WO1998032890A1 - Coating thickness control - Google Patents

Coating thickness control Download PDF

Info

Publication number
WO1998032890A1
WO1998032890A1 PCT/AU1998/000030 AU9800030W WO9832890A1 WO 1998032890 A1 WO1998032890 A1 WO 1998032890A1 AU 9800030 W AU9800030 W AU 9800030W WO 9832890 A1 WO9832890 A1 WO 9832890A1
Authority
WO
WIPO (PCT)
Prior art keywords
mouth
air knife
lips
facing
relative
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/AU1998/000030
Other languages
English (en)
French (fr)
Inventor
Glen Wallace
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Industrial Automation Services Pty Ltd
Original Assignee
Industrial Automation Services Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Industrial Automation Services Pty Ltd filed Critical Industrial Automation Services Pty Ltd
Priority to US09/341,818 priority Critical patent/US6199301B1/en
Priority to DE19881989T priority patent/DE19881989B4/de
Priority to AU56476/98A priority patent/AU721545B2/en
Priority to JP53142198A priority patent/JP4020217B2/ja
Priority to GB9916682A priority patent/GB2336377B/en
Publication of WO1998032890A1 publication Critical patent/WO1998032890A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C2/00Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
    • C23C2/14Removing excess of molten coatings; Controlling or regulating the coating thickness
    • C23C2/16Removing excess of molten coatings; Controlling or regulating the coating thickness using fluids under pressure, e.g. air knives
    • C23C2/18Removing excess of molten coatings from elongated material
    • C23C2/20Strips; Plates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/06Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface with a blast of gas or vapour
    • DTEXTILES; PAPER
    • D21PAPER-MAKING; PRODUCTION OF CELLULOSE
    • D21HPULP COMPOSITIONS; PREPARATION THEREOF NOT COVERED BY SUBCLASSES D21C OR D21D; IMPREGNATING OR COATING OF PAPER; TREATMENT OF FINISHED PAPER NOT COVERED BY CLASS B31 OR SUBCLASS D21G; PAPER NOT OTHERWISE PROVIDED FOR
    • D21H25/00After-treatment of paper not provided for in groups D21H17/00 - D21H23/00
    • D21H25/08Rearranging applied substances, e.g. metering, smoothing; Removing excess material
    • D21H25/16Rearranging applied substances, e.g. metering, smoothing; Removing excess material with a blast of vapour or gas, e.g. air knife

