WO2000026659A1 - Verfahren und vorrichtung zum betrieb einer mikroakustischen sensoranordnung - Google Patents
Verfahren und vorrichtung zum betrieb einer mikroakustischen sensoranordnung Download PDFInfo
- Publication number
- WO2000026659A1 WO2000026659A1 PCT/DE1999/003024 DE9903024W WO0026659A1 WO 2000026659 A1 WO2000026659 A1 WO 2000026659A1 DE 9903024 W DE9903024 W DE 9903024W WO 0026659 A1 WO0026659 A1 WO 0026659A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- transducers
- sensor
- cleaning
- substrate
- acoustic
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
- G01N11/10—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material
- G01N11/16—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material by measuring damping effect upon oscillatory body
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N9/00—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity
- G01N9/002—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity using variation of the resonant frequency of an element vibrating in contact with the material submitted to analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/022—Liquids
- G01N2291/0226—Oils, e.g. engine oils
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02818—Density, viscosity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/10—Number of transducers
- G01N2291/102—Number of transducers one emitter, one receiver
Definitions
- the invention relates to a method and a device for operating a microacoustic sensor arrangement, in particular for removing dirt in the sensor arrangement, according to the preamble of the main claim.
- SA Surface Acoustic Wave
- An important area here is the measurement of electrical quantities, such as the dielectric constant and / or the conductivity, the measurement of mechanical quantities, such as the density and / or the viscosity and the investigation of chemical properties, e.g. the presence of special substances in liquids.
- the sensor elements e.g. a certain substrate material for the sensor elements, a given direction of wave propagation, possibly also a special layer structure on the substrate material and a certain arrangement of the sensor elements constructed as electro-acoustic transducers.
- a certain substrate material for the sensor elements e.g. a certain substrate material for the sensor elements, a given direction of wave propagation, possibly also a special layer structure on the substrate material and a certain arrangement of the sensor elements constructed as electro-acoustic transducers.
- one or more of the aforementioned acoustic wave modes known per se occur, which differ in terms of a possible measurement sensitivity, propagation speed, an acousto-electric coupling factor and a susceptibility to cross-effects, etc., and thus determine the suitability of a special sensor type for a specific measurement task .
- the above-described acoustic wave modes known from the prior art are horizontally polarized acoustic shear waves, in which a wave propagating along the surface of the substrate on which the electro-acoustic transducers are located is used .
- additional boundary conditions such as contamination, aggressive media in a liquid and cross-sensitivity must be taken into account when using SAW components as sensors, especially for liquid analysis.
- liquid media such as those used in the automotive sector (e.g. oils, fuels, brake fluid, etc.) or in biosensors
- the susceptibility to contamination is of central importance, since particle deposition on the sensor surface leads to direct falsification due to the increase in mass of the measurement signal leads.
- these sensors are used in practice, where a regular replacement of the sensor element is often not tolerable, there is a main problem in the risk of deposits of components of the measuring liquid on the sensor or substrate surface.
- the invention takes advantage of the property that in many substrate materials for the electro-acoustic transducers, such as, for example, in certain quartz, lithium tantalate and lithium niobate sections, the acoustic shear modes used for the SAW sensors described at the outset can be used, in addition to the shear modes, further acoustic wave modes with predominantly sagittal polarization (for example, so-called Rayleigh modes) occur.
- substrate materials for the electro-acoustic transducers such as, for example, in certain quartz, lithium tantalate and lithium niobate sections
- the acoustic shear modes used for the SAW sensors described at the outset can be used, in addition to the shear modes, further acoustic wave modes with predominantly sagittal polarization (for example, so-called Rayleigh modes) occur.
- the sound waves used can also support desorption processes of molecules adsorbed on the sensor surface, which can be used in particular in the case of chemosensors, which are mostly based on reversible adsorption of chemical substances.
- an increase in the frequency of the ultrasound wave generated with the sagittal wave modes generally has a positive effect on the ablation and cleaning processes.
