WO1999027311A1 - Cooling apparatus employing a pressure actuated joule-thomson cryostat flow controller - Google Patents

Cooling apparatus employing a pressure actuated joule-thomson cryostat flow controller Download PDF

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Publication number
WO1999027311A1
WO1999027311A1 PCT/US1998/024990 US9824990W WO9927311A1 WO 1999027311 A1 WO1999027311 A1 WO 1999027311A1 US 9824990 W US9824990 W US 9824990W WO 9927311 A1 WO9927311 A1 WO 9927311A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas
joule
housing
diaphragm
dewar
Prior art date
Application number
PCT/US1998/024990
Other languages
French (fr)
Inventor
Roy A. Mangano
Werner J. Kroebig
Original Assignee
Raytheon Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Raytheon Company filed Critical Raytheon Company
Priority to EP98966449A priority Critical patent/EP0954729B1/en
Priority to DK98966449T priority patent/DK0954729T3/en
Priority to IL13074598A priority patent/IL130745A/en
Priority to DE69810268T priority patent/DE69810268T2/en
Publication of WO1999027311A1 publication Critical patent/WO1999027311A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/02—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point using Joule-Thompson effect; using vortex effect
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/01—Control of temperature without auxiliary power
    • G05D23/12—Control of temperature without auxiliary power with sensing element responsive to pressure or volume changes in a confined fluid

