WO1999004481A1

WO1999004481A1 - Exciting unit, linear or planar motor using the unit, stage device using the motor, and aligner using the device

Info

Publication number: WO1999004481A1
Application number: PCT/JP1998/002761
Authority: WO
Inventors: Keiichi Tanaka
Original assignee: Nikon Corporation
Priority date: 1997-07-18
Filing date: 1998-06-22
Publication date: 1999-01-28
Also published as: AU8037098A; JP3829335B2

Abstract

A planar motor two-dimensionally movable in a plane which can generate strong thrust, can move a mover in a two-dimensional plane while the motor gives buoyancy to the mover, and can control the position and attitude of the mover in six degrees of freedom. The planar motor is provided with a mover (4) having a magnetic pole unit (14) in which a plurality of permanent magnets (50N and 50S) are arranged in matrix in an X-Y plane, with their magnetic poles being inverted alternately; an iron core having four arm sections (20-26) forming a cross in the X-Y direction as a whole and five projecting teeth (28-36) formed in the base-side section of the core where the arm sections (20-26) cross and in the front end sections of the arm sections (20-26) and disposed so that the teeth (28-36) can be faced to the magnets (50N and 50S) of the unit (14); and an exciting unit (6) having four armature coils (38-44) which are respectively wound around the arm sections (20-26).

Description

Description Excitation unit, linear or planar motor using the same, stage apparatus using the same, and exposure apparatus using the same

The present invention relates to a linear motor that can move linearly on a plane or a planar motor that can move two-dimensionally, a stage device using the same, and an exposure device using the same. Background art

Conventionally, in order to move a control target on a straight line or a plane, or to position it at a target position, a device having a rotary motor and a conversion mechanism for converting rotary motion into linear motion has been frequently used. On the other hand, in recent years, the development of linear motors that directly attach a controlled object to a motor and perform linear motion has been progressing. Since linear motors have no conversion mechanism and have few components, they have excellent features in terms of reliability and accuracy. A planar motor that can move two-dimensionally using two linear motors is considered to be promising in the future from the viewpoint of reducing the weight of the movable part and simplifying the structure.

Prior art disclosing structures moving on the X-Y plane include, for example, those disclosed in Japanese Patent Application Laid-Open No. 62-110413 and U.S. Pat. No. 4,742,286. No. 5,867,597, US Pat. No. 4,867,597 and US Pat. There is an electromagnetic alignment device disclosed in US Pat. No. 4,835,378 and US Pat. No. 4,535,275. There is a disclosed two-dimensional drive. In these, the mover floats on an air bearing or the like and moves on the XY plane. Further, as a structure in which the mover is magnetically levitated and moves on the XY plane, a structure disclosed in Japanese Patent Application Laid-Open No. 2-359709 and U.S. Pat. No. 4,952,858 is disclosed. There is a stage device disclosed in Japanese Unexamined Patent Publication No. 5-57550 ₍ a linear motor described above is a two-axis linear motor on a moving plane). As an example of a separately connected soy motor type, there is one disclosed in Japanese Patent Publication No. 60-22583.

On the other hand, a flat-type pulse motor that can move in a plane with one drive unit without separating each axial drive part of the mover that moves in a plane is also being studied. For example, Japanese Patent Publication No. 51-492833 discloses a projection having a stator and an armature coil in which the N and S poles of a permanent magnet are arranged densely or at regular intervals. There is disclosed a planar motor including a mover having a plurality of teeth.

These planar motors are mainly applied to stage devices that move two-dimensionally in the XY plane, and are used to place a predetermined object on the mover and move in the XY plane. . A stage device using such a planar motor has a possibility of being applied to a stage system of an exposure device used for manufacturing a semiconductor device or the like (here, an exposure device is a semiconductor device). It is used in the photolithography process when manufacturing liquid crystal display devices or thin-film magnetic heads, etc., and is a device for accurately transferring a circuit pattern to a photosensitive substrate. Hereafter, a projection exposure apparatus that projects and exposes a circuit pattern formed on a reticle onto a semiconductor wafer or a glass plate (hereinafter, referred to as a wafer) via a projection optical system is mainly used. There are various methods, for example, in the case of semiconductor device manufacturing, an image file that can project the entire reticle circuit pattern at once. A projection exposure system that exposes the wafer in a step-and-repetitive manner through a projection optical system that has a ■ There is an and scan type projection exposure apparatus.

By the way, in the case of a planar motor as described above, for example, in a soy motor in which a linear pulse motor is connected in two axes, an armature coil and a permanent magnet are provided on the mover side. Therefore, the mover inevitably becomes heavy, and the axially moving parts of the mover moving in a plane are separated and independent, so that the entire mover becomes large and heavy. Accordingly, there is a problem that it is difficult to move the mover at a high speed because the frequency response characteristic is reduced.

In addition, a flat type pallet that moves in one plane with one drive unit without separating each axial drive part In the case of a motor as well, the armature coil is provided on the mover side, so that it becomes heavy, and there is a limit to moving the mover at high speed.

Further, in any of the above-described planar motors, the mover moves on the stator while being supported by air floating or a support guide mechanism. Therefore, there is also a problem that a complicated mechanism for lifting or supporting is required.

The above problems directly affect the stage device that requires the mover to move to the target position at high speed and also requires ultra-precise positioning, or the exposure device that uses it. There is no exposure apparatus that uses a mold motor as a stage device. However, in the future, higher integration of semiconductor devices or liquid crystal display devices manufactured by the exposure apparatus will be essential, and the exposure light used in the exposure apparatus will have shorter wavelength light (including charged particle beams and X-rays). However, these light irradiation paths need to be kept in a vacuum or He atmosphere. Therefore, a vacuum or He atmosphere must also be provided around the stage device on which the wafer is mounted in the exposure apparatus, and the conventional static pressure gas bearings used to drive the stage device cannot be used. <There is a reason to become. As described above, although the necessity of using a magnetically driven planar motor for the stage device of the exposure apparatus is recognized, there is a problem that the planar motor cannot be actually employed due to the various problems described above.

SUMMARY OF THE INVENTION An object of the present invention is to provide a linear or flat motor capable of obtaining a high thrust, having a light weight and capable of moving at a high speed.

Another object of the present invention is to provide a planar motor capable of moving a two-dimensional plane while giving a floating force to the mover.

Further, an object of the present invention is to provide a planar motor capable of controlling the position and posture of the mover in three directions of X, YZ and the rotational directions of those axes, for a total of six degrees of freedom.

Further, an object of the present invention is to provide a stage device using a planar motor capable of obtaining a high thrust, having a light weight and capable of moving at a high speed, and an exposure apparatus using the same.

Another object of the present invention is to move a two-dimensional plane while giving a floating force to the mover. It is an object of the present invention to provide a stage device using a flat-type motor and an exposure apparatus using the same.

Further, an object of the present invention is to provide a stage device using a planar motor capable of controlling the position and orientation of the mover in three directions of X, Y, and および and a total of six degrees of freedom in the directions of rotation of those axes, An object of the present invention is to provide an exposure apparatus using the same. Disclosure of the invention

The above-mentioned object is to form a pair with a magnetic pole unit having a plurality of permanent magnets arranged with the magnetic poles being alternately reversed, and to be used in a linear motor, and to form two substantially linearly formed arms. A magnetic member having three protruding teeth formed at a distal end of each arm and a base end to which each arm is connected so as to face a plurality of permanent magnets of the magnetic pole unit; This is achieved by an excitation unit characterized by having two armature coils wound around each of the coils.

Further, the above-mentioned object is to provide a linear motor having a plurality of permanent magnets arranged alternately with their magnetic poles reversed in a linear motor driven linearly, and the above-mentioned excitation unit. Achieved by a mold motor. The plurality of permanent magnets of the magnetic pole unit have a width of 1 in the linear direction, and the centers of the permanent magnets are linearly spaced apart by a distance of 21. It is characterized in that the two protruding teeth of the portion are displaced from the protruding tooth of the base end by a distance of 1 土 2 relative to the linear direction.

Further, the above-mentioned object is used in a plane type motor in combination with a magnetic pole unit having a plurality of permanent magnets arranged on the X-Υ plane by alternately reversing the directions of the magnetic poles. Four arms, each of which has a substantially cross shape in the direction, are formed at the distal end of each arm and the base end where each arm is connected so as to face the plurality of permanent magnets of the pole unit. The present invention is attained by an excitation unit having a magnetic member having five protruding teeth and four armature coils wound around each arm. Further, the object is to provide a magnetic field unit having a plurality of permanent magnets arranged on a plane by alternately reversing the directions of magnetic poles in a planar motor driven by a plane drive, and the excitation unit described above. _C achieved by a planar motor characterized by comprising The plurality of permanent magnets of the magnetic pole unit have a width of 1 in the X and Y directions in the XY plane, and the centers of the permanent magnets are separated by a distance of 21 in the X and Y directions, respectively. The two protruding teeth of the two arms extending in the X direction of the excitation unit are displaced relative to the protruding teeth of the base end by 1/2 of the soil in the X direction. The two protruding teeth of the two arms extending in the direction are characterized by being displaced from the protruding teeth of the base end by 1/2 of the soil relative to the Y direction.

In such a configuration, by supplying a predetermined current to each armature coil of the excitation unit, a predetermined polarity can be given to each tooth, and the permanent magnet of the magnetic pole unit facing each tooth can be provided. A magnetic attraction or a magnetic repulsion with the magnet can generate a thrust or a levitation force on the magnetic pole unit.

Further, in the linear motor according to the present invention, the permanent magnet whose magnetic axis is oriented in the direction of the magnetic pole of the permanent magnet is embedded between the plurality of permanent magnets in which the magnetic poles of the magnetic pole unit are reversed. Features. Further, in the planar motor of the present invention, between the plurality of permanent magnets spaced apart in the X direction of the magnetic pole unit, permanent magnets whose magnetic axes are oriented in the X direction are embedded, and a plurality of permanent magnets spaced in the Y direction are embedded. The permanent magnets whose magnetic axes are oriented in the Y direction are embedded between the permanent magnets, and are surrounded by permanent magnets whose magnetic axes are oriented in the X direction and permanent magnets whose magnetic axes are oriented in the Y direction. A conductor and a non-magnetic member are embedded in the region. With this configuration, the magnetic flux density due to the permanent magnet of the magnetic pole unit can be increased, so that the magnetic flux contributing to the thrust or the levitation force can be used with high efficiency.

According to a configuration in which a conductor and a non-magnetic member are embedded in a region surrounded by a permanent magnet whose magnetic axis is oriented in the X direction and a permanent magnet whose magnetic axis is oriented in the Y direction. When a magnetic flux passes through a non-magnetic member, an eddy current is generated in the member, and the eddy current generates a magnetic flux in a direction to cancel the magnetic flux. That is, it is possible to efficiently form a magnetic flux loop by reducing the leakage of magnetic flux between the magnetic pole unit and the excitation unit.

Further, in the linear or planar motor of the present invention, a plurality of excitation units are fixed at predetermined positions to form a stator, and a magnetic pole unit is movable with respect to the stator. It is characterized by being used. In the linear or planar motor according to the present invention, each excitation unit of the stator is disposed below the mover with the teeth facing upward, and the mover is configured with the plurality of permanent magnets facing downward. It is characterized by being arranged to face the protruding teeth. This makes it possible to obtain a small, lightweight, planar mover, and to drive the mover with less power. Here, in the case of the planar motor of the present invention, each excitation unit of the stator is disposed below the mover with five protruding teeth facing upward, and the mover is configured such that a plurality of permanent magnets face downward and protrude. You may make it arrange | position so that it may oppose. A pair of at least two excitation units arranged at a distance of 1 relative to each other in the X and Y directions is provided, and a predetermined current flowing through the four armature coils of each excitation unit is switched. Thus, a thrust for relatively moving the magnetic pole unit in a predetermined direction in the XY plane is generated, or a magnetic repulsive force for magnetically levitating in the Z direction is generated. As described above, by changing the position phases of at least two excitation units by a predetermined amount (distance 1), it is possible to improve the thrust and reduce the thrust unevenness.

