WO2000015420A1 - Dispositif permettant le transport des substrats en forme de disques ronds d'une station d'alimentation jusqu'a une station terminale en passant par plusieurs stations intermediaires - Google Patents

Dispositif permettant le transport des substrats en forme de disques ronds d'une station d'alimentation jusqu'a une station terminale en passant par plusieurs stations intermediaires Download PDF

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Publication number
WO2000015420A1
WO2000015420A1 PCT/EP1999/006504 EP9906504W WO0015420A1 WO 2000015420 A1 WO2000015420 A1 WO 2000015420A1 EP 9906504 W EP9906504 W EP 9906504W WO 0015420 A1 WO0015420 A1 WO 0015420A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
rotary table
station
substrates
turntable
Prior art date
Application number
PCT/EP1999/006504
Other languages
German (de)
English (en)
Inventor
Dietmar Fuest
Erwin Jansen
Alexander Weil
Original Assignee
Leybold Systems Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Systems Gmbh filed Critical Leybold Systems Gmbh
Priority to DE59907879T priority Critical patent/DE59907879D1/de
Priority to EP99950523A priority patent/EP1109663B1/fr
Publication of WO2000015420A1 publication Critical patent/WO2000015420A1/fr

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26Apparatus or processes specially adapted for the manufacture of record carriers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q39/00Metal-working machines incorporating a plurality of sub-assemblies, each capable of performing a metal-working operation
    • B23Q39/04Metal-working machines incorporating a plurality of sub-assemblies, each capable of performing a metal-working operation the sub-assemblies being arranged to operate simultaneously at different stations, e.g. with an annular work-table moved in steps
    • B23Q39/042Metal-working machines incorporating a plurality of sub-assemblies, each capable of performing a metal-working operation the sub-assemblies being arranged to operate simultaneously at different stations, e.g. with an annular work-table moved in steps with circular arrangement of the sub-assemblies
    • B23Q39/046Metal-working machines incorporating a plurality of sub-assemblies, each capable of performing a metal-working operation the sub-assemblies being arranged to operate simultaneously at different stations, e.g. with an annular work-table moved in steps with circular arrangement of the sub-assemblies including a loading and/or unloading station
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/04Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of grippers
    • B23Q7/041Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of grippers step by step
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/84Star-shaped wheels or devices having endless travelling belts or chains, the wheels or devices being equipped with article-engaging elements
    • B65G47/846Star-shaped wheels or wheels equipped with article-engaging elements
    • B65G47/847Star-shaped wheels or wheels equipped with article-engaging elements the article-engaging elements being grippers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B23/00Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture

Definitions

  • the invention relates to a device for the transport of circular disk-shaped substrates, for example compact disks, from an exit or feed station to an end station, for example a take-up spindle, the intermediate stations effecting the processing, for example coating, painting, drying and checking, for which purpose the first rotary table with substrate grippers attached to it for the further transport of the substrates from station to station along a circular path and a second rotary table provided with holding spindles are provided.
  • a device (DOS 41 27 341) for the automatic casting, coating, painting, testing and sorting of workpieces is known - in particular of circular disk-shaped, flat substrates made of plastic, such as, for example, optical or magnetic-optical data memories - with at least one transport device which conveys the substrates from a manufacturing station, for example an injection molding machine, to the processing stations, and each with a storage station for the separate storage of finished and as Flawlessly found and faulty workpieces, which is characterized by a substrate transport device with a transport carriage that can be moved back and forth along a straight line, each with three transport arms with substrate holders arranged on both sides of the carriage, a vacuum coating device provided on one side of the transport carriage and one on the other side of the transport carriage, there is a storage device with at least one shelf for well-found and one for rejecting substrates and a device for quality ⁇ ts phenomenon and with a carousel transport device arranged opposite in the direction of movement of the transport slide of the injection molding machine or a rotary table with various
  • Is known veiterhin a transport device for the transport of substrates, gear staticn to a basic and more in series or circularly arrange t e process stations include for receiving the substrate to which the substrate by the transport device designed as a turntable is guided and then delivered to a pick-up and / or transfer station, the pick-up and transfer of the substrate from the turntable using drivable substrate grippers (DE 195 14 037), the turntable being driven at a constant clock frequency and the clock frequency depends on the longest working time of any process station, the substrate being able to be fed to one or more process stations or satellite process stations provided outside the turntable and / or an exit station or a storage station by means of the rotatably mounted substrate gripper.
  • a device for the transport of flat substrates, for example trays from and to different processing stations (GB 2 250 495 A) with two turntables and with actuators arranged thereon with actuators, the free ends of which are provided with suction cups, the suction cups take over the substrates from a feed conveyor and for this purpose each carry out a straight-line lifting movement in the radial direction, then pivot the substrates into the region of processing stations and finally deliver the substrates to a return conveyor.
  • the object of the present invention is to design a device of the type mentioned in the introduction in such a way that it takes up a minimum of space a particularly short cycle time is permitted and is simple to set up and allows good access to all processing stations.
  • the turntable executes a rotating movement about its axis of rotation, adapted to the machining cycle and thereby picks up, transports and delivers the substrates, the turntable having a substrate gripper at its free end with a back and forth movement in the radial direction having transport member is provided, the lifting movement of which enables the transport of the substrate to a substrate receiving spindle in the center of the second rotary table.
  • the invention allows for a wide variety of embodiments; one of them is shown purely schematically in the attached drawings, which shows a device for the transport of compact discs in plan view and in three different working phases.
  • the device essentially consists of a turntable 3 with a plurality of radially extending arms 2, 2 ', ... arranged on its radially outer region, with a substrate gripper 4, 4', ..., 14 at the free end of each arm 2,2 ', ..., a substrate feed station 5, one on the lower side te of the turntable 3 mounted, extending along an arm 2, approximately radially movable transport member 6 and a second turntable 7 with six arranged on a circular line, each extending perpendicularly spindles 8,8 ', ... for receiving good found substrates 1, 1 ', ... and a central spindle 9 for receiving the substrates 1, 1', ...
  • the substrate gripper 14 holding the substrate 1, which is arranged at the free end of the transport member 6, can place the substrate 1 on the central spindle 9 (as shown in FIG. 3) ) or - depending on a signal received by the fault tester 13 - place on one of the spindles 8,8 ', ...

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Specific Conveyance Elements (AREA)

Abstract

Dans le cas d'un dispositif permettant de transporter des substrats (1, 1',...) en forme de disques ronds d'une station d'alimentation (5) jusqu'à une station terminale en passant par plusieurs stations intermédiaires (10, 11, 12, 13) à l'aide d'une première table rotative (3) dotée de pinces (4, 4',...) et à l'aide d'une deuxième table rotative dotée de broches de réception (8, 8',..., 9) comme station terminale. La première table rotative (3) exécute un mouvement de rotation autour de son axe de rotation (15), ce mouvement étant pendulaire et adapté au cycle d'usinage, et prend saisit ainsi les substrats (1, 1',...) pour les transporter et les céder. La table rotative (3) est dotée d'un élément de transport (6) qui est mobile dans le sens radial et dont le mouvement de soulèvement permet de transporter le substrat (1, 1',...) jusqu'à une broche réceptrice de substrat (9) placée au centre de la deuxième table rotative (7).
PCT/EP1999/006504 1998-09-10 1999-09-03 Dispositif permettant le transport des substrats en forme de disques ronds d'une station d'alimentation jusqu'a une station terminale en passant par plusieurs stations intermediaires WO2000015420A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE59907879T DE59907879D1 (de) 1998-09-10 1999-09-03 Vorrichtung für den transport von kreisscheibenförmigen substraten von einer zuführstation über mehrere zwischenstationen zu einer endstation
EP99950523A EP1109663B1 (fr) 1998-09-10 1999-09-03 Dispositif permettant le transport des substrats en forme de disques ronds d'une station d'alimentation jusqu'a une station terminale en passant par plusieurs stations intermediaires

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19841393.9 1998-09-10
DE19841393A DE19841393A1 (de) 1998-09-10 1998-09-10 Vorrichtung für den Transport von kreisscheibenförmigen Substraten von einer Zuführstation über mehrere Zwischenstationen zu einer Endstation

Publications (1)

Publication Number Publication Date
WO2000015420A1 true WO2000015420A1 (fr) 2000-03-23

