WO2001053814A3 - Gassensor mit einer gelschicht zur ermittlung des feuchtigkeitsgehaltes - Google Patents

Gassensor mit einer gelschicht zur ermittlung des feuchtigkeitsgehaltes Download PDF

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Publication number
WO2001053814A3
WO2001053814A3 PCT/DE2001/000120 DE0100120W WO0153814A3 WO 2001053814 A3 WO2001053814 A3 WO 2001053814A3 DE 0100120 W DE0100120 W DE 0100120W WO 0153814 A3 WO0153814 A3 WO 0153814A3
Authority
WO
WIPO (PCT)
Prior art keywords
layer
gas
sensor
gel layer
gas sensor
Prior art date
Application number
PCT/DE2001/000120
Other languages
English (en)
French (fr)
Other versions
WO2001053814A2 (de
Inventor
Hans Hecht
Manfred Strohrmann
Axel-Werner Haag
Andreas Stark
Matthias Tews
Josef Kleinhans
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of WO2001053814A2 publication Critical patent/WO2001053814A2/de
Publication of WO2001053814A3 publication Critical patent/WO2001053814A3/de

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0011—Sample conditioning
    • G01N33/0014—Sample conditioning by eliminating a gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/221—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties
    • G01N2027/222—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties for analysing gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

Es wird ein Gassensor zur Ermittlung physikalischer Grössen von Gasen vorgeschlagen, der mit einem Kondensator versehen ist, dessen Dielektrikum (3) derart mit dem Gas in Kontakt steht, dass eine Veränderung der physikalischen Eigenschaften des Gases zu einer entsprechenden Veränderung der Dielektrizitätskonstanten führt. Eine Gelschicht (4) ist auf dem Gassensor (1), der als ein Sensor zur Ermittlung des Feuchtigkeitsgehaltes des Gases ausgeführt ist, im Bereich des Dielektrikums (3) angeordnet. Mit der Gelschicht (4) werden Fremdstoffe, die im vorbeiströmenden Gas vorhanden sind, von der eigentlichen feuchteempfindlichen Schicht (Dielektrikum 3) des Kondensators ferngehalten, während das zu erfassende Wasser für die Feuchtigkeitsmessung diese Schicht (3) leicht durch Diffusion erreichen und wieder verlassen kann.
PCT/DE2001/000120 2000-01-22 2001-01-13 Gassensor mit einer gelschicht zur ermittlung des feuchtigkeitsgehaltes WO2001053814A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10002707A DE10002707A1 (de) 2000-01-22 2000-01-22 Gassensor
DE10002707.5 2000-01-22

Publications (2)

Publication Number Publication Date
WO2001053814A2 WO2001053814A2 (de) 2001-07-26
WO2001053814A3 true WO2001053814A3 (de) 2002-04-25

Family

ID=7628409

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2001/000120 WO2001053814A2 (de) 2000-01-22 2001-01-13 Gassensor mit einer gelschicht zur ermittlung des feuchtigkeitsgehaltes

Country Status (3)

Country Link
US (1) US20010015089A1 (de)
DE (1) DE10002707A1 (de)
WO (1) WO2001053814A2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004257950A (ja) * 2003-02-27 2004-09-16 Denso Corp 半導体圧力センサ
JP2004271461A (ja) * 2003-03-11 2004-09-30 Denso Corp 容量式湿度センサ
JP3855950B2 (ja) * 2003-03-19 2006-12-13 株式会社デンソー 容量式湿度センサ
FR2856897B1 (fr) * 2003-07-04 2007-01-26 Oreal Kit, notamment a usage cosmetique, comportant un indicateur ou capteur d'humidite ambiante
DE102009004393A1 (de) * 2009-01-08 2010-11-11 Eads Deutschland Gmbh Akkumulierender Feuchtesensor
JP5908069B2 (ja) 2011-06-08 2016-04-26 スリーエム イノベイティブ プロパティズ カンパニー 湿度センサ及びそのためのセンサ素子
EP3168608A1 (de) * 2015-11-16 2017-05-17 Universite De Montpellier Verwendung von biopolymeren in einem dielektrischen gassensor

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2113400A (en) * 1981-12-08 1983-08-03 Sharp Kk Moisture responsive electrical element
US4571543A (en) * 1983-03-28 1986-02-18 Southwest Medical Products, Inc. Specific material detection and measuring device
US5018380A (en) * 1989-02-06 1991-05-28 Allied-Signal Inc. Dielectric sensors
US5036704A (en) * 1990-03-23 1991-08-06 Gas Research Institute Moisture sensor
US5040411A (en) * 1989-12-27 1991-08-20 Ppg Industries, Inc. Windshield moisture sensor
JPH07335800A (ja) * 1994-06-08 1995-12-22 Fuji Electric Co Ltd 半導体装置
JPH10153508A (ja) * 1996-11-26 1998-06-09 Fuji Electric Co Ltd 半導体圧力センサ
US5857250A (en) * 1994-10-25 1999-01-12 Texas Instruments Incorporated Method of forming a capacitance type gaseous sensing device and apparatus thereof

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2113400A (en) * 1981-12-08 1983-08-03 Sharp Kk Moisture responsive electrical element
US4571543A (en) * 1983-03-28 1986-02-18 Southwest Medical Products, Inc. Specific material detection and measuring device
US5018380A (en) * 1989-02-06 1991-05-28 Allied-Signal Inc. Dielectric sensors
US5040411A (en) * 1989-12-27 1991-08-20 Ppg Industries, Inc. Windshield moisture sensor
US5036704A (en) * 1990-03-23 1991-08-06 Gas Research Institute Moisture sensor
JPH07335800A (ja) * 1994-06-08 1995-12-22 Fuji Electric Co Ltd 半導体装置
US5857250A (en) * 1994-10-25 1999-01-12 Texas Instruments Incorporated Method of forming a capacitance type gaseous sensing device and apparatus thereof
JPH10153508A (ja) * 1996-11-26 1998-06-09 Fuji Electric Co Ltd 半導体圧力センサ

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
DATABASE WPI Section EI Week 199833, Derwent World Patents Index; Class S02, AN 1998-382161, XP002180860 *
PATENT ABSTRACTS OF JAPAN vol. 1996, no. 04 30 April 1996 (1996-04-30) *

Also Published As

Publication number Publication date
DE10002707A1 (de) 2001-08-02
US20010015089A1 (en) 2001-08-23
WO2001053814A2 (de) 2001-07-26

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