WO2000071342A1 - Couche de protection de la surface d'un cristal appliquee par contact et procede associe - Google Patents

Couche de protection de la surface d'un cristal appliquee par contact et procede associe Download PDF

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Publication number
WO2000071342A1
WO2000071342A1 PCT/US2000/014520 US0014520W WO0071342A1 WO 2000071342 A1 WO2000071342 A1 WO 2000071342A1 US 0014520 W US0014520 W US 0014520W WO 0071342 A1 WO0071342 A1 WO 0071342A1
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Prior art keywords
crystal
nonlinear
optically
crystals
inert
Prior art date
Application number
PCT/US2000/014520
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English (en)
Inventor
Gregory J. Mizell
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Ii-Vi Incorporated
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Ii-Vi Incorporated filed Critical Ii-Vi Incorporated
Priority to AU52932/00A priority Critical patent/AU5293200A/en
Publication of WO2000071342A1 publication Critical patent/WO2000071342A1/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/355—Non-linear optics characterised by the materials used
    • G02F1/3551—Crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0305—Constructional arrangements
    • G02F1/0311—Structural association of optical elements, e.g. lenses, polarizers, phase plates, with the crystal

Definitions

  • Nonlinear optical materials are commonly used for the frequency conversion of laser radiation.
  • commercial Nd:YAG laser products typically use one or more such crystals to provide outputs at wavelengths that are sub-multiples of the 1.064 micrometer laser wavelength.
  • a visible output at 0.532 micrometers can be generated by second harmonic generation while an ultraviolet output at 0J55 micrometers is produced by summing the 1.064 micrometer fundamental with the second harmonic.
  • Nonlinear optical crystals can also be used to generate wavelengths that are greater than that of the input(s).
  • an optical parametric oscillator effectively divides the energy of a single input beam between two output frequencies with values that are determined by the phase-matching conditions and conservation of energy.
  • Such a device is, in many respects, similar to a laser oscillator using an optical resonator to concentrate at least one of the output beams in the nonlinear crystal and exhibiting an input power threshold for the onset of oscillation.
  • Difference frequency mixing in which two beams are focused into a nonlinear crystal, can also be used to produce a long wavelength output beam with an energy equal to the difference between the two inputs.
  • Crystals that are useful for nonlinear frequency conversion must possess a combination of properties. These include a large value for the effective nonlinear coefficient, sufficient birefringence to phase-match the process of interest, low optical losses and immunity to optical damage by either the input or output beams. In addition, it must be possible to polish the crystal surface to high optical quality and reproducibly grow samples that are large enough for use as optical devices. Crystals satisfying these requirements are few in number and include potassium titanyl phosphate (KTP), beta barium borate (BBO), lithium triborate (LBO), cesium lithium borate (CLBO), potassium niobate and lithium niobate. Of particular interest since the mid-1980s are members of the borate family including BBO, LBO and CLBO.
  • These materials combine a relatively high nonlinear coefficient, good resistance to optical damage (high damage threshold) and good transparency at ultraviolet wavelengths.
  • they are highly birefringent and can be used to generate ultraviolet radiation from the 1.064 micrometer output of the NdNAG laser via sequential third, fourth and fifth harmonic processes. They have also been used for the manufacture of visible-emitting, widely-tunable optical parametric oscillators.
  • Prior art solutions to the surface degradation problems with these and other hygroscopic crystals include continuously maintaining the polished nonlinear- optical crystal at an elevated temperature, using optical coatings to seal the surface or optically coupling the surface to an environmentally-inert material using an index- matching fluid. While effectively minimizing the interaction of the water vapor with the crystal surface, both of these approaches have significant practical drawbacks. Specifically, the heating approach requires the crystal to be placed in an oven that is continuously supplied by a source of electrical power. In at least one commercially available frequency converter, this condition is met by incorporating a battery backup system into the device. This arrangement increases both the cost and the complexity of the final assembly in a way that is disadvantageous for the end user.