Further, in the flat motor according to the present invention, the stator has a drive unit configured by combining at least two of the sets, and the drive unit causes the mover to move in a predetermined direction in the XY plane. It is characterized by generating a thrust to move and a magnetic repulsion to magnetically levitate in the Z direction. With such a drive unit, it becomes possible to generate a thrust for moving in the XY plane and at the same time to relatively float the magnetic pole unit.

On the other hand, the five teeth of the stator are arranged above the mover with the downward facing, and the mover is arranged so that a plurality of permanent magnets face upward with the permanent teeth, and the four electric motors of the stator are arranged. Even in a non-excited state in which no current is supplied to the child coil, the movable member may be floated by magnetic attraction between the plurality of permanent magnets of the mover and the five teeth of the stator. In this way, the drive of the mover can be controlled with less power, and the mover can be easily and accurately moved.

Further, the stator has at least three drive units distributed in a plane, and the three drive units rotate in the X, Y, Ζ axis directions and around each axis with respect to the stator. The position and orientation of the mover are controlled with 6 degrees of freedom. In this way, for example, when a magnetic pole unit is used as a stage, the stage can be displaced in the X, Υ, and Ζ axis directions and rotated around those axes. Position and attitude can be controlled with 6 degrees of freedom.

Further, in the excitation unit of the present invention, the teeth at the tips of the protruding teeth are formed in a sharp shape. By making the tip of the tip of these teeth into a tip shape, it is possible to obtain a thrust characteristic that changes sinusoidally in a non-excited state, and the tip of a plurality of excitation units in the drive unit is given a tip. By adopting a 銳 shape, the thrust can be smoothed.

Further, the object is to provide a stage device having a stage on which a substrate is mounted and a drive system for driving the stage, wherein the drive system controls the position of the stage in the X and Υ axis directions. The magnetic pole units for the linear motor are arranged in the X and Υ directions, and the excitation unit for the linear motor is arranged in the X and Υ directions as a drive system so as to face the magnetic pole unit. This is achieved by a stage device characterized in that It also has a stage on which the substrate is placed, and a drive system for driving the stage. The drive system allows the stage position and orientation with six degrees of freedom in the X, 丫, and Ζ axis directions and rotation around each axis. A stage device for controlling a stage, wherein a movable element of any of the above-mentioned planar motors is used as a stage, and a stator of any of the above-mentioned planar motors is used as a drive system. This is achieved by the device. Further, the above object is achieved by the above stage device of the present invention, further comprising a cooling mechanism for cooling the excitation unit.

Further, the above object is achieved by an exposure apparatus for transferring an image of a pattern onto a substrate, the exposure apparatus having the above-mentioned stage apparatus as a stage apparatus for mounting and moving the substrate. Further, the exposure apparatus of the present invention includes a column that supports a projection optical system that projects a pattern image on a substrate via a vibration isolation mechanism, and a fixed frame that supports a drive system of the stage device. It is characterized in that the force does not reach the projection optical system.

The above object is also achieved by forming the excitation unit in a substantially linear shape in the method of assembling the excitation unit. A magnetic body portion having two arms and three protruding teeth formed at a distal end of each arm and a base end to which each arm is connected so as to face a plurality of permanent magnets of the magnetic pole unit. This is achieved by a method of assembling an excitation unit, which comprises assembling a material and two armature coils wound around respective arms.

The above object is also achieved by assembling the excitation unit by forming four arms each having a substantially cross shape in the X-Y direction as a whole, and forming a tip end of each arm and a base end to which each arm is connected. This is achieved by a method of assembling an excitation unit, which comprises assembling a magnetic member having five protruded teeth and four armature coils wound around each arm.

Further, the object is to provide a method of assembling a linear motor, in which two arms formed in a substantially straight line and a front end of each arm and each arm are opposed to a plurality of permanent magnets of a magnetic pole unit. A magnetic member having three protruding teeth formed at the base end where the parts are connected, and an excitation unit assembling two armature coils wound around each arm, and alternately magnetic poles This is achieved by a method of assembling a linear motor, which comprises assembling a magnetic pole unit having a plurality of permanent magnets arranged in a reversed direction.

Further, the object is to provide a method of assembling a planar motor, comprising: a magnetic pole unit having a plurality of permanent magnets arranged on an XY plane by alternately reversing the directions of magnetic poles; Four cross-shaped arms and five protruding teeth formed at the distal end of each arm and at the base end where each arm is connected so as to face the multiple permanent magnets of the pole unit And an excitation unit having four armature coils wound around each of the arm portions, and assembling the same.

Further, the above object has a stage on which a substrate is placed, and a drive system for driving the stage, and the drive system controls the stage in six degrees of freedom of rotation in X, 丫, and Z axis directions and around each axis. In a method of assembling a stage device for controlling the position and orientation of a stage, the movable element of the planar motor of the present invention is assembled as a stage, and the stator of the planar motor of the present invention is assembled as a drive system. This is achieved by a method of assembling the stage device. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a perspective view showing a schematic structure of a planar motor according to a first embodiment of the present invention.

FIG. 2 is a diagram showing a schematic structure of an excitation unit of the flat motor according to the first embodiment of the present invention.

FIG. 3 is a plan view showing a schematic structure of a magnetic pole unit of the flat motor according to the first embodiment of the present invention.

FIG. 4 is a cross-sectional view of a plane type module cut along line AA in FIG. 3 according to the first embodiment of the present invention.

FIG. 5 is a perspective view for explaining a positional relationship between five protruding teeth of the excitation unit 6 facing the magnetic pole unit 14 in the first embodiment of the present invention.

FIG. 6 is a view for explaining a moving operation of the mover in the planar motor according to the first embodiment of the present invention.

FIG. 7 is a diagram illustrating a moving operation of the mover in the planar motor according to the first embodiment of the present invention.

FIG. 8 is a view for explaining the moving operation of the mover in the planar motor according to the first embodiment of the present invention.

FIG. 9 is a view for explaining the moving operation of the mover in the planar motor according to the first embodiment of the present invention.

FIG. 10 is a view for explaining the moving operation of the mover in the planar motor according to the first embodiment of the present invention.

FIG. 11 is a view for explaining the moving operation of the mover in the planar motor according to the first embodiment of the present invention.

FIG. 12 is a view for explaining the moving operation of the mover in the planar motor according to the first embodiment of the present invention.

FIG. 13 is a view for explaining the moving operation of the mover in the planar motor according to the first embodiment of the present invention.

FIG. 14 is a view showing the movement of the mover in the planar motor according to the first embodiment of the present invention. It is a figure explaining a dynamic operation.

FIG. 15 is a diagram showing an example of arrangement of exemplary units in the planar motor according to the first embodiment of the present invention.

FIG. 16 is a diagram illustrating a floating operation of the mover in the planar motor according to the first embodiment of the present invention.

FIG. 17 is a view for explaining the floating operation of the mover in the planar motor according to the first embodiment of the present invention.

FIG. 18 is a diagram illustrating the floating operation of the mover in the planar motor according to the first embodiment of the present invention.

FIG. 19 is a view for explaining the floating operation of the mover in the planar motor according to the first embodiment of the present invention.

FIG. 20 is a diagram illustrating a floating operation of the mover in the planar motor according to the first embodiment of the present invention.

FIG. 21 is a diagram illustrating an operation of controlling the mover with six degrees of freedom in the planar motor according to the first embodiment of the present invention.

FIG. 22 is a perspective view showing a schematic structure of a planar motor according to the second embodiment of the present invention.

FIG. 23 is a partial cross-sectional view of a planar motor according to the second embodiment of the present invention. FIG. 24 is a perspective view for explaining a positional relationship between five protruding teeth of the excitation unit 6 facing the magnetic pole unit 14 in the second embodiment of the present invention.

FIG. 25 is a view for explaining the moving operation of the mover in the planar motor according to the second embodiment of the present invention.

FIG. 26 is a view for explaining the moving operation of the mover in the planar motor according to the second embodiment of the present invention.

FIG. 27 is a view for explaining the moving operation of the mover in the planar motor according to the second embodiment of the present invention.

FIG. 28 is a diagram showing the structure of the excitation unit 6 in the planar motor according to the third embodiment of the present invention.

FIG. 29 shows an excitation unit in a planar motor according to the third embodiment of the present invention. FIG. 9 is a diagram for explaining the operation of the step 6.

FIG. 30 is a diagram for explaining the operation of the excitation unit 6 in the planar motor according to the third embodiment of the present invention.

FIG. 31 is a diagram showing a modification of the excitation unit 6 in the third embodiment of the present invention.

FIG. 32 is a diagram illustrating a schematic structure of an exposure apparatus according to a fourth embodiment of the present invention.

FIG. 33 is a diagram illustrating a schematic structure of a stage device according to a fourth embodiment of the present invention.

FIG. 34 is a diagram illustrating a schematic structure of a stage device according to a fourth embodiment of the present invention. BEST MODE FOR CARRYING OUT THE INVENTION

A planar motor according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 21. In the planar motor according to the present embodiment, a plurality of excitation units are fixed at predetermined positions to form a stator, and the magnetic pole unit is used as a movable element movable with respect to the stator. Each excitation unit of the stator is arranged below the mover with five teeth facing upward, and the mover is arranged with a plurality of permanent magnets facing downward to face the teeth. First, a schematic configuration of the planar motor according to the present embodiment will be described with reference to FIG.

FIG. 1 is a perspective view of a flat type module according to the present embodiment. As shown in FIG. 1, the configuration of the planar module according to the present embodiment is roughly divided into a stator unit 2 and a mover 4. In the stator unit 2, a plurality of excitation units 6 are fixed on a flat base 8 extending in the XY plane, and a planar sliding member 10 is provided on the upper surface thereof. On the other hand, the mover 4 has a magnetic pole unit 14 composed of a plurality of permanent magnets arranged in a matrix on an XY plane, and is fixed to the upper surface of the magnetic pole unit 14 to be a non-magnetic and non-conductive material. And a substrate 12. As will be described in detail later, by driving a plurality of predetermined excitation units 6 among the plurality of excitation units 6 of the stator unit 2, the movable element 4 on the sliding member 10 is Floating in the Z direction and sliding member 10 above In addition to being able to move two-dimensionally in the X-Y plane, the substrate 12 can also be leveled.

The structure of the excitation unit 6 of the stator unit 2 will be described with reference to FIG. FIG. 2A is a plan view of the excitation unit 6 as viewed from the + Z direction to the 1Z direction in the coordinate system shown in FIG. Fig. 2 (b) is the side view, and Fig. 2 (c) is the front view. As shown in FIG. 2, the excitation unit 6 in the present embodiment has four arms 20, 22, 24, 26, each of which has a substantially cross shape in the X-Y direction as a whole. Five protruding teeth 28, 30, 30 protruding in the + Z direction from the base end (the center of the cross) to which the tip of 20 to 26 and each arm 20 to 26 are connected. It has a magnetic member (for example, iron) composed of 32, 34, and 36. The flat portions at the tips of the five teeth 28 to 36 have a square shape with a side length of Ί, and the heights of the flat portions are adjusted so that they are all in the same plane. Armature coils 38, 40, 42, 44 are respectively wound around the arms 20-26 of the magnetic member. Although not shown, each armature coil 38 to 44 is connected to a current source, and each armature coil 38 of each excitation unit 6 is controlled by a command sent from the control system (not shown) to the current source. A predetermined current can be supplied to ~ 44.

Next, a schematic structure of the magnetic pole unit 14 of the stator 4 of the flat motor according to the present embodiment will be described with reference to FIG. FIG. 3 is a plan view of the magnetic pole unit 14 seen from one direction toward the + Z direction in the coordinate system shown in FIG. This plan view shows a surface of the magnetic pole unit 14 facing each tooth of the excitation unit 6. As shown in FIG. 3, the magnetic pole unit 14 according to the present embodiment has a cubic permanent magnet 50 N, 50 S whose magnetic poles are reversed with respect to each other to form a matrix on the XY plane. Multiple are arranged in a shape. The permanent magnet 5 ON has an N pole on the side facing each tooth of the excitation unit 6, and the permanent magnet 5 OS has an S pole on the side facing each tooth of the excitation unit 6. The plurality of permanent magnets 50 N, 50 S of the magnetic pole unit 14 have a square shape having a width of 1 in the X and Y directions in the XY plane, and are adjacent to each other. The centers of 0 S are arranged at a distance of 21 in the X and Y directions, respectively.

