is broken; The flannel's power is shared.
  • the distasteful measurement means based on the electrode located at the most distant position from one end of the previously selected electrode, among the plurality of distasteful electrodes orthogonal to the selected StS, It can also be measured.
  • the measuring means measures ma first out of a plurality of orthogonal self-measuring electrodes which are small in length. For each electrode located on one end side of the knitting electrode from the knitting electrode obtained, 3 ⁇ 4 3 ⁇ 4 ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ffi ffi ffi ffi ffi ffi ffi ffi ffi ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ It is also possible to provide a means for specifying the disconnection point of the electrode that has been measured by specifying ⁇ .
  • a simple matrix type liquid crystal there is also provided a simple matrix type liquid crystal.
  • An inspection device for inspecting the disconnection of a plurality of electrodes of the panel, a means for supplying a time-varying SEE to a part of one dislike electrode selected from tin electrodes.
  • the measuring means for measuring tittiru by the supply of ftrt self for any one of the plurality of electrodes which are orthogonal to the selected electrode, and the Based on the force in the above, the knitted as-measured electrode is used to determine whether or not there is a break in the force between the part of Sin and the electrode where the measuring means measured the voltage.
  • an inspection device for inspecting disconnection of a plurality of electrodes of a simple matrix type liquid crystal panel, wherein the inspection device is connected to one of the tin self-electrodes in time.
  • a simple matrix type liquid crystal panel detection device characterized by comprising: a judgment means for judging the level at which the selected electrode is broken due to a disconnection by comparing with each other. Is done.
  • the knitting measurement means estimates that a disconnection is expected among the electrodes orthogonal to the selected electrode. It is also possible to measure ⁇ by using the lliil self-electrode included in the region to be measured. Also, the ⁇ , orchid measuring means can measure the tilted self for all the ftjf self-electrodes orthogonal to the electrode selected by jitrtai.
  • the knitting electrode whose 3 ⁇ 4 ⁇ has changed is identified from each of the self-measurements, thereby selecting Means for specifying the broken portion of the electrode may be provided.
  • a plasma display An inspection device for inspecting the disconnection of a plurality of electrodes of a panel, and one of the knitting ⁇ s is tossed and changes temporally to one end of the distant.
  • an optional device for inspecting the disconnection of a plurality of electrodes formed by a plasma display panel wherein one of the return electrodes is selected and a part of the selected electrodes is provided.
  • the measured ⁇ ⁇ is based on whether the ME measured by the self-measurement is a force within a predetermined range.
  • a determination means for determining the presence of disconnection in a portion leading to the electrode is provided.
  • a detection device for detecting disconnection of a plurality of electrodes of a plasma display panel.
  • FIG. 1 is a schematic diagram of a ⁇ S device according to one embodiment of the present invention, and a diagram showing electrodes 100 and 101 of panel B inspected by a detection device A.
  • FIG. 2 is a diagram showing an internal circuit of the multiplexer 5. BEST MODE FOR CARRYING OUT THE INVENTION
  • the simple matrix type liquid crystal panel includes, for example, S-N simple matrix type liquid crystal panel and TN simple matrix type liquid crystal panel S.
  • electrode is intended to include both a scanning electrode and a symbol electrode.
  • FIG. 1 is a schematic diagram of an inspection apparatus ⁇ according to an embodiment of the present invention, and an electrode group 100 and 1 of a panel B showing a simple matrix type liquid crystal panel or a plasma display panel inspected by an inspection apparatus A. It is the figure which showed 01.
  • the electrode groups 100 and 1 • 1 are groups of electrodes corresponding to scanning electrodes and signal electrodes, respectively.
  • Inspection device A is a signal generator 1 that supplies a time-varying signal to electrode group 100 or 101 and an electrode group 100 or 101?
  • Signal processor 2 for amplifying and filtering the signal 111
  • oscilloscope 3 for measuring the signal processed by the signal processor 2
  • a probe connected to each electrode group 100 0 or 101 4
  • a multiplexer 5 for switching the connection between the probe 4 and the signal generator 1 or the signal processor 2 or GND, control of these, determination of electrode disconnection, and
  • a computer 6 for performing the operation.
  • the signal generator 1 generates a signal whose EE changes with time according to an instruction of the computer 7.
  • the degree (frequency) of the temporal change of the voltage is, for example, from 500 kHz to 1
  • the generated signal can be a square wave DC or AC Good.
  • the signal generator 1 may be one that generates the signal, regardless of the computer 7.
  • the signal processor 2 is for performing a filtering process such as removing noise from the group 100 or 101 (for example, a process for amplifying the level).