Definitions

  • This invention relates to the control of thickness of a coating applied to the
  • the present invention has been particularly developed for controlling the
  • the hot dip galvanising process aims to apply a controlled amount of a protective
  • galvanising line is employed to coat the sheet.
  • the galvanising line 1 includes input coils 2 which carry a
  • the metal sheet 3 is fed into an accumulator 4 and then passed
  • X-ray gauges 47 are located down the line beyond the air knives 15 to monitor the
  • the coat thickness is above the minimum required for the product in question.
  • the coating thickness is controlled by the application of a high pressure wiping
  • a typical air knife 15 is depicted schematically in
  • the distance from the air knife mouth to the sheet surface is controlled by
  • a bowed sheet profile can occur as the sheet exits the molten zinc bath
  • proximal sheet surface 32 This has the effect of introducing a variation in the thickness
  • Fig 3b illustrates a typical coating profile on the upper or
  • Fig. 3c illustrates a typical coating profile on the lower or
  • the width of the mouth opening varies at different points along its length. Constricting the width of the mouth reduces the gas flow at that point thus reducing the wiping effect
  • US-4524716 discloses an air knife in which movable obstructions are provided
  • gases gases, or even liquids, may be used and are encompassed by the invention.
  • an air knife assembly including:
  • moving means operable to move the lips relative to the air knife body.
  • the present invention also provides an air knife mouth arrangement for use in an
  • pressurised fluid passes to operate on a coating applied to a surface of a sheet material
  • the air knife mouth arrangement including a pair of facing lips defining the
  • the facing lips adapted to be movable relative to the air knife body.
  • the lips is varied along at least part of the length of the mouth
  • the present invention also preferably provides an air knife mouth arrangement
  • pressurised fluid passes to operate on a coating applied to a surface of a sheet material
  • the air knife mouth arrangement including a mouth defined by a pair of facing
  • said facing lips configured and adapted to co-operate with each other such that upon
  • mouth of the air knife can be employed to break free, and hence remove, small lumps of
  • each lip of the pair of facing lips has, in front elevation, a curved
  • each lip is provided along substantially the entire
  • each lip is defined by a mathematical function which,
  • each lip, in front elevation is defined by an odd
  • each lip has an identical shape to the other lip, although for some reasons
  • an initial non-uniform mouth width along its length may be required.
  • the moving means of the air knife assembly is operable to move both
  • the moving means is operative in response to signals from control
  • control means including sensing means located past the air knife and
  • this form of the present invention can be utilised to control the
  • Fig. 1 is a diagrammatic view of a typical hot dip galvanising line for coating
  • Fig. 2 is a schematic perspective view of a conventional air knife
  • Fig. 3a is a horizontal sectional view of a pair of air knives operating on a bowed
  • Figs. 3b & 3c illustrate a typical profile of the coating thickness resulting from
  • Fig. 4 is a schematic perspective view of one preferred embodiment of an air
  • Fig. 5 graphically depicts the mouth shape and mouth width variation of a
  • Fig. 6 graphically depicts the mouth shape and mouth width variation of a
  • Fig. 7 graphically depicts the mouth shape and mouth width variation of a
  • FIG. 8a to 8c schematically depict plan views of a further preferred embodiment
  • Fig. 9 schematically depicts a further preferred embodiment of air knife
  • the present invention relates to an air knife mouth
  • arrangement 20 comprises a mouth 16 defined by a pair of facing lips 17, 18, each lip
  • lips 17, 18 face each other.
  • the lips 17, 18 of the air knife mouth arrangement are
  • the present invention also provides an air knife assembly 15, the assembly
  • Means 12 are provided for distributing a fluid under pressure through the
  • the moving means passing the air knife to thereby control the thickness of the coating.
  • each lip 17, 18 is
  • the mathematical function defining the shape or profile of the lips 17, 18 may be
  • x lateral (transverse) coordinate, with origin as shown in Fig. 4
  • A,B,C,D tuning constants chosen appropriately to achieve desired gap
  • each air knife by lateral or sideways displacement of the respective facing lips.
  • Fig. 4 and Fig. 6 will narrow the width of the mouth midway along the length of the
  • the amplitude of the variation in width of the mouth will vary dependent on the
  • the moving means 41 for displacing the lips laterally can be any suitable means.
  • a mechanical arrangement such as gears may be used.
  • a mechanical arrangement such as gears may be used.
  • a mechanical arrangement such as gears may be used.
  • a mechanical arrangement such as gears may be used.
  • a mechanical arrangement such as gears may be used.
  • a mechanical arrangement such as gears
  • Fig. 4 is operative to simultaneously move both lips in opposite lateral directions.
  • the moving means comprises racks 42, 43 connected to the
  • the moving means 41 may be
  • control means 46 including
  • sensing means 47 located past the air knife and operative to sense the coating thickness
  • air knife assembly enable the selective control of the width of the mouth at different
  • the mouth arrangement can be relatively simple in construction
  • mouth arrangement may be capable of being retro fitted to existing air knives so that the
  • invention provides for the adjustment of the mean distance between the mouth of the air
  • the air knife 15 is schematically depicted in plan view.
  • FIG 8a depicts the air knife 15 with the lips of the air knife mouth 20 in a
  • the moving means 86 can by utilised to move one end of the mouth forward and the
  • a wedge member 92 may be located to act upon either or both of the lip
  • the air knife supporting structure can be used to position the air

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Coating Apparatus (AREA)
  • Coating With Molten Metal (AREA)
PCT/AU1998/000030 1997-01-22 1998-01-22 Coating thickness control Ceased WO1998032890A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US09/341,818 US6199301B1 (en) 1997-01-22 1998-01-22 Coating thickness control
DE19881989T DE19881989B4 (de) 1997-01-22 1998-01-22 Luftmessermündungsanordnung zum Betrieb in einer Luftmesseranordnung und Luftmesseranordnung
AU56476/98A AU721545B2 (en) 1997-01-22 1998-01-22 Coating thickness control
JP53142198A JP4020217B2 (ja) 1997-01-22 1998-01-22 コーティング厚さ制御
GB9916682A GB2336377B (en) 1997-01-22 1998-01-22 Coating thickness control

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPO4732 1997-01-22
AUPO4732A AUPO473297A0 (en) 1997-01-22 1997-01-22 Coating thickness control

Publications (1)

Publication Number Publication Date
WO1998032890A1 true WO1998032890A1 (en) 1998-07-30

Family

ID=3799036

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/AU1998/000030 Ceased WO1998032890A1 (en) 1997-01-22 1998-01-22 Coating thickness control

Country Status (6)

