WO2001011699A1 - Electrode contact for a piezoceramic actuator and method for producing same - Google Patents

Electrode contact for a piezoceramic actuator and method for producing same Download PDF

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Publication number
WO2001011699A1
WO2001011699A1 PCT/DE2000/002527 DE0002527W WO0111699A1 WO 2001011699 A1 WO2001011699 A1 WO 2001011699A1 DE 0002527 W DE0002527 W DE 0002527W WO 0111699 A1 WO0111699 A1 WO 0111699A1
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WO
WIPO (PCT)
Prior art keywords
piezoceramic
stack
actuator
extensions
foils
Prior art date
Application number
PCT/DE2000/002527
Other languages
German (de)
French (fr)
Inventor
Lothar Henneken
Armin Glock
Juergen Hackenberg
Original Assignee
Robert Bosch Gmbh
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Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Priority to KR1020027001556A priority Critical patent/KR20020027523A/en
Priority to DE50012932T priority patent/DE50012932D1/en
Priority to EP00962179A priority patent/EP1206804B1/en
Priority to JP2001516258A priority patent/JP2003530684A/en
Priority to US10/049,181 priority patent/US6891313B1/en
Publication of WO2001011699A1 publication Critical patent/WO2001011699A1/en

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H10N30/067—Forming single-layered electrodes of multilayered piezoelectric or electrostrictive parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Connection electrodes of multilayer piezoelectric or electrostrictive devices, e.g. external electrodes

