WO2000016036A1 - Surveillance de l'etat d'un outil - Google Patents

Surveillance de l'etat d'un outil Download PDF

Info

Publication number
WO2000016036A1
WO2000016036A1 PCT/GB1999/003009 GB9903009W WO0016036A1 WO 2000016036 A1 WO2000016036 A1 WO 2000016036A1 GB 9903009 W GB9903009 W GB 9903009W WO 0016036 A1 WO0016036 A1 WO 0016036A1
Authority
WO
WIPO (PCT)
Prior art keywords
tool
shifted
raman
light
materials
Prior art date
Application number
PCT/GB1999/003009
Other languages
English (en)
Inventor
Gillies David Pitt
Wolf-Dieter Münz
Original Assignee
Renishaw Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw Plc filed Critical Renishaw Plc
Priority to EP99946305A priority Critical patent/EP1044351A1/fr
Priority to JP2000570526A priority patent/JP2002525211A/ja
Publication of WO2000016036A1 publication Critical patent/WO2000016036A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0658—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of emissivity or reradiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/0009—Energy-transferring means or control lines for movable machine parts; Control panels or boxes; Control parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/09—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool
    • B23Q17/0904—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool before or after machining
    • B23Q17/0909—Detection of broken tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/248—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N2021/653—Coherent methods [CARS]
    • G01N2021/656—Raman microprobe