Country Link
US (1) US6199301B1 (enExample)
JP (1) JP4020217B2 (enExample)
AU (1) AUPO473297A0 (enExample)
DE (1) DE19881989B4 (enExample)
GB (1) GB2336377B (enExample)
WO (1) WO1998032890A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2140944A1 (en) * 2008-07-03 2010-01-06 Linde AG Adjustable baffles for gas wiping

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US6749390B2 (en) 1997-12-15 2004-06-15 Semitool, Inc. Integrated tools with transfer devices for handling microelectronic workpieces
US6752584B2 (en) 1996-07-15 2004-06-22 Semitool, Inc. Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpieces
US6749391B2 (en) 1996-07-15 2004-06-15 Semitool, Inc. Microelectronic workpiece transfer devices and methods of using such devices in the processing of microelectronic workpieces
US6921467B2 (en) * 1996-07-15 2005-07-26 Semitool, Inc. Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces
US6565729B2 (en) * 1998-03-20 2003-05-20 Semitool, Inc. Method for electrochemically depositing metal on a semiconductor workpiece
TW593731B (en) * 1998-03-20 2004-06-21 Semitool Inc Apparatus for applying a metal structure to a workpiece
US6497801B1 (en) * 1998-07-10 2002-12-24 Semitool Inc Electroplating apparatus with segmented anode array
US7020537B2 (en) * 1999-04-13 2006-03-28 Semitool, Inc. Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
US6368475B1 (en) * 2000-03-21 2002-04-09 Semitool, Inc. Apparatus for electrochemically processing a microelectronic workpiece
WO2000061837A1 (en) 1999-04-13 2000-10-19 Semitool, Inc. Workpiece processor having processing chamber with improved processing fluid flow
US7351314B2 (en) 2003-12-05 2008-04-01 Semitool, Inc. Chambers, systems, and methods for electrochemically processing microfeature workpieces
US6916412B2 (en) * 1999-04-13 2005-07-12 Semitool, Inc. Adaptable electrochemical processing chamber
US7264698B2 (en) 1999-04-13 2007-09-04 Semitool, Inc. Apparatus and methods for electrochemical processing of microelectronic workpieces
US20030038035A1 (en) * 2001-05-30 2003-02-27 Wilson Gregory J. Methods and systems for controlling current in electrochemical processing of microelectronic workpieces
US7351315B2 (en) 2003-12-05 2008-04-01 Semitool, Inc. Chambers, systems, and methods for electrochemically processing microfeature workpieces
US7189318B2 (en) * 1999-04-13 2007-03-13 Semitool, Inc. Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
US7438788B2 (en) 1999-04-13 2008-10-21 Semitool, Inc. Apparatus and methods for electrochemical processing of microelectronic workpieces
US7585398B2 (en) * 1999-04-13 2009-09-08 Semitool, Inc. Chambers, systems, and methods for electrochemically processing microfeature workpieces
US7160421B2 (en) 1999-04-13 2007-01-09 Semitool, Inc. Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
US6623609B2 (en) 1999-07-12 2003-09-23 Semitool, Inc. Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same
AU2001259504A1 (en) * 2000-05-24 2001-12-03 Semitool, Inc. Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
WO2002004887A1 (en) * 2000-07-08 2002-01-17 Semitool, Inc. Methods and apparatus for processing microelectronic workpieces using metrology
KR20030018175A (ko) * 2001-08-27 2003-03-06 주식회사 포스코 에어나이프 노즐과 강판사이의 간격측정장치
AU2002343330A1 (en) 2001-08-31 2003-03-10 Semitool, Inc. Apparatus and methods for electrochemical processing of microelectronic workpieces
US6630360B2 (en) 2002-01-10 2003-10-07 Advanced Micro Devices, Inc. Advanced process control (APC) of copper thickness for chemical mechanical planarization (CMP) optimization
US6991710B2 (en) * 2002-02-22 2006-01-31 Semitool, Inc. Apparatus for manually and automatically processing microelectronic workpieces
US20030159921A1 (en) * 2002-02-22 2003-08-28 Randy Harris Apparatus with processing stations for manually and automatically processing microelectronic workpieces
US6893505B2 (en) * 2002-05-08 2005-05-17 Semitool, Inc. Apparatus and method for regulating fluid flows, such as flows of electrochemical processing fluids
US20040031167A1 (en) * 2002-06-13 2004-02-19 Stein Nathan D. Single wafer method and apparatus for drying semiconductor substrates using an inert gas air-knife
US7114903B2 (en) * 2002-07-16 2006-10-03 Semitool, Inc. Apparatuses and method for transferring and/or pre-processing microelectronic workpieces
KR20040048263A (ko) * 2002-12-02 2004-06-07 주식회사 포스코 폭방향 에어 송풍량이 조절이 가능한 에어나이프 장치
US20050092611A1 (en) * 2003-11-03 2005-05-05 Semitool, Inc. Bath and method for high rate copper deposition
KR100903180B1 (ko) * 2006-05-22 2009-06-17 주식회사 엘지화학 리튬이온 폴리머 전지용 분리막의 코팅량 조절방법
WO2007142396A1 (en) * 2006-06-05 2007-12-13 Posco Gas wiping apparatus
CN1928147B (zh) * 2006-09-12 2012-09-19 攀钢集团攀枝花钢铁研究院 用于控制镀锌层厚度的气刀
DE102008058513B4 (de) * 2008-11-21 2011-03-10 Berger, Bernd, Dr.-Ing. Vorrichtung zum Entfernen von Flüssigkeit von der Oberfläche eines bewegten Bandes und Bandbearbeitungsanlage mit solch einer Vorrichtung
DE102010008989B4 (de) * 2009-03-06 2018-07-26 Primetals Technologies Japan, Ltd. Gasabstreifvorrichtung
JP5602371B2 (ja) * 2009-03-06 2014-10-08 三菱日立製鉄機械株式会社 ガスワイピング装置
KR101125649B1 (ko) * 2010-05-24 2012-03-27 삼성에스디아이 주식회사 활물질 코팅 장치 및 이를 이용한 코팅 방법
JP5857577B2 (ja) * 2011-09-22 2016-02-10 日本電気株式会社 塗工ダイヘッド
CN103510032B (zh) * 2012-06-20 2015-12-02 鞍钢股份有限公司 冷轧热镀锌镀层均匀度的偏差值控制方法
KR102362174B1 (ko) 2018-10-01 2022-02-10 주식회사 엘지에너지솔루션 슬롯 다이 코터의 상부 토출구와 하부 토출구 간의 거리를 조절하는 슬롯 다이 코터 조정 장치 및 이를 포함하는 전극 활물질 코팅 시스템