Definitions

  • the present invention relates generally to Joule-Thomson valve flow controllers, and more particularly, to a pressure activated Joule-Thomson valve flow controller.
  • the assignee of the present invention manufactures missile systems that use a focal plane array infrared sensor that requires cooling to approximately 90 °K.
  • the temperature of the focal plane array and infrared sensor must be maintained within a few tenths of a degree Kelvin for precise target acquisition.
  • Joule-Thomson coolers using argon or nitrogen gas are employed to cool the focal plane array infrared sensor.
  • the flow controller is required to permit high flow during cooldown, and reduce flow once cooldown temperature is reached, while permitting a low flow to maintain the temperature of the focal plane array infrared sensor.
  • Joule-Thomson valve flow controllers incorporate temperature sensitive devices to control flow. This requires that a temperature sensor or actuator to be located at the cold end of the cryostat.
  • a temperature sensor or actuator to be located at the cold end of the cryostat.
  • gas filled bellows are located at the cold end of the cryostat. The bellows collapse as they cool down with the cryostat and dewar assembly. Upon collapse, a valve is closed to limit flow.
  • the snap disk is a bimetallic, and has a convex curvature at room temperature. When cooled down to approximately 90°K, the disk snaps into a concave shape, which, when coupled to a valve system, reduces flow.
  • the actuator device In both of the above-described cases, the actuator device must cool to the required (approximately 90°K) temperature before valve closure occurs. These devices rob the cryostat of performance due to the mass of the device (specific heat), which also needs to be cooled to the required temperature.
  • the present invention provides for a pressure activated Joule-Thomson valve flow controller having a diaphragm actuator that is located outside a dewar, and which is not cooled.
  • the diaphragm actuator is compact, and limits flow based on gas pressure supplied to the cryostat, not temperature, and does not impede cooldown of a device within or coupled to the dewar.
  • a wave spring provides a force to close the valve, thus balancing the back pressure of the gas supply.
  • the design of the present invention varies from current design technologies in that it utilizes pressure regulation instead of temperature regulation to achieve flow control.
  • Various missiles currently produced by the assignee of the present invention that would benefit from using the present invention are those that require ultra fast cooldown of a focal plane array infrared sensor in a time frame of from 3 to 10 seconds.
  • the diaphragm actuator may be used on any system, whether it requires fast cooldown or not. With the ability to regulate (reduce) flow once cooldown temperature is reached, the diaphragm actuator can be used with any system for gas conservation, wherein the reduced flow requirements lengthens the supply time provided by the gas supply.
  • Fig. 1 illustrates a cross sectional view of a pressure controlled flow actuator in accordance with the principles of the present invention
  • Fig. 2 illustrates diaphragm displacement caused by pressure in the flow actuator of Fig. 1.
  • Fig. 1 illustrates a cross sectional view of cooling apparatus 10 comprising a pressure controlled flow actuator 10 or controller 10 in accordance with the principles of the present invention.
  • the pressure controlled flow actuator 10 comprises a dewar 11 having a Joule-Thomson valve 12 (orifice 12a and stem 12b) located at one end thereof that is disposed adjacent to a sensor 13, such as a focal plane array infrared sensor 13 used in a missile 30, for example.
  • a heat exchanger 14 is disposed within the dewar 11.
  • the Joule-Thomson valve 12 is coupled by way of an actuator stem 15 to a diaphragm actuator 20 or flow controller 20 in accordance with the principles of the present invention.
  • the diaphragm actuator 20 is physically located outside of the dewar 11 at an end distal from the
  • the diaphragm actuator 20 is comprised of a housing 21 having first and second portions 21a, 21b that secure a diaphragm 22 therebetween.
  • the first and second portions 21a, 21b of the housing 21 may be secured together using a plurality of machine screws 23, for example.
  • a load plate 24 is disposed within the housing 21 adjacent to the diaphragm 22.
  • a wave spring 26 is disposed between the load plate 24 and the second portion of the housing 21b.
  • the actuator stem 15 is disposed through an opening 25 in the second portion of the housing 21b and is connected to the load plate 24.
  • a gas supply connection 16 is coupled between a gas supply 17 and an inlet 27a to the first portion 21a of the housing 21 so that a gas, such as argon or nitrogen, for example, or any gas whose temperature is below the Joule-Thomson inversion temperature, may be coupled into the interior of the housing 21 to pressurize the diaphragm 22.
  • a gas outlet line 18 is coupled between an outlet 27b from the interior of the housing 21 and the heat exchanger 14.
  • Fig. 2 illustrates diaphragm displacement caused by pressure in the flow actuator 10 of
  • Fig. 1 is an enlarged cross sectional view of the diaphragm actuator 20 of the flow actuator 10. As is shown in Fig. 2, gas is supplied from the gas supply 17 by way of the inlet 27a to the first portion 21a pressurizes the interior of the housing 21.
  • the sensor 13 on the missile 30 requires cooling to approximately 90 °K, with little or no temperature excursions for target acquisition.
  • the Joule-Thomson valve 12 and the present diaphragm actuator 20 are used to cool the sensor 13. During a cooldown cycle, a high flow rate of cooling gas is required to quickly cool the sensor 13. Once cooldown is reached, the flow rate needs to be reduced to maintain the requisite temperature, but not exhaust the gas contained in the gas supply 17.
  • the present diaphragm actuator 20 or flow controller 20 regulates the gas flow rate.
  • the diaphragm actuator 20 is located outside the dewar 11, and limits the gas flow rate based on the gas pressure in the gas supply 17. The pressure in the gas supply 17 supplies the opening force, and the wave spring 26 applies a load equivalent to the required closing pressure.
  • the use of conventional temperature sensitive control device to regulate gas flow places an unnecessary burden on cryostats that use them.
  • the present pressure actuated flow controller 20 eliminates this burden and locates the flow controller 20 outside of the dewar 11).
  • Gas supply pressure applies a load on the diaphragm 22, which in turn causes the diaphragm 22 to deflect downward (in the drawing figures) to open the Joule-Thomson valve 12.
  • the wave spring 26 applies a load in the upward direction, which translates to a pressure when distributed across the load plate 24. As the pressure in the gas supply 17 decays (the pressure decrease resulting from gas blowdown), the load applied by the pressure in the gas supply 17, and the load applied by the wave spring 26, reach equilibrium.
  • the wave spring 26 is selected to provide the closing force required to close the Joule-Thomson valve 12 when cooldown is reached.
  • the wave spring 26 may be varied for the specific design of the pressure controlled flow actuator 10, mission, and configuration, and may be selected to match a particular cooldown profile in order to match temperature as a function of pressure.
  • cooling apparatus comprising a pressure activated Joule-Thomson valve flow controller. It is to be understood that the described embodiment is merely illustrative of some of the many specific embodiments which represent applications of the principles of the present invention. Clearly, numerous and other arrangements can be readily devised by those skilled in the art without departing from the scope of the invention.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Control Of Fluid Pressure (AREA)
  • Temperature-Responsive Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)