A cubic permanent magnet 54 whose magnetic axis is oriented in the X direction is embedded between the plurality of permanent magnets 50 N and 5 OS that are separated in the X direction. The magnetic poles of the stones 50N and 50S are arranged so that the magnetic poles face each other. On the other hand, between the permanent magnets 50 N and 5 OS spaced apart in the Y direction, cubic permanent magnets 56 whose magnetic axes are oriented in the Y direction are embedded, respectively, and the magnetic poles are similar to those in the X direction. Are arranged such that the magnetic poles of the permanent magnets 50N and 50S face the same poles. A cubic region surrounded by a permanent magnet 54 whose magnetic axis is oriented in the X direction and a permanent magnet 56 whose magnetic axis is oriented in the Y direction is embedded with a conductive and non-magnetic member 60. Have been. As the member 60, copper or aluminum can be used. As described above, in the magnetic pole unit 14 of the mover 4 according to the present embodiment, the magnetic axis is oriented in the X or Y direction between the permanent magnets 50 N and 5 OS arranged in a matrix at a distance. By arranging the permanent magnets 54, 56 as described above, the magnetic flux density of the magnetic flux generated by the permanent magnets 50N, 50S of the magnetic pole unit 14 can be increased. As will be described in detail later, the thrust given to the mover 4 or the magnetic flux given to the levitation force can be used with high efficiency. Also, by embedding a member 60 which is a conductor and a non-magnetic material in a region surrounded by the permanent magnets 54 and 56, the magnetic flux passing through the member 60 is canceled by the magnetic flux of the generated eddy current. Therefore, the leakage of magnetic flux between the magnetic pole unit 14 and the excitation unit 6 can be reduced, and a magnetic flux loop can be formed efficiently.

Next, the positional relationship of the teeth of the excitation unit 6 with respect to the magnetic pole unit 14 of the planar motor according to the present embodiment will be described with reference to FIGS. FIG. 4 is a cross-sectional view of the planar module according to the present embodiment, taken along a line AA in FIG. 3 showing the magnetic pole unit 14. FIG. 5 is a perspective view for explaining the positional relationship between the five protruding teeth of the excitation unit 6 facing the magnetic pole unit 14. As shown in FIG. 4, a plurality of permanent magnets 50 N, 50 S of a magnetic pole unit 14 each having a width 1 and a lateral permanent magnet 54 whose magnetic axis is oriented in the X or Y direction are opposed to each other. The two protruding teeth 28, 32 at the end of each of the excitation units 6 extending in the X direction are relatively positioned in the X direction relative to the protruding tooth 36 at the base end. — Offset by 1/2 and +1/2.

Although not shown, the two protruding teeth 3 0 and 3 4 of the two arms 2 2 and 2 6 extending in the Y direction are also 1/1 / relative to the protruding teeth 36 of the base end in the Y direction. 2, + 1/2 They are staggered. Therefore, as shown in FIG. 5, when the position of the tooth portion T5 of the protruding tooth 36 at the base end coincides with and faces the permanent magnet 50N (N pole) of the magnetic pole unit 14, The teeth T 1, T 2, Τ 3, Τ 4 of the projecting teeth 28 to 34 of the four arms are respectively connected to the permanent magnets 50 S (S pole) of the magnetic pole unit 14 facing each other. It overlaps in the direction or Y direction by 1/2. In FIGS. 5 and subsequent drawings, the direction of the magnetic axes of the permanent magnets 54 and 56 of the magnetic pole unit 14 is partially shown by arrows or omitted.

The above description is the positional relationship of the teeth of one excitation unit 6 with respect to the magnetic pole unit 14. The arrangement of the magnetic pole units 14 between the magnetic units 6 when a plurality of magnetic units 6 are used will be described later.Before that, in this embodiment, one magnetic unit 6 is used. The moving operation of the mover in the planar motor according to the embodiment will be described with reference to FIGS.

First, a case where the magnetic pole unit 14 is moved in the -X direction by one excitation unit 6 will be described with reference to FIGS. Here, a case where the mover 4 is moved in the X direction is described as an example, but the mover 4 can be moved in the Y direction by the same operation. 6A to 8A are plan views showing the positions of the teeth of the excitation unit 6 with respect to the magnetic pole unit 14 of the mover 4, and the tooth portions T1 to T of the teeth 28-36 are shown. The position of 5 is shown. (B) in FIGS. 6 to 8 shows a cross section in the X direction including the tooth portion T 5 of the excitation unit 6. (C) shows a cross section in the Y direction including the tooth portion T5 of the excitation unit 6.

In FIG. 6, it is assumed that the tooth portion T5 of the protruding tooth 36 at the base end of the excitation unit 6 faces the permanent magnet 50N (N pole) of the magnetic pole unit 14 as an initial state. . This state is assumed to be X = 0, and as shown in the figure, the four armature coils 38 to 44 are energized so that the tooth T1 is N-pole and the teeth T2 to T4 are excited to the S-pole. A predetermined current is supplied. _C By supplying this current, the tooth portion T5 is excited to a strong N pole. As a result, as shown in FIG. 6 (b), at the tooth portion T1, a thrust is generated to move the magnetic pole unit 14 in the X direction (left direction in the figure) by magnetic attraction. in teeth T 3 magnetic repulsion by the magnetic pole Yuni' Bok 1 4 further _c thrust tending to move to an X direction it is generated, once movement is started, teeth T 5 also magnetic repulsion By one in the X direction Generates thrust. On the other hand, as shown in Fig. 6 (c), only magnetic repulsion occurs in the Y direction, and the resultant forces are balanced and no thrust is generated in the Y direction. Also, as is evident from Fig. 6 (a), when the magnetic pole unit 14 starts to move, the teeth T2 and T4 in the Y direction also move the magnetic pole unit 14 in the X direction by magnetic repulsion. It can be seen that thrust to move is generated.

Next, a state in which the mover 4 has moved from the position (X = 0) shown in FIG. 6 to the position X = − 1 will be described with reference to FIG. As shown in FIG. 7, when the mover 4 moves to the position of X = — 1, the current flowing through the armature coil 38 of the excitation unit 14 is reversed, and the tooth portion T 1 becomes the S pole. To excite. As a result, as shown in FIG. 7 (b), at the tooth portion T3, the magnetic pole unit 14 is displaced by the magnetic attraction force to the permanent magnet 50N and the magnetic repulsive force to the permanent magnet 50S. A thrust to move the magnetic pole unit 14 in the -X direction is generated at the tooth portion T5 by a magnetic repulsive force. Further, once the movement is started, the tooth portion T1 also generates a thrust due to the magnetic repulsive force on the permanent magnet 50S. On the other hand, as shown in Fig. 7 (c), only magnetic repulsion occurs in the Y direction, and the resultant forces are balanced and no thrust is generated in the Y direction. Further, as is apparent from FIG. 7 (a), the teeth T2 and T4 in the Y direction also generate magnetic attraction repulsive force to generate thrust. Next, a state in which the mover 4 has moved from the position (Χ = —Ί / 2) shown in FIG. 7 to the position Χ = —1 will be described with reference to FIG. At the position of Χ = —I, the direction of the current flowing through each armature coil 38 to 44 does not change. As shown in FIG. 8, when the mover 4 has moved to the position of Χ = −1, the magnetic poles of the teeth Τ1, Τ2, Τ4, Τ5 due to the magnetic repulsive force against the permanent magnet 50S are formed. A thrust is generated to move the unit 14 in the X direction. At the tooth portion Τ3, the magnetic pole unit 14 is moved in the −X direction by magnetic attraction to the permanent magnet 50Ν. Is generated. On the other hand, as shown in FIG. 8 (c), at the position of Χ = −1, no magnetic attraction / repulsion occurs because no permanent magnet is arranged in the Υ direction of the pole unit 14.

The movement in the X direction from Χ = 0 to Χ = — 1 has been described above. However, even when moving in the negative direction from Χ = — 1 or in the positive direction from Χ = 0, Similarly, by changing the current flowing through each armature coil 38 to 44, Thus, a thrust for moving the magnetic pole unit 14 in a predetermined direction relative to the excitation unit 6 can be generated.

Next, the movement operation of the magnetic pole unit 14 in the present embodiment will be described in more detail with reference to FIG. 9 to FIG. FIG. 9 (a) shows an arrangement relationship between the magnetic pole unit 14 and the excitation unit 6 at the position of X = 0, which is the same as that shown in FIG. 6 (a) and the like. That is, as an initial state, the tooth portion T5 of the protruding tooth 36 at the base end of the excitation unit 6 faces the permanent magnet 5ON (N pole) of the magnetic pole unit 14. Fig. 9 (b) specifies the direction of the current flowing through the armature coils 38 to 44 of the excitation unit 6.The-mark in the drawing indicates the direction from the page to the front of the page, and the X indicates the direction from the front of the page. Indicates the direction toward the paper. When the direction of the current flowing through each of the armature coils 38 to 44 shown in FIG. 9 (b) is the positive direction, when the magnetic pole unit 14 relatively moves in the positive direction from X = 0 to X = 41. FIG. 10 shows the current application schedule of the current flowing through the armature coils 38 to 44 of the excitation unit 6 and the change in the polarity excited in each tooth. Here, the currents flowing through the armature coils 38, 40, 42, and 44 are the currents C1, C2, C3, and C4, respectively, as shown in FIG. 9B. In Fig. 10 (a), the horizontal axis represents the positive moving distance from χ = 0 to X = 41, the vertical axis of the upper graph represents the current C1 flowing through the armature coil 38, and the lower graph represents the current. The vertical axis indicates the polarity excited in the tooth portion T 1 of the tooth 28. Similarly, Figs. 10 (b) to (d) also show the currents C2 to C4 flowing through the armature coils 40 to 44 at the positive travel distance from X20 to X = 41, and the protrusions 30 to The polarity excited in the 34 tooth portions T2 to T4 is shown. In addition, Fig. 10 (e) shows the result of energizing each armature coil 38-44 as shown in Figs. 10 (a)-(d), which is generated at the tooth T5 of the tooth 36 at the base end. The change of the magnetic pole is shown.

As shown in FIGS. 10 (a) to 10 (e), by changing the polarity of each of the teeth T1 to D5 with the movement from X = 0 to X2 41, each of the teeth T1 to T5 is changed. 6 to 8 and the magnetic repulsive force or magnetic force similar to that described with reference to FIGS. 6 to 8 between the permanent magnets 50 N and 50 S of the magnetic pole unit 14 facing them. The suction force acts to generate thrust. Fig. 11 shows the thrust generated by each tooth. Fig. 11 (a) to (e) show the thrusts FT1 to FT5 generated at the teeth T1 to D5, from X = 0 to X = 4. Changes up to Ί are shown. FIG. 11 (f) shows the resultant force of the thrusts FΤ1 to FΤ5, that is, the thrust at each moving position with the position shown in FIG. 9 (a) as a base point. In Figs. 11 (a) to 11 (f), the waveform shown by the solid line shows the change in thrust in the non-excited state, and the waveform shown by the broken line is generated by the excited state, that is, by the conduction schedule shown in Fig. 10. Thrust. As can be seen from the broken line in Fig. 11 (f), the thrust generated by the excitation unit 6 when moving from the position shown in Fig. 9 (a) by excitation is Χ = 0, 2Ί, 4Ί. The sine wave changes with almost 21 periods so that it approaches 0 at each position slightly past.