  • Dielectric coatings often used to minimize reflectivity from the crystal surfaces, also provide some degree of isolation from atmospheric water vapor. Particularly effective in this regard are the high-density, low porosity coatings that are applied using ion-assisted deposition techniques. Unfortunately, coatings of this type do not provide a perfect seal and often produce mechanical stresses at the crystal surface when the crystal/coating combination is heated. This stress is caused by dissimilar thermal expansion coefficients for the crystal and coating and can change the crystal properties and/or cause the coating to de-bond from the surface. It can also interfere with the coating process, increasing the scattering losses to an unacceptably high level.
  • Coupling to an inert material using an index-matching fluid has been proposed as a method for protecting the surface without introducing coating stresses.
  • Mounts that are sealed with quartz windows and filled with an index matching fluid have been used for many years to prevent the degradation of water-soluble crystals like ADP and KDP. More recently, workers from the University of St. Andrews described an LBO optical parametric oscillator based on this approach (see T.R. Stevenson, F.G. Colville,
  • plano-convex cavity end-mirrors were coupled to the ends of the LBO nonlinear crystal using a thin layer of index matching fluid.
  • index matching fluids are found to degrade over time when exposed to the intense optical fields typically used for nonlinear frequency conversion. This situation is worsened for systems that have ultraviolet input and/or output beams as is commonly the case for borate-based frequency converters.
  • an optical contacting technique is used to protect the surfaces of a single, hygroscopic nonlinear crystal as be might used to frequency double the output of a pulsed, solid-state laser.
  • fused silica windows are bonded to the crystal ends to create a monolithic frequency doubling structure.
  • antireflection coatings designed to minimize the reflection of the input and/or output beams are applied to the outer surfaces of the fused silica windows.
  • a disclosed fifth harmonic generator three nonlinear crystals are optically contacted together in the correct crystallographic orientations to generate a 212.8 nm output when pumped by a 1064 nm input beam.
  • An optional oven assembly is used to stabilize the output power for optimal power conversion.
  • optical contacting method include frequency-converted laser devices incorporating hygroscopic nonlinear materials.
  • a 355 nm output can be produced by bonding a coated neodymium yttrium vanadate gain crystal to a composite nonlinear frequency converter consisting of a crystal of potassium titanyl phosphate, a waveplate and a crystal of beta barium borate.
  • the output end of the nonlinear assembly is optically contacted to a curved, fused silica end piece with a dielectric coating on its outer (curved) surface.
  • Fig. 6 is a schematic view of a fifth embodiment of a harmonic generator in accordance with the present invention.
  • the force holding the surfaces together is in the range of 29 to 43 psi and a shear force of approximately 114 psi acting parallel to the contacted surface is required to separate them.
  • glass pieces are usually separated with a sharp blow from a wooden mallet or by applying local heat to one edge of the joint with a Bunsen burner or other heat source. In the latter case, differential expansion across the contacted surface acts to break the bond. Spatially-uniform temperature variations, however, have little effect on the contacted bond and assemblies incorporating hygroscopic BBO crystals are stable with respect to uniform heating over a range exceeding 50° C.
  • Optical contacting techniques have been used for the fabrication of optical components for many years, although it is common practice to use identical materials.
  • Optical contacting of dissimilar, non-hygroscopic crystals was first developed by this inventor in an effort to develop compact, frequency-doubled microlaser devices.
  • Certain embodiments of this invention are disclosed in U.S. Patent No. 5,651,023, which describes several monolithic, optically contacted, microlasers incorporating non- hygroscopic crystals like Nd:YAG, Nd-doped yttrium vanadate and potassium titanyl phosphate.
  • the current invention is based on the discovery that the optical contacting technique described above can be used to affix an environmentally inert material, such as fused silica, to a hygroscopic nonlinear material including lithium triborate (LBO), beta barium borate (BBO) and cesium lithium triborate (CLBO). thereby producing an environmentally rugged, long-lived assembly.
  • an environmentally inert material such as fused silica
  • BBO beta barium borate
  • CLBO cesium lithium triborate
  • the embodiment shown in Fig. 1 is a harmonic generator consisting of a hygroscopic nonlinear crystal 100 with optically contacted fused silica window surface protectants, including an input window 120 and an output window 130.