Definitions

  • This invention relates to methods and apparatus for monitoring the condition of a cutting tool of the type used in machine tools.
  • a broken cutting tip of a tool can be detected and wear can be monitored by directly measuring its dimensions, e.g. using a metrological probe of the type sold by Renishaw pic. It is also possible to detect optically the shape of the tool tip. However, it would be useful to be able to supplement such direct methods, especially in an automated environment.
  • the present invention seeks to provide alternatives to such methods.
  • the present invention provides apparatus and methods in which the condition of a cutting tool is monitored by illuminating its surface with light in order to generate light at one or more shifted wavelengths, e.g. by the Raman effect, and then detecting the shifted wavelength or wavelengths.
  • the invention provides such a method, in which the tool to be monitored comprises at least one layer of a first material, lying over a second layer or a substrate of a second material, the first and second materials having different spectra of shifted wavelengths when illuminated; the method comprising the steps of: illuminating the surface of the tool with light, in order to generate a wavelength-shifted spectrum therefrom; analysing and detecting the resulting spectrum, to determine which of said first and second materials lies at the surface of the tool.
  • the spectrum is a Raman spectrum.
  • a second aspect of the invention provides a cutting tool comprising at least one layer of a first material, lying over a second layer or a substrate of a second material, the first and second materials having different spectra of shifted wavelengths when illuminated.
  • a third aspect of the invention provides a tool condition monitoring system, comprising a probe which is capable of being brought into proximity or contact with a tool to be monitored, a source of light for illuminating a surface of the tool via the probe, thereby generating a spectrum of shifted wavelengths, the probe collecting light of said spectrum and delivering it to an analyser, the analyser comprising means for determining the condition of the tool from its spectrum.
  • Fig 1 is a schematic diagram showing the tip of a cutting tool and a Raman probe, not to scale
  • Fig 2 is a schematic diagram of analysis and detection arrangements for a Raman spectrum acquired by the probe of Fig 1;
  • Fig 3 is a graph illustrating how two Raman signals vary with depth d as the surface of the tool tip in Fig 1 is worn;
  • Figs 4 and 5 illustrate two alternative Raman monitoring systems for a carousel of cutting tools
  • Fig 6 illustrates a Raman system integrated with a tool setting probe on a machine tool
  • Fig 7 is a graph of the Raman spectra of suitable materials for tool tip coatings.
  • the tip 10 of a cutting tool may be a tool particularly suitable for use in a fully automated high performance/high speed machining environment. It comprises a substrate 20, onto which are coated multiple hard coating layers 12-18.
  • TiN titanium nitride
  • TiAlXN TiAIN
  • TiAlXN TiAIN
  • Other possible materials include A1N, TiCN, ZrN and TiZrN. Two or more such materials may be alternated in the various layers.
  • Suitable materials such as a TiAlN/ZrN superlattice coating, are described in "Investigation of superlattice coatings deposited by a combined steered arc evaporation and unbalanced magnetron sputtering technique", L.A. Donohue et al, Surface and Coatings Technology, 76-77 (1995), pages 149-158.
  • the respective layers 12-18 may be alternately TiN and TiAlN.
  • the substrate 20 may be ferrous (e.g. high-speed steel or stainless steel) or it may be cemented tungsten carbide.
  • the condition and state of wear of such a tool may be examined using a Raman probe 22.
  • this has an optical fibre 24 by means of which exciting laser light is delivered, and an optional narrow bandpass filter 28 to help render the laser light monochromatic (removing plasma lines and any fluorescence or Raman scattering generated in the fibre 24).
  • a mirror 30 reflects the incoming laser light towards a notch filter 32.
  • This is preferably a holographic or rugate notch filter at a low angle of incidence to the light, e.g. 10°. It reflects the light of the laser wavelength via an objective 34 towards the tool tip 10, while at the same time transmitting (and therefore removing) light of all other wavelengths. It therefore performs a similar function to the filter 28 in rendering the exciting light monochromatic.
  • Raman scattering takes place at the tool tip 10. Since Raman scattering is a bulk effect, in which the re-emission occurs in all directions, adequate quantities of the Raman light are back-scattered via the objective 34 and passed to the filter 32. This in contrast to, for example, infra-red reflectivity measurements, where most of the light would be reflected as shown by the arrow 36. Thus, it is not necessary to ensure that the probe 22 is aligned normal to the surface of the tool tip 10. This means that any tool shape can be measured, and from any angle. Furthermore, unlike other optical techniques such as infra-red reflectivity, Raman is substantially unaffected by the presence of water on the tool tip. The Raman scattered light is filtered by the filter 32, which is highly effective to reject reflected and Rayleigh scattered light having substantially the same wavelength as the laser. The Raman scattered light then passes via an optical fibre 26, back to the analysis and detection arrangements seen in Fig 2.
  • Fig 2 is an example of a simple (and therefore relatively cheap) analysis arrangement.
  • the Raman scattered light which passes along the optical fibre 26 is split along two paths by a beamsplitter 38.
  • One such path passes through a narrow bandpass filter 40, which selects for example Raman scattered light shifted by 550cm "* from the laser wavelength. This is detected by a photodetector 42.
  • a narrow bandpass filter 44 selects light shifted by (say) 640cm " from the laser wavelength, which is then detected by a detector 46.
  • the beamsplitter 38 may be a conventional 50/50 beamsplitter, or it may split the light in other proportions e.g. to normalise the two selected wavenumbers relative to each other.
  • the beamsplitter 38 may be dichroic, in the form of an edge filter, which reflects all light above a certain wavenumber, while transmitting all light below that wavenumber. This has the advantage of greater optical efficiency, since it significantly reduces the amount of the available signal lost in the beamsplitter.