Next, referring to FIGS. 12 to 14, a description will be given of a moving operation in a case where each tooth of the excitation unit is shifted from the position shown in FIG. 9A. Fig. 12 shows the positional relationship between the magnetic pole unit 14 and the excitation unit 6 at the position of X = 0, and the tooth portion T5 of the protruding tooth 36 at the base end of the excitation unit 6 is the initial state. The unit 14 faces the permanent magnet 56 between the permanent magnet 50 N (N pole) in the Y direction and the permanent magnet 50 S in the Y direction. In other words, the initial state is a state in which the excitation unit 6 is relatively moved by 1 in the + Y direction from the state shown in FIG. The direction of the current flowing through the armature coils 38 to 44 of the excitation unit 6 and the sign of the current flowing through each of the armature coils 38 to 44 are the same as those shown in FIG. 4 is relatively moving in the positive direction from X = 0 to X = 41, the current supply schedule for the current flowing through the armature coils 38 to 44 of the excitation unit 6, and the excitation of each tooth Figure 13 shows the change in polarity. Also in Fig. 13 (a), the horizontal axis indicates the moving distance in the positive direction from X = 0 to X = 41, the vertical axis of the upper graph indicates the current C1 flowing through the armature coil 38, and the lower graph indicates the current C1. The vertical axis of the graph indicates the polarity excited in the tooth portion T1 of the tooth 28. Similarly, Figs. 13 (b) to 13 (d) also show the currents C2 to C4 flowing through the armature coils 40 to 44 at the positive travel distance from X = 0 to X = 41, and the tooth teeth. It shows the polarity excited in the teeth T2 to T4 of 30-34. Fig. 13 (e) shows the excitation of the tooth T5 of the protruding tooth 36 at the base end as a result of energizing each of the armature coils 38 to 44 as shown in Figs. 13 (a) to 13 (d). The change is shown.

As shown in Figs. 13 (a) to (e), the polarity of each tooth T1 to T5 is By changing from 0 to X = 41, the magnetic repulsive force between the permanent magnets 50Ν and 50S of the magnetic pole unit 14 facing each tooth T1 to T5 and the vicinity thereof, or Thrust is generated by magnetic attraction. Fig. 14 shows the thrust generated by each tooth. FIGS. 14 (a) to 14 (e) show changes in the thrusts FT1 to FT5 generated in the tooth portions T1 to T5 from Χ = 0 to Χ = 41. Fig. 14 (f) shows the resultant of the thrusts FT1 to FT5, that is, the thrust generated at each moving point with the position shown in Fig. 12 as a base point. In Figs. 14 (a) to 14 (f), the waveform shown by the solid line shows the change in thrust in the non-excitation state, and the waveform shown by the broken line is generated by the excitation state, that is, the energization schedule shown in Fig. Thrust. As can be seen from the dashed line in Fig. 14 (f), the thrust generated by the excitation unit 6 when moving from the position shown in Fig. 12 changes sinusoidally in approximately 21 cycles, and X = It is almost 0 at 0, 21.41.

As shown in FIGS. 11 (f) and 14 (f), even if the position of the excitation unit 6 with respect to the magnetic pole unit 14 is shifted in the Y direction, the position in the X direction (X = If 0) is the same, the obtained thrust characteristic changes sinusoidally with a period of approximately 21 and approaches 0 or 0 at or near X = 0, 21, 41. Therefore, if at least two excitation units 6 are used and they are arranged by being shifted relative to each other by one in the X direction, thrust unevenness can be reduced. This is equivalent to combining the waveform of Fig. 11 (f) with the waveform of Fig. 14 (f) by shifting the phase by 1 relative to the waveform of Fig. 11 (f), and the synthesized waveform is flat as is clear from the figure. Therefore, it is possible to eliminate the position where the thrust approaches zero and to reduce the thrust unevenness.

The above is the thrust characteristics in the movement in the X direction, but the thrust characteristics in the movement in the Y direction are all <the same description holds. Therefore, in order to reduce the thrust unevenness in the Y direction, at least two excitation units 6 may be arranged so as to be relatively shifted by one in the Y direction. In other words, to move the mover 2 two-dimensionally in the XY plane by reducing the thrust unevenness, at least two excitation units 6 are used as shown in FIG. The excitation units 6 may be arranged so that the positions of the excitation units 6 are relatively shifted by 1 in the X and Y directions.

Next, the floating operation of the mover in the planar motor according to the present embodiment will be described. This will be described with reference to FIGS.

First, the case where the magnetic pole unit 14 is levitated by one excitation unit 6 will be described with reference to FIGS. 16 to 20. First, the basic operation for floating the mover in the present embodiment will be described with reference to FIG. FIG. 16 (a) shows a cross section in the X direction showing the positions of the teeth T1 to T5 of the teeth 28 to 36 of the excitation unit 6 with respect to the magnetic pole unit 14 of the mover 4. I have. (B) shows a cross section in the Y direction including the tooth portion T5 of the excitation unit 6.

In FIG. 16, it is assumed that the tooth portion T 5 of the protruding tooth 36 at the base end of the excitation unit 6 faces the permanent magnet 50 N (N pole) of the magnetic pole unit 14 as an initial state. . This state is set to X = 0, and a predetermined current is supplied to the four armature coils 38 to 44 so that the teeth T1 to T4 are excited to the S pole as shown in the figure. At this time, the tooth portion Τ 5 is excited to the Ν pole. As a result, as shown in FIGS. 16 (a) and 16 (b), magnetic repulsion is generated against the magnetic pole unit 14 at all the teeth T1 to t5, and the magnetic pole unit 14 is generated. A levitation force is generated to make the levitation in the + Z direction. Due to the levitation force, the magnetic pole unit 14 floats with respect to the excitation unit 6.

However, with only one excitation unit 6 described above, the floating force cannot be maintained at all positions where the mover 4 moves two-dimensionally in the XY plane. For example, if the position of the tooth portion T5 of the excitation unit 6 is as shown in FIG. 12 with the movement of the movable element in the X-Y direction, the movable element 4 is lifted up. You will not be able to get enough buoyancy. That is, the levitation force also changes depending on the relative position between the excitation unit 6 and the magnetic pole unit 14. This point will be described in detail with reference to FIGS. 17 to 20 taking movement in the X direction as an example.

Fig. 17 (a) shows the arrangement relationship between the magnetic pole unit 14 and the excitation unit 6 at the position of X = 0 as shown in Fig. 9 (a), that is, the initial state of the excitation unit 6 It shows a change in the energization schedule and the polarity of each tooth portion when the tooth portion T 5 of the protruding tooth 36 at the base end faces the permanent magnet 5 ON (N pole) of the magnetic pole unit 14. The direction of the current flowing through the armature coils 38 to 44 of the excitation unit 6 is the same as the rule in Fig. 9 (b). In Fig. 17 (a), the horizontal axis represents the moving distance in the positive direction from X = 0 to X = 41, and the vertical axis of the upper graph represents the current C1 flowing through the armature coil 38. The vertical axis of the lower graph shows the polarity excited in the tooth portion T1 of the tooth 28. Similarly, FIGS. 17 (b) to 17 (d) also show the currents C2 to C4 flowing through the armature coils 40 to 44 and the protruding teeth 30 in the forward movement distance from X = 0 to X = 41, respectively. 34 shows the polarity excited to the teeth T2 to T4. Also, Fig. 17 (e) shows the excitation generated in the tooth portion T5 of the protruding tooth 36 at the base end as a result of energizing the armature coils 38-44 as shown in Figs. 17 (a)-(d). Shows the change.

As shown in FIGS. 17 (a) to 17 (e), by changing the polarity of each tooth portion T1 to T5 according to a predetermined schedule from the position X = 0 to Χ = 4Ί, A magnetic repulsive force acts between the teeth # 1 to # 5 and the permanent magnets 50 #, 50S of the magnetic pole unit 14 facing them, and a levitation force is generated. Figure 18 shows the levitation force generated by each tooth. FIGS. 18 (a) to 18 (e) show changes in the levitation forces FT1 to FT5 generated at the tooth portions T1 to T5 from the position X = 0 to X = 41. FIG. 18 (f) shows the resultant force of the levitation forces F 1 to FT5, that is, the levitation force at each moving position with the position shown in FIG. 9 (a) as a base point. In FIGS. 18 (a) to 18 (f), the waveforms shown by the solid lines show changes in the levitation force in the non-excited state. In the non-excited state, only the magnetic attraction force acts, so the levitation force in the Z direction is all negative. The waveform shown by the broken line is the excited state, that is, the levitation force generated by the energization schedule shown in FIG. As can be seen from Fig. 18 (f), the levitation force generated by the excitation unit 6 when moving from the position shown in Fig. 9 (a) is from the position X = 0 to X = 41 in the excited state. The movable element 4 is levitated in the + Z direction in the entire region up to the point.A positive levitation force is generated, and its magnitude changes in a sinusoidal wave with a period of 21 o

Next, the initial state is set at the position where each tooth of the excitation unit is moved relative to the position shown in FIG. 12 by 1 in the + Y direction from the state shown in FIG. 9 in the + Y direction. The floating force in the case will be described.

Also in this example, the direction of the current flowing through the armature coils 38 to 44 of the excitation unit 6 and the sign of the current flowing through each armature coil 38 to 44 are the same as those shown in FIG. When the unit 14 moves relatively in the positive direction from X = 0 to X = 41, the conduction schedule of the current flowing through the armature coils 38 to 44 of the excitation unit 6 Fig. 19 shows the change in the polarity of the yule and the polarity excited by each tooth. Also in Fig. 19 (a), the horizontal axis represents the moving distance in the positive direction from X = 0 to X = 41, and the vertical axis of the upper graph represents the current C1 flowing through the armature coil 38. The vertical axis of the graph indicates the polarity excited in the tooth portion T1 of the tooth 28. Similarly, Figs. 19 (b) to (d) also show the currents C2 to C4 flowing through the armature coils 40 to 44 at the positive movement distance from X = 0 to X = 41, and the protruding teeth 30 to 34, respectively. The polarity excited in the tooth portions T2 to T4 of FIG. In addition, Fig. 19 (e) shows the tooth T5 of the protruding tooth 36 at the base end as a result of energizing each armature coil 38-44 as shown in Figs. 19 (a)-(d). The change in excitation is shown.

As shown in FIGS. 19 (a) to 19 (e), by changing the polarity of each tooth T1 to D5 over X = 0 or X = 41, each tooth T1 to D5 is changed. A magnetic repulsive force acts between the permanent magnets 50N and 50S of the magnetic pole unit 14 facing the magnetic pole unit 14 and a levitation force is generated. Fig. 20 shows the levitation force generated by each tooth. FIGS. 20 (a) to 20 (e) show changes in the levitation forces FT1 to FT5 generated in the tooth portions T1 to T5 from X = 0 to X = 41. FIG. 20 (f) shows the resultant force of the levitation forces F T1 to F T5, that is, the levitation force generated at each moving point with the position shown in FIG. 12 as a base point. In FIGS. 20 (a) to 20 (f), the waveforms shown by the solid lines show changes in the levitation force in the non-excited state. In the unexcited state, only the magnetic attraction acts, so the levitation force in the Z direction is all negative. The waveform shown by the broken line is the excited state, that is, the levitation force generated by the energization schedule shown in FIG. As can be seen from FIG. 20 (f), the levitation force generated in the excitation unit 6 when moving from the position shown in FIG. 12 changes sinusoidally in approximately 21 cycles in the excitation state. In addition, it can be seen that a negative levitation force, that is, a suction force is generated at X = l, 31 and its vicinity.

Thus, as shown in FIGS. 18 (f) and 20 (f), in the excited state, the position of the excitation unit 6 with respect to the pole unit 14 is shifted in the Y direction, and the position in the X direction is shifted. When (X = 0) is the same, the levitation force characteristics obtained from each magnetic pole unit 6 are similar in that they are almost in phase and change sinusoidally with a period of 21. The difference depends on whether the levitation force becomes negative near the position of X = l, 31. Obedience Therefore, if at least two excitation units 6 are used, and they are arranged relatively shifted by 1 in the X direction, the levitation force unevenness can be reduced. This is equivalent to synthesizing the waveform of Fig. 18 (f) with the waveform of Fig. 20 (f) shifted by 1 relative to the waveform of Fig. 18 (f), and the synthesized waveform is flattened as is clear from the figure. Therefore, it is possible to eliminate the position where the floating force becomes negative and to reduce the unevenness of the floating force.