  • the nonlinear crystal 100 is a lithium triborate crystal (LBO) that is oriented for the sum frequency mixing of 1064 nm and 532 nm radiation to generate a 355 nm output.
  • the crystallographic c-axis is oriented at a 45 degree angle with respect to the propagation direction of input beams 105.
  • the lithium triborate crystal is typically 10 to 20 mm in length and has a square cross section with 3 mm long sides.
  • the fused silica windows 120, 130 are circular in cross section with a diameter of approximately 7 mm. Dissimilar component radii have been found to facilitate the optical contacting process and yield a more robust assembly.
  • the opposed ends of the nonlinear crystal 100 are polished flat and parallel and optically contacted to inner surfaces 122, 131 of the fused silica windows 120, 130, respectively, according to the procedure above. Dielectric coatings designed to minimize the reflection of the 1064 nm and 532 nm input beams
  • a temperature stabilized oven assembly 140 surrounds the assembly and can be used to adjust the crystal temperature for optical output power.
  • Phase matched sum frequency mixing occurs in the LBO nonlinear crystal producing a 355 nm sum frequency output 110 that exits the nonlinear crystal assembly with the power-depleted inputs.
  • Fig. 1 is replaced with a plano-convex lens or output window 230 that focuses
  • a planar side 231 of the output window 230 is optically contacted to the polished end of an LBO nonlinear crystal 200 and a dual band antireflection coating (AR 532 nm and 1064 nm) applied to the other side.
  • a fused silica planar window 220 with an inner surface 222 and an antireflection coated outer surface 221 is optically contacted to the other surface of the LBO crystal 200 and receives an input beam 205.
  • fused silica is a preferred window material in the embodiments of Figs. 1 and 2, it is possible to substitute a wide range of alternative environmentally-inert window materials that can be polished to that flatness and surface finish required for optical contacting.
  • Such materials include but are not limited to glasses like BK-7 that are commonly used for the fabrication of lenses, mirrors and other optical components, undoped gain materials like yttrium-aluminum-garnet and yttrium orthovanadate, and crystal quartz, etc.
  • a dielectric index matching layer to the inside surface of the window material in order to reduce reflections at the optically contacted interface.
  • this coating is applied to the surfaces 122 and 131 prior to contacting.
  • the coating would be applied to surfaces 222 and 231.
  • a wide range of coating materials and designs is known in the art and could be used to minimize reflections at the nonlinear crystal/window interface.
  • Fig. 1 While the preferred embodiment of Fig. 1 is designed to generate the third harmonic of the NdNAG laser by summing the fundamental (1064 nm) with the first harmonic (532 nm), primary features can be applied to a wide range of nonlinear frequency conversion devices. Specifically, appropriately oriented crystals of BBO, LBO, CLBO and other hygroscopic crystals may be used for second, third, fourth and fifth harmonic generation, sum and difference frequency generation and optical parametric oscillation. Composite nonlinear crystal assemblies in which multiple nonlinear crystals are optically contacted to one another are an alternative embodiment of this invention that can minimize the number of input beams required to generate higher order harmonics (third, fourth or fifth). For example, the assembly of Fig.
  • the input beam 300 first passes through a nonhygroscopic KTP crystal 310 to generate a 532 nm second harmonic via Type II, critically-phase-matched second harmonic generation.
  • the two beams travel together through a first or leftmost BBO crystal 320 that is oriented to phase-match the frequency doubling of the 532 nm beam to 266 nm.
  • the 1064 nm beam travels through the first BBO crystal 320 without interacting, entering a second or rightmost BBO crystal 330 with the unconverted 532 nm beam and the 266 nm fourth harmonic beam.
  • all surfaces are optically contacted, i.e., the right surface of the KTP crystal 310 is optically contacted to the left surface of the first BBO crystal 320, such that the two BBO crystals 320 and 330 are joined by optical contacting at the interface between them, and the right surface of the second BBO crystal 330 is optically contacted to the inner surface of the sapphire end window 340.
  • an outer surface 311 of the KTP crystal 310 is antireflection coated at the 1064 nm input wavelength and an output face 341 of the sapphire protective window 340 has a broadband UV antireflection coating.
  • all components would have square cross sections with 5 mm long sides.
  • the KTP crystal 310 would be 3 mm in length while the two BBO crystals 320, 330 would be 5 mm long.