Definitions

  • the invention relates to a piezoceramic actuator, consisting essentially of a sintered monolithic stack of thin piezoceramic foils with inner electrodes arranged between the foils, which on the outside of the stack with the formation of at least two electrically separate electrode groups with alternating successive inner electrodes of the at least two groups with one another are electrically connected.
  • Such actuators are generally known.
  • Piezoceramic materials have the property of being exposed to mechanical forces, i.e. especially under mechanical pressure or tension, to charge electrically.
  • an electric field applied to the piezoceramic material causes the material to be mechanically braced, i.e. especially expands or contracts.
  • Foils can no longer or practically no longer contribute to the work of the actuator.
  • DE 196 48 545 AI therefore provides for the aforementioned metallic coatings with a mechanically particularly flexible, electrically conductive cover another layer in order to keep the fragments of the aforementioned coating, which is also referred to in DE 196 48 545 AI also as basic metallization, in an electrically conductive connection with one another.
  • This additional coating can, for example, take the form of a wire mesh or braid or also a metal foam or corrugated sheet.
  • the invention is based on the general idea of continuing the inner electrodes at least on a region of the outside of the stack by strip-like or flag-like metallic elements, which can preferably be formed by electrolytically deposited metal.
  • the internal electrodes can thus be connected to one another in an electrically conductive manner at a certain distance from the side edges of the piezoceramic foils, for example by means of optionally corrugated metal foils, knitted metal or the like. or conductive plastic foils, for example silicone foils, in which electrically conductive particles are embedded, so that these foils form a continuous, flat electrical conduction band.
  • the strips or flags that continue the inner electrodes outside the piezoceramic stack thus form a non-coherently structured, strip-shaped base metallization, these strips or flags being only little stressed by the mechanical movements of the adjacent piezoceramic foils during operation of the actuator.
  • a particularly stable actuator can be achieved.
  • the single figure shows a sectional view of an actuator according to the invention.
  • a piezoceramic actuator 1 essentially consists of a stack of sintered piezoceramic foils 2 with metallic inner electrodes 3 arranged between them, which alternately extend to the right or left side of the actuator 1 shown, i.e. are accessible from the outside between the adjacent piezoceramic foils 2. At the respective opposite edge area, each inner electrode is covered by the adjacent piezoceramic foils 2, so that there the edge of the respective inner electrode 3 is inaccessible from the outside.
  • strip-like extensions 4 are formed on the edge regions of the inner electrodes 3 that can be reached from the right or left in the drawing and which, for example, each consist of a nickel layer 4 ′ directly adjoining the inner electrodes 3 and a gold layer 4 lying on the outside " consist.
  • the free edges of the strip-like extensions 4 are electrically connected to one another via electrically conductive foils 5 ′ or 5 ′′, for example made of plastic, for example silicone or copolymers, and embedded therein electrically conductive carbon or metal particles, these particles being used to achieve the desired electrical conductivity are packed very densely and that Plastic material essentially serves to ensure the mechanical bond of the particles.
  • electrically conductive foils 5 ′ or 5 ′′ for example made of plastic, for example silicone or copolymers, and embedded therein electrically conductive carbon or metal particles, these particles being used to achieve the desired electrical conductivity are packed very densely and that Plastic material essentially serves to ensure the mechanical bond of the particles.
  • the strip-like extensions 4 and the foils 5 'and 5 can be electrically conductively connected to one another, for example by hot pressing.
  • the two foils 5 'and 5 are in turn electrically connected to connecting lines 6' and 6", via which the foils 5 'and 5 "and thus the internal electrodes 3 electrically connected to them can be connected to an operating voltage source, such that the respective the film 5 'electrically connected group of the internal electrodes 3 and the karam-like intervening between the aforementioned internal electrodes 3, which are electrically connected to the film 5 "electrically connected internal electrodes 3, have opposite polarities and each intermediate piezoceramic film 2 is subjected to a corresponding electrical field.
  • the upper and lower ends of the actuator 1 then perform relative movements corresponding to the double arrow P.
  • the foils 5 'and 5 are spatially separated from the edges of the piezoceramic foils 2, and since the foils 5' and 5" also have a certain elastic flexibility, the movements of the actuator 1 cannot destroy the foils 5 'and 5 "cause.
  • the foils 5 'and 5 can also have a corrugated structure, such that an outside convex bead extends between two inner electrodes 3 or their strip-shaped extensions 4, which are adjacent to the foil 5' and 5" and are adjacent.
  • the conductive foils 5 'and 5 " it is also possible to replace the conductive foils 5 'and 5 "with knitted or meshed metal or even with a layer of metal foam.
  • the electrochemical production of the strip-like extensions 4 can be carried out as follows:
  • the stack of the sintered piezoceramic foils 2 with the internal electrodes 3 arranged between them is fixed in a holder. Thereafter, the inner electrodes 3 are electrically contacted with each other on the two opposite sides, in the drawing on the right and left side of the stack shown, but in such a way that the respective contacts leave a larger continuous area on the opposite sides of the stack.
  • the stack is then cleaned in a neutral cleaner, for example at a temperature of 55 ° C. and a treatment time of five minutes.
  • Electrochemical metal deposition now takes place, e.g. a nickel deposition or the deposition of a nickel alloy from a nickel sulfamate electrolyte which, in the case of deposition of an alloy, contains appropriate additives or alloy components. If necessary, noble metal can also be deposited from a corresponding electrolyte.
  • the internal electrodes 3 are electrically connected as cathodes via the aforementioned contacts in the stack and a suitable anode is used.
  • the nickel sulfamate electrolyte can have a pH between 3 and 4 and a temperature of about 40 ° C. Other electrolytes are operated under similar process conditions.
  • the electrical current strength between cathode and anode can be 1 mA / cm 2 , based on the exposed ceramic surface. This achieves a deposition rate of approx. 0.1 ⁇ / min.
  • Hard gold is then deposited in a gold electrolyte, the internal electrodes 3 in turn being connected as a cathode and an anode made of platinized titanium can be used.
  • the pH of the gold electrolyte can be adjusted to a value from 4 to 5.
  • the temperature can again be 40 ° C.
  • the current strength can in turn be 1 mA / cm 2 based on the exposed ceramic surface of the ceramic film stack.
  • a uniform, approximately 0.1 mm thick gold layer can be deposited without electroless from a Sudgold electrolyte.
  • the temperature for this process step can be between 80 ° C and 90 ° C.
  • the strip-like extensions 4 are now available for connection to the electrically conductive foils 5 'and 5 "or the like.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Laminated Bodies (AREA)

Abstract

The invention relates to a piezoceramic actuator (1) essentially consisting of a monolithic stack of thin piezoceramic films (2) between which internal electrodes (3) are provided. Said actuator comprises, on the outer side of the stack, strips (4) which are electrochemically formed on the internal electrodes and via which the internal electrodes (3) are contacted by the outer electrodes (5, 5') for operating the actuator (1). The strips (4) are preferably comprised of copper and of tin-silver alloys or of a nickel layer (4') and a gold layer (4'').