The above is the levitation force characteristics in the movement in the X direction, but the same description holds for the levitation force characteristics in the movement in the Y direction. Therefore, in order to reduce the floating force unevenness in the Y direction, at least two excitation units 6 may be arranged so as to be shifted by one relatively in the Y direction. In other words, in order to move the mover 4 two-dimensionally in the XY plane by reducing the floating force unevenness, two excitation units are used as illustrated in FIG. 15 used for reducing the thrust unevenness described above. It is sufficient to use a set of exciters 6 and arrange a set of excitation units 6 whose mutual positions are relatively shifted by 1 in the X and Y directions, respectively.

Therefore, the set of the excitation unit 6 shown in FIG. 15 is used for the two-dimensional movement of the mover 4 in the XY plane, and the excitation unit also shown in FIG. If a set of magnets 6 is prepared and used for floating the mover 4, that is, at least two sets of the excitation unit 6 are used, and the magnetic pole unit is relatively moved in a predetermined direction in the XY plane. By constructing a drive unit that generates a thrust to be generated and a magnetic repulsion for magnetically levitating in the Z direction, the mover 4 can move and levitate at the same time.

In addition, by providing a plurality of sets of excitation units 6 for levitation and movement arranged as shown in FIG. 15 to form a drive unit and providing them on the base 8, a wider range is provided. The mover 4 can be moved across. Further, by using a set of a plurality of excitation units 6, a high thrust and a high levitation force can be obtained.

Furthermore, as shown in FIGS. 21 (a) and (b), the magnetic pole unit 14 of the square mover 4 is divided into, for example, square areas A to D, and the area below the areas A to D is divided. A different predetermined current may be supplied to each of the armature coils 38 to 44 of the set of the excitation unit 6. In this way, for example, by changing the direction of the thrust in each of the areas A to D as shown in Fig. 21 (a), the direction in the X-Y plane as a whole is Not only can you move, but you can also rotate around the Z axis. In addition, as shown in Fig. 21 (b), by changing the levitation force in the Z direction of each of the regions A to D, it becomes possible to perform rotation about the X axis or the Y axis. However, the leveling of the plane of the mover 4 can be adjusted.

As described above, according to the planar motor of the present embodiment, a plurality of sets of excitation units can be provided on the stator side, so that a high thrust can be obtained. Since it can be configured with a simple planar structure composed of the conductor member 60, the conductor member 60, and the substrate 12, it can be moved at a high speed with a light weight. Further, according to the planar motor according to the present embodiment, it becomes possible to move the two-dimensional plane while giving a floating force to the mover 4. Further, it is possible to realize a planar motor that can control the position and posture of the mover 4 in three axes directions of X, Y, and および and a total of six degrees of freedom in the rotation directions of those axes.

Next, a planar motor according to a second embodiment of the present invention will be described with reference to FIGS. In the planar motor according to the present embodiment, a plurality of excitation units are fixed at predetermined positions to form a stator, and the magnetic pole unit is used as a movable element movable with respect to the stator. The difference from the first embodiment is that each excitation unit of the stator is arranged above the mover with five protruding teeth facing downward, and the mover faces the protruding teeth with a plurality of permanent magnets facing upward. The point is that it is arranged to be. First, a schematic configuration of the planar motor according to the present embodiment will be described with reference to FIG.

FIG. 22 is a perspective view of the flat motor according to the present embodiment. As shown in FIG. 22, the configuration of the planar motor according to the present embodiment is roughly divided into a stator unit 2 and a mover 4. The stator unit 2 has a plurality of excitation units 6 fixed to the lower surface of a flat base 8 extending in an X-plane, and a flat sliding member 10 provided on the lower surface. On the other hand, the mover 4 has a magnetic pole unit 14 composed of a plurality of permanent magnets arranged in a matrix on a Χ-Υ plane, and is fixed to the lower surface of the magnetic pole unit 14, and is made of a non-magnetic material and non-conductor. There is a certain substrate 12.

As described above, in the present embodiment, the mover 4 is located below the stator unit 2, and even if the respective excitation units 6 of the stator unit 2 are not excited, the plurality of permanent magnets of the mover 4 Through a predetermined gap with respect to the stator unit 2 Then, the mover 4 can be floated in the air. As will be described later in detail, by driving a predetermined plurality of excitation units 6 out of the plurality of excitation units 6 of the stator unit 2, the movable element 4 below the sliding member 10 is slid. The movable member 10 can be moved two-dimensionally in the XY plane below the movable member 10, and the leveling of the mover 4 itself can be adjusted.

The excitation unit 6 of the stator unit 2 has the same configuration as the excitation unit 6 in the first embodiment described with reference to FIG. 2, and has five teeth 2 in the Z direction in a use state. The only difference is that 8, 30, 32, 34, and 36 are arranged so that the illustration and description of the configuration are omitted. Also, the structure of the magnetic pole unit 14 of the stator 4 of the planar motor according to the present embodiment is the same as the magnetic pole unit in the first embodiment described with reference to FIG. Is omitted.

Next, the positional relationship of the teeth of the excitation unit 6 with respect to the magnetic pole unit 14 of the planar motor according to the present embodiment will be described with reference to FIGS. 23 and 24. FIG. FIG. 23 shows a cross section of a flat motor according to the present embodiment, and FIG. 24 is a perspective view for explaining a positional relationship between five protruding teeth of an excitation unit 6 facing the magnetic pole unit 14. . As shown in FIG. 23, the plurality of permanent magnets 50 N, 5 OS of the magnetic pole unit 14 each having a width 1 and the horizontal permanent magnet 54 whose magnetic axis is oriented in the X or Y direction are opposed to each other. The two arms 20 and 24 extending in the X direction of each of the excitation units 6 have two protruding teeth 28 and 32 at the end thereof relative to the protruding teeth 36 at the base end in the X direction. — Offset by 1/2 and +1/2.

Although not shown, the two protruding teeth 30 and 34 of the two arms 2 2 and 26 extending in the Y direction are also relatively smaller in the Y direction than the protruding teeth 36 of the base end. They are offset by 2, + 1/2. Therefore, as shown in FIG. 24, when the position of the tooth portion T5 of the protruding tooth 36 at the base end coincides with and faces the permanent magnet 50N (N pole) of the magnetic pole unit 14 The teeth T 1, T 2, Τ 3, 腕 4 of the four teeth 28-34 are permanent magnets 5 of the opposing magnetic pole unit 14, 5 OS (S pole) in the X direction Alternatively, they overlap by 1/2 in the Y direction.

The above description is the positional relationship of the teeth of one excitation unit 6 with respect to the pole unit 14. Later, when a plurality of excitation units 6 are used, the distance between each excitation unit 6 Before describing the arrangement relationship with respect to the magnetic pole unit 14, the case where the magnetic pole unit 14 is moved in the X direction by one excitation unit 6 will be described with reference to FIGS. 25 to 27. I do. Here, a case where the mover 4 is moved in the X direction will be described as an example, but the mover 4 can be moved in the Y direction by the same operation. (A) in FIGS. 25 to 27 is a plan view showing the position of each tooth of the excitation unit 6 with respect to the magnetic pole unit 14 of the mover 4, and the tooth portion T of each tooth 28 to 36 is shown. 1 to T5 are shown. (B) in FIGS. 25 to 27 shows a cross section in the X direction including the tooth portion T5 of the excitation unit 6. (C) shows a cross section in the Y direction including the tooth portion T5 of the excitation unit 6.

In FIG. 25, the tooth T5 of the tooth 36 at the base end of the excitation unit 6 faces the permanent magnet 50N (N pole) of the magnetic pole unit 14 as an initial state. You. This state is defined as X = 0. In the non-excitation state where current is not supplied to the armature coils 38 to 44 of the excitation unit 6 at X = 0, the excitation unit by the plurality of permanent magnets 50 N and 50 S of the magnetic pole unit 14 is used. The magnetic attraction between the teeth T 1 to T 5 of the box 6 is balanced, and the magnetic pole unit 14 floats in the air via a predetermined gap with respect to the excitation unit 6.

Next, as shown in FIG. 25 (b), the N pole relatively strong at the tooth T1 (hereinafter, referred to as N + pole), and relatively weak at the teeth T2 to T4 The N-pole (hereinafter referred to as the N-pole) supplies a predetermined current to the four armature coils 38 to 44 so that the S-pole is excited in the tooth T5. As a result, the balance of the magnetic attraction between the teeth T1 to T5 is lost, and as shown in FIG. 25 (b), the magnetic attraction at the tooth T1 is stronger than that in the balanced state. Thrust is generated to move the pole unit 14 in the X direction (rightward in the figure). Further, in the tooth portion T3, the magnetic attraction force is weaker than in the balanced state, and as a result, the mover 4 starts moving in the X direction.

On the other hand, as shown in Fig. 25 (c), in the Y direction, while the state of balance of the magnetic attraction force is maintained, only the magnetic attraction force changes as a whole, so the thrust in the Y direction is generated. do not do. In the moving operation of the mover according to the present embodiment, the mover is moved by supplying a much smaller current than the current supplied to each of the armature coils 38 to 44 in the first embodiment. be able to. Next, a state where the mover 4 has moved from the position (X = 0) shown in FIG. 25 to the position X = 1 / will be described with reference to FIG. As shown in Fig. 26, when the mover 4 moves to the position of X = 1/2, the S + pole at the tooth T3, the N + pole at the tooth T1, and the N— pole at T2 and T4. A predetermined current is supplied to the four armature coils 38 to 44 so that the S—pole is excited in the tooth portion T5. As a result, the balance of the magnetic attraction force between the teeth T1 to T5 is broken, and as shown in FIG. 26 (b), at the tooth T3, the permanent magnet 50 of the magnetic pole unit 14 is formed. A stronger magnetic attractive force is generated for N than in the balanced state, and a magnetic repulsive force is generated for the permanent magnet 50 S, causing the magnetic pole unit 14 to move in the X direction (rightward in the figure). A thrust to move is generated. Further, in the tooth portion T1, the magnetic attraction force is weaker than in the balanced state, and as a result, the mover 4 starts moving in the X direction. On the other hand, as shown in Fig. 26 (c), in the Y direction, while the state of balance of the magnetic attraction force is maintained, only the magnetic attraction force as a whole changes, so the thrust in the Y direction is Does not occur.

Next, a state where the mover 4 has moved from the position (X = l / 2) shown in FIG. 26 to the position X = l will be described with reference to FIG. At the position of X = 1, the direction of the current flowing through each armature coil 38 to 44 is reversed, and the N + pole is excited in the tooth T5, and the S-pole is excited in the tooth T1 to the tooth T4. A current of a predetermined magnitude is supplied to the four armature coils 38 to 44 as described above. As a result, the balance of the magnetic attraction force between the tooth portions T1 to T5 is lost, and as shown in FIG. 27 (b), at the tooth portion T5, the permanent magnet 50S of the magnetic pole unit 14 is formed. A stronger magnetic attraction force is generated than in the balanced state, and a magnetic repulsion force is generated against the permanent magnet 50 N to move the magnetic pole unit 14 in the X direction (rightward in the figure). As a result, the mover 4 starts moving in the X direction. On the other hand, as shown in FIG. 27 (c), at the position of X = 1, since the permanent magnet is not arranged in the Y direction of the pole unit 14, the balanced state of the magnetic attraction force is maintained.