Abstract

A pressure activated flow controller (10) for use with a Joule-Thompson valve (12) having a diaphragm actuator (20) that is located outside a dewar (11), and which is not cooled. The diaphragm actuator limits flow based on gas pressure supplied to the dewar from a gas supply (17), not temperature, and does not impede cooldown of a device coupled to the dewar. The diaphragm actuator comprises a diaphragme (22) and load plate (24) that exert a force to open the Joule-Thompson valve. A wave spring (26) provides a force to close the Joule-Thompson valve, thus balancing the back pressure of the gas supply. The diaphragm actuator is compact, and limits flow based on gas supply pressure, not temperature. The present invention thus uses pressure regulation instead of temperature regulation to achieve flow control.

Description

COOLING APPARATUS EMPLOYING A PRESSURE ACTUATED JOULE-THOMSON CRYOSTAT FLOW CONTROLLER
BACKGROUND
The present invention relates generally to Joule-Thomson valve flow controllers, and more particularly, to a pressure activated Joule-Thomson valve flow controller.
The assignee of the present invention manufactures missile systems that use a focal plane array infrared sensor that requires cooling to approximately 90 °K. The temperature of the focal plane array and infrared sensor must be maintained within a few tenths of a degree Kelvin for precise target acquisition. Joule-Thomson coolers using argon or nitrogen gas are employed to cool the focal plane array infrared sensor.
Development of ultra fast cooldown cryostats by the assignee of the present invention has lead to a need for an actuator/flow controller that is compatible therewith. The flow controller is required to permit high flow during cooldown, and reduce flow once cooldown temperature is reached, while permitting a low flow to maintain the temperature of the focal plane array infrared sensor.
Currently available Joule-Thomson valve flow controllers incorporate temperature sensitive devices to control flow. This requires that a temperature sensor or actuator to be located at the cold end of the cryostat. In the case of a Carleton-type design, gas filled bellows are located at the cold end of the cryostat. The bellows collapse as they cool down with the cryostat and dewar assembly. Upon collapse, a valve is closed to limit flow.
One patented valve flow controller developed by the assignee of the present invention incorporates a temperature sensitive snap disk. The snap disk is a bimetallic, and has a convex curvature at room temperature. When cooled down to approximately 90°K, the disk snaps into a concave shape, which, when coupled to a valve system, reduces flow.
In both of the above-described cases, the actuator device must cool to the required (approximately 90°K) temperature before valve closure occurs. These devices rob the cryostat of performance due to the mass of the device (specific heat), which also needs to be cooled to the required temperature.
Accordingly, it is an objective of the present invention to provide for a pressure activated Joule-Thomson valve flow controller.
SUMMARY OF THE INVENTION To meet the above and other objectives, the present invention provides for a pressure activated Joule-Thomson valve flow controller having a diaphragm actuator that is located outside a dewar, and which is not cooled. The diaphragm actuator is compact, and limits flow based on gas pressure supplied to the cryostat, not temperature, and does not impede cooldown of a device within or coupled to the dewar. A wave spring provides a force to close the valve, thus balancing the back pressure of the gas supply. The design of the present invention varies from current design technologies in that it utilizes pressure regulation instead of temperature regulation to achieve flow control.
Various missiles currently produced by the assignee of the present invention that would benefit from using the present invention are those that require ultra fast cooldown of a focal plane array infrared sensor in a time frame of from 3 to 10 seconds. However, it is to be understood that the diaphragm actuator may be used on any system, whether it requires fast cooldown or not. With the ability to regulate (reduce) flow once cooldown temperature is reached, the diaphragm actuator can be used with any system for gas conservation, wherein the reduced flow requirements lengthens the supply time provided by the gas supply. BRIEF DESCRIPTION OF THE DRAWINGS
The various features and advantages of the present invention may be more readily understood with reference to the following detailed description taken in conjunction with the accompanying drawings, wherein like reference numerals represent like structural elements, and in which
Fig. 1 illustrates a cross sectional view of a pressure controlled flow actuator in accordance with the principles of the present invention; and
Fig. 2 illustrates diaphragm displacement caused by pressure in the flow actuator of Fig. 1.
DETAILED DESCRIPTION
