WO1998018192A1 - Systeme d'entrainement direct, procede de production d'une unite passive d'un systeme d'entrainement direct, et dispositif pour la mise en oeuvre de ce procede - Google Patents

Systeme d'entrainement direct, procede de production d'une unite passive d'un systeme d'entrainement direct, et dispositif pour la mise en oeuvre de ce procede Download PDF

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Publication number
WO1998018192A1
WO1998018192A1 PCT/DE1997/002434 DE9702434W WO9818192A1 WO 1998018192 A1 WO1998018192 A1 WO 1998018192A1 DE 9702434 W DE9702434 W DE 9702434W WO 9818192 A1 WO9818192 A1 WO 9818192A1
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WO
WIPO (PCT)
Prior art keywords
passive
base body
mold
unit
components
Prior art date
Application number
PCT/DE1997/002434
Other languages
German (de)
English (en)
Inventor
Günter DREIFKE
Klaus Martin
Lars Dreifke
Nils Dreifke
Sören DREIFKE
Sixten Dreifke
Original Assignee
Dreifke Guenter
Lars Dreifke
Nils Dreifke
Dreifke Soeren
Sixten Dreifke
Klaus Martin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19643518A external-priority patent/DE19643518A1/de
Priority claimed from DE1996149357 external-priority patent/DE19649357A1/de
Application filed by Dreifke Guenter, Lars Dreifke, Nils Dreifke, Dreifke Soeren, Sixten Dreifke, Klaus Martin filed Critical Dreifke Guenter
Priority to EP97944742A priority Critical patent/EP0878049A1/fr
Publication of WO1998018192A1 publication Critical patent/WO1998018192A1/fr

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K41/00Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02Linear motors; Sectional motors
    • H02K41/03Synchronous motors; Motors moving step by step; Reluctance motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K2201/00Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18Machines moving with multiple degrees of freedom
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K5/00Casings; Enclosures; Supports
    • H02K5/04Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/16Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields

Definitions

  • the present invention relates to a passive unit for a Dlr ⁇ Ktantrl ⁇ b with passive elements made of magnetically conductive material, which have a structured surface of Polz Zahn ⁇ nn and Polzahnlück ⁇ n, which are attached to a rigid base body, and interact with an active unit of the direct drive.
  • the present invention provides a method for producing such a level of fit, and an apparatus for carrying out the method is described.
  • the force-generating elements simultaneously take over the function of guiding the moving parts and also represent the frame system for any application.
  • the passive unit consists of a soft iron strip provided with pole teeth.
  • the content of this document is expressly included in the disclosure content and the detailed description of the functional principle of such linear motors or direct drives is omitted here.
  • the embodiments shown in the laid-open specification predominantly use the active unit as a rotor, while the passive unit represents the part of the motor which is fixed to the frame.
  • a linear motor is described in US Pat. No. 4,563,602, which among other things. indicates a very simply constructed passive unit and can be designed both as a single-phase synchronous machine and as a multi-phase synchronous machine.
  • the possibility of air storage between the active and passive unit is also previously known from this document.
  • the direct drives known from the prior art have passive units, which for the most part consist of a basic body
  • the passive units are switched off formed from the solid material of the base body, for example by milling.
  • the pass module must be made of very high quality material due to the magnetic properties.
  • the corrosion resistance of the functional surfaces is also important, so that passive modules are required with which improved properties of the direct drive are possible.
  • An object of the present invention is therefore to provide a passive unit for a direct drive, with which the disadvantages mentioned can be overcome or greatly reduced.
  • the passive unit is made from passive modules which are firmly connected to the base body.
  • a passive module consists of a strip or a plate of soft iron, a material that conducts the magnetic flux well and has the lowest possible magnetism.
  • the relationship between price and properties must be weighed, e.g. corrosion resistance or effective machinability can also be an important criterion.
  • the Passrvmodul ⁇ have the advantage that the structuring in the form of pole teeth and pole tooth gaps can be carried out in a prefabrication process before assembly.
  • Known catfish are only applied to structures directly in the direction of movement in linear direct drives, and in planar drives the structures are introduced in the x and perpendicular directions in the y direction. 2 * ⁇ fs & ⁇ J ** ⁇ , -fr'T ⁇ '? ⁇ - "** * ⁇
  • the base body must be so resistant to bending and torsion that the dimensional stability is maintained even under mechanical or thermal loads to such an extent that a guide unit can work.
  • the management task consists in creating a constant and small distance between active and passive.
  • the basic body is the frame system or a part thereof, so that fastening elements are also attached here.
