WO1998034579A1 - Procede de production d'eau gazeifiee - Google Patents

Procede de production d'eau gazeifiee Download PDF

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Publication number
WO1998034579A1
WO1998034579A1 PCT/JP1998/000458 JP9800458W WO9834579A1 WO 1998034579 A1 WO1998034579 A1 WO 1998034579A1 JP 9800458 W JP9800458 W JP 9800458W WO 9834579 A1 WO9834579 A1 WO 9834579A1
Authority
WO
WIPO (PCT)
Prior art keywords
carbon dioxide
dioxide gas
carbonated spring
producing
hollow fiber
Prior art date
Application number
PCT/JP1998/000458
Other languages
English (en)
Japanese (ja)
Inventor
Makoto Uchida
Masanao Kobuke
Kenji Watari
Yoshinori Nagasaka
Original Assignee
Mitsubishi Rayon Co., Ltd.
Mitsubishi Rayon Engineering Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP35114197A external-priority patent/JPH11179178A/ja
Application filed by Mitsubishi Rayon Co., Ltd., Mitsubishi Rayon Engineering Co., Ltd. filed Critical Mitsubishi Rayon Co., Ltd.
Priority to EP98901501A priority Critical patent/EP0968699B1/fr
Priority to DE69807851T priority patent/DE69807851T2/de
Priority to AU57796/98A priority patent/AU5779698A/en
Publication of WO1998034579A1 publication Critical patent/WO1998034579A1/fr
Priority to US09/368,168 priority patent/US6164632A/en

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Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
    • A61H33/00—Bathing devices for special therapeutic or hygienic purposes
    • A61H33/02—Bathing devices for use with gas-containing liquid, or liquid in which gas is led or generated, e.g. carbon dioxide baths
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
    • A61H33/00—Bathing devices for special therapeutic or hygienic purposes
    • A61H33/60—Components specifically designed for the therapeutic baths of groups A61H33/00
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
    • A61H33/00—Bathing devices for special therapeutic or hygienic purposes
    • A61H33/14—Devices for gas baths with ozone, hydrogen, or the like
    • A61H2033/145—Devices for gas baths with ozone, hydrogen, or the like with CO2