- the interdigital transducers known as electro-acoustic transducers, which are known per se from the prior art mentioned at the beginning
- ultrasound frequencies can be generated in a simple manner from tens to hundreds of megahertz. Since these transducers can be applied directly to the surface of the substrate, which is typically only a few mm 2 in size, the power required to achieve a large cleaning effect is relatively low.
- SH-APM Shear Horizontal Acoustic Plate Modes
- the horizontally polarized plate shear modes which are spreadable in thin plates from suitable piezoelectric materials, are used. These wave modes can be excited by the metallic interdigital transducer applied to the plate surface. These wave modes are therefore shear waves that are repeatedly reflected between the two plate surfaces. When one or both surfaces are wetted with a measuring liquid, a viscous coupling occurs, so that the shaft damping and the speed of propagation depend on the density-viscosity product of the measuring liquid.
- the SH-APM sensors are also suitable as gravimetric chemo or biosensors and, using the acoustoelectric effect, for the investigation of conductive liquids.
- the measuring medium is applied to the surface of the substrate facing away from the sensor transducers, since this protects the sensitive sensor transducers.
- the cleaning transducers can thus be attached to the wetted side of the substrate in this embodiment.
- advantageous sensor arrangements result in all embodiments, which allow a simple and expedient cleaning method of the measurement-sensitive areas of the sensor arrangement. It can be used to achieve a cleaning effect on the sensor surface
- An integration of cleaning transducers for the excitation of sagittally polarized acoustic surface waves in connection with arrangements of the sensor transducers for the generation of horizontally polarized acoustic shear modes for the measurement purposes is advantageously carried out.
- the cleaning transducers are arranged on the same substrate surface as the sensor transducers or, for the second mode types of SH-APM sensors, on the substrate surface opposite the sensor transducers.
- An arrangement of one or more cleaning transducers next to the sensor transducer or within the sensor element, optionally with a protective layer of adhesion-reducing material above the sensor element and the cleaning transducer, can be produced in a simple manner.
- the cleaning of the sensor surface and an acceleration of desorption processes of adsorbed molecules in the sensor arrangement can take place without external mechanical influence and during operation. This results in an increase in the duration of use and long-term stability as well as an expansion of the possible uses.
- FIG. 1 shows an example of a schematic view of a sensor arrangement for determining the density and the viscosity of a liquid flowing through the sensor arrangement
- FIG. 2 shows a detailed view of an interdigital transducer for generating and detecting acoustic wave modes
- FIGS. 3 and 4 each show an arrangement of interdigital transducers according to FIG. 2 as a cleaning converter for generating sagittally polarized acoustic wave modes of the first mode types;
- FIG. 5 and 6 show sections of the embodiment according to FIG. 4 with a waveguide layer for the love mode types according to FIG. 5 and a protective layer for the leak or SSBW mode types according to FIG. 6;
- FIG. 7 shows a section through a further embodiment of a sensor arrangement for the second mode types, in which a multi-reflected shear wave is used as the measurement signal;
- FIG. 8 shows a first example of an arrangement of cleaning transducers according to FIGS. 7 and
- FIG. 9 shows a second example of an arrangement of cleaning transducers according to FIG. 7.
- the main component of the proposed sensor arrangement 1 is a one-sided polished substrate 5 made of a piezoelectric material, in which horizontally polarized acoustic shear modes of basic sensor elements can be excited and propagated.
- Suitable substrate materials are Y-rotated quartz cuts, a few lithium niobate and lithium tantalate cuts and correspondingly polarized piezoelectric ceramics.
- interdigital transducers On the polished surface of the substrate 5 there is an arrangement of metallic interdigital transducers (IDTs) 6, which are explained in more detail with reference to FIG. 2. These interdigital transducers 6 are made, for example, of aluminum, titanium, chromium, gold or platinum, optionally on an adhesive layer made of silicon, and serve to excite and detect the surface acoustic waves. Furthermore, in the exemplary embodiment according to FIG. 1, a meandering thin-film temperature resistor 15 is arranged next to or between the basic elements with the IDT 6 on the surface of the substrate 5, since in particular the viscosity is strongly temperature-dependent and the temperature therefore represents a further important measurement variable.