  • a common application is for linear motion, where the passive modules are attached to a cuboid as a base body on one, two, three or four long sides, usually over the entire side surface. If the Cfajfder is rectangular, the passive modules are also of different widths, but it is also possible, as a rule, to attach pass modules parallel to the widening of the functional area.
  • connection with an angular active unit because in addition to the drive function, the frame function and the measuring standard, guidance on the straight line is also achieved.
  • cascading of passive modules can also be advantageously implemented in the direction of movement, as will be explained in more detail below.
  • Direct drives according to the invention may be due to the facilitated philosophicalfi ⁇ xibility very well with specific solutions combine.
  • a Linßar direct drive is also proposed, on which 2 angular active units can operate in parallel and independently of one another over the entire driving range and, in addition, along with other independent active units.
  • Cost savings are achieved if one angular active unit is only connected to one passive module and the other unit attached to the angle is an air bearing.
  • passive modules which are precisely worked on the side, can be arranged in the direction of movement without a special additional device for positioning the passive modules. Potting compound must be added in the area of the joint between the passive modules in the pole tooth gap, and the surface level must be produced in particular when using air bearings by grinding or lapping.
  • the solution according to the invention also consists in using a device to move the p
  • Such a passive unit can be manufactured with almost any external shape, the base body made of mineral casting material being able to take over all or a substantial part of the frame functions of a drive system to be constructed.
  • Mineral casting material is easy to process, is cheap and has good chemical properties. In particular, such a material does not corrode.
  • “Mineral casting material w” is understood to mean a mixture of a reactive resin-bound material based on epoxy resin in combination with additives. Suitable additives are unbroken, dried quartz grains, such as sand or gravel.
  • Mineral casting material consists of mineral fillers and a synthetic resin lanyard.
  • a passive unit the base body of which is made of mineral casting material
  • conventional direct drives also cause vibrations in the audible range, sometimes with a large amplitude, so that in some cases considerable noise pollution is caused.
  • Metallic bodies of passive units transmit these vibrations well and may even represent a resonance body that amplifies the noise level.
  • Passive units made of mineral casting material dampen these vibrations significantly, so that noise pollution is significantly reduced. Furthermore, other unwanted vibrations are damped, which in certain applications leads to increased positioning accuracy of the direct drive.
  • An advantageous embodiment is characterized in that the functional elements are cast into the mineral casting material of the base body, the structured surfaces being directed outwards and not covered by mineral casting material.
  • the functional elements are attached to the base body in some other way.
  • the functional elements can be glued, screwed on or attached in a similar manner. This embodiment is always advantageous when functional elements are to be attached to different positions of a standardized base body in order to adapt the respective passive unit to the specific application.
  • a particularly advantageous embodiment is characterized in that the base body is at least partially surrounded by an enclosure, which already serves as part of the mold for the base body during the casting process, and comprises fastening elements which can take over frame functions.
  • this enclosure can consist of a steel frame or a trough-like steel mold which remains firmly connected to the mineral casting material after the casting process, as a result of which steel elements are available at least in sections, into which holes or threads can be made or to which other fastening elements are attached can be, with which the passive unit can be adapted to any application variants.
  • the base body may be expedient not to produce the base body completely from solid material, but instead to provide cavities in individual areas of the base body, which on the one hand can serve to accommodate external frame oil elements and on the other hand reduce the weight of the entire passive unit.
  • the coefficient of expansion of the mineral casting material is substantially equal to the coefficient of expansion of the magnetizable material of the functional elements.
  • the coefficient of expansion of mineral casting material can be set relatively well in a certain range by suitable selection of the components.
  • the components required are known to the person skilled in the art. However, this gives the possibility of assigning the individual elements of the passive unit an essentially equal coefficient of expansion, which means that temperature fluctuations do not lead to internal stresses, which generally lead to poorer parameters in the accuracy of the direct drives and, in the worst case, the inability to operate or the Destruction of such a drive can cause.
  • a particularly preferred embodiment of the passive unit is characterized in that it is connected to further assemblies of a machine and that it acts as a force-transmitting frame assembly.
  • a passive unit is also advantageous, which is designed as part of a device and on which conventional tensioning and fastening elements are arranged, which are used to support and lock serve workpieces. With such designs, frame functions and power transmission functions are also taken over by the passive unit, which originally only served to generate force, which leads to improved system integration.
  • the present invention furthermore provides a method for producing such a passive unit, with the following method steps: a) an arbitrary shape which reproduces the desired base body is produced,. - Edinburgh b) raw elements made of magnetisable material that do not yet have a structuring are inserted into the mold, c) the mold is filled with mineral casting material in a casting process, d) structures consisting of pole teeth and pole tooth gaps are introduced at the desired locations of the raw elements, whereby the functional elements are formed.