Definitions

  • the present invention relates to a method for producing a carbonated spring in which a physiologically effective carbonated spring can be easily obtained at home or the like as a carbonated spring having a predetermined carbon dioxide gas concentration.
  • Carbonated springs have been used in hot springs and other public baths for a long time because of their excellent thermal insulation. It is considered that the warming action of the carbonated spring is basically because the body environment is improved by the peripheral vasodilation of the carbon dioxide contained. In addition, the percutaneous invasion of carbon dioxide causes an increase and expansion of the capillary bed and improves blood circulation in the skin. Therefore, it is said to be effective in treating regressive lesions and peripheral circulatory disorders.
  • carbonated springs are obtained by methods such as sending carbon dioxide gas into the bathtub in the form of bubbles, a chemical method of reacting carbonates and acids, and a method of pressurizing hot water and carbon dioxide gas in a tank for a certain period of time.
  • Japanese Patent Application Laid-Open No. 2-27959-58 proposes a method in which carbon dioxide gas is supplied through a hollow fiber semipermeable membrane and absorbed in water.
  • An object of the present invention is to provide a method for easily producing a carbonated spring having a specific concentration at home or the like.
  • the present invention relates to a method for producing a carbonated spring by supplying carbon dioxide gas to a carbon dioxide gas dissolving unit and dissolving the carbon dioxide gas in raw water, wherein the pH of the carbonated spring generated by the carbon dioxide dissolving unit is measured. Calculates the carbon dioxide gas concentration data of the carbonated spring generated from the value of the raw water and the value of the raw water power, and calculates the carbon dioxide gas to the carbon dioxide dissolver so that the carbon dioxide gas concentration data becomes the preset target carbon dioxide gas concentration value.
  • This is a method for producing a carbonated spring characterized by adjusting the gas supply.
  • FIG. 1 is a flow sheet showing an example of an apparatus used in the method for producing a carbonated spring of the present invention
  • FIG. 2 is a graph showing the relationship between the concentration of carbon dioxide in the carbonated spring, pH, and alkalinity of raw water.
  • FIG. 3 is a schematic diagram of a three-layer composite hollow fiber membrane preferably used in the method for producing a carbonated spring of the present invention
  • FIG. 4 is another diagram of the apparatus used in the method for producing a carbonated spring of the present invention. It is a flow sheet showing an example.
  • FIG. 1 is an example of a flow sheet showing a method for producing a carbonated spring according to the present invention.
  • Hot water obtained by heating raw water such as tap water is stored in a hot water tank 3 via a motor-operated valve 1 and a pre-filter 2, from which the water pump 4 traps debris in the hot water.
  • Guided to vessel 6 Carbon dioxide gas is a carbon dioxide gas cylinder From 7, the gas is supplied to the carbon dioxide dissolver via a pressure reducing valve 8, an on-off valve 9 and a control valve 10 as a carbon dioxide gas supply amount adjusting means.
  • the carbon dioxide gas dissolver used in this example is configured with a built-in membrane module provided with a hollow fiber membrane, and the carbon dioxide gas is guided to the outer surface of the hollow fiber membrane in the dissolver.
  • Raw water flowing through the hollow part of the hollow fiber membrane comes into contact with the raw fiber through the membrane surface of the hollow fiber membrane and dissolves in the raw water.
  • the raw water becomes a carbonated spring and is discharged from the carbon dioxide gas dissolver.
  • the gas-liquid contact area can be increased and the carbon gas can be dissolved with high efficiency.
  • a membrane module a hollow fiber membrane module, a flat membrane module, a spiral type module and the like can be used. Above all, the hollow fiber membrane module can dissolve carbon dioxide gas with the highest efficiency.
  • the pH of the carbonated spring generated by the carbon dioxide dissolver in this way is measured by the pH sensor 11.
  • the concentration of carbon dioxide in the carbonated spring and the pH of the carbonated spring have a certain relationship, but the concentration of carbon dioxide in the carbonated spring cannot be uniquely determined from the pH value. In other words, as shown in Fig.
  • the relationship between the concentration of carbon dioxide and the pH of the carbonated spring changes significantly depending on the alkalinity of the raw water. For this reason, in the method of the present invention, the PH value of the generated carbonated spring measured by the pH sensor and the value of the total power of the raw water are input to the computing unit, and the real power shown in FIG. Using the relationship between the temperature and the pH value, the concentration of carbon dioxide gas is calculated and output.
  • the raw water is water obtained from a constant water source such as tap water
  • the value of the raw water does not fluctuate so much over time. Therefore, once the carbonated spring production equipment is installed and put into operation, once the raw water power level is measured, that value can be used thereafter.
  • the alkalinity of the raw water may be measured and the value may be input to the computing unit.
  • alkalinity according to the present invention OH @ - is included in the raw water, C 0 3 2 -, HC 0 3 - is one way to view the content of the component which consumes acid such as, p H 4.8
  • Adoption of alkalinity (M alkalinity) is preferred.