Description

Piezokeramischer Aktor sowie Verfahren zu seiner HerstellungPiezoceramic actuator and method for its production
Stand der TechnikState of the art
Die Erfindung bezieht sich auf einen piezokeramischen Aktor, im wesentlichen bestehend aus einem gesinterten monolithischen Stapel dünner piezokeramischer Folien mit zwischen den Folien angeordneten Innenelektroden, welche auf der Außenseite des Stapels unter Bildung zumindest zweier elektrisch voneinander getrennter Elektrodεngruppen mit alternierend aufeinanderfolgenden Innenelektroden der zumindest zwei Gruppen miteinander elektrisch verbunden sind.The invention relates to a piezoceramic actuator, consisting essentially of a sintered monolithic stack of thin piezoceramic foils with inner electrodes arranged between the foils, which on the outside of the stack with the formation of at least two electrically separate electrode groups with alternating successive inner electrodes of the at least two groups with one another are electrically connected.
Derartige Aktoren sind allgemein bekannt.Such actuators are generally known.
Piezokera ische Materialien haben die Eigenschaft, sich bei Beaufschlagung mit mechanischen Kräften, d.h. insbesondere unter mechanischem Druck oder Zug, elektrisch aufzuladen. Andererseits bewirkt ein auf das piezokeramische Material angelegtes elektrisches Feld, daß sich das Material mechanisch verspannt, d.h. insbesondere ausdehnt oder zusammenzieht .Piezoceramic materials have the property of being exposed to mechanical forces, i.e. especially under mechanical pressure or tension, to charge electrically. On the other hand, an electric field applied to the piezoceramic material causes the material to be mechanically braced, i.e. especially expands or contracts.
Diese letzteren Effekte werden bei Aktoren ausgenutzt, um Stellbewegungen auszuführen. Durch den Aufoau des Aktors aus einem Stapel piezokeramischer Folien m t entsprechend vielen Innenelektroden kann auch bei begrenzter elektrischer Betriebsspannung eine hohe elektrische Feldstarke innerhalb der piezokeramiscnen Folien erreicht werden, da m Falle von zwei Eleκtroαengruppen jeweils zwischen zwei benachbarten Innenelektroαen die Betriecsspannung anliegt.These latter effects are used in actuators to perform positioning movements. By thawing the actuator out of a stack of piezoceramic foils with a corresponding number of internal electrodes, even with a limited electrical operating voltage, a high electric field strength can be achieved within the piezoceramic foils, since in the case of two electro-groups, the operating voltage is present between two adjacent interior electrons.
In der Praxis kann die Kontaktierung der Innenelektroden Schwierigkeiten bereiten. Be herkömmlichen Aktoren sind voneinander separierte Seitenbereiche des Stapels metallisch beschichtet, derart, daß d e eine Beschichtung elektrisch mit den Innenelektroden der einen Gruppe und die andere Beschichtung elektrisch mit den Innenelektroden der anderen Gruppe verbunden st.In practice, contacting the internal electrodes can be difficult. In conventional actuators, side regions of the stack which are separated from one another are coated with metal, in such a way that a coating is electrically connected to the internal electrodes of one group and the other coating is electrically connected to the internal electrodes of the other group.
Beim Betrieb der Aktoren werden αiese metallischen Bescϊiichtungen erheolichen mechanischen Sparnungen ausgesetzt, wenn s ch der Aktor entsprechend der jeweiligen Betriebsspannung ausdehnt oder zusammenzient. Hierbei können hohe Wechselbeanspruchungen auftreten, wenn die Betriebsspannung häufig an- und abgeschaltet bzw. bezüglich ihrer Polarit t umgeschaltet w._.rd.When the actuators are in operation, these metallic coatings are subject to considerable mechanical savings if the actuator expands or converges in accordance with the respective operating voltage. Here, high alternating stresses can occur if the operating voltage is frequently switched on and off or switched with respect to its polarity.