  • This particularly preferred variant of the production process offers the possibility of providing the base body with raw elements without great technological expenditure, which are only subjected to fine machining in a later process step, the tooth structure being formed.
  • the structure does not have to be produced on the entire surface of the raw elements, but can be limited to the desired areas.
  • a method is used to manufacture the passive unit, with the following steps: a) an arbitrary shape that reproduces the desired basic body is produced. b) the functional elements made of magnetizable material are inserted into the mold or fastened on the inside, with the structured surfaces facing outwards, c) the mold is filled with mineral casting material in a casting process.
  • Process for the production of a passive unit according to one of Claims 1 to 6, with the following process steps: a) an arbitrary shape which reproduces the desired basic body is produced, b) the mold is produced in a casting process with mineral casting compound - filled up material, c) after hardening of the base body, the functional elements made of magnetizable material are attached to it.
  • the functional elements When using this method, the functional elements must be attached to the base body in a separate process step, but this always offers advantages if, due to the materials selected, a durable, direct connection between the mineral casting material and the magnetisi Saron. Material of the functional elements can not be guaranteed or by the additional Fasteners desired properties can be achieved. For example, a layer of adhesive arranged between the functional elements and the mineral casting material can serve to compensate for given slightly different expansion coefficients.
  • a modified embodiment variant of the method is characterized in that fastening elements are anchored in the casting compound of the base body before curing. It is also expedient to fill the pole gaps of the functional elements with a filling compound in a subsequent process step. If necessary, the surface quality of the functional elements can be increased by a subsequent fine grinding.
  • the proposed method is based on the assumption that passive module In in the form of punishments or plates are made of a suitable material and that a combination with a wide variety of basic bodies can be realized.
  • a form is advantageously used for this purpose, with which the passive module ⁇ are recorded on their functional surface. Magnetic or vacuum clamping means are suitable for this.
  • the passive modules positioned in relation to one another are best glued to the base body, using self-adhesive layers that are matched to the differences to be compensated for between passive modules and base body.
  • a V-shaped prism with magnetic chucks is used to create the passivity. Heating elements in the mold can shorten the manufacturing process.
  • a device which consists of a facing plate on which at least 2 active units are so elastically fastened that they rest smoothly on two passive units lying one behind the other in the direction of movement of the active unit, without any significant constraining forces.
  • the freely moving stator modules can align themselves with the active heights.
  • the active units In order to comply with the division period, the active units must either both be energized with only one and the same phase, or the current ratios in the two active units are set in the same way.
  • the passive units can be easily positioned exactly to each other to within 0.01 mm,
  • the mounting ⁇ vorrlchtung can also be made movable in order to align the Passivmodul ⁇ Grundkörpem in severe, then the air is turned off and the device with the passive modules can then be placed on the heavy body.
  • a grinding process which includes the removal of soft lenses and mineral casting, is on
  • the passive module can also be used for certain applications
  • Flg. 1 a passive module for a linear and a passive module for a planer direct drive
  • Figure 3 shows a Aktlvelnhelt and a Passlv ⁇ inh ⁇ it for a Unear direct drive with a hollow body.
  • FIG. 7 shows a base body made of granite with a passive unit fastened in a groove with additional air guidance
  • X ff shows the passive unit from FIG. 1 in a partially cut-away side view
  • Fig. S is a detailed view of a functional element 1 'of
  • FIG. 1 passive unit from FIG. 1 »;
  • FIG. 1 shows the passive unit from FIG. 10 in a view from below;
  • 3 shows a modified embodiment of the passive unit for a linear drive in a view from the front;
  • the Flg. 1 each shows a passive module for linear direct drives and for planar direct drives and illustrates the character of the strips, preferably for linear drives and of plates for planar drives.
  • the linear or pixel structure is recognizable.
  • the pole tooth gaps are filled with a polymer in the case of the use of air bearings in the associated active units.
  • the structured functional surface is flat and ground very precisely, especially with air storage.
  • the 2 shows a typical passive unit for Llnear direct drives in modular catfish.
  • the 2 passive modules shown here are generally glued and / or additionally screwed onto the base body.
  • FIG. 3 shows a Lln ⁇ ar direct drive with air bearings.
  • the active unit is preferably angular to solve the management task in order to absorb forces and moments.
  • the basic body is hollow here, especially to save mass and costs and to enable use for moving driveline in the case of high accelerations.
  • a filler can be introduced to reduce noise.
  • FIG. 4 shows that 2 active units can also be moved independently of one another on a stator, in which 4 stator modules ⁇ are used. If the two active units are elastically connected to each other perpendicular to the direction of movement, a compact, strong Aktlvelnhelt is achieved, which can be called a mub unit.