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US2568492A (en) * 1949-04-16 1951-09-18 Gen Aniline & Film Corp Adjustable nozzle
US3272176A (en) * 1964-04-13 1966-09-13 Du Pont Air knife
US4106429A (en) * 1977-05-23 1978-08-15 Beloit Corporation Air knife with adjustable lip
GB2019916A (en) * 1978-04-26 1979-11-07 Albany Int Corp Air or other fluid knife
EP0249234A1 (de) * 1986-06-12 1987-12-16 DUMA Konstruktionsbüro Abblasvorrichtung zum kontinuierlichen beidseitigen Beschichten von Metallband
DE4024229C1 (enExample) * 1990-07-31 1991-07-18 Heinrich 4100 Duisburg De Pannenbecker
GB2254808A (en) * 1991-04-03 1992-10-21 Air Control Installations "air knife"
AU3700593A (en) * 1992-04-17 1993-10-21 Clecim Air knife device for regulating a metal deposit

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US2568492A (en) * 1949-04-16 1951-09-18 Gen Aniline & Film Corp Adjustable nozzle
US3272176A (en) * 1964-04-13 1966-09-13 Du Pont Air knife
US4106429A (en) * 1977-05-23 1978-08-15 Beloit Corporation Air knife with adjustable lip
GB2019916A (en) * 1978-04-26 1979-11-07 Albany Int Corp Air or other fluid knife
EP0249234A1 (de) * 1986-06-12 1987-12-16 DUMA Konstruktionsbüro Abblasvorrichtung zum kontinuierlichen beidseitigen Beschichten von Metallband
DE4024229C1 (enExample) * 1990-07-31 1991-07-18 Heinrich 4100 Duisburg De Pannenbecker
GB2254808A (en) * 1991-04-03 1992-10-21 Air Control Installations "air knife"
AU3700593A (en) * 1992-04-17 1993-10-21 Clecim Air knife device for regulating a metal deposit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2140944A1 (en) * 2008-07-03 2010-01-06 Linde AG Adjustable baffles for gas wiping

Also Published As

Publication number Publication date
GB9916682D0 (en) 1999-09-15
AUPO473297A0 (en) 1997-02-20
GB2336377B (en) 2001-07-25
GB2336377A (en) 1999-10-20
DE19881989T1 (de) 2000-02-10
US6199301B1 (en) 2001-03-13
JP2001508358A (ja) 2001-06-26
JP4020217B2 (ja) 2007-12-12
DE19881989B4 (de) 2009-05-14

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