Diese mechanischen Beanspruchungen der metallischen Beschichtungen können zu Rissen m αer Beschichtung fuhren, mit der Folge, αaß eine mehr oder weniger große Anzahl der Innenelektroden nicht mehr an die Betriebspannungsquelle anschließbar ist und die benachbarten piezokeramischenThese mechanical stresses on the metallic coatings can lead to cracks in the coating, with the result that a more or less large number of internal electrodes can no longer be connected to the operating voltage source and the adjacent piezoceramic ones
Folien nicht enr bzw. praktisch nicht mehr zur Arbeit des Aktors beitragen können.Foils can no longer or practically no longer contribute to the work of the actuator.
In der DE 196 48 545 AI wird deshalb vorgesehen, die vorgenannten metallischen Beschichtungen mit einer mechanisch besonders nachgiebigen, elektrisch leitenden weiteren Schicht zu bedecken, um die Fragmente der vorgenannten Beschichtung, die in der DE 196 48 545 AI auch als Grundmetallisierung bezeichnet wird, ständig in elektrisch leitender Verbindung miteinander zu halten. Diese zusätzliche Beschichtung kann beispielsweise die Form eines Drahtgewirkes oder -geflechtes oder auch eines Metallschaums oder Wellbleches aufweisen.DE 196 48 545 AI therefore provides for the aforementioned metallic coatings with a mechanically particularly flexible, electrically conductive cover another layer in order to keep the fragments of the aforementioned coating, which is also referred to in DE 196 48 545 AI also as basic metallization, in an electrically conductive connection with one another. This additional coating can, for example, take the form of a wire mesh or braid or also a metal foam or corrugated sheet.
Vorteile der ErfindungAdvantages of the invention
Die Erfindung beruht auf dem allgemeinen Gedanken, die Innenelektroden jeweils zumindest an einem Bereich der Außenseite des Stapels durch leistenartige bzw. fahnenartige metallische Elemente fortzusetzen, welche in bevorzugter Weise durch elektrolytisch abgeschiedenes Metall gebildet werden können. Damit können die Innenelektroden in einem gewissen Abstand von den Seitenrändern der piezokeramischen Folien miteinander elektrisch leitend verbunden werden, beispielsweise durch gegebenenfalls gewellte Metallfolien, Metallgestricke od.dgl. oder leitfahige Kunststoffolien, beispielsweise Silikonfolien, in die elektrisch leitende Partikel eingebettet sind, so daß diese Folien ein durchlaufendes flächiges elektrisches Leitungsband bilden.The invention is based on the general idea of continuing the inner electrodes at least on a region of the outside of the stack by strip-like or flag-like metallic elements, which can preferably be formed by electrolytically deposited metal. The internal electrodes can thus be connected to one another in an electrically conductive manner at a certain distance from the side edges of the piezoceramic foils, for example by means of optionally corrugated metal foils, knitted metal or the like. or conductive plastic foils, for example silicone foils, in which electrically conductive particles are embedded, so that these foils form a continuous, flat electrical conduction band.
Die die Innenelektroden außerhalb des piezokeramischen Stapels fortsetzenden Leisten oder Fahnen bilden also eine nicht zusammenhängend strukturierte, streifenförmige Grundmetallisierung, wobei diese Leisten oder Fahnen durch die mechanischen Bewegungen der benachbarten piezokeramischen Folien beim Betrieb des Aktor nur allenfalls wenig beansprucht werden. Indem nun diese Leisten oder Fahnen mechanisch nachgiebig miteinander elektrisch verbunden werden, kann ein besonders standfester Aktor erreicht werden. ZeichnungThe strips or flags that continue the inner electrodes outside the piezoceramic stack thus form a non-coherently structured, strip-shaped base metallization, these strips or flags being only little stressed by the mechanical movements of the adjacent piezoceramic foils during operation of the actuator. By mechanically compliantly connecting these strips or flags to one another, a particularly stable actuator can be achieved. drawing