- the material for the thin-film temperature resistor 15 is advantageously material such as for the IDT 6, namely titanium / platinum or titanium / platinum / titanium, the adhesive layer being either titanium or silicon.
- FIG. 2 shows one of the interdigital transducers 6 in detail, wherein transducer fingers 7 can generate acoustic waves with the wavelength 8 (center frequency) when excited by an electrical voltage at an input 9. This creates an acoustic surface wave, i.e. in particular a shear wave in the polarization direction of arrow 11, with the aperture according to arrow 12.
- the transducer fingers 7 can also be divided into two single fingers or split fingers within the period, so that ⁇ / 8 fingers arise. There is a factor of two between the electrical and the mechanical period, so that elimination or at least a reduction in internal reflections and the ⁇ og. Triple transit echoes (TTE) is achievable.
- FIG. 3 schematically shows an arrangement of the interdigital transducers 6 as sensor transducers, which are so arranged on the substrate 5 that the previously described, horizontally polarized shear waves propagating along the surface are used for the measurement.
- interdigital transducers 20 rotated by 90 ° or in another angle corresponding to the direction of propagation of the wave modes used, which are used to excite agitally polarized wave modes in the direction of propagation according to arrow 21 and thus act as cleaning converters.
- These cleaning transducers 20 are located in the same mask plane of the substrate 5 as the interdigital transducers 6 acting as sensor transducers.
- two cleaning transducers 20 can be arranged on both sides of the sensor transducer 6, which extend over the entire length of the sensor.
- the sagittally polarized acoustic wave modes excited by the transducers 20 propagate on the surface along the arrows 21 and in the process radiate ultrasonic energy into the liquid located above them.
- the ratio between the transducer period of the cleaning transducer 20 and the distance between the two cleaning transducers 20 must be selected so that sufficient energy is available on the entire sensor surface for a cleaning effect.
- a particular advantage of the arrangement according to FIG. 3 is that there are no cleaning transducers 20 in the area of the active sensor surface with the sensor transducers 6 or their propagation path.
- the resulting sensor element with the cleaning transducers 20 can therefore, as shown in FIG. 3, be designed as a delay line or as a resonator (not shown here).
- the two cleaning transducers 20 can also be divided into a plurality of smaller transducers, also not shown here, for better impedance matching.
- one or more cleaning transducers 20 are applied vertically between the sensor transducers 6 directly on the delay line.
- An advantage of this arrangement is that the effects of the ultrasound waves on the components to be cleaned are more direct than the arrangement according to FIG. surface and the smaller space requirement.
- an acoustically thin layer (not shown here), above the transducers 6 and 20, can be used to support the cleaning effect, for example made of Teflon or other chemically inert materials to protect the IDT 6 , can be provided.
- FIG. 5 shows a section through the arrangement according to FIG. 4, in which a waveguide layer 30 is arranged above the transducers 6 and 20 for the use of love mode waves.
- a section according to FIG. 6 shows an embodiment for use with leaky waves or SSBW waves, in which a thin protective layer 31 can still be placed over the transducers 6 and 20.
- FIG. 7 shows an exemplary embodiment of a sensor arrangement with the SH-APM sensors, in which a shear wave (see arrow 23) reflected several times between the two surfaces of a substrate 22 is used for the sensor transducer 6.
- the sensor transducers 6 are located on the surface of the substrate 22 facing away from the measurement medium.
- one or more cleaning transducers 24 for excitation of wave modes with ⁇ agittal polarization are applied in the measuring section located in the measuring medium.
- the cleaning transducers 24 can also be used here, e.g. for reasons of impedance, can be divided into several smaller converters. It is also possible here to provide an adhesion-reducing layer 25 or a protective layer above the cleaning converter 24 according to FIG.