  • Various other alternatives are possible, such as using a dichroic bandpass filter for the beamsplitter 38
  • An alternative to the system shown in Fig 2 is to apply the incoming Raman scattered light to a diffraction grating. This disperses the various Raman wavenumbers at different angles.
  • One or more photodetectors 42,46 may then be placed at appropriate positions (preferably behind slits and with appropriate focusing optics) to detect the particular Raman band or bands of interest.
  • Fig 3 shows how the resulting signals detected by the photodetectors 42,46 vary in accordance with depth, as the tool tip wears and successive layers are exposed. At low depths d, where the outer TiN layer 18 is still intact, there are relatively high values of the 550cm " signal detected by the photodetector 42, and relatively low values of the 640cm " wavenumber detected by the detector 46.
  • the bottom layer, closest to the substrate is TiN.
  • the outer layer could be TiAlN instead of TiN.
  • the tool tip 10 is in use on a machine tool, and subject to regular wear, its condition may be monitored by a series of regular inspections using the probe 22.
  • regular inspections may be daily for example, or they may be programmed as part of the machining cycle in a CNC control, particularly where the control is directly controlled by an external computer.
  • This computer may take a series of readings of the outputs of the photodetectors 42,46 (or of the output of the amplifier 48), counting the peaks and troughs in the curves 50,52 seen in Fig 3, and thereby counting the numbers of the layers 12-18 which have worn away.
  • the computer control may be programmed to stop using that tool, and to use a different tool instead; or it may be programmed to trigger an alarm or generate a message indicating that the tool needs to be changed.
  • the wavenumbers 550cm " and 640cm " have been given purely as examples. Other peaks in the Raman spectra of TiN and TiAlN may be used. For example, it has been found that TiN has a peak near 800cm " which is not present in TiAlN. Intermediate compositions between TiN and TiAlN produce corresponding signal levels at 800cm " . Thus, the height of this peak could be used to monitor the wear of the layers 12-18. In this case, the filter 40 would be tuned to 800cm " , while the filter 44 could be tuned to a background wavenumber which does not appreciably change as the aluminium content of the alloy varies. Other changes are apparent in the Raman spectra of TiN and TiAlN between 150 and 400cm " , and appropriate arrangements may monitor the peak heights, positions and/or half-widths in this region in order to analyse the Al composition.
  • One or more of the layers 12-18 may be of a material, or doped with a material (e.g. Cr) , specially chosen as a marker because it has a strong Raman peak at a particular characteristic wavelength, or a characteristic fluorescence, luminescence, etc spectrum, which may be detected by one of the filters 40,44. Just one or two layers of this material may be provided at or close to the substrate 20, so that the computer control which monitors the output of the detectors can detect this characteristic wavenumber and use it as an indication that the tool is now worn nearly to the substrate.
  • the element X selected will depend on the resulting multi-layer structure, and/or on the emission characteristics of the resulting alloy.
  • a material may be chosen for the marker which exhibits resonance Raman scattering, i.e. it gives a very strong Raman signal when excited at a particular laser wavelength (which is then used for the laser excitation passing down the optical fibre 24) .
  • a marker layer having a particularly strong Raman peak it is also possible to provide a layer of a material which has a marked absence of a Raman peak which is present in the other layer or layers of the tool tip 10.
  • Particularly suitable materials for one of the layers are either CrN or VN.
  • CrN or VN there may be a layer of Cr or VN of, say, l ⁇ thickness immediately over a high speed steel or cemented tungsten carbide substrate.
  • this may be any conventional hard-wearing tool coating material having a detectable Raman signature, such as TiN, TiZrN or other materials discussed above.
  • Fig 7 shows a Raman spectrum 90 for TiZrN, a spectrum 92 for CrN, and a spectrum 94 for VN . It can be seen that TiZrN has a pronounced peak between 200cm “" and 300cm “ “, and another around 500cm “” , which are not present in CrN or VN. So TiZrN can be used as the outer wear layer, and an analyser such as in Fig 2 is used to detect one of these peaks. When the outer layer wears through, the Raman signal will disappear. It will do so while there still remains a hard-wearing coating of CrN or VN, without exposure of the substrate. Therefore, a warning is given that the tool needs to be changed or recoated, before the substrate can cause unacceptable surface finish to the workpieces being machined.
  • An alternative to a marker layer of a different material is to use a layer having a greater or less thickness than the other layers 12-18.
  • Computer monitoring of the Raman signals received periodically will then show that one of the peaks of the curves 50 or 52 will be much wider or narrower than the others, showing that the marker layer of a different thickness has been reached.
  • one or more marker layers of a material which exhibits another spectroscopic shifting property rather than Raman, fluorescence or luminescence.
  • the coolants commonly used on machine tools may themselves exhibit fluorescence. If so, the presence of such coolant on the tool tip 10 may mask the Raman signal which is to be measured and analysed.
  • One solution to this problem is to use a coolant which does not fluoresce.
  • Another solution is to wash the coolant away with a jet of water, as discussed below, prior to the measurement.
  • the invention is particularly useful for use with the most modern non-lubricated cutting tools, where no coolant or lubricant is used.
  • Fig 4 shows a carousel 54 of cutting tools 56, for example in a high rpm machine tool.
  • a measuring station 58 there is located the fibre optic probe 22 according to Fig 1, and (optionally) a nozzle 60 for delivering a jet of water to clean coolant from a tool 56 located in the station 58.
  • the optical fibre 26 brings the Raman scattered light back to a Raman system 62, which (in a simple version) may be as shown in Fig 2.
  • the carousel 54 is rotated in the direction of the arrow 64, indexing each tool 56 in turn to the measuring station 58.