Anhand der Zeichnung wird eine besonders bevorzugte Ausfuhrungs orm der Erfindung erläutert.A particularly preferred embodiment of the invention is explained with the aid of the drawing.
Dabei zeigt die einzige Figur ein Schnittbild eines erfindungsgemaßen Aktors.The single figure shows a sectional view of an actuator according to the invention.
Gemäß der Zeichnung besteht ein erfmdungsgemaßer piezokeramischer Aktor 1 im wesentlichen aus einem Stapel gesinterter piezokeramischer Folien 2 mit dazwischen angeordneten metallischen Innenelektroαen 3, die abwecnselnd bis zur rechten bzw. linken Seite des dargestellten Aktors 1 reichen, d.h. von außen zwischen den benachbarten piezokeramischen Folien 2 zugänglich sind. Am jeweils gegenüberliegenden Randbereich wird jede Innenelektrode von den benachbarten piezokeramischen Folien 2 überdeckt, so daß dort der Rand der jeweiligen Innenelektrode 3 von außen unzugänglich ist.According to the drawing, a piezoceramic actuator 1 according to the invention essentially consists of a stack of sintered piezoceramic foils 2 with metallic inner electrodes 3 arranged between them, which alternately extend to the right or left side of the actuator 1 shown, i.e. are accessible from the outside between the adjacent piezoceramic foils 2. At the respective opposite edge area, each inner electrode is covered by the adjacent piezoceramic foils 2, so that there the edge of the respective inner electrode 3 is inaccessible from the outside.
Durch weiter unten dargestellte elektrolytische Metallabscheidung werden an den von außen erreichbarer., in der Zeichnung rechten bzw. linken Randbereichen der Innenelektroden 3 leistenartige Fortsatze 4 angeformt, welche beispielsweise jeweils aus einer an die Innenelektroden 3 unmittelbar anschließenden Nickelschicht 4' und einer außen daruberliegenden Goldschicht 4" bestehen.By means of electrolytic metal deposition shown further below, strip-like extensions 4 are formed on the edge regions of the inner electrodes 3 that can be reached from the right or left in the drawing and which, for example, each consist of a nickel layer 4 ′ directly adjoining the inner electrodes 3 and a gold layer 4 lying on the outside " consist.
Die freien Rander der leistenartigen Fortsatze 4 sind miteinander elektrisch über elektrisch leitende Folien 5' bzw. 5" verbunden, die beispielsweise aus Kunststoff, z.B. Silikon oder Copolymeren, und darin eingelagert elektrisch leitenden Kohlenstoff- oder Metallpartikeln bestehen, -wobei diese Partikel zur Erzielung der gewünschten elektrischen Leitfähigkeit sehr dicht gepackt sind und das Kunststoff aterial im wesentlichen zur Gewährleistung αes mechanischen Verbundes der Partikel dient.The free edges of the strip-like extensions 4 are electrically connected to one another via electrically conductive foils 5 ′ or 5 ″, for example made of plastic, for example silicone or copolymers, and embedded therein electrically conductive carbon or metal particles, these particles being used to achieve the desired electrical conductivity are packed very densely and that Plastic material essentially serves to ensure the mechanical bond of the particles.
Die leistenartigen Fortsatze 4 und die Folien 5' bzw. 5" können miteinander beispielsweise durch Heißverpressen elektrisch leitend verounden sein.The strip-like extensions 4 and the foils 5 'and 5 "can be electrically conductively connected to one another, for example by hot pressing.