Family

ID=7880504

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP1999/006504 WO2000015420A1 (fr) 1998-09-10 1999-09-03 Dispositif permettant le transport des substrats en forme de disques ronds d'une station d'alimentation jusqu'a une station terminale en passant par plusieurs stations intermediaires

Country Status (4)

Country Link
EP (1) EP1109663B1 (fr)
DE (2) DE19841393A1 (fr)
TW (1) TW469254B (fr)
WO (1) WO2000015420A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10343378A1 (de) * 2003-09-17 2005-05-12 M & S Metzl Und Seitz Industri Vorrichtung zum Bearbeiten von Werkstücken an einer Anzahl von Arbeitsstationen
CN100359581C (zh) * 2002-09-20 2008-01-02 卡劳斯-马菲塑料工业股份公司 用来制造粘合盘片的方法和装置
US10781314B2 (en) 2015-11-30 2020-09-22 Anomera Inc. Cellulose-based organic pigments

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9329015B2 (en) 2010-02-08 2016-05-03 3Shape A/S Object feeder system
CN104493627B (zh) * 2014-12-08 2016-11-30 重庆第二机床厂有限责任公司 一种轴类零件倒立式双层旋转料仓
CN110271823A (zh) * 2018-03-15 2019-09-24 北京慧荣和科技有限公司 培养皿存储分拣装置及艾姆斯实验仪

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4408537A1 (de) * 1994-03-14 1995-09-21 Leybold Ag Vorrichtung für den Transport von Substraten
DE19514037A1 (de) * 1995-04-13 1996-10-17 Leybold Ag Transportvorrichtung
DE19606764C1 (de) * 1996-02-23 1997-04-03 Singulus Technologies Gmbh Vorrichtung zum Greifen, Halten und/oder Transportieren von Substraten

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2250495B (en) * 1990-09-07 1993-12-22 Robert Sincliar Hall Feeding apparatus.
DE4127341C2 (de) * 1991-08-19 2000-03-09 Leybold Ag Vorrichtung zum selbsttätigen Gießen, Beschichten, Lackieren, Prüfen und Sortieren von Werkstücken
DE4235676C2 (de) * 1992-10-22 1997-08-28 Balzers Hochvakuum Vakuumkammer zum Transport scheibenförmiger Werkstücke in einer Vakuumanlage
DE4340522A1 (de) * 1993-11-29 1995-06-01 Leybold Ag Vorrichtung und Verfahren zum schrittweisen und automatischen Be- und Entladen einer Beschichtungsanlage
DE19706594A1 (de) * 1997-02-20 1998-08-27 Leybold Systems Gmbh Vorrichtung für den Transport von Substraten
DE29703020U1 (de) * 1997-02-20 1997-04-10 Leybold Systems Gmbh Vorrichtung für den Transport von Substraten

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4408537A1 (de) * 1994-03-14 1995-09-21 Leybold Ag Vorrichtung für den Transport von Substraten
US5612068A (en) * 1994-03-14 1997-03-18 Leybold Aktiengesellschaft Apparatus for the transfer of substrates
DE19514037A1 (de) * 1995-04-13 1996-10-17 Leybold Ag Transportvorrichtung
DE19606764C1 (de) * 1996-02-23 1997-04-03 Singulus Technologies Gmbh Vorrichtung zum Greifen, Halten und/oder Transportieren von Substraten

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100359581C (zh) * 2002-09-20 2008-01-02 卡劳斯-马菲塑料工业股份公司 用来制造粘合盘片的方法和装置
DE10343378A1 (de) * 2003-09-17 2005-05-12 M & S Metzl Und Seitz Industri Vorrichtung zum Bearbeiten von Werkstücken an einer Anzahl von Arbeitsstationen
DE10343378B4 (de) * 2003-09-17 2005-11-24 M & S Metzl Und Seitz Industrieautomation Gmbh Vorrichtung zum Bearbeiten von Werkstücken an einer Anzahl von Arbeitsstationen
US10781314B2 (en) 2015-11-30 2020-09-22 Anomera Inc. Cellulose-based organic pigments

Also Published As

Publication number Publication date
EP1109663A1 (fr) 2001-06-27
EP1109663B1 (fr) 2003-11-26
TW469254B (en) 2001-12-21
DE59907879D1 (de) 2004-01-08
DE19841393A1 (de) 2000-03-16

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