WO1998045751B1 - System and method for efficient manufacturing of liquid crystal displays - Google Patents
System and method for efficient manufacturing of liquid crystal displaysInfo
- Publication number
- WO1998045751B1 WO1998045751B1 PCT/US1998/006587 US9806587W WO9845751B1 WO 1998045751 B1 WO1998045751 B1 WO 1998045751B1 US 9806587 W US9806587 W US 9806587W WO 9845751 B1 WO9845751 B1 WO 9845751B1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- liquid crystal
- forming
- sacrificial material
- permeable
- sacrificial
- Prior art date
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract 14
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000463 material Substances 0.000 claims abstract 31
- 239000004020 conductor Substances 0.000 claims 7
- 238000000059 patterning Methods 0.000 claims 3
- 238000000151 deposition Methods 0.000 claims 2
- 230000005684 electric field Effects 0.000 claims 2
- 230000001939 inductive effect Effects 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
Abstract
The present invention enables efficient microfabrication of a fully integrated liquid crystal display device (20). Initially, a sacrificial layer is patterned, and portions of the sacrificial layer are removed to expose portions of the underlying layer supporting the sacrificial layer (37). Then, a permeable layer is formed on the sacrificial layer (35), thereby filling in the space vacated by the removed portions of the sacrificial layer (37). The structure is heated and the material of the sacrificial layer is allowed to dissolve into and dissipate through the permeable layer in order to leave a cavity (37). Once the sacrificial layer is removed, the permeable layer (35) is supported by the portion of the permeable layer filling in the space vacated by the removed portions of the sacrificial layer. Accordingly, a monolithic liquid crystal display (20) is easily and reliably formed without having to etch an opening in the structure to allow the sacrificial material to egress from the structure and without having to separately attach mechanical components to each liquid crystal display manufactured.
Claims
1. A method for microfabricating a liquid crystal display, comprising the steps of:
forming a conductive pad (27) on a base (21); forming sacrificial material (31) on said conductive pad (27); patterning said sacrificial material (31) to expose a portion of said base (21); forming permeable material (35) on said sacrificial material (31) and said exposed portion of said base (21);
dissipating said sacrificial material (31) through said permeable material (35) in order to form a cavity (37); filling said cavity (37) with liquid crystal; forming a transparent conductor (42); and
creating a voltage difference between said transparent conductor (42) and said conductive pad (27) to apply an electric field across said liquid crystal.
2. The method of claim 1, further comprising the step of dissolving said sacrificial material (31) into said permeable material (35).
3. A method for forming a fully integrated liquid crystal display, comprising the steps of:
depositing a sacrificial material (31) on a surface of a microfabricated structure
(21); depositing a permeable layer (35) on said sacrificial material (31);
dissipating said sacrificial material (31) through said permeable layer (35) in order to form a cavity (37) within said liquid crystal display; inserting liquid crystal into said cavity (37); forming a transparent conductor (42) and a conductive pad (27); and inducing an electric field to appear across said liquid crystal by creating a voltage difference between said transparent conductor (42) and said conductive pad (27).
4. The method of claim 3, further comprising the step of patterning said sacrificial material (31 ) to expose said surface.
5. The method of claim 3, further comprising the step of dissolving said sacrificial material (31) into said permeable layer.
6. The method of claim 3, forming said transparent conductor (42) with said permeable material (31).
7. A method for microfabricating a liquid crystal display, comprising the steps of: forming a conductive pad (27) on a base (21) of said liquid crystal display; forming sacrificial material (31) on said conductive pad (27); forming permeable material (35) on said sacrificial material (31);
dissolving said sacrificial material (31) into said permeable material (35) in order to form a
cavity (37); and filling said cavity (37) with liquid crystal.
8. The method of claim 7, further comprising the steps of: patterning said sacrificial material (31) to form holes (37) in said sacrificial material (31); and filling said holes (37) with said permeable material (31) during said forming permeable
material step.
9. The method of claim 7, further comprising the step of dissipating said
sacrificial material (31) from said permeable material (35).
41
10. The method of claim 7, further comprising the steps of: forming a transparent conductor (42) on said permeable material (35);
polishing said permeable material (35) in order to reduce said permeable material (35); and forming other permeable material (35) on said transparent conductor (42).
42
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP54291398A JP2001519049A (en) | 1997-04-04 | 1998-04-03 | Efficient manufacturing system and manufacturing method for liquid crystal display |
| CA002285924A CA2285924C (en) | 1997-04-04 | 1998-04-03 | System and method for efficient manufacturing of liquid crystal displays |
| KR1019997009012A KR20010005935A (en) | 1997-04-04 | 1998-04-03 | System and method for efficient manufacturing of liquid crystal displays |
| EP98915254A EP0972226A4 (en) | 1997-04-04 | 1998-04-03 | System and method for efficient manufacturing of liquid crystal displays |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US4251597P | 1997-04-04 | 1997-04-04 | |
| US60/042,515 | 1997-04-04 | ||
| US09/054,188 | 1998-04-02 | ||
| US09/054,188 US6141072A (en) | 1997-04-04 | 1998-04-02 | System and method for efficient manufacturing of liquid crystal displays |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO1998045751A1 WO1998045751A1 (en) | 1998-10-15 |
| WO1998045751B1 true WO1998045751B1 (en) | 1998-12-17 |
Family
ID=26719322
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US1998/006587 WO1998045751A1 (en) | 1997-04-04 | 1998-04-03 | System and method for efficient manufacturing of liquid crystal displays |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US6141072A (en) |
| EP (1) | EP0972226A4 (en) |
| JP (1) | JP2001519049A (en) |
| KR (1) | KR20010005935A (en) |
| CA (1) | CA2285924C (en) |
| WO (1) | WO1998045751A1 (en) |
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1998
- 1998-04-02 US US09/054,188 patent/US6141072A/en not_active Expired - Fee Related
- 1998-04-03 EP EP98915254A patent/EP0972226A4/en not_active Withdrawn
- 1998-04-03 JP JP54291398A patent/JP2001519049A/en active Pending
- 1998-04-03 KR KR1019997009012A patent/KR20010005935A/en not_active Application Discontinuation
- 1998-04-03 CA CA002285924A patent/CA2285924C/en not_active Expired - Fee Related
- 1998-04-03 WO PCT/US1998/006587 patent/WO1998045751A1/en not_active Application Discontinuation
-
2000
- 2000-09-25 US US09/669,180 patent/US6469761B1/en not_active Expired - Fee Related
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