Die beiden Folien 5' und 5" sind ihrerseits mit Anschlußleitungen 6' und 6" elektrisch verbunden, über die sich die Folien 5' und 5" und damit die daran elektrisch angeschlossenen Innenelektroden 3 mit einer Betriebsspannungsquelle verbinden lassen, derart, daß jeweils die mit der Folie 5' elektrisch verbundene Gruppe der Innenelektroden 3 und die karamartig zwischen die vorgenannten Innenelektroden 3 eingreifenden, mit der Folie 5" elektrisch verbundenen Innεnelektroden 3 elektrisch entgegengesetzte Polaritäten aufweisen und jede dazwischenliegende piezokeramische Folie 2 mit einem entsprechenden elektrischen Feld beaufschlagt wird.The two foils 5 'and 5 "are in turn electrically connected to connecting lines 6' and 6", via which the foils 5 'and 5 "and thus the internal electrodes 3 electrically connected to them can be connected to an operating voltage source, such that the respective the film 5 'electrically connected group of the internal electrodes 3 and the karam-like intervening between the aforementioned internal electrodes 3, which are electrically connected to the film 5 "electrically connected internal electrodes 3, have opposite polarities and each intermediate piezoceramic film 2 is subjected to a corresponding electrical field.
Je nach Polarität der elektrischen Betriebsspannung fuhren dann die oberen und unteren Enden des Aktors 1 Relativbewegungen zuemanαer entsprechend dem Doppelpfeil P aus .Depending on the polarity of the electrical operating voltage, the upper and lower ends of the actuator 1 then perform relative movements corresponding to the double arrow P.
Da die Folien 5' und 5" von den Randern der piezokeramischen Folien 2 räumlich separiert sind, und da die Folien 5' und 5" darüber hinaus eine gewisse elastische Nachgiebigkeit besitzen, können die Bewegungen des Aktors 1 keinerlei Zerstörungen an den Folien 5' und 5" verursachen.Since the foils 5 'and 5 "are spatially separated from the edges of the piezoceramic foils 2, and since the foils 5' and 5" also have a certain elastic flexibility, the movements of the actuator 1 cannot destroy the foils 5 'and 5 "cause.
Gegebenenfalls können αie Folien 5' und 5" auch eine gewellte Struktur aufweisen, derart, daß jeweils zwischen zwei an der Folie 5' bzw. 5" benachbart angeoundenen Innenelektroden 3 bzw. deren leistenfor igen Fortsätzen 4 ein außenseitig konvexer Wulst verlauft. Statt dessen ist es auch möglich, die leitenden Folien 5' und 5" durch Metallgestricke oder -netze oder auch durch eine Schicht aus Metallschaum zu ersetzen.Optionally, the foils 5 'and 5 "can also have a corrugated structure, such that an outside convex bead extends between two inner electrodes 3 or their strip-shaped extensions 4, which are adjacent to the foil 5' and 5" and are adjacent. Instead, it is also possible to replace the conductive foils 5 'and 5 "with knitted or meshed metal or even with a layer of metal foam.
Die elektrochemische Erzeugung der leistenartigen Fortsätze 4 kann wie folgt durchgeführt werden:The electrochemical production of the strip-like extensions 4 can be carried out as follows:
Der Stapel aus den gesinterten piezokeramischen Folien 2 mit den dazwischen angeordneten Innenelektroden 3 wird in einer Halterung fixiert. Danach werden die Innenelektroden 3 miteinander auf den beiden gegenüberliegenden Seiten, in der Zeichnung auf der rechten und linken Seite des dargestellten Stapels, miteinander elektrisch kontaktiert, allerdings so, daß die jeweiligen Kontaktierungen noch einen größeren durchlaufenden Bereich der einander gegenüberliegenden Seiten des Stapels freilassen.The stack of the sintered piezoceramic foils 2 with the internal electrodes 3 arranged between them is fixed in a holder. Thereafter, the inner electrodes 3 are electrically contacted with each other on the two opposite sides, in the drawing on the right and left side of the stack shown, but in such a way that the respective contacts leave a larger continuous area on the opposite sides of the stack.