  • the tool is cleaned by a jet of water from the nozzle 60 (if required) and a measurement is taken by the probe 22 and Raman system 62 in the manner described above.
  • the result of this measurement is stored by the computer, giving a day-to-day record of the wear and condition of each individual tool 56. Should it be detected that a particular tool 56 is too worn for use, the computer can flag this fact, producing a list of those tools which need to be replaced. If the tool concerned is not to be replaced immediately, the computer system may be programmed not to use that tool but to use an alternative, identical tool in the carousel 54 instead.
  • Fig 5 shows a similar arrangement to Fig 4.
  • a direct optical connection is used, and the Raman system 62 is similar to that described in EP 0543578.
  • a microscope objective 65 is located at the measuring station 58.
  • the laser illumination is injected into the optical path within the system 62.
  • a beamsplitter or removable mirror 68 may be provided, enabling the tool 56 at the station 58 to be visually examined through the microscope objective by a video camera 70.
  • a two-dimensional image of the surface of the tool may be formed on the CCD detector (not shown) which forms part of the Raman system 62 as described in EP 0543578.
  • This two-dimensional image may be formed in white light, to aid visual inspection of the tool surface, or in the illumination provided by the laser. Alternatively, it may be formed in light of a selected Raman band, so that the image shows how the wear varies from one place on the tool to another. Visual monitoring by the video camera or the CCD may be used to scan the tool tip for breakage or other defects in its shape.
  • the probe 22 or the microscope objective lens 65 (and the nozzle 60 if provided) to be indexed in sequence from one tool to another, the tools being kept stationary, as an alternative to indexing the tools in the carousel as indicated by the arrow 64.
  • an auto focusing system may be provided to ensure that the tool tip is correctly focused by the probe 22 or the microscope objective lens.
  • the Raman system 62 is relatively simple, e.g. as shown in Fig 2, it is possible to build the system into the tool carousel of an individual machine tool.
  • the present invention is to be used in a large manufacturing plant with many machine tools, and especially if the more expensive system according to EP 0543578 is to be used, it may be preferable to build the Raman system 62 and its associated components including the probe 22 or microscope objective lens 65 into a portable trolley. This can then be wheeled around the manufacturing plant and docked with a measuring station 58 on each machine tool carousel in turn. Appropriate docking connections may be provided both on the machine tool carousel and on the trolley (or on the fibre optic probe 22) to ensure correct alignment of the optical components with the measuring station 58.
  • Fig 6 shows an alternative system which can be used for measurement and monitoring of the tool tip "in process", during a machining cycle. It is known to provide a tool setting probe on the bed of a machine tool such as a machining centre. Such tool setting probes may be electro- mechanical, and are sold commercially by Renishaw pic.
  • the tool Prior to machining, and optionally at other times during the machining cycle, the tool is brought into contact with the measuring tip of the tool setting probe, which generates a trigger signal upon contact.
  • This trigger signal causes the machine control to take a reading of the instantaneous position of the tool, and thereby to generate offsets for future machining.
  • Fig 6 shows such a tool setting probe 80, installed on the bed 82 of the machine tool.
  • the tool setting probe 80 is modified in that it has an optical fibre 84 passing up its stylus stem 86 to the measuring tip 88.
  • the probe 80 When the tool 56 is brought into contact with the measuring tip 88, as indicated by broken lines, the probe 80 generates a trigger signal in the usual way and sends it back to the machine control (not shown) .
  • this causes the machine control to take a reading from a Raman system 62 connected to the optical fibre 84.
  • the Raman system 62 is preferably similar to that shown in Fig 2.
  • optical fibre 84 Only one optical fibre 84 is shown in Fig 6.
  • the laser input may pass down this optical fibre as well as the returning Raman scattered light, by folding the laser input light into the optical path within the system 62, using an appropriate beamsplitter (preferably dichroic) .
  • a separate optical fibre may be used for delivery of the laser light, running parallel to the optical fibre 84 to the measuring tip 88 of the probe 80.
  • the system shown in Fig 6 may include auto focus arrangements.
  • the Raman measurement can be taken after the tool 56 has been backed a short distance away from the measuring tip 88 after contact, if desired.
  • a further possibility for "in process" Raman measurement of the tip of the tool 56 is to provide a measuring station at a position on the bed of the machine tool which is separate from any tool setting probe 80.
  • This measuring station may include a probe 22 such as shown in Fig 1.
  • the tool 56 is then occasionally brought into the vicinity of the probe 22 at this station, and a Raman measurement made upon an instruction received from the machine computer control.
  • a further possibility is to make Raman measurements of the tool in situ as it machines a workpiece.
  • An appropriate optical fibre and a long focal length lens may be attached to non-rotating structure which moves with the movable spindle of a machining centre, or with the tool turret of a lathe. The lens is then focused on the tool tip as machining takes place.
  • Raman tool condition monitoring systems as described above may be used in other ways than to study tool tips having multiple coating layers. For example, stress in a tool tip may be monitored, by monitoring a characteristic Raman peak of the material concerned which is wavenumber shifted or which is broadened or narrowed as a result of stress. Oxidation of the tool tip may also be monitored, by studying Raman bands which change as oxidation takes place.
  • the substrate 20 may alternatively be of a material having a characteristic Raman peak which can be detected when the overlying coatings wear away.
  • the embodiments shown in Figs 4-6 enable lifetime forecasts to be made for each tool 56 on the basis of a quantitative measurement in real time.

Landscapes

  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Optics & Photonics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un outil de coupe (10) pour une machine-outil. Cet outil de coupe comprend un substrat (20) et une ou plusieurs couches (12-18) de matériaux présentant un spectre Raman différent, p. ex. Tin, TiA1N, TiA1XN (dans lequel X = Y, Cr, Nb, W, Mo, etc.), AlN, TiC, ZrN, TiZrN, CrN or VN. Une sonde (22) spectroscopique Raman détecte et distingue les spectres Raman. A mesure que l'outil s'use, différentes couches présentant des spectres Raman différents sont détectées et un signal d'avertissement peut être émis lorsque l'outil doit être remplacé ou doit recevoir un nouveau revêtement.
PCT/GB1999/003009 1998-09-11 1999-09-09 Surveillance de l'etat d'un outil WO2000016036A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP99946305A EP1044351A1 (fr) 1998-09-11 1999-09-09 Surveillance de l'etat d'un outil
JP2000570526A JP2002525211A (ja) 1998-09-11 1999-09-09 工具の状態を監視する方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9819732.0A GB9819732D0 (en) 1998-09-11 1998-09-11 Tool conditioning monitoring
GB9819732.0 1998-09-11

Publications (1)

Publication Number Publication Date
WO2000016036A1 true WO2000016036A1 (fr) 2000-03-23

Family

ID=10838637

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB1999/003009 WO2000016036A1 (fr) 1998-09-11 1999-09-09 Surveillance de l'etat d'un outil

Country Status (4)