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Acoustics & Sound (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
Description
Claims
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000579989A JP2002529702A (ja) | 1998-11-04 | 1999-09-22 | 音響マイクロセンサ装置を駆動する方法および装置 |
DE59914765T DE59914765D1 (de) | 1998-11-04 | 1999-09-22 | Verfahren und vorrichtung zum betrieb einer mikroakustischen sensoranordnung |
US09/581,111 US6304021B1 (en) | 1998-11-04 | 1999-09-22 | Method and apparatus for operating a microacoustic sensor array |
EP99955757A EP1090288B1 (de) | 1998-11-04 | 1999-09-22 | Verfahren und vorrichtung zum betrieb einer mikroakustischen sensoranordnung |
KR1020007007360A KR100706561B1 (ko) | 1998-11-04 | 1999-09-22 | 마이크로 음향 센서 장치를 작동시키기 위한 방법 및 장치 |
AU12612/00A AU752276B2 (en) | 1998-11-04 | 1999-09-22 | Method and device for operating a microacoustic sensor array |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19850801A DE19850801A1 (de) | 1998-11-04 | 1998-11-04 | Verfahren und Vorrichtung zum Betrieb einer mikroakustischen Sensoranordnung |
DE19850801.8 | 1998-11-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2000026659A1 true WO2000026659A1 (de) | 2000-05-11 |
Family
ID=7886645
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE1999/003024 WO2000026659A1 (de) | 1998-11-04 | 1999-09-22 | Verfahren und vorrichtung zum betrieb einer mikroakustischen sensoranordnung |
Country Status (7)
Country | Link |
---|---|
US (1) | US6304021B1 (de) |
EP (1) | EP1090288B1 (de) |
JP (1) | JP2002529702A (de) |
KR (1) | KR100706561B1 (de) |
AU (1) | AU752276B2 (de) |
DE (2) | DE19850801A1 (de) |
WO (1) | WO2000026659A1 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19850802A1 (de) * | 1998-11-04 | 2000-05-11 | Bosch Gmbh Robert | Sensoranordnung für die Ermittlung physikalischer Eigenschaften von Flüssigkeiten |
DE10142789C1 (de) * | 2001-08-31 | 2003-05-28 | Advalytix Ag | Bewegungselement für kleine Flüssigkeitsmengen |
US6935311B2 (en) * | 2002-10-09 | 2005-08-30 | Ford Global Technologies, Llc | Engine control with fuel quality sensor |
US20050226773A1 (en) * | 2004-04-01 | 2005-10-13 | Honeywell International, Inc. | Multiple modes acoustic wave sensor |
KR100682547B1 (ko) * | 2004-04-26 | 2007-02-15 | 경상대학교산학협력단 | 전기저항 측정과 음향방출을 이용한 탄소 나노튜브와나노섬유 강화 에폭시 복합재료의 비파괴적 손상 감지방법 |
US7398685B2 (en) * | 2004-06-11 | 2008-07-15 | Ulvac, Inc. | Measuring method using surface acoustic wave device, and surface acoustic wave device and biosensor device |
JP2005351799A (ja) * | 2004-06-11 | 2005-12-22 | Ulvac Japan Ltd | 表面弾性波素子、バイオセンサー装置及び表面弾性波素子による測定方法 |
JP4628075B2 (ja) * | 2004-12-03 | 2011-02-09 | 日本無線株式会社 | センサ |
KR100600807B1 (ko) | 2004-12-04 | 2006-07-18 | 주식회사 엠디티 | 에너지 포집형 표면탄성파 기반의 무전원/무선 센서 |
FI118829B (fi) * | 2005-07-08 | 2008-03-31 | Valtion Teknillinen | Mikromekaaninen sensori, sensoriryhmä ja menetelmä sekä pitkittäisten akustisten aaltojen uusi käyttö |
KR100693222B1 (ko) * | 2006-04-28 | 2007-03-12 | 주식회사 엠디티 | 압력 감지용 saw 트랜스폰더 |
DE102006034842A1 (de) * | 2006-07-27 | 2008-02-07 | Siemens Ag | Fluidsensor |
JP4870530B2 (ja) * | 2006-11-20 | 2012-02-08 | 日本無線株式会社 | 弾性表面波センサ |
