WO2000019178A3 - Druckgeber - Google Patents

Druckgeber Download PDF

Info

Publication number
WO2000019178A3
WO2000019178A3 PCT/DE1999/002501 DE9902501W WO0019178A3 WO 2000019178 A3 WO2000019178 A3 WO 2000019178A3 DE 9902501 W DE9902501 W DE 9902501W WO 0019178 A3 WO0019178 A3 WO 0019178A3
Authority
WO
WIPO (PCT)
Prior art keywords
pressure sensor
diaphragm
capacitors
extension
thin
Prior art date
Application number
PCT/DE1999/002501
Other languages
English (en)
French (fr)
Other versions
WO2000019178A2 (de
Inventor
Erwin Naegele
Herbert Keller
Martin Mast
Original Assignee
Bosch Gmbh Robert
Erwin Naegele
Herbert Keller
Martin Mast
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert, Erwin Naegele, Herbert Keller, Martin Mast filed Critical Bosch Gmbh Robert
Publication of WO2000019178A2 publication Critical patent/WO2000019178A2/de
Publication of WO2000019178A3 publication Critical patent/WO2000019178A3/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

Bei einem Druckgeber (10) ist die Membran (20) aus Metall, insbesondere Edelstahl hergestellt. Im Biegebereich (21) der Membran (20) sind die Meßwiderstände (30) in Dünnschichttechnik aufgebracht. Ferner befinden sich auf einem Fortsatz (32) der Membran (20) die Auswerteschaltung (35) und weitere elektronische Bauteile, wie z. B. Kondensatoren (40). Dadurch ist eine sehr kompakte Bauweise mit relativ wenig elektrischen Verbindungsstellen möglich.
PCT/DE1999/002501 1998-09-29 1999-08-10 Druckgeber WO2000019178A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19844556.3 1998-09-29
DE1998144556 DE19844556A1 (de) 1998-09-29 1998-09-29 Druckgeber

Publications (2)

Publication Number Publication Date
WO2000019178A2 WO2000019178A2 (de) 2000-04-06
WO2000019178A3 true WO2000019178A3 (de) 2000-11-23

Family

ID=7882596

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE1999/002501 WO2000019178A2 (de) 1998-09-29 1999-08-10 Druckgeber

Country Status (2)

Country Link
DE (1) DE19844556A1 (de)
WO (1) WO2000019178A2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10361769B4 (de) * 2003-12-29 2014-10-23 Robert Bosch Gmbh Druckaufnehmer mit einteiligem Gehäuse
DE102005012686A1 (de) * 2005-01-14 2006-07-27 Trafag Ag Drucksensor, darin verwendbarer Verformungskörper und Herstellverfahren dafür
DE102005011973B4 (de) * 2005-03-13 2012-04-19 Endress + Hauser Gmbh + Co. Kg Sensormodul
DE102008003954A1 (de) * 2008-01-11 2009-07-23 Knorr-Bremse Systeme für Nutzfahrzeuge GmbH Leiterbahnträger sowie Verfahren zur Herstellung eines Leiterbahnträgers
DE102019131342A1 (de) 2019-11-20 2021-05-20 Tdk Electronics Ag Sensor zur Messung von Druck und Temperatur

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57115873A (en) * 1981-01-09 1982-07-19 Hitachi Ltd Semiconductor diaphragm type pressure sensor
EP0407587A1 (de) * 1988-09-30 1991-01-16 Kabushiki Kaisha Komatsu Seisakusho Drucksensor
US5421956A (en) * 1991-11-20 1995-06-06 Nippondenso Co., Ltd. Method of fabricating an integrated pressure sensor
EP0786651A2 (de) * 1996-01-25 1997-07-30 Delco Electronics Corporation Druckwandler mit integrierte Schaltung

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3919059A1 (de) * 1989-06-10 1991-01-03 Bosch Gmbh Robert Drucksensor zum erfassen von druckschwankungen einer druckquelle
EP0456873A1 (de) * 1990-05-18 1991-11-21 Hottinger Baldwin Messtechnik Gmbh Kapazitiver Druckaufnehmer
DE4111149A1 (de) * 1991-04-06 1992-10-08 Bosch Gmbh Robert Drucksensor
DE19537569C2 (de) * 1995-08-03 1998-07-02 Fraunhofer Ges Forschung Stahlbasiertes Kraft-Sensorsystem
IT1285025B1 (it) * 1996-03-22 1998-06-03 Bitron Spa Sensore di pressione e procedimento per la sua fabbricazione.

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57115873A (en) * 1981-01-09 1982-07-19 Hitachi Ltd Semiconductor diaphragm type pressure sensor
EP0407587A1 (de) * 1988-09-30 1991-01-16 Kabushiki Kaisha Komatsu Seisakusho Drucksensor
US5421956A (en) * 1991-11-20 1995-06-06 Nippondenso Co., Ltd. Method of fabricating an integrated pressure sensor
EP0786651A2 (de) * 1996-01-25 1997-07-30 Delco Electronics Corporation Druckwandler mit integrierte Schaltung

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 006, no. 211 (E - 137) 23 October 1982 (1982-10-23) *

Also Published As

Publication number Publication date
WO2000019178A2 (de) 2000-04-06
DE19844556A1 (de) 2000-04-27

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