  • the axes of the BBO crystals 320, 330 are oriented so the beams are polarized as shown in Fig. 4.
  • the entire assembly can be housed in a thermal enclosure 360 for purposes of tuning the combined birefringence of the KTP crystal 310 and first BBO crystal 320 to a fullwave of retardation.
  • the temperature tuning range required to accomplish this task is estimated to be less than 10° C.
  • Further control of the 1064 nm polarization may be accomplished by placing a waveplate that has a fullwave of retardation at 532 nm and a halfwave at 1064 nm between the two BBO crystals 320 and 330.
  • This waveplate would be contacted to the two crystals using the procedures outlined above and oriented to rotate the 1064 nm polarization to a direction that is orthogonal to the 532 nm second harmonic beam. So oriented, the full 1064 nm power would be available to the sum frequency generation process, thereby increasing the fifth harmonic conversion efficiency.
  • the assembly is designed to minimize the deleterious effects of the Poynting vector walkoff that is characteristic of non-critically phase-matched interactions.
  • the assembly is designed to minimize the deleterious effects of the Poynting vector walkoff that is characteristic of non-critically phase-matched interactions.
  • light propagating at an angle with respect to the principal optical axes of a nonlinear crystal will generate a nonlinear output beam in a non-collinear direction.
  • this beam travels down the crystal, it spatially "walks off of the input beam significantly reducing the efficiency of the nonlinear frequency conversion process.
  • it is possible to change the direction of the nonlinear crystal axes (and hence the walkoff direction at periodic intervals).
  • a single crystal of BBO, oriented for second harmonic generation of a 532 nm input ( ⁇ 47.6), is cut into ten segments (400 - 409) of identical length (2 mm). These segments are subsequently reassembled into a single structure by optically contacting the adjacent surfaces of the individual segments. Minimization of Poynting vector walkoff is achieved by rotating the crystallographic axes of adjacent crystals by 90 degrees in the plane perpendicular to the propagation direction before contacting them.
  • Undoped NdNAG windows 410, 420 are optically contacted to the two ends of the assembly as described previously to protect the outermost surfaces of the walkoff-compensated frequency doubler from atmospheric moisture.
  • Optional dielectric coatings may be applied to the window surfaces to minimize reflection of an input beam 411 and/or an output beam 421.
  • Like-crystal composite assemblies made of like-oriented crystals may also be used to increase the available nonlinear interaction distance in cases where the maximum crystal length is shorter than desired.
  • the like-oriented crystals are contacted in an end-to-end relationship to produce an assembly of increased length with the nonlinear properties of a single crystal.
  • Protective windows are applied to the ends of this assembly as shown in Fig. 5.
  • Fig. 6 is an Nd: YVO 4 laser in which two, nonlinear optical crystals are used to generate second and third harmonic outputs from the intracavity field.
  • the high-gain axis of the Nd:YVO 4 crystal 500 is oriented at 45 degrees relative to the axes of the KTP crystal 510 to maximize the production of second harmonic light at 531 J nm.
  • This BBO crystal 530 is optically contacted to the waveplate 520 on the left side and to a plano-convex, fused silica protective window 540 on the right side.
  • Optical coatings that are highly reflective at the laser wavelength are applied to the outer surface of the Nd:YVO 4 crystal 500 and a curved surface 541 of the protective window 540.
  • the Nd: YVO 4 crystal coating is highly transmissive (>95%) at the 808 nm pump wavelength.
  • the coating on the curved output surface 541 is optimized for high transmission at the third, and possibly, the second harmonics.
  • the curvature of the output window surface 541 is greater than the diffractive path length between the pump face of the Nd:YNO 4 crystal 500 and the output surface.
  • Optimal performance in the device of Fig. 6 is expected with curvatures between 100 mm and 300 mm.
  • the device is energized by a pump beam 550 that is focused onto the coated face of the ⁇ d:YNO 4 crystal 500 and generates an output beam 555.
  • This pump beam 550 is most advantageously supplied by a broad area diode laser or diode laser array.
  • the ⁇ d: YNO 4 crystal of Fig. 6 may be physically separated from the KTP crystal and the two resulting surfaces antireflection coated at 1064 nm.
  • a single-crystal harmonic generator similar in design to the third harmonic generator of Fig. 1 , may be inserted in the cavity of a flashlamp-pumped laser to generate a second harmonic output through intracavity second harmonic generation.