DE102008050445A1 (de) * | 2008-10-08 | 2010-04-15 | Endress + Hauser Gmbh + Co. Kg | Vorrichtung zum Bestimmen und/oder Überwachung einer Prozessgröße eines Mediums |
KR101125602B1 (ko) * | 2010-01-05 | 2012-03-27 | 한국과학기술연구원 | 오일점도 프로브와 이를 구비하는 오일점도 모니터링 장치 및 방법 |
US10343193B2 (en) * | 2014-02-24 | 2019-07-09 | The Boeing Company | System and method for surface cleaning |
US10031140B1 (en) * | 2015-01-26 | 2018-07-24 | University Of South Florida | Orthogonal SAW transducers on substrate for simultaneous biofouling removal and biosensing |
JP6424746B2 (ja) * | 2015-06-11 | 2018-11-21 | 株式会社デンソー | ディーゼル機関の制御装置 |
EP3715826B1 (de) * | 2019-03-26 | 2024-03-06 | Infineon Technologies AG | Sensorvorrichtung, partikelsensorvorrichtung und verfahren zur detektion der dichte eines partikelförmigen materials |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1987002134A1 (en) * | 1985-09-26 | 1987-04-09 | Nederlandse Organisatie Voor Toegepast-Natuurweten | An apparatus for determining the condition of a material, in particular the adsorption of a gas or liquid on said material |
US5051645A (en) * | 1990-01-30 | 1991-09-24 | Johnson Service Company | Acoustic wave H2 O phase-change sensor capable of self-cleaning and distinguishing air, water, dew, frost and ice |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
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FR2437126A1 (fr) * | 1978-09-19 | 1980-04-18 | Thomson Csf | Dispositif acousto-electrique de lecture ou de traitement d'une image optique a deux dimensions |
US5850118A (en) * | 1997-05-05 | 1998-12-15 | Toda; Kohji | Ultrasonic touch-position sensitive device |
-
1998
- 1998-11-04 DE DE19850801A patent/DE19850801A1/de not_active Ceased
-
1999
- 1999-09-22 WO PCT/DE1999/003024 patent/WO2000026659A1/de active IP Right Grant
- 1999-09-22 US US09/581,111 patent/US6304021B1/en not_active Expired - Lifetime
- 1999-09-22 KR KR1020007007360A patent/KR100706561B1/ko not_active IP Right Cessation
- 1999-09-22 DE DE59914765T patent/DE59914765D1/de not_active Expired - Lifetime
- 1999-09-22 JP JP2000579989A patent/JP2002529702A/ja active Pending
- 1999-09-22 EP EP99955757A patent/EP1090288B1/de not_active Expired - Lifetime
- 1999-09-22 AU AU12612/00A patent/AU752276B2/en not_active Ceased
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1987002134A1 (en) * | 1985-09-26 | 1987-04-09 | Nederlandse Organisatie Voor Toegepast-Natuurweten | An apparatus for determining the condition of a material, in particular the adsorption of a gas or liquid on said material |
US5051645A (en) * | 1990-01-30 | 1991-09-24 | Johnson Service Company | Acoustic wave H2 O phase-change sensor capable of self-cleaning and distinguishing air, water, dew, frost and ice |
Also Published As
Publication number | Publication date |
---|---|
KR100706561B1 (ko) | 2007-04-13 |
AU752276B2 (en) | 2002-09-12 |
KR20010033808A (ko) | 2001-04-25 |
AU1261200A (en) | 2000-05-22 |
US6304021B1 (en) | 2001-10-16 |
EP1090288B1 (de) | 2008-05-21 |
DE19850801A1 (de) | 2000-05-11 |
JP2002529702A (ja) | 2002-09-10 |
EP1090288A1 (de) | 2001-04-11 |
DE59914765D1 (de) | 2008-07-03 |
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