Referring to the drawing figures, Fig. 1 illustrates a cross sectional view of cooling apparatus 10 comprising a pressure controlled flow actuator 10 or controller 10 in accordance with the principles of the present invention. The pressure controlled flow actuator 10 comprises a dewar 11 having a Joule-Thomson valve 12 (orifice 12a and stem 12b) located at one end thereof that is disposed adjacent to a sensor 13, such as a focal plane array infrared sensor 13 used in a missile 30, for example. A heat exchanger 14 is disposed within the dewar 11.
The Joule-Thomson valve 12 is coupled by way of an actuator stem 15 to a diaphragm actuator 20 or flow controller 20 in accordance with the principles of the present invention. The diaphragm actuator 20 is physically located outside of the dewar 11 at an end distal from the
Joule-Thomson valve 12 and sensor 13. The diaphragm actuator 20 is comprised of a housing 21 having first and second portions 21a, 21b that secure a diaphragm 22 therebetween. The first and second portions 21a, 21b of the housing 21 may be secured together using a plurality of machine screws 23, for example. A load plate 24 is disposed within the housing 21 adjacent to the diaphragm 22. A wave spring 26 is disposed between the load plate 24 and the second portion of the housing 21b. The actuator stem 15 is disposed through an opening 25 in the second portion of the housing 21b and is connected to the load plate 24.
A gas supply connection 16 is coupled between a gas supply 17 and an inlet 27a to the first portion 21a of the housing 21 so that a gas, such as argon or nitrogen, for example, or any gas whose temperature is below the Joule-Thomson inversion temperature, may be coupled into the interior of the housing 21 to pressurize the diaphragm 22. A gas outlet line 18 is coupled between an outlet 27b from the interior of the housing 21 and the heat exchanger 14.
Fig. 2 illustrates diaphragm displacement caused by pressure in the flow actuator 10 of
Fig. 1. Fig. 2 is an enlarged cross sectional view of the diaphragm actuator 20 of the flow actuator 10. As is shown in Fig. 2, gas is supplied from the gas supply 17 by way of the inlet 27a to the first portion 21a pressurizes the interior of the housing 21.
The sensor 13 on the missile 30 requires cooling to approximately 90 °K, with little or no temperature excursions for target acquisition. The Joule-Thomson valve 12 and the present diaphragm actuator 20 are used to cool the sensor 13. During a cooldown cycle, a high flow rate of cooling gas is required to quickly cool the sensor 13. Once cooldown is reached, the flow rate needs to be reduced to maintain the requisite temperature, but not exhaust the gas contained in the gas supply 17. The present diaphragm actuator 20 or flow controller 20 regulates the gas flow rate. In the present invention, the diaphragm actuator 20 is located outside the dewar 11, and limits the gas flow rate based on the gas pressure in the gas supply 17. The pressure in the gas supply 17 supplies the opening force, and the wave spring 26 applies a load equivalent to the required closing pressure.
The use of conventional temperature sensitive control device to regulate gas flow places an unnecessary burden on cryostats that use them. The present pressure actuated flow controller 20 eliminates this burden and locates the flow controller 20 outside of the dewar 11). Gas supply pressure applies a load on the diaphragm 22, which in turn causes the diaphragm 22 to deflect downward (in the drawing figures) to open the Joule-Thomson valve 12. The wave spring 26 applies a load in the upward direction, which translates to a pressure when distributed across the load plate 24. As the pressure in the gas supply 17 decays (the pressure decrease resulting from gas blowdown), the load applied by the pressure in the gas supply 17, and the load applied by the wave spring 26, reach equilibrium. As pressure bleeds down further, the load supplied by the wave spring 26 overcomes the load resulting from pressure supplied by the gas supply 17, and the Joule-Thomson valve 12 closes. The force balance is achieved that is given by the equation: P r gs = F r ws' / ΛAlps wherein Pgs is the pressure supplied by the gas supply 17, Fws is the force exerted by the wave spring 26, and Alp is the area of the load plate 24.
Therefore, the wave spring 26 is selected to provide the closing force required to close the Joule-Thomson valve 12 when cooldown is reached. The wave spring 26 may be varied for the specific design of the pressure controlled flow actuator 10, mission, and configuration, and may be selected to match a particular cooldown profile in order to match temperature as a function of pressure.
Thus, cooling apparatus comprising a pressure activated Joule-Thomson valve flow controller has been disclosed. It is to be understood that the described embodiment is merely illustrative of some of the many specific embodiments which represent applications of the principles of the present invention. Clearly, numerous and other arrangements can be readily devised by those skilled in the art without departing from the scope of the invention.