The movement in the X direction from X = 0 to Χ = 以上 has been described above.The same applies to the case of moving in the positive direction from Χ = 、 or the case of moving in the negative direction from χ = ο. By changing the current flowing through each of the armature coils 38 to 44, a thrust for moving the magnetic pole unit 14 in a predetermined direction relative to the excitation unit 6 can be generated. Note that the planar motor according to the present embodiment also supplies current to each of the armature coils 38 to 44 based on the energization schedule corresponding to FIGS. 10 and 13 in the first embodiment. Thus, a thrust as shown in FIGS. 11 and 14 can be generated at each tooth. Therefore, also in the present embodiment, as shown in FIGS. 11 (f) and 14 (f), the position of the excitation unit 6 with respect to the magnetic pole unit 14 is shifted in the Y direction. Also, if the position in the X direction (X = 0) is the same, the thrust characteristics obtained will change sinusoidally with a period of approximately 21 and the thrust characteristics at or near the positions of X = 0, 21 and 41 Nearly zero or approaching zero. Therefore, if at least two excitation units 6 are used and they are arranged by being shifted relative to each other by one in the X direction, thrust unevenness can be reduced. This is equivalent to combining the waveform in Fig. 11 (f) with the phase of Fig. 14 (f) shifted by 1 relative to the waveform in Fig. 11 (f), and the synthesized waveform is flattened as is clear from the figure. As a result, the thrust approaches 0, and it becomes possible to eliminate the position and reduce the thrust unevenness.

The above is the thrust characteristics in the movement in the X direction, but the same description holds true for the thrust characteristics in the movement in the Y direction. Therefore, in order to reduce the thrust unevenness in the Y direction, at least two excitation units 6 may be arranged so as to be relatively shifted by one in the Y direction. That is, in order to move the mover 2 two-dimensionally in the XY plane while reducing the thrust unevenness, at least two movers are required as shown in FIG. 15 as in the first embodiment. It is sufficient to use the excitation unit 6 and arrange them so that their mutual positions are relatively shifted by 1 in the X and Y directions, respectively. Therefore, the set of the excitation unit 6 shown in FIG. 15 is used for the two-dimensional movement of the mover 4 in the XY plane, and the excitation unit 6 shown in FIG. If a set of the magnets 6 is prepared and used for leveling the mover 4, that is, at least two sets of the excitation unit 6 are used, and the magnetic pole unit is oriented in a predetermined direction in the XY plane. By forming a driving unit that generates a thrust to move relative to the motor and changes the magnetic attraction force that is magnetically levitated in the Z direction, the movement of the mover 4 in the XY direction and the movement in the Z direction Movement can be performed simultaneously.

Further, by providing a plurality of sets of excitation units 6 for levitation and movement having the arrangement shown in FIG. 15 to form a drive unit and providing them on the lower surface of the base 8, a wider range is provided. The mover 4 can be moved over the enclosure. Further, by using a group of a plurality of excitation units 6, high thrust and high levitation force can be obtained.

Further, in the same manner as shown in FIGS. 21 (a) and (b) according to the first embodiment, the magnetic pole unit 14 of the square mover 4 is moved to, for example, square areas A to D. It may be divided into four, and different predetermined currents may be supplied to the armature coils 38 to 44 of the set of the excitation units 6 above the regions A to D, respectively. By doing so, for example, by changing the direction of thrust in each of the areas A to D as shown in Fig. 21 (a), not only can the entire body move in one direction in the X-Y plane, Will be able to do it. Also, as shown in Fig. 21 (b), by changing the levitation force in each of the areas A to D in the Z direction, rotation around the X axis or Y axis can be performed. The leveling of the plane of the mover 4 can be adjusted.

As described above, also in the planar motor according to the present embodiment, a plurality of sets of the excitation units 6 can be provided on the stator unit 2 side, so that a high thrust can be obtained. Since it can be configured with a simple planar structure composed of the permanent magnet 50, the conductor member 60, and the substrate 12, it can be moved at a high speed with light weight.

Further, in the planar motor according to the first embodiment, since the mover 4 is located above the stator unit 2, the magnetic pole unit 6 of the mover 2 is required to float the mover 4. The magnetic attraction force acting between the permanent magnets 50 N, 50 S of the stator unit 2 and the protruding teeth 28 to 36 of the excitation unit 6 of the stator unit 2 is canceled, and the floating of the movable element 4 is equal to or more than its own weight. It is necessary to generate an upward force. For this reason, a large current needs to flow through each of the armature coils 38 to 44, and the heat generated from the stator unit 2 due to energization of the coils increases. On the other hand, according to the planar motor of the present embodiment, since the mover 4 is located below the stator unit 2 and the mover 4 floats in the space due to magnetic attraction even in a non-excited state. On the other hand, the position and orientation control of the mover 4 requires only a small amount of coil current, so that the heat generated from the stator unit 2 can be reduced, which is advantageous in that it is efficient. Next, a planar motor according to a third embodiment of the present invention will be described with reference to FIGS. The planar motor according to the present embodiment has a shape of the tip of the five protruding teeth 28 to 36 of the excitation unit 6 in the planar motor according to the first and second embodiments. It has a characteristic in shape. Other configurations are the same as those of the first and second embodiments, so that illustration and description are omitted.

FIG. 28 shows a magnetic member having five protruding teeth of the excitation unit 6 according to the present embodiment, and armature coils 38 to 44 wound around arms thereof. FIG. 28 (a) is a perspective view of the excitation unit 6 according to the present embodiment, and FIG. 28 (b) is a partially enlarged view of the tip of each tooth of the excitation unit 6, and FIG. () Is a partial cross-sectional view of the tip of each tooth of the excitation unit 6. FIG. As shown in FIGS. 28 (a) to (c), a predetermined chamfer 6 2 is provided on each of the four end portions T 5 to T 5 of the five protruding teeth 28 to 36 of the excitation unit 6. a to 62 d are applied, and the tooth portions at the tips of the five protruding teeth are formed in a sharp shape. In the present embodiment, as shown in FIG. 28 (c), the flat portions and the chamfers 62 in the moving direction of the XY plane of the tooth portions T1 to D5 of the respective protruding teeth 28 to 36 are shown. The length ratio of the 6 2d is set to about 2: 1: 1.

Now, for the teeth T1 to T5 of the protruding teeth 28 to 36 of the excitation unit 6, the operation and effect obtained by using the teeth 1 to 5 will be described with reference to FIGS. This will be described using 30. FIG. 29 shows the tooth part Τ5 of the protruding tooth 36 as an example, the tooth part Τ5 in the present embodiment is shown on the right side of the figure, and the tooth part Τ5 without chamfering is shown as a comparative example. Shown on the left. When the tooth portion # 5 of the present embodiment and the tooth portion # 5 of the comparative example move relative to the magnetic pole unit 14 from the upper stage to the lower stage in the figure, the magnetic force in the non-excitation state is increased. The difference in the operation of the suction force is shown.

First, in FIG. 29 (a), each tooth portion of the present embodiment and the comparative example has a width substantially equal to the width 1 of the permanent magnet 50 of the magnetic pole unit 14, and the permanent magnet 50 S Shall be opposed to. The shape of the tip portion of the tooth portion of the present embodiment is composed of the end face and the chamfers 62 to 62 d as already described with reference to FIG. 28, and the tip portion of the tooth portion of the comparative example is The chamfers 6 2a to 6 2d provided on the tooth portions of the form (1) have a shape of only the end face. The end surfaces of any of the teeth are located at a predetermined gap from the magnetic pole unit 14.

At this time, the magnetic attractive force acting between the tooth portion T5 of the present embodiment and the permanent magnet 50S of the magnetic pole unit 14 is denoted by Ft, and the breaking perpendicular to the direction in which the magnetic attractive force Ft acts. Let At be the size of the area. On the other hand, the magnetic attraction acting on the tooth portion T5 of the comparative example is F f, A f is the size of the cross-sectional area perpendicular to the direction in which the magnetic attraction F f acts. In general, the magnitude of the magnetic attraction force F is inversely proportional to the square of the distance between the two magnetic materials, and proportional to the surface area of the opposing magnetic materials. The magnetic attraction force Ft of the tooth portion T5 of the present embodiment having a region where the distance of the action of the tooth portion is long <is smaller than the magnetic attraction force Ff of the tooth portion T5 of the comparative example. .

From the above state, when the magnetic pole unit 14 is moved rightward in the figure as shown in FIGS. 29 (b) to 29 (d), the component force in the moving direction of the magnetic attraction forces Ft and Ff is obtained. As a result, thrust components ft and ff are generated. The change in the thrust components f t and f f associated with this movement will be described with reference to FIG. 29 and FIG. FIG. 30 (a) shows the thrust characteristics at the tooth portion of the comparative example, and FIG. 30 (b) shows the thrust characteristics at the tooth portion according to the present embodiment. In both figures, the horizontal axis represents the moving distance. The vertical axes in both figures show the cross-sectional areas A t and A f from the origin position to the upper side, and the magnitudes of the magnetic attraction forces F t and F f and the magnitudes of the thrusts ft and ff to the lower side Is shown. The positions of a to d shown on the horizontal axis in the figure correspond to the movement amounts of the magnetic pole unit 14 shown in FIGS. 29 (a) to (d). First, in the tooth portion of the comparative example, as shown in FIGS. 29 (a) to (d) and FIG. 30 (a), the cross-sectional area A f monotonously decreases with the movement of the magnetic pole unit 14. . Therefore, the magnetic attractive force F f also decreases monotonically. As a result, the thrust f f suddenly increases _ and then decreases monotonically. Fig. 30 (a) The curve of the thrust ff shown by the solid line shows the thrust characteristics when only the permanent magnet 50S is considered, and the curve of the thrust ff shown by the broken line shows the This is the thrust characteristic when the effect of the permanent magnet 50 N next to S is considered. As described above, in the conventional tooth portion used in the comparative example, since the magnitude of the thrust ff at the moving position of the magnetic pole unit 14 is uneven, cogging occurs.

On the other hand, in the case of the tooth portion according to the present embodiment, as shown in FIGS. 29 (a) to (d) and FIG. 30 (b), since the chamfers 62a to 62d are provided, the magnetic pole unit 1 With the movement of 4, there is a position where the cross-sectional area At does not decrease monotonically but increases in area. Therefore, there is a position where the magnetic attraction force F f increases in accordance with a change in the cross-sectional area At, and changes in a sinusoidal waveform for one cycle between the positions a to d. As a result, thrust ft is half It changes like a sine wave for the period. The meaning of the curves of the thrust ff indicated by the solid line and the broken line in FIG. 30 (b) is the same as that of the comparative example in FIG. 30 (a). As described above, according to the present embodiment, it is possible to obtain a thrust characteristic that changes sinusoidally in a non-excited state, so that cogging can be reduced. Furthermore, by providing chamfers for all the teeth of the teeth of the plurality of excitation units 6 that are arranged and driven out of phase, the above-described sinusoidal thrust characteristics can be smoothed, so that cogging can be achieved. This makes it possible to realize a planar motor in which the load is extremely reduced.

In the above description, the ratio of the end face of each tooth T1 to T5 of the excitation unit 6 to the chamfer is set to about 2: 1: 1 as described above, but of course, this is only an example. 'It is also possible to use other ratios.For example, as shown in Fig. 31, instead of chamfers 6 2a to 6 2d, there is no flat part as shown in Fig. A tooth portion at the tip of each protruding tooth may be formed to make it more sharp. In short, the width of each protruding tooth T1 to D5 of the excitation unit 6 of the stator unit 2, the width of the permanent magnet 50 of the mover 4, or the distance between the stator unit 2 and the mover 4 Based on various parameters such as the distance of the gap, the tips of the respective protruding teeth T1 to T5 may be formed in an optimum tip shape.

In the first and second embodiments, the excitation unit 6 has four arms each having a substantially cross shape in the X-Y direction, and a base to which the tip of each arm and each of the arms are connected. It consisted of a magnetic member having five protruding teeth formed at the end, and four armature coils wound around each arm. However, the excitation unit is composed of a magnetic member having two substantially linear arms, and a distal end of each arm and three protruding teeth formed at a base end to which the arms are connected. Alternatively, a linear excitation unit formed of two armature coils wound around each arm may be used. When current is applied to the two armature coils in the order of (+1, +1) → (+1, 0) → (0, -I) → (-I, one I), the mover moves straight through the plane. Move in a shape. If such linear excitation units are provided in the X and Y directions, the mover can be moved along the XY plane.

Next, a stage device and an exposure device using the planar motor according to the above embodiment will be described. The second embodiment described above as the fourth embodiment of the present invention. A stage apparatus using a planar motor and an exposure apparatus using the same will be described with reference to FIGS. 32 to 34.

FIG. 32 shows an overall schematic configuration of an exposure apparatus according to the present embodiment. The exposure apparatus of the present embodiment scans the reticle one-dimensionally and one-dimensionally scans the wafer at a speed synchronized with the reticle (a speed multiplied by the projection magnification). This is a so-called step-and-scan projection method. An exposure apparatus. In FIG. 32, a first column 230 made of invar (an alloy having a low expansion coefficient) is placed on a base 100 via an anti-vibration damper 112. The first column 230 fixes the projection optical system PL. In addition, a laser interferometer 135 for measuring the position of the reticle scanning stage 180 is mounted on the first column 230, and a second column holding the illumination optical system 130 is also provided. Column 170 is fixed.

Inside the first column 230, a stage device using the planar motor described in the second embodiment is provided. This stage device is composed of a stage drive unit 300 corresponding to the stator unit 2 in the second embodiment and a wafer stage WST corresponding to the mover 4. A wafer W as a substrate is mounted. Around the wafer W mounting surface of the wafer stage WST, a plurality of permanent magnets each having a magnetic axis oriented in a predetermined direction are arranged _(the stage driving unit 300 is connected to the base 100 via the frame 124). 0, and as described in the second embodiment, the wafer stage WST has a magnetic attraction force even when the plurality of excitation units 6 in the stage drive unit 300 are in a non-excited state. When a plurality of predetermined excitation units 6 in the stage drive unit 300 are excited by the control of the drive system 1337, the wafer stage WST is accordingly turned on by the projection optical system. In the plane perpendicular to the optical axis of the PL (horizontal plane), the direction perpendicular to the paper plane in Figure 32 (Y direction), in the horizontal plane the X direction perpendicular to the Y axis, and the wafer W The optical axis of the projection optical system PL Position the wafer W in the Z direction, (C) The inclination of W with respect to the image plane of the projection optical system PL can also be adjusted. When the wafer stage WST moves in the X, Y, and Z directions, the stage drive unit 300 Generates a reaction force in the opposite direction. Escaped to base 100 via 124. On the other hand, since the projection optical system PL is held by the first column 230 via the anti-vibration dam 12, the reaction force generated in the stage drive unit 300 exerts vibration on the projection optical system PL. Never.

A second column 110 composed of a member is fixed on the first column 230, and a reticle scanning stage 180 slidable in the X direction is mounted on the upper part of the second column 170, and the reticle A reticle R having a transfer pattern formed thereon is held on a scanning stage 180. The reticle scanning stage 180 is specifically a stage driven by a linear motor described in Japanese Patent Application Laid-Open No. 8-63231, and has a structure in which a reaction force due to driving is canceled. I have. Therefore, the reaction force generated on the reticle scanning stage 180 and the reaction force generated on the stage drive unit 300 do not cause vibration to the projection optical system PL, and also cause vibration to the illumination optical system 130. There is no. - How, through the excimer one laser light source (not shown) (K r F, A r F ), or a solid laser light source (F ₂₎ exposure illumination light from the light guide optical system (not shown), an illumination optical system It is incident on 130. The illumination optical system 130 includes a blind mechanism, a fly-eye lens, a condenser lens, and the like, and illumination light formed in a predetermined area irradiates the reticle R. Thus, reticle R that has received the illumination light defined in a predetermined shape is held on reticle scanning stage 180 that can move at least in X direction at a constant speed on second column 170. The reticle scanning stage 180 performs a one-dimensional scanning movement in the X direction, a minute rotation movement for bowing correction, and the like by a drive system 134. At one end of the reticle scanning stage 180, a movable mirror 1336 that reflects the measurement beam from the laser interferometer 135 is fixed, and the X direction position of the reticle R is adjusted by the laser interferometer 135. Measured in real time.

The image of the pattern formed on the reticle R is reduced to, for example, 1/4 by the projection optical system PL and formed on the wafer W. The wafer W is mounted on a wafer stage WST that can move in the X, Y, and Z directions.

Thus, the pattern on the reticle R is illuminated with the exposure light IL, and the projection image on the reticle R is projected and exposed on the wafer W via the projection optical system PL. In this case, the illumination area on the reticle R is, for example, a rectangular slit, and the entire pattern area on the reticle R is not illuminated by the illumination area alone. Therefore, at the time of exposure, reticle scanning stage 180 is driven to scan reticle R with respect to the illumination area at a constant speed V1 in the X direction, which is a direction perpendicular to the longitudinal direction of the illumination area. By driving the wafer stage WST in synchronization with this, the wafer W is scanned at a constant speed V2 in the X direction with respect to the reticle image in the illumination area. Assuming that the projection magnification from the reticle R to the ueno and W by the projection optical system PL is ^, the velocity V 2 is / 5 · V 1. In this manner, by synchronously scanning reticle R and wafer W, images of all patterns of reticle R are projected and exposed on wafer W. When exposure of one exposure area is completed, the wafer stage WST is driven by the stage drive unit 300 to move the scanning start position of the next exposure area on the wafer W into the exposure field of the projection optical system PL. I do. A moving mirror 1339X that reflects the measuring beam from the laser interferometer 1338X is fixed to one end surface of the wafer stage WST in the X direction, and the coordinate position of the wafer stage WST in the X direction is fixed. Is measured in real time by the laser interferometer 1 3 8 X. Although not shown, a moving mirror 1339Y that reflects the measuring beam from the laser interferometer 1338Y is also fixed to one end surface of the wafer stage WST in the Y direction, and the YST of the wafer stage WST is fixed. Is measured in real time by the laser interferometer 1338Y.

The stage drive unit 300 of the scanning exposure apparatus according to the present embodiment is connected to a refrigerant supply port 310 at the end of a pipe drawn from a cooler (not shown). The refrigerant controlled at a predetermined temperature through the stage 0 is introduced into the stage drive unit 300, circulates through the stage drive unit 300, and flows through the armature coils 38 to 44. After the plurality of excitation units 6 that have generated heat are cooled, they are discharged from the cooling medium discharge ports 312.

Further, the scanning exposure apparatus according to the present embodiment is provided with a wafer stage transfer system 320 for loading or unloading wafer stage WST from opening 330 on the side surface of first column 230. The wafer stage transfer system 320 has the same configuration as the stage drive unit 300, and can move the wafer stage WST on which the wafer W is mounted by floating it with magnetic attraction. In the scanning exposure apparatus according to the present embodiment, the transfer of the wafer W is The wafer stage WS is transported together with the stage WST.

In addition, the control of the exposure operation in the present scanning type exposure apparatus is totally managed by the main control unit 141. The basic operation of the main controller 14 1 is based on the scan exposure based on the position information from the laser interferometers 13 5 and 13 8 and the speed information from the drive systems 13 4 and 13 7. While maintaining a predetermined speed ratio (a value corresponding to the projection magnification of the projection optical system PL) between the reticle scanning stage 180 and the wafer stage WS 時に, a predetermined alignment of the relative positional relationship between the reticle pattern and the wafer pattern is performed. The relative movement is to be performed with the error kept within.

Next, the structure of the stage drive unit 300 and wafer stage WS of the exposure apparatus according to the present embodiment will be described in more detail with reference to FIGS. 33 and 34. FIG. FIG. 33 is an exploded perspective view showing a part of stage drive unit 300 and wafer stage W S # according to the present embodiment. FIG. 34 is a plan view showing the arrangement of the excitation unit 6 in the stage drive unit 300 and the arrangement of the magnetic pole units 14 provided on the wafer stage WS.

As shown in FIGS. 33 and 34, the stage drive unit 300 has a plurality of excitation units 6 fixed to the lower surface of a flat base 8, and a flat sliding member 10 on the lower surface. Is provided. An opening is provided substantially at the center of the stage drive unit 300, and the light exit side end of the lens barrel of the projection optical system is located in this opening. Therefore, the base 8 has a mortar-shaped slope in conformity with the shape of the light exit end of the lens barrel of the projection optical system, and is connected to the sliding member 10 at the opening at the bottom of the slope. ing.

On the other hand, the wafer stage WST has a substantially square planar shape, a circular wafer mounting surface on which the wafer W is mounted, and a plurality of permanent magnets around the wafer mounting surface. Magnetic pole units formed in a matrix on a plane are provided divided into four regions A to D. A nonmagnetic and nonconductive substrate 12 is fixed to the lower surface of the magnetic pole unit 14 and below the wafer mounting surface. In addition, movable mirrors 1339X and 1339Y for measuring the positions in the X and Y directions with a laser interferometer are attached to two adjacent sides of the wafer stage WST. And You.

As described above, in the stage apparatus of the present embodiment, wafer stage WST serving as a mover is located below stage drive unit 300 serving as a stator unit, and stage drive unit 300 is provided. Even when each excitation unit 6 of the wafer stage WST is in a non-excited state, the magnetic force of the plurality of permanent magnets 50 N and 50 S of the wafer stage WST causes the stage drive unit 300 to pass through a predetermined gap through a predetermined gap. They can float in the air.

Further, as shown in FIG. 34, the plurality of excitation units 6 of the stage drive unit 300 located above the respective areas A to D are the excitation units already described with reference to FIG. The six sets are arranged so that they function sequentially in groups of two.Each area A to D of the magnetic pole unit generates a thrust for relative movement in a predetermined direction in the XY plane, and a magnetic force is generated in the Z direction. By changing the magnetic attraction force that is being levitated, the wafer stage WS can be moved in the X and Y directions and in the Z direction at the same time. Further, since the magnetic pole unit 14 of the wafer stage WST is divided into four areas A to D, the armature coils 38 to 44 of the set of the excitation unit 6 above the areas A to D are respectively provided for each area. By supplying different predetermined currents to the actuators, for example, by changing the direction of thrust in each of the areas A to D, not only can the entire body move in one direction in the XY plane, but also rotate around the Z axis. Will be able to do it. In addition, by changing the floating force in the Z direction of each of the regions A to D, the rotation around the X axis or the Y axis can be performed, and the leveling of the wafer W plane of the wafer stage WST can be performed. Can be adjusted.

In the manufacture of the excitation unit in the above-described embodiment, the four arms and the protruding teeth at the leading and trailing ends of the arms may be integrally formed of a magnetic material, or each part may be manufactured separately. And then assemble it. The armature coil is wound around the arm of the manufactured magnetic member to connect the wires and pipes, and comprehensive adjustments (electrical adjustment, operation confirmation, etc.) are performed.

In the manufacture of the planar motor having the excitation unit according to the above-described embodiment, in addition to the manufacture of the excitation unit, a plurality of permanent magnets are arranged on a substrate by reversing the directions of the magnetic poles thereof. The magnetic pole unit is manufactured. Also, in the manufacture of the stage device incorporating the planar motor according to the above-described embodiment, the mover of the planar motor according to the above-described embodiment is incorporated as a stage for mounting a substrate, and the stator is driven for driving the stage. The system is incorporated as a system and comprehensively adjusted so that the position and orientation of the stage can be achieved with six degrees of freedom of rotation around the X, Υ, and Ζ axes.

In the manufacture of the exposure apparatus according to the above-described embodiment, the illumination system and the projection optical system composed of a plurality of lenses are incorporated into the exposure apparatus main body to perform optical adjustment, and the step according to the above-described embodiment including a large number of mechanical parts is performed. This is done by incorporating a lithographic apparatus as a reticle stage or wafer stage, attaching it to the main body of the exposure apparatus, connecting wiring and piping, and performing comprehensive adjustments (electrical adjustment, operation confirmation, etc.). It is desirable to manufacture the exposure equipment in a clean room where the temperature and cleanliness are controlled.

The present invention is not limited to the above embodiment, and various modifications are possible.