  • the oscilloscope 3 measures the 3 ⁇ 4 ⁇ level from the signal transmitted from the signal processor 2. The measurement and the result are sent to the computer 6.
  • the probe 4 is individually assigned to each electrode of the electrode groups 100 and 101, and one of the probes 4 strokes to one of the S1s and the other end of the multiplexer 5 It is connected to the.
  • the probe 4 is individually assigned to each electrode.
  • the probe 4 may be moved in the order of each step manually or by an appropriate device.
  • the multiplexer 5 selectively connects the other end of each probe 4 to one of the signal generator 1 ⁇ signal processing 2 power or GND, and the connection is switched by the computer 6. Done.
  • FIG. 2 is a diagram showing an internal circuit of the multiplexer 5.
  • the computer 6 select the electrodes to be tested for disconnection.
  • the electrode 10 l a force ';
  • the computer 6 selects one of the electrode groups 100 orthogonal to the selected electrode 101a.
  • the electrode 100a is elongated.
  • the connection between the computer 6 and the multiplexer 5 is switched, the probe 4 connected to the electrode 100 la is connected to the signal generator 1, and the probe 4 connected to the electrode 100a is connected. Connect to signal processor 4 respectively. If all other probes 4 of this age are connected to GND, more accurate inspection is possible.
  • the signal generator 1 generates a time-varying mi, which is supplied only to the electrode 1 Ola via the manoplexer 5 and the probe 4.
  • the electrode 100a is connected to the electrode 100a via the capacitance at a portion orthogonal to the electrode 101a.
  • the signal is processed by the signal processor 2 via the probe 4 and the multiplexer 5 and measured by the oscilloscope 3.
  • the computer 6 determines whether or not the power measured in the oscilloscope 3 is within the predetermined range, and determines that the power is within the predetermined range. If not, 3 ⁇ 4 ⁇ determines that 101 a is disconnected.
  • the predetermined range is the data obtained by performing the inspection in the same procedure for the dummy panel B in the same procedure as that of the dummy panel B, which was previously disconnected. Is determined based on
  • the disconnection inspection of the electrode can be performed more easily.
  • the multiplexer 5 connects S3 ⁇ 4100b to the symbol processor 2 in place of the electrode 100a.
  • the force within the predetermined range of 100 b is determined. If it is within the predetermined range, there is no disconnection of electrode 101a from one end of electrode 101a to electrode 100b. A disconnection occurs between the two. If it is not within the predetermined range, the distance between electrode 1
  • the manole tipplexer 5 gives 3 ⁇ 43 ⁇ 4 ⁇ 0 0
  • the electrode 100 c is connected to the signal processor 2 instead of b.
  • the portion where 101a is disconnected is found. For example, if there is a disconnection at point X in FIG. 1, the boundary between electrode 1 oob and i 00 c will cause a change in the electrode.
  • the disconnection inspection of the panel B is completed. This inspection method also finds the location of the disconnection, which is convenient for the il key.
  • the present invention when inspecting for disconnection of S3 ⁇ 4l01a, first measure the length of the electrode 100a at the most knitted position from one end of the electrode 10la (probe 4 side). It was decided to. This is because a single inspection is used to inspect the disconnection of almost all of the electrode 101a. For example, the field Hff ⁇ where disconnection is likely to occur is limited: In the case of ⁇ , etc., the voltage applied to the electrode 100c at the farthest position may be measured. This means that a disconnection from one end of the electrode 101a to 3 ⁇ 4S 100c can be inspected. In the above E inspection method, the force applied to O la by applying probe 4 to one of the electrodes 101a and changing its time, However, the present invention is not limited to this. If possible, any part of 101a may be supplied as worms.
  • one 100a is selected from the electrode group 100 orthogonal to the electrode 101a to be inspected, and the range of the electrode 100a is determined in advance. It is determined whether or not the electrode 101a has a broken wire by comparing with the electrodes 101a. By selecting a plurality of electrodes from mm i00 and comparing the respective appearing values with each other, the electrodes 101a are determined. It may be determined whether a is a breaking force. This is because, if the electrode 101a is disconnected, the ⁇ ⁇ l ⁇ of each electrode orthogonal to the electrode 101a will be different. For example, if there is a disconnection at point X in Fig. 1, the electrodes 100a and 100b will have! EL-R ⁇ , which are the same force as those of the other electrodes. , 00. 11 £ is a force that is at a different level.
  • 0H ⁇ ⁇ ⁇ ⁇ ⁇ E may be measured for all the electrodes of (0 0), or in consideration of the range in which the disconnection is expected, the electrodes of ⁇ ⁇ ⁇ ⁇ to 3 ⁇ 4 of the orthogonal m3 ⁇ 4 group may be measured. . In addition, one of the electrodes in the electrode group that is intermittently skipped, two may be skipped, etc.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Liquid Crystal (AREA)
  • Liquid Crystal Display Device Control (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)