Sodann erfolgt eine Reinigung des Stapels in einem Neutralreiniger, beispielsweise bei einer Temperatur von 55° C und einer Behandlungszeit von fünf Minuten.The stack is then cleaned in a neutral cleaner, for example at a temperature of 55 ° C. and a treatment time of five minutes.
Nachfolgend erfolgt eine Spülung in vollständig entsalztem Wasser (VE-Wasser) .This is followed by rinsing in completely demineralized water (deionized water).
Nunmehr erfolgt elektrochemische Metallabscheidung, z.B. eine Nickel-Abscheidung oder die Abscheidung einer Nickellegierung aus einem Nickelsulfamatelektrolyt, welcher im Falle der Abscheidung einer Legierung entsprechende Zusätze bzw. Legierungskomponenten enthält. Gegebenenfalls kann auch eine Edelmetallabscheidung aus einem entsprechenden Elektrolyten erfolgen.Electrochemical metal deposition now takes place, e.g. a nickel deposition or the deposition of a nickel alloy from a nickel sulfamate electrolyte which, in the case of deposition of an alloy, contains appropriate additives or alloy components. If necessary, noble metal can also be deposited from a corresponding electrolyte.
Bei der Abscheidung werden die Innenelektroden 3 über die vorgenannten Kontaktierungen des Stapels elektrisch als Kathode geschaltet und eine geeignete Anode eingesetzt. Der Nickelsulfamatelektrolyt kann einen pH-Wert zwischen 3 und 4 und eine Temperatur von etwa 40° C aufv/eisen. Weitere Elektrolyte werden bei ähnlichen Prozeßbedingungen betrieben.During the deposition, the internal electrodes 3 are electrically connected as cathodes via the aforementioned contacts in the stack and a suitable anode is used. The nickel sulfamate electrolyte can have a pH between 3 and 4 and a temperature of about 40 ° C. Other electrolytes are operated under similar process conditions.
Die elektrische Stromstärke zwischen Kathode und Anode kann bezogen auf die freiliegenden Keramikoberfläche bei 1 mA/cm2 liegen. Damit wird eine Abscheiderate von ca. 0,1 μ /min erreicht.The electrical current strength between cathode and anode can be 1 mA / cm 2 , based on the exposed ceramic surface. This achieves a deposition rate of approx. 0.1 μ / min.
Nach Erzeugung der Metallschichten 4' erfolgt einer erneute Spülung in voll entsalztem Wasser.After the metal layers 4 'have been produced, they are rinsed again in demineralized water.
Anschließend erfolgt eine Hartgold-Abscheidung in einem Goldelektrolyt, wobei die Innenelektroden 3 wiederum als Kathode geschaltet werden und eine Anode aus platiniertem Titan eingesetzt werden kann. Der pH-Wert des Goldelektrolyts kann auf einen Wert von 4 bis 5 eingestellt sein. Die Temperatur kann wiederum bei 40° C liegen. Die Stromstärke kann wiederum bezogen auf die freiliegende Keramikfläche des keramischen Folienstapels bei 1 mA/cm2 liegen .Hard gold is then deposited in a gold electrolyte, the internal electrodes 3 in turn being connected as a cathode and an anode made of platinized titanium can be used. The pH of the gold electrolyte can be adjusted to a value from 4 to 5. The temperature can again be 40 ° C. The current strength can in turn be 1 mA / cm 2 based on the exposed ceramic surface of the ceramic film stack.
Alternativ kann auch eine gleichmäßige ca. 0,1 mm dicke Goldschicht stromlos aus einem Sudgold-Elektrolyten abgeschieden werden. Die Temperatur für diesen Prozeßschritt kann bei 80° C bis 90° C liegen.Alternatively, a uniform, approximately 0.1 mm thick gold layer can be deposited without electroless from a Sudgold electrolyte. The temperature for this process step can be between 80 ° C and 90 ° C.
Abschließend erfolgt eine erneute Spülung in voll entsalztem Wasser.Finally, the water is rinsed again in demineralized water.
Nunmehr stehen die leistenartigen Fortsätze 4 zur Verbindung mit den elektrisch leitenden Folien 5' und 5" od.dgl. zur Verfügung. The strip-like extensions 4 are now available for connection to the electrically conductive foils 5 'and 5 "or the like.