  • the carbon dioxide gas concentration data of the carbonated spring obtained by the calculation in this manner is input to the target carbon dioxide gas desired by the user in advance before the operation of the carbonated spring manufacturing apparatus is started.
  • the amount of carbon dioxide supplied to the carbon dioxide dissolver is adjusted so that a carbon dioxide spring with the target carbon dioxide concentration is generated in comparison with the carbon dioxide concentration.
  • Various methods can be used to adjust the gas supply amount.
  • the gas flow amount control valve 10 is used.
  • the gas supply amount can be adjusted by controlling the gas flow amount control valve.
  • the pH sensor is usually installed near the outlet of the carbon dioxide gas dissolver to eliminate the influence of a control disturbance factor.
  • the measurement accuracy of the PH sensor decreases with time due to contamination by the liquid to be measured, regardless of the installation position, so it is preferable to perform calibration periodically.
  • the pH sensor be calibrated once every one to two weeks.
  • hollow fiber membrane used in the carbon dioxide gas dissolver 9 various kinds of hollow fiber membranes are used as long as they are excellent in gas permeability, and may be a porous membrane or a non-porous membrane.
  • a porous hollow fiber membrane it is preferable that the diameter of the opening pores on the surface is ⁇ 0.1 to 10 m.
  • the most preferred hollow fiber membrane is a composite hollow fiber membrane having a three-layer structure i in which both sides of a thin non-porous layer are sandwiched between porous layers, and specific examples thereof include a three-layer composite membrane manufactured by Mitsubishi Rayon Co., Ltd. Hollow fiber membrane (MH F, trade name).
  • FIG. 3 is a schematic diagram showing an example of such a composite hollow fiber membrane, where 19 is a non-porous layer and 20 is a porous layer.
  • the non-porous layer is a membrane through which gas permeates by a dissolution / diffusion mechanism in the membrane substrate, and forms pores through which gas can permeate in gaseous form like a Knudsen flow. Any material may be used as long as it is not qualitatively included.
  • gas can be supplied and dissolved at any pressure without being released as bubbles into the carbonated spring, and it can be dissolved efficiently, and it can be easily dissolved at any concentration with good controllability. it can.
  • the composite hollow fiber membrane having a three-layer structure is preferable because the non-porous layer is formed as an extremely thin film having excellent gas permeability, and is formed by being protected by the porous layer so as not to be easily damaged.
  • the pH can be measured with high accuracy.
  • the thickness of the hollow fiber membrane is preferably from 10 to 150 m. If it is less than 1 m, the strength of the membrane tends to be insufficient, and if it exceeds 150 m, the permeation rate of carbon dioxide gas decreases and the dissolution efficiency tends to decrease.
  • the thickness of the non-porous membrane is preferably 3 to 2 m. If the thickness is less than 0.3 im, the film is liable to be deteriorated, and if the film is deteriorated, a leak occurs. On the other hand, if it exceeds 2 m, the permeation rate of carbon dioxide gas will decrease and the dissolution efficiency will decrease.
  • Preferred examples of the hollow fiber membrane material include silicone-based, polyolefin-based, polyester-based, polyamide-based, polyimide-based, polysulfone-based, cellulose-based, and polyurethane-based membranes.
  • Preferred materials for the non-porous membrane of the composite hollow fiber membrane having a three-layer structure include polyurethane, polyethylene, polypropylene, poly (4-methylpentene-11), polydimethylsiloxane, polyethylcellulose, and polyphenylene oxide. Polyurethane is particularly preferred because it has good film-forming properties and has a small amount of eluted substances.
  • the inner diameter of the hollow fiber membrane is preferably from 50 to 100 m. If it is less than 50 m, the flow resistance of the carbon dioxide gas flowing through the hollow fiber membrane becomes large, and it becomes difficult to supply the carbon dioxide gas. On the other hand, when the length exceeds 100 m, the size of the dissolver increases, and the size is not reduced.
  • a hollow fiber membrane is used in a carbon dioxide gas dissolver, a method in which carbon dioxide gas is supplied to the hollow side of the hollow fiber membrane and raw water is supplied to the outer surface side to dissolve the carbon dioxide gas, and an outer surface of the hollow fiber membrane There is a method in which carbon dioxide is supplied to the side and raw water is supplied to the hollow side to dissolve the carbon dioxide.
  • carbon dioxide gas is supplied to the outer surface of the hollow fiber membrane and raw water is supplied to the hollow side to dissolve carbon dioxide, the concentration of carbon dioxide in hot water becomes high regardless of the type of membrane module. Is preferred because it can be dissolved in
  • a carbon dioxide gas dissolver having a diffuser means in which a diffuser made of a porous body is provided at the bottom in the carbon dioxide gas dissolver may be used.
  • the material and shape of the porous body disposed in the air diffuser may be of any type, but the porosity, that is, the volume ratio of the voids present in the porous body itself to the entire porous body is It is preferably 5 to 70 V o 1%.
  • a lower porosity is more suitable, and preferably 5 to 40 V 01%. If the porosity exceeds 70 vo 1%, it becomes difficult to control the flow rate of the carbon dioxide gas. Bubbles become large and the dissolving efficiency tends to decrease. If the porosity is less than 5 vol 1%, the supply amount of carbon dioxide decreases, and the dissolution of carbon dioxide tends to take a long time.
  • the diameter of the opening on the surface of the porous body is preferably 0.01 to 10 m in order to control the flow rate of the diffused carbon dioxide gas and to form fine bubbles. If the pore size exceeds 1 Q / m, the bubbles rising in the water will be too large, and the dissolution efficiency of carbon dioxide will tend to decrease. On the other hand, if it is less than 0.01 m, the amount of air diffused into water decreases, and it tends to take a long time to obtain a high-concentration carbonated spring.
  • the shape of the porous body is not limited, those having a large surface area are preferable.
  • There are various methods for increasing the surface area such as making the porous body cylindrical, or making the shape like a flat plate to make the surface uneven, but using a porous hollow fiber membrane
  • the material of the porous body includes various materials such as metal, ceramic, and plastic, but is not particularly limited. However, it is not preferable to use a hydrophilic material because hot water enters through the pores on the surface into the air diffuser when the supply of carbon dioxide gas is stopped.
  • FIG. 4 is an example of another flow sheet of the method for producing a carbonated spring of the present invention.
  • hot water is supplied by the water pump 4 and the pressure tank 23 without a hot water tank.
  • the terminal valve is closed, the water pump 4 is still operating and the pressure in the piping rises, but the pressure tank 23 functions as a pressure buffer, and when the pressure reaches the predetermined upper limit, the pressure switch 2 2 works and the water pump 4 stops.
  • the carbon dioxide gas dissolver 6 having a built-in hollow fiber membrane and flowing hot water through the hollow portion of the hollow fiber membrane to dissolve the carbon dioxide gas in contact with the carbon dioxide gas is provided with a pipe 31 for backwashing.
  • a pipe 31 for backwashing When warm water that has passed through the pre-filter flows into the hollow part of the hollow fiber membrane in the dissolver 6 for a long time, scale accumulates at the potting opening end of the hollow fiber membrane, which is the supply port to the hollow fiber membrane hollow part. It was found that the production flow rate gradually decreased. However, it has been found that this scale can be relatively easily removed by flowing the water flow in the carbon dioxide gas dissolver 6 in the opposite direction.
  • the solenoid valve 12 is closed, the on-off valve 25 is opened, and the three-way valve 24 is opened to the backflow washing pipe side to flow hot water in the hollow fiber membrane in the opposite direction.
  • the reverse flow cleaning 1 to 3 kg Z cm 2 about normal water flow pressure 0. Be performed 5-3 and 0 minutes to flow, it depends but 1-4 weeks usage time of the carbon dioxide gas dissolver It is preferable to carry out the inspection about once.
  • the use of a finer filter in the check filter in front of the carbon dioxide dissolver can also prevent the scale from adhering, but it is not practical because the pressure loss becomes too large.
  • the carbon dioxide dissolver 6 is provided with a drain vent at a portion communicating with the outside of the hollow fiber membrane, and the water vapor evaporated from the hollow part of the hollow fiber membrane is condensed and collected at the outside part of the hollow fiber membrane. Open the release valve 26 if necessary and discharge to the outside.
  • An overflow prevention valve 27 is provided upstream of the carbon dioxide gas flow control valve 1 ⁇ . If the carbon dioxide gas leaks for some reason and excess carbon dioxide gas flows, the overflow prevention valve 27 is Automatically shuts off, ensuring the safety of the carbonated spring manufacturing equipment.
  • a gas vent valve 28 is provided downstream of the carbon dioxide gas dissolving unit 6, and removes undissolved carbon dioxide gas bubbles contained in the produced carbonated spring and discharges it to a drain pipe.
  • the gas vent valve 28 the same one as that generally used for general hot water piping can be used. Since gaseous carbon dioxide is not easily absorbed percutaneously, there is no carbon dioxide spring effect on the human body.In addition, the gas vent valve is installed to reduce the concentration of carbon dioxide in the air in the bathroom. The position is valid.
  • the other equipment in Fig. 4 is the same as in Fig. 1.
  • the present invention will be described specifically with reference to examples.
  • a carbonated spring was manufactured using the flow sheet apparatus shown in FIG.
  • the carbon dioxide gas dissolver the one incorporating the above-mentioned three-layer composite hollow fiber membrane MHF with an effective total membrane area of 2.4 m 2 was used.
  • Warm water obtained by heating tap water having an M alkalinity of 16.0 to 40 ° C. was supplied to a carbon dioxide gas dissolver at 10 liters Zmin.
  • the target carbon dioxide concentration of the carbonated spring was set to 600 ppm
  • the pH of the carbonated spring obtained by the carbon dioxide dissolver was detected by the pH sensor, and the CPU based on this and the M alkalinity value of the tap water
  • the carbon dioxide gas concentration data was obtained by calculation, and the carbon dioxide gas was supplied to the carbon dioxide gas dissolver by controlling the opening of the carbon dioxide gas flow control valve so that the carbon dioxide gas concentration data matched the target carbon dioxide gas concentration.
  • the carbon dioxide gas concentration of the carbonated spring obtained 4 minutes after the start of operation was measured.
  • the carbonated spring of the target carbon dioxide concentration can be easily manufactured at home etc. using a relatively inexpensive PH measuring device.

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  • Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Epidemiology (AREA)
  • Pain & Pain Management (AREA)
  • Physical Education & Sports Medicine (AREA)
  • Rehabilitation Therapy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Veterinary Medicine (AREA)
  • Devices For Medical Bathing And Washing (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

Un procédé de production d'une eau gazéifiée par apport de gaz carbonique à un dissolvant de gaz carbonique et dissolution du gaz carbonique dans de l'eau brute, consiste à mesurer le pH de l'eau gazéifiée générée, à calculer les données de concentration en gaz carbonique de l'eau gazéifiée produite, à partir de la mesure de pH et de l'alcalinité de l'eau brute, et à réguler une quantité de gaz carbonique ajoutée au dissolvant de gaz carbonique de manière que les données de concentration en gaz carbonique atteignent une concentration en gaz carbonique cible prédéfinie. Selon le procédé, il est possible de simplifier la production d'eau gazéifiée d'une concentration cible au moyen d'un dispositif de mesure de pH bon marché.
PCT/JP1998/000458 1997-02-05 1998-02-04 Procede de production d'eau gazeifiee WO1998034579A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP98901501A EP0968699B1 (fr) 1997-02-05 1998-02-04 Procede de production d'eau gazeifiee
DE69807851T DE69807851T2 (de) 1997-02-05 1998-02-04 Verfahren zum erzeugen von karbonisiertem wasser
AU57796/98A AU5779698A (en) 1997-02-05 1998-02-04 Method of manufacturing carbonated spring
US09/368,168 US6164632A (en) 1997-02-05 1999-08-05 Method for the preparation of a carbonate spring

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2258697 1997-02-05
JP9/22586 1997-02-05
JP9/351141 1997-12-19
JP35114197A JPH11179178A (ja) 1997-12-19 1997-12-19 炭酸泉の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US09/368,168 Continuation US6164632A (en) 1997-02-05 1999-08-05 Method for the preparation of a carbonate spring

Publications (1)

Publication Number Publication Date
WO1998034579A1 true WO1998034579A1 (fr) 1998-08-13

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1998/000458 WO1998034579A1 (fr) 1997-02-05 1998-02-04 Procede de production d'eau gazeifiee

Country Status (4)

Country Link
EP (1) EP0968699B1 (fr)
AU (1) AU5779698A (fr)
DE (1) DE69807851T2 (fr)
WO (1) WO1998034579A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001293344A (ja) * 2000-04-18 2001-10-23 Mitsubishi Rayon Eng Co Ltd 炭酸水製造装置および炭酸水製造方法
JP2001293343A (ja) * 2000-04-18 2001-10-23 Mitsubishi Rayon Eng Co Ltd 炭酸水製造装置および炭酸水製造方法
WO2001078883A1 (fr) * 2000-04-18 2001-10-25 Mitsubishi Rayon Engineering Co., Ltd. Procede et dispositif de fabrication d'une solution aqueuse d'acide carboxylique
JP2002052328A (ja) * 2000-08-10 2002-02-19 Mitsubishi Rayon Eng Co Ltd 炭酸水製造供給システム
JP2002058725A (ja) * 2000-08-21 2002-02-26 Mitsubishi Rayon Eng Co Ltd 炭酸水製造方法
US7469883B2 (en) * 2000-06-26 2008-12-30 Applied Materials, Inc. Cleaning method and solution for cleaning a wafer in a single wafer process