Country Link
EP (1) EP1044351A1 (fr)
JP (1) JP2002525211A (fr)
GB (1) GB9819732D0 (fr)
WO (1) WO2000016036A1 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002100592A1 (fr) * 2001-06-08 2002-12-19 Motorola, Inc. Dispositif et procede permettant de mesurer la deterioration d'un outil
WO2009040153A1 (fr) * 2007-09-20 2009-04-02 Robert Bosch Gmbh Machine-outil
US7652763B2 (en) 2004-12-09 2010-01-26 The Science And Technology Facilities Council Apparatus for depth-selective Raman spectroscopy
US7911604B2 (en) 2005-11-25 2011-03-22 The Science And Technology Facilities Council Security screening using raman analysis
EP2402740A1 (fr) * 2010-06-29 2012-01-04 General Electric Company Système et procédé de quantification d'usure d'outils
CN109682790A (zh) * 2019-01-10 2019-04-26 东南大学 一种表面增强拉曼散射基底及其制备方法
US11910797B2 (en) 2018-01-14 2024-02-27 Collidion, Inc. Compositions, kits, methods and uses for cleaning, disinfecting, sterilizing and/or treating

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103017677B (zh) * 2011-09-23 2015-07-15 通用电气公司 测量刀具的刀刃轮廓的方法
KR102269026B1 (ko) * 2019-07-02 2021-06-24 강원대학교 산학협력단 공구 마모 측정 시스템

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4009994A1 (de) * 1989-03-28 1990-10-04 Kanefusa Knife & Saw Schneidorgan fuer drehbearbeitung von holz
US4962518A (en) * 1987-12-07 1990-10-09 Twin City International, Inc. Apparatus for measuring the thickness of a coating
DE4326852A1 (de) * 1992-08-27 1994-03-03 Balzers Hochvakuum Verfahren zur Beurteilung der Beschichtbarkeit von Metallen
EP0752293A2 (fr) * 1995-07-05 1997-01-08 Ngk Spark Plug Co., Ltd Article revêtu de diamant et son procédé de préparation
GB2323164A (en) * 1997-03-13 1998-09-16 Helmut Fischer Gmbh & Co Istit Measurement of the thickness of thin layers by the means of X-ray fluorescence with compensation for position of sample

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4962518A (en) * 1987-12-07 1990-10-09 Twin City International, Inc. Apparatus for measuring the thickness of a coating
DE4009994A1 (de) * 1989-03-28 1990-10-04 Kanefusa Knife & Saw Schneidorgan fuer drehbearbeitung von holz
DE4326852A1 (de) * 1992-08-27 1994-03-03 Balzers Hochvakuum Verfahren zur Beurteilung der Beschichtbarkeit von Metallen
EP0752293A2 (fr) * 1995-07-05 1997-01-08 Ngk Spark Plug Co., Ltd Article revêtu de diamant et son procédé de préparation
GB2323164A (en) * 1997-03-13 1998-09-16 Helmut Fischer Gmbh & Co Istit Measurement of the thickness of thin layers by the means of X-ray fluorescence with compensation for position of sample