Claims

Ansprüche Expectations
1. Piezokeramischer Aktor (1), im wesentlichen bestehend aus einem monolithischen Stapel dünner piezokeramischer Folien1. Piezoceramic actuator (1), consisting essentially of a monolithic stack of thin piezoceramic films
(2) mit zwischen den Folien angeordneten Innenelektroden (3), welche auf Außenseiten des Stapels unter Bildung zumindest zweier elektrisch voneinander getrennter Elektrodengruppen miteiander elektrisch verbunden sind, dadurch gekennzeichnet, daß die Innenelektroden (3) jeweils an einem Bereich der Außenseite des Stapels leistenartige Fortsätze (4) aufweisen.(2) with inner electrodes (3) arranged between the foils, which are electrically connected to one another on the outside of the stack to form at least two electrically separated electrode groups, characterized in that the inner electrodes (3) each have strip-like extensions on a region of the outside of the stack (4).
2. Aktor nach Anspruch 1, dadurch gekennzeichnet, daß die Fortsätze (4) durch elektrolytisch abgeschiedenes Metall gebildet sind.2. Actuator according to claim 1, characterized in that the extensions (4) are formed by electrodeposited metal.
3. Aktor nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß jeder leistenartige Fortsatz (4) aus einer Nickel- oder Nickellegierungsschicht (4') sowie einer nach außen anschließenden Goldschicht (4") besteht.3. Actuator according to claim 1 or 2, characterized in that each strip-like extension (4) consists of a nickel or nickel alloy layer (4 ') and an outwardly adjoining gold layer (4 ").
4. Aktor nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß jeder leistenartige Fortsatz (4) aus Kupfer besteht. 4. Actuator according to claim 1 or 2, characterized in that each strip-like extension ( 4) consists of copper.
5. Aktor nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß jeder leistenartige Fortsatz (4) aus Zinn-Silber-Legierungen besteht.5. Actuator according to claim 1 or 2, characterized in that each strip-like extension ( 4 ) consists of tin-silver alloys.
6. Verfahren zur Herstellung eines piezokeramischen Aktors nach Anspruch 1, dadurch gekennzeichnet, daß die Fortsätze (4) elektrochemisch erzeugt werden, indem die Innenelektroden (3) als Kathode geschaltet und der monolithische Stapel in ein elektrolytisches Bad gebracht wird.6. A method for producing a piezoceramic actuator according to claim 1, characterized in that the extensions (4) are generated electrochemically by switching the internal electrodes (3) as the cathode and the monolithic stack is brought into an electrolytic bath.
7. Verfahren nach Anspruch 6, dadurch gekennzeichnet, daß zur Bildung der Fortsätze (4) zunächst Nickel oder Nickellegierungen und in einem weiteren Bad Gold abgeschieden wird.7. The method according to claim 6, characterized in that to form the extensions (4) first nickel or nickel alloys and in a further bath gold is deposited.
8. Verfahren nach Anspruch 6, dadurch gekennzeichnet, daß zur Bildung der Fortsätze (4) Kupfer oder Zinn-Silber-Legierungen abgeschieden wird. 8. The method according to claim 6, characterized in that copper or tin-silver alloys is deposited to form the extensions (4).
PCT/DE2000/002527 1999-08-06 2000-08-02 Electrode contact for a piezoceramic actuator and method for producing same WO2001011699A1 (en)

Priority Applications (5)

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KR1020027001556A KR20020027523A (en) 1999-08-06 2000-08-02 Electrode Contact for a Piezoceramic Actuator and Method for Producing Same
DE50012932T DE50012932D1 (en) 1999-08-06 2000-08-02 ELECTRODE CONTACT FOR A PIEZOCERAMIC ACTUATOR AND METHOD OF MANUFACTURE
EP00962179A EP1206804B1 (en) 1999-08-06 2000-08-02 Electrode contact for a piezoceramic actuator and method for producing same
JP2001516258A JP2003530684A (en) 1999-08-06 2000-08-02 Piezoelectric ceramic actuator and manufacturing method thereof
US10/049,181 US6891313B1 (en) 1999-08-06 2000-08-02 Electrode contact for a piezoceramic actuator and method for producing same

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DE19936713A DE19936713C2 (en) 1999-08-06 1999-08-06 Piezoceramic actuator and method for its production
DE19936713.2 1999-08-06

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EP1206804A1 (en) 2002-05-22
CN1206750C (en) 2005-06-15
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JP2003530684A (en) 2003-10-14
US6891313B1 (en) 2005-05-10

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