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

L'invention concerne un procédé de protection des surfaces optiques polies d'un cristal (100) optique non linéaire hygroscopique. Ce procédé consiste à appliquer par un procédé de liaison optique un matériau (120, 130) inerte sur chaque surface optique polie du cristal (100) non linéaire de manière à protéger ces surfaces du contact avec la vapeur d'eau. L'invention concerne également un générateur d'harmoniques réalisé au moyen de ce procédé.
PCT/US2000/014520 1999-05-26 2000-05-26 Couche de protection de la surface d'un cristal appliquee par contact et procede associe WO2000071342A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU52932/00A AU5293200A (en) 1999-05-26 2000-05-26 Contacted crystal surface protector and method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13610999P 1999-05-26 1999-05-26
US60/136,109 1999-05-26

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Cited By (5)

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Publication number Priority date Publication date Assignee Title
WO2002012955A1 (fr) * 2000-08-04 2002-02-14 Bae Systems Australia Pty Ltd Oscillateur parametrique optique et procede de construction associe
WO2006060160A1 (fr) * 2004-11-30 2006-06-08 Electro Scientific Industries, Inc. Modifications du cristal non lineaire pour la conversion de longueur d'onde laser haute puissance durable
US8243764B2 (en) 2010-04-01 2012-08-14 Tucker Derek A Frequency conversion of a laser beam using a partially phase-mismatched nonlinear crystal
WO2016034416A1 (fr) * 2014-09-05 2016-03-10 Oxxius Système de génération de faisceau laser par effet non linéaire à base de cavité microchip résonante
CN111244744A (zh) * 2020-01-16 2020-06-05 中国科学院大连化学物理研究所 一种高功率激光系统中光学晶体损伤防护方法

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US5201977A (en) * 1989-08-09 1993-04-13 Hiroaki Aoshima Process for producing structures from synthetic single-crystal pieces
US5441803A (en) * 1988-08-30 1995-08-15 Onyx Optics Composites made from single crystal substances
US5563899A (en) * 1988-08-30 1996-10-08 Meissner; Helmuth E. Composite solid state lasers of improved efficiency and beam quality
US5651023A (en) * 1995-05-13 1997-07-22 Uniphase Lasers Limited Monolithic laser
US5846638A (en) * 1988-08-30 1998-12-08 Onyx Optics, Inc. Composite optical and electro-optical devices
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US5441803A (en) * 1988-08-30 1995-08-15 Onyx Optics Composites made from single crystal substances
US5563899A (en) * 1988-08-30 1996-10-08 Meissner; Helmuth E. Composite solid state lasers of improved efficiency and beam quality
US5846638A (en) * 1988-08-30 1998-12-08 Onyx Optics, Inc. Composite optical and electro-optical devices
US5852622A (en) * 1988-08-30 1998-12-22 Onyx Optics, Inc. Solid state lasers with composite crystal or glass components
US5201977A (en) * 1989-08-09 1993-04-13 Hiroaki Aoshima Process for producing structures from synthetic single-crystal pieces
EP0456060A1 (fr) * 1990-04-27 1991-11-13 Hiroaki Aoshima Procédé pour lier ensemble des monocristaux synthétiques
US5651023A (en) * 1995-05-13 1997-07-22 Uniphase Lasers Limited Monolithic laser

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002012955A1 (fr) * 2000-08-04 2002-02-14 Bae Systems Australia Pty Ltd Oscillateur parametrique optique et procede de construction associe
EP1314064A1 (fr) * 2000-08-04 2003-05-28 BAE Systems Australia Pty Ltd Oscillateur parametrique optique et procede de construction associe
EP1314064A4 (fr) * 2000-08-04 2005-06-22 Bae Systems Australia Pty Ltd Oscillateur parametrique optique et procede de construction associe
US6963443B2 (en) 2000-08-04 2005-11-08 Andrew Pfeiffer Optical parametric oscillator and method of constructing same
WO2006060160A1 (fr) * 2004-11-30 2006-06-08 Electro Scientific Industries, Inc. Modifications du cristal non lineaire pour la conversion de longueur d'onde laser haute puissance durable
GB2435125A (en) * 2004-11-30 2007-08-15 Electro Scient Ind Inc Nonlinear crystal modifications for durable high-power laser wavelength conversion
US8243764B2 (en) 2010-04-01 2012-08-14 Tucker Derek A Frequency conversion of a laser beam using a partially phase-mismatched nonlinear crystal
WO2016034416A1 (fr) * 2014-09-05 2016-03-10 Oxxius Système de génération de faisceau laser par effet non linéaire à base de cavité microchip résonante
FR3025661A1 (fr) * 2014-09-05 2016-03-11 Oxxius Systeme de generation de faisceau laser par effet non lineaire a base de cavite microchip resonante
US10108070B2 (en) 2014-09-05 2018-10-23 Oxxius Resonant-microchip-cavity-based system for generating a laser beam via a nonlinear effect
CN111244744A (zh) * 2020-01-16 2020-06-05 中国科学院大连化学物理研究所 一种高功率激光系统中光学晶体损伤防护方法

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