AU8037098A - Exciting unit, linear or planar motor using the unit, stage device using the motor, and aligner using the device - Google Patents

Exciting unit, linear or planar motor using the unit, stage device using the motor, and aligner using the device

Info

Publication number
AU8037098A
AU8037098A AU80370/98A AU8037098A AU8037098A AU 8037098 A AU8037098 A AU 8037098A AU 80370/98 A AU80370/98 A AU 80370/98A AU 8037098 A AU8037098 A AU 8037098A AU 8037098 A AU8037098 A AU 8037098A
Authority
AU
Australia
Prior art keywords
unit
motor
aligner
linear
exciting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU80370/98A
Inventor
Keiichi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of AU8037098A publication Critical patent/AU8037098A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Linear Motors (AREA)
AU80370/98A 1997-07-18 1998-06-22 Exciting unit, linear or planar motor using the unit, stage device using the motor, and aligner using the device Abandoned AU8037098A (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP9-210034 1997-07-18
JP21003497 1997-07-18
JP36191297 1997-12-10
JP9-361912 1997-12-10
PCT/JP1998/002761 WO1999004481A1 (en) 1997-07-18 1998-06-22 Exciting unit, linear or planar motor using the unit, stage device using the motor, and aligner using the device

Publications (1)

Publication Number Publication Date
AU8037098A true AU8037098A (en) 1999-02-10

Family

ID=26517817

Family Applications (1)

Application Number Title Priority Date Filing Date
AU80370/98A Abandoned AU8037098A (en) 1997-07-18 1998-06-22 Exciting unit, linear or planar motor using the unit, stage device using the motor, and aligner using the device

Country Status (3)

Country Link
JP (1) JP3829335B2 (en)
AU (1) AU8037098A (en)
WO (1) WO1999004481A1 (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI248718B (en) * 1999-09-02 2006-02-01 Koninkl Philips Electronics Nv Displacement device
TW498368B (en) * 2000-05-23 2002-08-11 Koninkl Philips Electronics Nv Displacement device
JP4831719B2 (en) * 2001-08-06 2011-12-07 学校法人日本大学 Magnetically levitated XY surface linear synchronous motor
JP4673117B2 (en) * 2005-04-08 2011-04-20 キヤノン株式会社 Stage apparatus and exposure apparatus
JP4702083B2 (en) * 2006-02-10 2011-06-15 ウシオ電機株式会社 XYθ moving stage
US7592760B2 (en) * 2006-09-11 2009-09-22 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7348752B1 (en) * 2006-09-20 2008-03-25 Asml Netherlands B.V. Stage apparatus and lithographic apparatus
US9752615B2 (en) 2007-06-27 2017-09-05 Brooks Automation, Inc. Reduced-complexity self-bearing brushless DC motor
US8823294B2 (en) 2007-06-27 2014-09-02 Brooks Automation, Inc. Commutation of an electromagnetic propulsion and guidance system
JP5416104B2 (en) 2007-06-27 2014-02-12 ブルックス オートメーション インコーポレイテッド Position feedback for self-bearing motors
US8283813B2 (en) 2007-06-27 2012-10-09 Brooks Automation, Inc. Robot drive with magnetic spindle bearings
JP5446865B2 (en) * 2007-09-04 2014-03-19 株式会社安川電機 Magnetic levitation system
CN101800460B (en) * 2009-12-23 2012-07-11 哈尔滨工业大学 Short-stroke direct current planar motor integrating winding structure
KR101488249B1 (en) * 2014-01-27 2015-01-30 연세대학교 산학협력단 Untethered Biped Walking Machine Using Air-Core Coils
WO2017126577A1 (en) * 2016-01-22 2017-07-27 Tdk株式会社 Actuator
WO2020154816A1 (en) * 2019-02-01 2020-08-06 Zaber Technologies Inc. Adjustable magnetic counterbalance
IT202000014239A1 (en) 2020-06-15 2021-12-15 Biometic S R L TUNNEL COMPUTERIZED TOMOGRAPH AND METHOD FOR PERFORMING A COMPUTERIZED TOMOGRAPHY OF AN OBJECT
JP7044844B2 (en) * 2020-09-18 2022-03-30 株式会社神戸製鋼所 Electric motor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5439562B2 (en) * 1972-07-05 1979-11-28
JPH0628502B2 (en) * 1984-10-11 1994-04-13 株式会社日立製作所 Linear motor
US4706007A (en) * 1985-06-25 1987-11-10 Kabushiki Kaisha Yaskawa Denki Seisakusho Surface pulse motor

Also Published As

Publication number Publication date
WO1999004481A1 (en) 1999-01-28
JP3829335B2 (en) 2006-10-04

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase