WO1998049725A1 - Procede de realisation de billes de connexion sur des circuits ou des composants electroniques - Google Patents
Procede de realisation de billes de connexion sur des circuits ou des composants electroniques Download PDFInfo
- Publication number
- WO1998049725A1 WO1998049725A1 PCT/FR1998/000837 FR9800837W WO9849725A1 WO 1998049725 A1 WO1998049725 A1 WO 1998049725A1 FR 9800837 W FR9800837 W FR 9800837W WO 9849725 A1 WO9849725 A1 WO 9849725A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- stencil
- balls
- implementing
- reflow
- component
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 48
- 238000005476 soldering Methods 0.000 claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 239000007788 liquid Substances 0.000 claims abstract description 16
- 239000011230 binding agent Substances 0.000 claims abstract description 10
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- 230000008023 solidification Effects 0.000 claims description 17
- 238000007650 screen-printing Methods 0.000 claims description 13
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- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 239000003365 glass fiber Substances 0.000 claims description 3
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- 238000004581 coalescence Methods 0.000 description 6
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4853—Connection or disconnection of other leads to or from a metallisation, e.g. pins, wires, bumps
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- H—ELECTRICITY
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/11—Manufacturing methods
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
- H05K3/3485—Applying solder paste, slurry or powder
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/11001—Involving a temporary auxiliary member not forming part of the manufacturing apparatus, e.g. removable or sacrificial coating, film or substrate
- H01L2224/11003—Involving a temporary auxiliary member not forming part of the manufacturing apparatus, e.g. removable or sacrificial coating, film or substrate for holding or transferring the bump preform
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/1147—Manufacturing methods using a lift-off mask
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/118—Post-treatment of the bump connector
- H01L2224/11848—Thermal treatments, e.g. annealing, controlled cooling
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/01—Chemical elements
- H01L2924/01022—Titanium [Ti]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01039—Yttrium [Y]
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01057—Lanthanum [La]
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- H01L2924/01—Chemical elements
- H01L2924/01058—Cerium [Ce]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01327—Intermediate phases, i.e. intermetallics compounds
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0335—Layered conductors or foils
- H05K2201/035—Paste overlayer, i.e. conductive paste or solder paste over conductive layer
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/04—Soldering or other types of metallurgic bonding
- H05K2203/043—Reflowing of solder coated conductors, not during connection of components, e.g. reflowing solder paste
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0548—Masks
- H05K2203/0557—Non-printed masks
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0562—Details of resist
- H05K2203/0577—Double layer of resist having the same pattern
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1216—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by screen printing or stencil printing
Definitions
- the present invention relates to a method for producing and soldering electrical connection balls on reception areas for electrical connection of circuits or electronic components.
- the present invention also relates to the device for implementing the method which is the subject of the invention. invention.
- the second known technique consists in making the beads directly from reflow of 0 solder cream deposited by screen printing on the receiving areas of the component.
- solder cream consists of approximately 50% by volume of metallic part and the rest of organic part or flux necessary to transfer the cream properly by screen printing giving it the appropriate rheology. After reflow, only the metallic part of the volume deposited in each opening of the stencil participated in the constitution of the ball by coalescence.
- the desired dimensional requirements of the balls and the PAS between the balls lead to defining a maximum opening of the stencil and the thickness thereof.
- Patent EP 0 753 988 describes a process for forming solder balls on a substrate. This method consists in using one or more stencils (10) provided with orifices (14) into which solder cream (18) is introduced. The bottom of the stencil holes is obstructed by a thin plate (12). The cream filling the orifices is melted to separate the metallic part, suitable for soldering, from the impurities (24) which rise to the surface. To prevent the weld plug formed from falling off when removing the plate (12), the upper end of the holes in the stencil is covered by another plate (26) and then the stencil is turned over.
- the plate (12) can then be removed. After a further inversion, the orifices of the stencil are positioned above the parts to be welded. When the temperature rises, the solder plugs melt and settle on the area to be welded in the form of a ball.
- US Pat. No. 5,346,118 describes a method of assembling by soldering electronic components and a method of forming solder balls on one or both components with a view to their assembly.
- solder balls are produced from a stencil provided with conical or pyramidal orifices filled with soldering cream.
- This patent gives a lot of information on the shape of the holes in the stencil and on the composition of the soldering cream, but imprecisely defines the process for producing the beads.
- This patent US Pat. No. 5,346,118 describes a means for depositing enough solder paste on a substrate to form beads of sufficient size by reflow.
- the inventor found a means allowing the release of the soldering cream by means of conical openings.
- This patent shows a conventional and known screen printing which consists in: 1 ° - depositing the soldering cream by screen printing on a substrate; 2 ° - remove the stencil at room temperature and before reflow; 3 ° - carry out the reflow.
- US Patent 5,658,827 describes a method for producing solder balls on a substrate by using a stencil.
- the ball will naturally seek an equilibrium position and therefore will take a non-spherical position allowing it to balance the surface tensions exerted in this case in a non-symmetrical manner.
- the balls should theoretically find their equilibrium position and adopt perfectly aligned positions and spherical shapes.
- the second reflow is not sufficient in itself, the flow having been denatured and eliminated by cleaning, the result obtained will not be perfect both in terms of the alignment of the balls and their sphericity and / or their height or diameter.
- the invention relates to a method for obtaining very regular balls and with excellent alignment along the axes "x" and "y” defining the plane on which they rest.
- the method according to the invention for producing and soldering electrical connection balls, on reception areas for electrical connection of electronic components is essentially characterized in that:
- a suitable rheology solder cream comprising metallic microbeads capable of agglomerating by coalescence and of brazing on the metallic reception area and a binder;
- the stencil used for this purpose has a thickness and dimensions of opening and spacing between them determined according to the pitch of the balls to be produced and their desired diameter;
- the stencil is held in place on the component and it is separated from the component during or after reflow but before solidification of the balls, the latter still being in the liquid state so that the balls in formation find themselves their position of equilibrium;
- a minimum area of reception area placed opposite the molten alloy is sufficient to retain the molten alloy during removal of the stencil.
- the ball or balls When removing the stencil, the ball or balls deform as a function of the stresses they undergo as a result of friction on the walls of the openings of the stencil as well as by the surface energy of these walls.
- the stencil used by the invention being non-wettable and having a low surface energy, the beads remain attached to their receiving ranges.
- the ball When the ball is released from the opening of the stencil where it was created, it can take its final place by itself perfectly in the center of the reception area and acquire a perfect spherical shape because the molten alloy does not undergoes more mechanical action, neither by the stencil, nor by the binder or flux residues because these are at this time in the liquid state and because they have a density significantly lower than the molten alloy.
- FIG. 3 to 5 show an embodiment of the connection balls according to the method of the invention with a mold stencil
- Figures 10 and 11 show by way of nonlimiting example a device for implementing the method of the invention.
- Figure 1 is shown an operation for producing and soldering an electrical connection ball 1 on a metal receiving surface 2 of an electronic component 3 (not shown to simplify Figure 1 and Figure 2).
- soldering cream with suitable rheology comprising metallic microbeads capable of agglomerating into a ball by hot coalescence during the reflow liquefying the microbeads and of brazing on the reception area 2 and a binder organic or flux which will be denatured by the reflow and which will have to be evacuated after this, when the ball (s) 1 are solidified by a cleaning operation.
- Use is made of at least one stencil 4 having a thickness and dimensions of opening 5 and spacing between them determined according to the pitch of the balls to be produced and their desired diameter.
- the openings 5 of the stencil are filled with soldering cream by means of a doctor blade 6 or equivalent (not shown in Figures 1-2).
- the ball will naturally seek an equilibrium position and therefore will take a non-spherical position allowing it to balance the surface tensions as well as the stresses induced by the mold being exerted in this case not symmetrical.
- the balls should theoretically find their equilibrium position and adopt perfectly aligned positions and spherical shapes.
- the second reflow is not sufficient in itself, the flow having been denatured and eliminated by cleaning, the result obtained will not be perfect both in terms of the alignment of the balls and their sphericity and / or their height or diameter.
- this two refusal process appears to be particularly complex.
- the final result obtained is only apparently satisfactory; in fact, on the one hand, the two successive thermal reflow cycles can be detrimental to the service life of the component, in particular if a chip is mounted on the substrate before the production of the beads and, on the other hand, two successive fusions are likely to increase the thickness of intermetallic between the ball and the receiving range, which can affect the mechanical strength of the ball on the reception range.
- Figure 1 shows an offset of the stencil in the case of a pitch of 1 mm; in this case, the ball is well hung on the reception area.
- Figure 2 shows an offset of the stencil of a value identical to Figure 1; but in this case, it is a step of 0.8 mm; the surface hanging on the beach is much smaller.
- the misalignment between the stencil and the receiving surfaces of the component can result from a bad positioning of the stencil or be linked to the differential expansion between the stencil and the substrate during the heating generating the reflow.
- these misalignments of the balls and these differences in height of the balls are generated by the mechanical stresses imposed on the one hand by the flux residues (represented at 7 in Figures 1/2 ) and on the other hand by the walls of the mold stencil, the constraints being shown diagrammatically by the arrows when the latter separates from the microbead alloy during the transition to the liquid state and which occupies in the opening 5 of the mold part of the cavity, which generates stresses during solidification, on the molten alloy.
- a single operation of reflowing the cream by heating is carried out.
- the stencil-mold 4 is held in place on the component and it is removed or separated from the component 3 during or after the remelting but before solidification of the balls, the latter being still in the liquid state so that they find their own position of equilibrium.
- a minimum area of reception area 2 placed opposite the molten alloy is sufficient to retain the ball when removing the stencil.
- FIG. 3 is shown the filling with the soldering cream of the openings 5 of the stencil 4 placed on the electronic component or substrate, the openings being opposite the metallic reception areas 2.
- FIG. 4 shows diagrammatically the formation of the balls 1 by coalescence during the hot reflow, the stencil-mold 4 being in place.
- Figure 5 shows schematically the removal of the stencil-mold 4 during or after remelting and before solidification of the balls 1.
- the molten alloy in contact with the receiving area wettable metal takes the form of a sphere or a spherical cap because it is in this configuration that the surface tensions are reduced to the minimum; on the other hand if the slightest mechanical stress is applied to the molten alloy, it will take a random shape and solidify in this random shape.
- oxides are present during remelting, they will also cause stresses which will deform the spherical cap, hence the need for flux to strip the surfaces.
- the flux or binder which has been denatured is removed by cleaning.
- FIG. 6 to 9 is shown another embodiment of the invention according to the method of the invention; use is made of a soldering cream as mentioned above which is deposited on the reception areas of the component by screen printing.
- the first stencil 4 said to be thick is the one used in the previous case.
- the second so-called transfer stencil 8 is a very fine stencil.
- the thickness H1 of the first stencil and the dimensions of its openings are determined according to the PAS of the balls to be produced and their diameter.
- the openings of the second stencil 8 are identical in shape to those of the first stencil 4 with which they overlap.
- the second stencil 8 is removed. A hot reflow is made with the first stencil 4 remaining in place on the component.
- the first stencil is removed before solidification, either after or during the melting, which is commonly called remelting during the liquid phase of the beads and cleaning of the denatured binder is carried out after the beads have solidified.
- the first stencil 4 according to the invention is capable of withstanding the reflow temperature. It must be made of a material which cannot be soldered with the cream.
- the first stencil is made of stainless metal, for example titanium or steel or a synthetic material, for example teflon.
- the first stencil is made of stainless metal, for example stainless steel or titanium, or of a synthetic material, for example of teflon, or it can be made of a polyamide resin or of an epoxy resin, or of a non-wettable and non-solderable synthetic material loaded. glass fibers.
- the stencil 4 can be of the same nature or of an equivalent nature to that of the substrate or component 3 to which it is applied.
- the stencil 4 is made of a material having a low surface energy.
- the second stencil 8 can be of any material traditionally used for the production of stencils, for example metal or polyester.
- the second stencil has the function of allowing a transfer completely filling the openings of the first stencil by masking certain areas, if desired.
- the ball in the liquid state deforms according to the stresses it undergoes due to friction on the walls of the cavity formed by the corresponding opening of the stencil- mold as well as by the surface energy of the walls, however, the stencil according to the invention not being wettable by the alloy in the liquid state, the ball remains attached to the reception area.
- the method according to the invention allows for example the production of beads in the following configurations:
- the JEDEC standard requires a respective height of balls of 0.60 and 0.50 mm with a tolerance of plus or minus 0.1.
- Ts Upper tolerance
- Ti Lower tolerance
- ⁇ y Standard deviation
- x Average of values
- Cp process capability
- the values of Cpk> 1.33 show that the process allows the dimension of the spherical caps to be well controlled.
- the stencil 4 or stencil-mold or stencil of thickness is made of a non-wettable synthetic material of the epoxy resin or polymide or teflon resin loaded or not with glass fibers. Fiberglass provides rigidity to the stencil even in the smallest thicknesses.
- the epoxy resin or the polymer resin has the advantage of being a product with low surface energy. The higher the surface energy of a material, the more a liquid will adhere to it and vice versa.
- the surface energy of metals is relatively large, greater than 1000 millijoules per m2 while organic materials of the epoxy resin or polymide resin type have a surface energy of the order of 50 millijoules per m2, which allows a easy separation of the molten alloy and the stencil.
- metallic materials can exhibit physical and chemical heterogeneities (cracks, oxidations) which can cause the molten alloy to become attached.
- stencils made of materials of the above-mentioned type, epoxy resin or polymide is that the substrate used as the base of the components is generally of the same nature or equivalent, for example made of epoxy resin or polymide and that it has a coefficient of equal expansion or close to that of the stencil material.
- This arrangement of the invention makes it possible, when the substrate and stencil assembly is subjected to the reflow temperature which is of the order of 220 ° centigrade, to avoid a problem of differential expansion generating misalignment which would not fail to occur. show if the substrate and stencil materials had different coefficients of expansion.
- Figures 10 and 11 is shown by way of non-limiting example a device for implementing the method of the invention.
- the device comprises a molded stencil 4 and an upper stencil 8, as in the exemplary embodiment of FIGS. 6 to 9.
- the stencil 4 is suspended on a mesh fabric of stainless steel wires 9 itself stretched over a rigid frame 9A preferably metal.
- the whole is perfectly flat and undeformable; only the stencil 4 is deformed in the same plane by surface expansion when it is brought to temperature.
- the circuit 3 which must receive the balls 1 is placed on a support 10 to compensate for the differences in height and to be located with precision.
- the support 10 is itself placed on a plate 11 for handling the assembly in the screen printing machine and in the oven.
- the frame 9A acting as a stencil holder, is connected to the plate 11 by an articulation 12.
- the stencil 4 being suspended on the stainless steel mesh 9 of the frame 9A, it can be perfectly plated on the substrate during the screen printing and reflow phase of the soldering cream, which makes it possible to obtain that the alloy microbeads cannot migrate under the stencils 4 and 8 and this gives the certainty that the solder cream present in the openings of the stencil 4, always remains in contact with the reception areas to allow an exchange of calories and the attachment between the reception areas and the solder cream.
- the alloy ball which will be formed will be surrounded by flux residues and will remain in the stencil. It is therefore important that the stencil of thickness 4 or stencil-mold is pressed on the substrate 3, while leaving a relative freedom of movement between the stencil and the substrate in the x, y plane in order to avoid any stress during the rise in temperature, in particular if it is not perfectly homogeneous over the entire surface.
- the stainless steel mesh 9 stretched over the frame 9 allows this plating with freedom of movement.
- This stainless steel mesh 9 is an elastic connection between the support frame 9A and the stencil of thickness 4 which therefore always remains flat and taut and does not curl.
- this stainless steel mesh plays the role of thermal brake between the frame and the stencil thickness, that is to say that if the support frame which has a significant thermal mass is not at the same temperature as the stencil d 'thickness and the substrate, it will not thermally disturb the stencil thickness.
- the stencil holder 9A is pressed onto the support 11.
- the stencil 4 is under pressure on the circuit 3.
- This assembly is oriented towards the reflow oven, an appropriate thermal profile makes it possible to bring the solder cream to the liquid state.
- the part must be warmed up in a controlled manner to allow progressive evaporation of the solvents present in the soldering cream without boiling and that, on the other hand, the flux residues can rise to the surface, if these two points are not reached, the alloy will not remain in contact with the reception area and consequently, the alloy ball will remain hung in the stencil. Cooling should also be done in a controlled and gradual manner to avoid problems of settling.
- a mechanical device not shown makes it possible to gradually separate the stencil holder 9A from the circuit support 3 by rotation around the joint 12. The balls are thus very gently separated from the stencil from front to back. After the end of the separation, the whole must still be kept in fusion for at least 5 seconds so that the last separated balls can reposition well and form.
- the cleaning is carried out preferably after the separation of the circuit from its support. Each part is cleaned separately.
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54666398A JP2002514352A (ja) | 1997-04-28 | 1998-04-27 | 電子回路または電子部品の電気接続接触面に、電気接続ビードを作成してはんだ付けする方法、およびそれを実施するための装置 |
CA002287249A CA2287249A1 (fr) | 1997-04-28 | 1998-04-27 | Procede de realisation de billes de connexion sur des circuits ou des composants electroniques |
AU75356/98A AU7535698A (en) | 1997-04-28 | 1998-04-27 | Method for making connection balls on electronic circuits or components |
EP98922871A EP0979528A1 (fr) | 1997-04-28 | 1998-04-27 | Procede de realisation de billes de connexion sur des circuits ou des composants electroniques |
US09/403,598 US6689412B1 (en) | 1997-04-28 | 1998-04-27 | Method for making connection balls on electronic circuits or components |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9705435A FR2762714A1 (fr) | 1997-04-28 | 1997-04-28 | Procede de realisation et de brasage de billes de connexion electrique sur des composants electroniques et materiel a cet effet |
FR97/07819 | 1997-06-24 | ||
FR9707819A FR2762715B1 (fr) | 1997-04-28 | 1997-06-24 | Procede de realisation et de brasage de billes de connexion electrique sur des plages d'accueil de raccordement electrique de circuits ou de composants electroniques et dispositif de mise en oeuvre |
FR97/05435 | 1997-06-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1998049725A1 true WO1998049725A1 (fr) | 1998-11-05 |
Family
ID=26233500
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/FR1998/000837 WO1998049725A1 (fr) | 1997-04-28 | 1998-04-27 | Procede de realisation de billes de connexion sur des circuits ou des composants electroniques |
Country Status (7)
Country | Link |
---|---|
US (1) | US6689412B1 (fr) |
EP (1) | EP0979528A1 (fr) |
JP (1) | JP2002514352A (fr) |
AU (1) | AU7535698A (fr) |
CA (1) | CA2287249A1 (fr) |
FR (1) | FR2762715B1 (fr) |
WO (1) | WO1998049725A1 (fr) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2789541B1 (fr) | 1999-02-05 | 2001-03-16 | Novatec Sa Soc | Procede de realisation de modules electroniques a connecteur a billes ou a preformes integre brasables sur circuit imprime et dispositif de mise en oeuvre |
JP2001044607A (ja) * | 1999-07-30 | 2001-02-16 | Fuji Mach Mfg Co Ltd | 半田バンプ形成方法および装置 |
US6593543B2 (en) * | 2000-07-20 | 2003-07-15 | David Benderly | Gemstone marking system and method |
DE10310293A1 (de) * | 2003-03-10 | 2004-09-23 | Robert Bosch Gmbh | Vorrichtung zum Laserbohren |
JP2006173460A (ja) * | 2004-12-17 | 2006-06-29 | Renesas Technology Corp | 半導体装置の製造方法 |
CN100382266C (zh) * | 2005-05-17 | 2008-04-16 | 华为技术有限公司 | 球栅阵列封装基板植球方法及设备 |
US7846775B1 (en) * | 2005-05-23 | 2010-12-07 | National Semiconductor Corporation | Universal lead frame for micro-array packages |
US20070270049A1 (en) * | 2006-05-19 | 2007-11-22 | Suyin Corporation | Method for forming electrical contacts on an electrical connector |
CN101197296B (zh) * | 2006-12-04 | 2010-08-11 | 中芯国际集成电路制造(上海)有限公司 | 无助焊剂的凸点回流工艺 |
US8319344B2 (en) * | 2008-07-14 | 2012-11-27 | Infineon Technologies Ag | Electrical device with protruding contact elements and overhang regions over a cavity |
KR101686312B1 (ko) * | 2012-04-17 | 2016-12-13 | 가부시키가이샤 다니구로구미 | 땜납 범프 및 그 형성방법과 땜납 범프를 구비한 기판 및 그 제조방법 |
CN103855041B (zh) * | 2012-12-06 | 2017-12-22 | 北京普源精电科技有限公司 | 一种芯片植球装置及方法 |
DE102013211634A1 (de) * | 2013-06-20 | 2014-12-24 | Osram Opto Semiconductors Gmbh | Verfahren zum Herstellen eines Konversionselements |
JP6320066B2 (ja) * | 2014-02-13 | 2018-05-09 | イビデン株式会社 | ボール搭載用マスクおよびボール搭載装置 |
US9982967B2 (en) | 2015-02-18 | 2018-05-29 | E I Du Pont De Nemours And Company | Composite ballistic resistant laminate |
US9842818B2 (en) * | 2016-03-28 | 2017-12-12 | Intel Corporation | Variable ball height on ball grid array packages by solder paste transfer |
US10304799B2 (en) | 2016-12-28 | 2019-05-28 | Intel Corporation | Land grid array package extension |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0469848A2 (fr) * | 1990-07-30 | 1992-02-05 | Industrial Development Corporation Of South Africa Limited | Montage de circuits intégrés aux plaquettes à circuits imprimés |
US5346118A (en) * | 1993-09-28 | 1994-09-13 | At&T Bell Laboratories | Surface mount solder assembly of leadless integrated circuit packages to substrates |
US5587342A (en) * | 1995-04-03 | 1996-12-24 | Motorola, Inc. | Method of forming an electrical interconnect |
EP0753988A2 (fr) * | 1995-07-13 | 1997-01-15 | Motorola, Inc. | Procédé de formage de perles de soudure sur un substrat |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5539153A (en) * | 1994-08-08 | 1996-07-23 | Hewlett-Packard Company | Method of bumping substrates by contained paste deposition |
CA2135508C (fr) | 1994-11-09 | 1998-11-03 | Robert J. Lyn | Methode de formation de globules de soudure sur les substrats semiconducteurs |
US5872051A (en) * | 1995-08-02 | 1999-02-16 | International Business Machines Corporation | Process for transferring material to semiconductor chip conductive pads using a transfer substrate |
US5934545A (en) * | 1997-02-21 | 1999-08-10 | Gordon; Thomas A. | Ball placement method and apparatus for forming a ball grid array |
-
1997
- 1997-06-24 FR FR9707819A patent/FR2762715B1/fr not_active Expired - Fee Related
-
1998
- 1998-04-27 JP JP54666398A patent/JP2002514352A/ja active Pending
- 1998-04-27 AU AU75356/98A patent/AU7535698A/en not_active Abandoned
- 1998-04-27 CA CA002287249A patent/CA2287249A1/fr not_active Abandoned
- 1998-04-27 US US09/403,598 patent/US6689412B1/en not_active Expired - Lifetime
- 1998-04-27 WO PCT/FR1998/000837 patent/WO1998049725A1/fr active Application Filing
- 1998-04-27 EP EP98922871A patent/EP0979528A1/fr not_active Withdrawn
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0469848A2 (fr) * | 1990-07-30 | 1992-02-05 | Industrial Development Corporation Of South Africa Limited | Montage de circuits intégrés aux plaquettes à circuits imprimés |
US5346118A (en) * | 1993-09-28 | 1994-09-13 | At&T Bell Laboratories | Surface mount solder assembly of leadless integrated circuit packages to substrates |
US5587342A (en) * | 1995-04-03 | 1996-12-24 | Motorola, Inc. | Method of forming an electrical interconnect |
EP0753988A2 (fr) * | 1995-07-13 | 1997-01-15 | Motorola, Inc. | Procédé de formage de perles de soudure sur un substrat |
Also Published As
Publication number | Publication date |
---|---|
FR2762715A1 (fr) | 1998-10-30 |
US6689412B1 (en) | 2004-02-10 |
FR2762715B1 (fr) | 2000-07-21 |
EP0979528A1 (fr) | 2000-02-16 |
CA2287249A1 (fr) | 1998-11-05 |
JP2002514352A (ja) | 2002-05-14 |
AU7535698A (en) | 1998-11-24 |
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