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002100592A1 (fr) * 2001-06-08 2002-12-19 Motorola, Inc. Dispositif et procede permettant de mesurer la deterioration d'un outil
US6633379B2 (en) 2001-06-08 2003-10-14 Semiconductor 300 Gmbh & Co. Kg Apparatus and method for measuring the degradation of a tool
JP2004530886A (ja) * 2001-06-08 2004-10-07 モトローラ・インコーポレイテッド 工具の劣化を測定するための装置及び方法
US8159664B2 (en) 2004-12-09 2012-04-17 The Science And Technology Facilities Council Apparatus for depth-selective Raman spectroscopy
US7652763B2 (en) 2004-12-09 2010-01-26 The Science And Technology Facilities Council Apparatus for depth-selective Raman spectroscopy
US8243269B2 (en) 2004-12-09 2012-08-14 The Science And Technology Facilities Council Raman spectral analysis of sub-surface tissues and fluids
US7911604B2 (en) 2005-11-25 2011-03-22 The Science And Technology Facilities Council Security screening using raman analysis
US8085396B2 (en) 2006-04-05 2011-12-27 The Science And Technology Facilities Council Raman analysis
US8259902B2 (en) 2006-04-05 2012-09-04 The Science And Technology Facilities Council Raman analysis of tissue and/or calcifications
WO2009040153A1 (fr) * 2007-09-20 2009-04-02 Robert Bosch Gmbh Machine-outil
RU2484929C2 (ru) * 2007-09-20 2013-06-20 Роберт Бош Гмбх Технологическая машина
US8701534B2 (en) 2007-09-20 2014-04-22 Robert Bosch Gmbh Machine tool
EP2402740A1 (fr) * 2010-06-29 2012-01-04 General Electric Company Système et procédé de quantification d'usure d'outils
US11910797B2 (en) 2018-01-14 2024-02-27 Collidion, Inc. Compositions, kits, methods and uses for cleaning, disinfecting, sterilizing and/or treating
CN109682790A (zh) * 2019-01-10 2019-04-26 东南大学 一种表面增强拉曼散射基底及其制备方法
CN109682790B (zh) * 2019-01-10 2021-03-19 东南大学 一种表面增强拉曼散射基底及其制备方法

Also Published As

Publication number Publication date
JP2002525211A (ja) 2002-08-13
GB9819732D0 (en) 1998-11-04
EP1044351A1 (fr) 2000-10-18

Similar Documents

Publication Publication Date Title
Jemielniak et al. Application of AE and cutting force signals in tool condition monitoring in micro-milling
JP4500641B2 (ja) 欠陥検査方法およびその装置
US9500471B2 (en) Optical measuring device and method for acquiring in situ a stage height between a support and an edge region of an object
Kurada et al. A review of machine vision sensors for tool condition monitoring
US5555474A (en) Automatic rejection of diffraction effects in thin film metrology
JP7425583B2 (ja) 工具装置及び加工工具の状態を測定するための方法
WO2017002395A1 (fr) Dispositif de mesure de forme d'outil
EP1855083A1 (fr) Dispositif et procédé pour le mesurage optique de la distance
EP1044351A1 (fr) Surveillance de l'etat d'un outil
CN102892547A (zh) 利用加工距离的原位测量的材料加工装置
Wang et al. Development of a laser-scattering-based probe for on-line measurement of surface roughness
Ye et al. On-machine chromatic confocal measurement for micro-EDM drilling and milling
JP2008089608A (ja) 金属部品の欠陥検出方法
Carolan et al. Acoustic emission monitoring of tool wear during the face milling of steels and aluminium alloys using a fibre optic sensor. Part 1: Energy analysis
Decker et al. Process monitoring in laser beam cutting on its way to industrial application
JPH08313433A (ja) 赤外顕微分光分析方法及び装置
KR100420373B1 (ko) 공작물표면의 주기성 파형들을 감지하기 위한 방법 및 장치
JP5336959B2 (ja) プローブ顕微鏡
US6850333B1 (en) Optimized aperture shape for optical CD/profile metrology
JP2007309710A (ja) 微細周期性溝の観測方法とその観測装置、微細周期性溝の加工観測方法とその加工観測装置
Carolan et al. Acoustic emission monitoring of tool wear during the face milling of steels and aluminium alloys using a fibre optic sensor. Part 2: Frequency analysis
CN118829845A (zh) 方法和坐标测量机
Mandal et al. Surface Characterization of Laser Clad Surfaces using Profile and Arial Techniques
Hansbrough Application of a Fabry-Perot interferometer for measuring machining forces in turning operations
Klauer-Dobrowolski et al. Ball end micro milling of brass: Wear behavior in field-use

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): DE GB JP US

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE

WWE Wipo information: entry into national phase

Ref document number: 1999946305

Country of ref document: EP

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWP Wipo information: published in national office

Ref document number: 1999946305

Country of ref document: EP

REG Reference to national code

Ref country code: DE

Ref legal event code: 8642

WWW Wipo information: withdrawn in national office

Ref document number: 1999946305

Country of ref document: EP