Abstract

L'invention concerne un procédé d'inspection d'un panneau à cristaux liquides à matrice passive, permettant de détecter plus facilement la rupture d'une électrode, et un dispositif permettant une telle inspection, ainsi qu'un procédé d'inspection d'un panneau d'affichage à plasma et un dispositif permettant une telle inspection. L'invention concerne également un procédé permettant de détecter la rupture d'une pluralité d'électrodes (100, 101) comprises dans un panneau (B). Ce procédé consiste à sélectionner une de ces électrodes (100, 101), à appliquer une tension à variation temporelle à une extrémité d'une électrode (101a), à mesurer par une capacité la tension apparaissant sur l'électrode (100a) qui recoupe perpendiculairement l'électrode (101a) sélectionnée, suite à l'application de cette tension dans cette électrode (101a), et à évaluer par ordinateur (6) si la tension mesurée se situe à l'intérieur d'un intervalle prédéterminé.
PCT/JP2001/000289 2000-01-18 2001-01-18 Procede d'inspection d'un panneau a cristaux liquides a matrice passive et dispositif permettant une telle inspection, ainsi que procede d'inspection d'un panneau d'affichage a plasma et dispositif permettant une telle inspection WO2001053842A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000-9287 2000-01-18
JP2000009287A JP2001201753A (ja) 2000-01-18 2000-01-18 単純マトリックス型液晶パネルの検査方法及び検査装置、プラズマディスプレイパネルの検査方法及び検査装置

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Publication Number Publication Date
WO2001053842A1 true WO2001053842A1 (fr) 2001-07-26

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JP (1) JP2001201753A (fr)
TW (1) TW494232B (fr)
WO (1) WO2001053842A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1486791A1 (fr) * 2003-06-11 2004-12-15 Infineon Technologies AG Puce à semi-conducteur avec un dispositif de surveillance de l'endommagement mécanique
CN101799508A (zh) * 2010-03-09 2010-08-11 上海松下等离子显示器有限公司 电极断线检测方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4653775B2 (ja) * 2002-04-26 2011-03-16 東芝モバイルディスプレイ株式会社 Ｅｌ表示装置の検査方法
US7631230B2 (en) * 2004-11-19 2009-12-08 Sun Microsystems, Inc. Method and apparatus for testing a transmission path
US7514937B2 (en) 2005-11-21 2009-04-07 Sun Microsystems, Inc. Method and apparatus for interconnect diagnosis
US7394260B2 (en) 2006-05-24 2008-07-01 Sun Microsystems, Inc. Tuning a test trace configured for capacitive coupling to signal traces
JP5671316B2 (ja) * 2010-12-01 2015-02-18 株式会社Ihi 宇宙浮遊物体検出装置
WO2021079945A1 (fr) * 2019-10-25 2021-04-29 日本電産リード株式会社 Procédé d'inspection de substrat, programme d'inspection de substrat et dispositif d'inspection de substrat

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Publication number Priority date Publication date Assignee Title
JPS559146A (en) * 1978-07-06 1980-01-23 Pentel Kk Tablet testing device
JPH07146323A (ja) * 1993-11-22 1995-06-06 Inter Tec:Kk 液晶表示器用ガラス基板の検査方法及び検査装置
JPH07270477A (ja) * 1994-03-29 1995-10-20 Dainippon Printing Co Ltd 線状電極の欠陥検出方法および欠陥検出装置
US5883437A (en) * 1994-12-28 1999-03-16 Hitachi, Ltd. Method and apparatus for inspection and correction of wiring of electronic circuit and for manufacture thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS559146A (en) * 1978-07-06 1980-01-23 Pentel Kk Tablet testing device
JPH07146323A (ja) * 1993-11-22 1995-06-06 Inter Tec:Kk 液晶表示器用ガラス基板の検査方法及び検査装置
JPH07270477A (ja) * 1994-03-29 1995-10-20 Dainippon Printing Co Ltd 線状電極の欠陥検出方法および欠陥検出装置
US5883437A (en) * 1994-12-28 1999-03-16 Hitachi, Ltd. Method and apparatus for inspection and correction of wiring of electronic circuit and for manufacture thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1486791A1 (fr) * 2003-06-11 2004-12-15 Infineon Technologies AG Puce à semi-conducteur avec un dispositif de surveillance de l'endommagement mécanique
CN101799508A (zh) * 2010-03-09 2010-08-11 上海松下等离子显示器有限公司 电极断线检测方法

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Publication number Publication date
TW494232B (en) 2002-07-11
JP2001201753A (ja) 2001-07-27

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