Claims

CLAIMSWhat is claimed is:
1. A cooling apparatus (10) characterized by: a dewar (11); a Joule-Thompson valve (12) located at one end of the dewar; a heat exchanger (14) disposed within the dewar; a diaphragm actuator (20) disposed outside of and coupled to the dewar at an end distal from the Joule-Thompson valve that comprises a housing (21) that secures a diaphragm (22) in its interior, a load plate (24) disposed adjacent to the diaphragm, and a wave spring (26) disposed between the load plate and the housing; an actuator stem (15) disposed through an opening (25) in the housing that is connected between the load plate and the Joule-Thompson valve; a gas supply (17) is coupled to the housing for coupling a gas into the interior of the housing to pressurize the diaphragm; and a gas line (18) is coupled between the interior of the housing and the heat exchanger.
2. The apparatus (10) of Claim 1 wherein the gas is characterized by argon.
3. The apparatus (10) of Claim 1 wherein the gas is characterized by nitrogen.
4. The apparatus (10) of Claim 1 wherein the gas is characterized by a gas whose temperature is below the Joule-Thompson inversion temperature.
5. A pressure controlled flow actuator (10) for use with a Joule-Thompson cryostat comprising a dewar (11), a Joule-Thompson valve (12) located at one end of the dewar, and a heat exchanger (14) disposed within the dewar, wherein the improvement is characterized by: a diaphragm actuator (20) disposed outside of and coupled to the dewar at an end distal from the Joule-Thompson valve that comprises a housing (21) that secures a diaphragm (22) in its interior, a load plate (24) disposed adjacent to the diaphragm, and a wave spring (26) disposed between the load plate and the housing; an actuator stem (15) disposed through an opening (25) in the housing that is connected between the load plate and the Joule-Thompson valve; a gas supply (17) is coupled to the housing for coupling a gas into the interior of the housing to pressurize the diaphragm; and a gas line (18) is coupled between the interior of the housing and the heat exchanger.
6. The apparatus (10) of Claim 5 wherein the gas is characterized by argon.
7. The apparatus (10) of Claim 5 wherein the gas is characterized by nitrogen.
8. The apparatus (10) of Claim 5 wherein the gas is characterized by a gas whose temperature is below the Joule-Thompson inversion temperature.
9. A pressure controlled flow actuator (10) for use with a system having a valve (12) and a heat exchanger (14), said flow actuator (10) characterized by: a diaphragm actuator (20) that comprises a housing (21) that secures a diaphragm (22) in its interior, a load plate (24) disposed adjacent to the diaphragm, and a wave spring (26) disposed between the load plate and the housing; an actuator stem (15) disposed through an opening (25) in the housing that is connected between the load plate and the valve (12); a gas supply (17) is coupled to the housing for coupling a gas into the interior of the housing to pressurize the diaphragm; and a gas line (18) is coupled between the interior of the housing and the heat exchanger (14).
10. The apparatus (10) of Claim 9 wherein the gas is characterized by argon.
11. The apparatus (10) of Claim 9 wherein the gas is characterized by nitrogen.
12. The apparatus (10) of Claim 9 wherein the gas is characterized by a gas whose temperature is below the Joule-Thompson inversion temperature.
PCT/US1998/024990 1997-11-21 1998-11-19 Cooling apparatus employing a pressure actuated joule-thomson cryostat flow controller WO1999027311A1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP98966449A EP0954729B1 (en) 1997-11-21 1998-11-19 Cooling apparatus employing a pressure actuated joule-thomson cryostat flow controller
DK98966449T DK0954729T3 (en) 1997-11-21 1998-11-19 Pressure-triggered flow control refrigerator for a Joule-Thompson cryostat
IL13074598A IL130745A (en) 1997-11-21 1998-11-19 Cooling apparatus employing a pressure actuated joule-thomson cryostat flow controller
DE69810268T DE69810268T2 (en) 1997-11-21 1998-11-19 COOLING UNIT WITH A PRESSURE-CONTROLLED FLOW REGULATOR FOR A JOULE-THOMSON CRYOSTAT