In the above embodiment, the set of the excitation units 6 is defined by the arrangement shown in FIG. 15, but the present invention is not limited to this. For example, η 1, m 1 (n , M is a positive integer) and may be composed of at least two excitation units 6 separated by a distance. Further, the arrangement position of the pair of the excitation units 6 is not limited to the example shown in FIG. 15 and various modifications are possible.

Further, in the above embodiment, the drive unit is divided into four regions A to D as shown in FIGS. 21 and 34 in order to give the mover 4 a movement with six degrees of freedom. The invention is not limited to this, and the magnetic pole unit 14 is divided into areas A to C in which a line connecting the centers of the respective areas on the XY plane forms a triangle, and the excitation unit below the areas A to C is divided. Even if a predetermined current that is different for each region is supplied to each of the six sets of armature coils 38 to 44, the mover 4 can be given a movement with six degrees of freedom. Therefore, the number of divided regions may be three or more.

Further, in the above embodiment, the one provided with the magnetic pole unit 14 is used for the mover 4, and the one provided with the excitation unit 6 is used for the stator unit 2, but the present invention is not limited to this. The magnetic pole unit 14 may be used as the stator unit 2 and the exciting unit 6 may be used as the mover 4. In particular, the number of excitation units 6 is not very large. This is effective if wiring for supplying current to the sub coils 38 to 44 can be simplified.

In the fourth embodiment, the stage apparatus and the exposure apparatus using the planar motor according to the second embodiment have been described. Similarly, the planar motor according to the first embodiment may be replaced with a stage apparatus. And exposure equipment

Further, in the above-described embodiment, the stage apparatus using the planar motor of the present invention has been described as being applied to the wafer stage WST side. However, the present invention is not limited to this, and for example, the reticle scanning stage 180 side And the reticle scanning stage 180 may be controlled with six degrees of freedom.

Further, the excitation unit 6 is not limited to the shape shown in the above-described embodiment, but can be variously modified depending on the mounting space at the mounting stage and other components. For example, the excitation unit 6 in the above embodiment is formed in a cross shape in which an angle between two adjacent arms of each of the arms 20 to 26 is approximately 90 °. The present invention is not limited to this, and the angle between two adjacent arms may be different. For example, the angle between the arm 20 and the arm 22 and the angle between the arm 24 and the arm 26 are both 120 °, and the arm 22 and the arm 24 It is a matter of course that the angle between the arm 26 and the arm 20 and the angle between the arm 20 may both be 60 ° (in the present invention, these are also referred to as substantially cross-shaped). Furthermore, instead of making the lengths of the arms 20 to 26 different, or protruding each tooth from just above the tip and base of the arm, from the side of the tip and base, Of course, it may be extended. Along with such a change in the shape of the excitation unit, the width in the X and Y directions of the plurality of permanent magnets arranged in the X and Y directions of the pole unit may be appropriately changed.

In the fourth embodiment, the present invention is applied to a step-and-scan type projection exposure apparatus using a conventional ultra-high pressure mercury lamp as a light source, but the present invention is not limited to this. The present invention can of course be applied to a projection exposure apparatus for exposing a wafer by a step-and-repeat method via a projection optical system having an image field capable of projecting the entire reticle circuit pattern at one time. Also, Since it does not require the intervention of air unlike a static pressure gas bearing, it can be used even in a vacuum, and is particularly suitable for use in an exposure apparatus using an excimer laser or another charged particle beam as a radiation source. Industrial applicability

As described above, according to the present invention, it is possible to realize a flat motor in which a high thrust is obtained, the mover is lightweight and can move at high speed. Also, it is possible to realize a planar motor that moves a two-dimensional plane while giving a floating force to the mover. Furthermore, it is possible to realize a planar motor that can control the position and orientation of the mover in a total of six degrees of freedom in the three axis directions of X, Y, and および and the rotation directions of those axes.

Further, according to the present invention, even if the stage device for mounting and moving a wafer is sealed in a vacuum or He atmosphere, the stage that can move the mover to the target position at a high speed and can perform ultra-precision positioning An apparatus and an exposure apparatus using the same can be realized.

Claims

The scope of the claims

1. Used in linear motors in pairs with magnetic pole units having a plurality of permanent magnets arranged with the magnetic poles reversed alternately.

A pair of substantially linearly formed arms and a base end to which the distal ends of the respective arms and the respective arms are connected so as to face the plurality of permanent magnets of the magnetic pole unit. An excitation unit comprising: a magnetic member having three formed protruding teeth; and two armature coils wound around each of the arms.

2. In a linear motor driven linearly,

A magnetic pole unit having a plurality of permanent magnets arranged by alternately reversing the direction of magnetic poles;

The excitation unit according to claim 1 and

A linear motor comprising:

3. In the linear motor according to claim 2,

The plurality of permanent magnets of the magnetic pole unit each have a width of 1 in the linear direction, and the centers of the permanent magnets are linearly spaced apart by a distance of 21. The linear motor according to claim 1, wherein the two protruding teeth of the arm portion are disposed so as to be displaced from each other by a half in a linear direction with respect to the protruding teeth of the base end portion.

4. Used in a flat-type motor in pairs with a magnetic pole unit having a plurality of permanent magnets arranged on the X-- 丫 plane by alternately reversing the direction of the magnetic poles.

The distal end of each arm and each of the arms are connected so as to face the four arms, which are substantially cross-shaped in the X-Y direction as a whole, and the plurality of permanent magnets of the magnetic pole unit. An excitation unit comprising: a magnetic member having five protruding teeth formed at a base end portion formed; and four armature coils wound around each of the arm portions.

5. For a planar motor driven by a plane,

A magnetic pole unit having a plurality of permanent magnets arranged on the XY plane by alternately reversing the directions of the magnetic poles; The excitation unit according to claim 4 and

A flat type motor comprising:

6. The flat motor according to claim 2,

The plurality of permanent magnets of the magnetic pole unit have a width of 1 in the X and Y directions in the XY plane, respectively, and a distance between the centers of the permanent magnets in the X and Y directions respectively. 2 1 apart

The two teeth of the two arms extending in the X direction of the excitation unit are displaced relative to the teeth of the base end by 1/2 of the soil in the X direction, and are arranged in the Y direction. A planar motor, wherein the two protruding teeth of the two extending arms are displaced relative to the protruding teeth of the base end by a half of soil in the Y direction.

7. In the linear motor according to claim 2,

A linear motor, wherein a permanent magnet whose magnetic axis is oriented in the direction of the magnetic pole of the permanent magnet is embedded between a plurality of permanent magnets whose magnetic poles are reversed in direction of the magnetic pole unit.

8. The flat motor according to claim 5,

Permanent magnets whose magnetic axes are oriented in the X direction are respectively embedded between the plurality of permanent magnets spaced in the X direction of the magnetic pole unit, and between the plurality of permanent magnets spaced in the Y direction. The permanent magnet whose magnetic axis is oriented in the Y direction is embedded in each of the permanent magnets whose magnetic axis is oriented in the X direction and the permanent magnet whose magnetic axis is oriented in the Y direction. A planar motor having a non-magnetic member embedded therein.

9. The linear or planar motor according to any one of claims 2 or 3, or 5 to 7,

A linear or planar motor, wherein a plurality of the excitation units are fixed at predetermined positions to form a stator, and the magnetic pole units are used as movers movable with respect to the stator.

10. The linear or planar motor according to claim 9,

Each of the excitation units of the stator is positioned below the movable element with the protruding teeth facing upward. Wherein the mover is arranged so that the plurality of permanent magnets face the lower teeth so as to face the protruding teeth.

11. The flat motor according to claim 5,

A set of at least two stators arranged at a distance of 1 relative to each other in the X and Y directions, and a predetermined current flowing through the four armature coils of each of the excitation units To generate a thrust for moving the magnetic pole unit as a movable element in a predetermined direction in the XY plane, or to generate a magnetic repulsive force for magnetically levitating the movable element in the Z direction. A flat-type motor characterized in that:

12. The flat motor according to claim 11, wherein:

The stator has a drive unit formed by combining at least two of the sets, and the drive unit generates a thrust for relatively moving the mover in a predetermined direction in the XY plane, and A planar repulsive force generating a magnetic repulsive force for magnetically levitating in the Z direction.

13. The flat motor according to claim 12,

The stator has at least three drive units distributed in a plane, and the three drive units are arranged in the X, 丫, and Z-axis directions with respect to the stator. A planar motor characterized in that the position and orientation of the mover are controlled with six degrees of freedom of rotation about each axis.

14. In the excitation unit according to claim 1 or 4,

The exciting unit according to claim 1, wherein a tooth portion at a tip of the protruding tooth is formed in a sharp shape.

15. A stage device having a stage on which a substrate is placed and a drive system for driving the stage, wherein the drive system controls the position of the stage in the X and Y axis directions.

As the stage, the magnetic pole unit according to claim 2 is arranged in the X direction and the Y direction,

A stage as the drive system, wherein the excitation unit described in claim 2 is arranged in the X direction and the Y direction so as to face the magnetic pole unit. apparatus.

16. A stage on which a substrate is placed, and a drive system for driving the stage, the drive system having six degrees of freedom of rotation in X, 丫, and Z axis directions and around each axis. In a stage device for controlling the position and orientation,

As the stage, a movable element of the flat motor according to any one of claims 11 to 13 is used,

14. A stage device, wherein the stator of the planar motor according to claim 11 is used as the drive system.

1 7. In the stage apparatus according to the first paragraph 5 or the first item 6 claims, the stage apparatus characterized by comprising a cooling mechanism for cooling the excitation Yuni' preparative _c

1 8. In an exposure apparatus that transfers a pattern image to a substrate,

17. An exposure apparatus, comprising: the stage device according to claim 15 or 16 as a stage device on which the substrate is mounted and moved.

19. The exposure apparatus according to claim 18, wherein

A column for supporting a projection optical system for projecting an image of the pattern onto a substrate via a vibration isolation mechanism,

A fixed frame supporting a drive system of the stage device,

Exposure apparatus m.o characterized by the fact that the reaction force generated in the drive system does not reach the projection optical system.

20. In the method of assembling the excitation unit,

A pair of substantially linearly formed arms and a base end to which the distal ends of the respective arms and the respective arms are connected so as to face the plurality of permanent magnets of the magnetic pole unit. A method for assembling an excitation unit, comprising: assembling a magnetic member having three formed protruding teeth, and two armature coils wound around each of the arm portions.

2 1. In the method of assembling the excitation unit,

A magnetic body having four arms each having a substantially cross shape in the X-Y direction as a whole, and five protruding teeth formed at a distal end of each of the arms and a base end to which each of the arms is connected. The parts and four armature coils wound around each of the arms are assembled. And a method of assembling the excitation unit.

2 2. In the method of assembling the linear motor,

A pair of substantially linearly formed arms and a base end to which the distal ends of the respective arms and the respective arms are connected so as to face the plurality of permanent magnets of the magnetic pole unit. An excitation unit assembling a magnetic member having three formed protruding teeth, and two armature coils wound around each of the arm portions;

A magnetic pole unit having a plurality of permanent magnets arranged by alternately reversing the magnetic pole direction;

And a method of assembling a linear motor.

23. In the method of assembling the planar motor,

A magnetic pole unit having a plurality of permanent magnets arranged on the XY plane by alternately reversing the directions of the magnetic poles;

The distal end of each arm and each of the arms are connected so as to face the four arms, which are substantially cross-shaped in the X-Y direction as a whole, and the plurality of permanent magnets of the magnetic pole unit. A magnetic member having five protruding teeth formed at the base end formed, and an excitation unit having four armature coils wound around each of the arms.

A method for assembling a planar motor, comprising:

24. A stage on which a substrate is placed, and a drive system for driving the stage, wherein the drive system has six degrees of freedom of rotation in X, 丫, and Z axis directions and around each axis. In an assembling method of a stage device for controlling a position and orientation,

Assembling the mover of the planar motor according to any one of claims 11 to 13 as the stage,

14. A method for assembling a stage device, comprising: assembling the stator of the planar motor according to any one of claims 11 to 13 as the drive system.