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JPS60102020U (ja) * 1983-12-19 1985-07-11 昭和炭酸株式会社 人工炭酸泉の製造装置
JPH08215270A (ja) * 1995-02-13 1996-08-27 Mitsubishi Rayon Co Ltd 浄化保温機能を有する炭酸泉製造装置

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WO1993013746A1 (fr) * 1991-05-24 1993-07-22 Technica Entwicklungsgesellschaft Mbh & Co. Kg Soins capillaires et dermatologiques a l'eau enrichie en co¿2?
DE4124728C1 (en) * 1991-05-24 1992-10-29 Technica Entwicklungsgesellschaft Mbh & Co Kg, 2418 Ratzeburg, De Hair care process removing dirt etc. without damaging hair - using carbon di:oxide impregnated warm water from pressure source to rinse hair after washing
US5347665A (en) * 1991-09-25 1994-09-20 Matsushita Electric Works, Ltd. Carbonate spring bath system
JPH08173344A (ja) * 1994-12-22 1996-07-09 Nippon Tansan Gas Co Ltd 炭酸泉浴用シャワー装置

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
JPS60102020U (ja) * 1983-12-19 1985-07-11 昭和炭酸株式会社 人工炭酸泉の製造装置
JPH08215270A (ja) * 1995-02-13 1996-08-27 Mitsubishi Rayon Co Ltd 浄化保温機能を有する炭酸泉製造装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP0968699A4 *

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001293344A (ja) * 2000-04-18 2001-10-23 Mitsubishi Rayon Eng Co Ltd 炭酸水製造装置および炭酸水製造方法
JP2001293343A (ja) * 2000-04-18 2001-10-23 Mitsubishi Rayon Eng Co Ltd 炭酸水製造装置および炭酸水製造方法
WO2001078883A1 (fr) * 2000-04-18 2001-10-25 Mitsubishi Rayon Engineering Co., Ltd. Procede et dispositif de fabrication d'une solution aqueuse d'acide carboxylique
US6905111B2 (en) 2000-04-18 2005-06-14 Mitsubishi Rayon Engineering Co., Ltd. Apparatus and method for producing aqueous carbonic acid solution
US7246793B2 (en) 2000-04-18 2007-07-24 Mitsubishi Rayon Co., Ltd. Carbonic water production apparatus and carbonic water production method
EP1894615A2 (fr) 2000-04-18 2008-03-05 Mitsubshi Rayon Engineering Co., Ltd Appareil de fabrication d'eau carbonique et procédé de fabrication d'eau carbonique
US7434792B2 (en) 2000-04-18 2008-10-14 Mitsubishi Rayon Engineering Co., Ltd. Carbonic water production apparatus and carbonic water production method
US7441752B2 (en) 2000-04-18 2008-10-28 Mitsubishi Rayon Engineering Co., Ltd. Carbonic water production apparatus and carbonic water production method
US7533873B2 (en) 2000-04-18 2009-05-19 Mitsubishi Rayon Engineering Co., Ltd. Carbonic water production apparatus and carbonic water production method
US7469883B2 (en) * 2000-06-26 2008-12-30 Applied Materials, Inc. Cleaning method and solution for cleaning a wafer in a single wafer process
JP2002052328A (ja) * 2000-08-10 2002-02-19 Mitsubishi Rayon Eng Co Ltd 炭酸水製造供給システム
JP2002058725A (ja) * 2000-08-21 2002-02-26 Mitsubishi Rayon Eng Co Ltd 炭酸水製造方法

Also Published As

Publication number Publication date
AU5779698A (en) 1998-08-26
EP0968699B1 (fr) 2002-09-11
EP0968699A4 (fr) 2000-03-01
EP0968699A1 (fr) 2000-01-05
DE69807851T2 (de) 2003-05-28
DE69807851D1 (de) 2002-10-17

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