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/975,777 US5974808A (en) 1997-11-21 1997-11-21 Cooling apparatus employing a pressure actuated Joule-Thomson cryostat flow controller
US08/975,777 1997-11-21

Publications (1)

Publication Number Publication Date
WO1999027311A1 true WO1999027311A1 (en) 1999-06-03

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PCT/US1998/024990 WO1999027311A1 (en) 1997-11-21 1998-11-19 Cooling apparatus employing a pressure actuated joule-thomson cryostat flow controller

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US (1) US5974808A (en)
EP (1) EP0954729B1 (en)
KR (1) KR100304228B1 (en)
DE (1) DE69810268T2 (en)
DK (1) DK0954729T3 (en)
IL (1) IL130745A (en)
TR (1) TR199901713T1 (en)
TW (1) TW438962B (en)
WO (1) WO1999027311A1 (en)

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CN103743147A (en) * 2014-01-17 2014-04-23 奥泰医疗系统有限责任公司 Superconducting MRI low temperature refrigeration system

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US6374619B1 (en) * 1999-11-18 2002-04-23 Raytheon Company Adiabatic micro-cryostat system and method of making same
US6604366B1 (en) * 2002-09-19 2003-08-12 Raytheon Company Solid cryogen cooling system for focal plane arrays
EP2758728A4 (en) 2011-07-22 2015-02-18 Lockheed Corp Idca for fast cooldown and extended operating time
WO2013043883A1 (en) 2011-09-20 2013-03-28 Lockheed Martin Corporation Extended travel flexure bearing and micro check valve
AT512799B1 (en) * 2012-04-19 2017-12-15 Wild Johannes Cooling device for drinks
US9765995B2 (en) 2012-06-27 2017-09-19 Raytheon Company Cryocoolers with electronic cryostat flow controllers and related system and method
US9207540B1 (en) 2014-05-30 2015-12-08 Lockheed Martin Corporation Integrating functional and fluidic circuits in joule-thomson microcoolers
US9999885B1 (en) 2014-05-30 2018-06-19 Lockheed Martin Corporation Integrated functional and fluidic circuits in Joule-Thompson microcoolers
US9813644B1 (en) 2014-06-19 2017-11-07 Lockheed Martin Corporation Nano-antenna array infrared imager
CN106768378A (en) * 2016-11-22 2017-05-31 昆明物理研究所 The infrared detector minitype Dewar of real-time detection vacuum
CN109976415A (en) * 2017-12-27 2019-07-05 中国科学院长春光学精密机械与物理研究所 A kind of temperature range control system of infrared optical system

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US1648337A (en) * 1926-06-01 1927-11-08 Charles V Ewan Gas-pressure regulator
CH288875A (en) * 1949-04-11 1953-02-15 Bernhard Holm Carl Device with a diaphragm valve to regulate the flow of liquid.
DE2509384A1 (en) * 1974-03-15 1975-09-25 Tecnomeccanica S I T Precisa S Diaphragm valve for regulating gas pressure - attached to household burner, and has three way changeover cock
US4609003A (en) * 1985-01-03 1986-09-02 Zwick Energy Research Organization, Inc. Method and apparatus for generation of a pneumatic feedback trigger signal
US5230359A (en) * 1992-06-15 1993-07-27 Veriflo Corporation Supply pressure compensated fluid pressure regulator and method
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Publication number Priority date Publication date Assignee Title
CN103743147A (en) * 2014-01-17 2014-04-23 奥泰医疗系统有限责任公司 Superconducting MRI low temperature refrigeration system

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Publication number Publication date
KR20000070305A (en) 2000-11-25
IL130745A (en) 2003-03-12
EP0954729A1 (en) 1999-11-10
DE69810268D1 (en) 2003-01-30
EP0954729B1 (en) 2002-12-18
TW438962B (en) 2001-06-07
IL130745A0 (en) 2000-06-01
US5974808A (en) 1999-11-02
DK0954729T3 (en) 2003-01-27
KR100304228B1 (en) 2001-09-24
DE69810268T2 (en) 2003-07-24
TR199901713T1 (en) 2000-02-21

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