  • the advantage over known arrangements is that only 2 right angles between the passive modules have to be correct and self-locking occurs when the air is switched off.
  • Fig. 5 shows another variant to increase the thrust. If you increase the functional area of strong active units, which is usually the air bearing guide with an air gap of about 15 micrometers, the requirements for the flatness of passive modules increase at the same time. However, the requirements for flatness should be reduced in order to be able to offer an inexpensive drive. In order to take advantage of working with passive modules, it is therefore better to connect smaller active units with an elastic element, as shown in the example of the cover plate.
  • the adhesive material and the thickness of the adhesive layer should be selected so that each active unit can be guided freely and unclamped on the passive unit.
  • FIG. 7 gives an example of the manufacture and use of a granite passive unit.
  • the main body is provided with a groove along the route into which one or more passive modules are glued.
  • the passive module ⁇ holds the base body even at higher thermal loads and the achievement of a flat surface between the passive module and granite can be achieved by grinding.
  • a motor element is thus integrated directly into a control element, which is important for the highest positioning accuracy.
  • the picture also shows the location of the active unit. which is elastically connected to the frame by means of a spring. In this way, the moving carriage can absorb larger loads due to additional air bearings and the function of the air bearing in the active unit is excellently maintained, as a result of which a constant air bearing is achieved even under high loads.
  • a connecting plate holds 2 active units at a prescribed distance and is designed to be sufficiently elastic that no significant constraining forces act on the passive module ⁇ . If you ensure that the passive modules on the two active units can move freely in an air bearing, a defined distance between the stator modules can be set by energizing the active units, e.g. by energizing only one phase at a time. The air is then switched off, and in a second step the passive modules ⁇ are attached to the base body.
  • Fig. 9 shows this method in connection with magnetic clamping means.
  • the active units can advantageously be part of the clamping and assembly device.
  • FIG. 10 shows a simplified representation of a passive unit 1 as used in direct drives.
  • the passive unit shown is used for a planar drive. It has a square base and
  • the un stationsele ent 2 consists of soft iron, which, as in the embodiment shown, is attached as a thin plate or sheet to the passive unit.
  • This soft iron plate has a structure on its top that is absolutely necessary for the functioning of a direct drive and is shown in detail in FIG. 3 v described later.
  • the functional element S> can, as shown x, extend over the entire surface of the passive unit f or, in modified embodiments, only in individual
  • the alignment of the structuring depends on the desired application and is predetermined by the directions of movement to be carried out by the assigned active unit. In the example shown, it is a cross-shaped structuring that is required for a movement of the active unit sliding along the surface of the functional element -2 "V in both the x and y direction.
  • the passive unit shown is for a combination with an An active unit is provided, which is guided on the passive unit by an air bearing according to the prior art. Other guide variants are possible, but then require additional guide elements. Such guide elements can be formed integrally with the base body of the passive unit with a suitable shape.
  • Fig. Z shows a side view of the passive unit r, partially in section.
  • the passive unit iu - further comprises a base body 3, which consists of an enclosure 4, which is arranged on the outer sides of the passive unit, and mineral casting material 5, with which the interior of the passive unit is largely filled.
  • the mineral casting material 5 has a customary mineral composition Fillers and synthetic resins.
  • the border 4 is formed by a stable steel frame, an adhesion promoter 6 being able to be attached to improve the connection between the border 4 and the mineral casting material 5.
  • fastening elements 7 can be provided, the position of which is adapted to existing frame devices.
  • the fastening elements 7 have, for example, a threaded bore 8 which is accessible from the underside of the passive unit ⁇ . With the aid of the fastening elements 7, the passive unit can be attached to the frame of a corresponding device. Due to the fact that the fastening elements 7 can be placed almost anywhere within the passive unit - ⁇ , simple adaptation to different frame systems is possible.
  • the border 4 forms with its upper edge a support surface -WJ on which the functional element 2 * rests.
  • the connection between the functional element Z and the frame 4 can be made, for example, by an adhesive layer. So that the tread is as flat as possible on the upper
  • the functional element JZ can be made available, it is expedient to attach the functional element to the mineral casting material 5 essentially over the entire base area by means of an adhesive layer. If particularly high demands are placed on the temperature stability, the functional element Z can also be attached only to the mineral casting material 5, which in this case should have an expansion coefficient which is essentially identical to the expansion coefficient of the magnetizable material which forms the functional element .
  • the coefficient of expansion of the mineral casting material can be in adjust in a known manner by suitable choice of materials.
  • the bezel 4 is designed as a self-contained steel ring.
  • 4 further functional bores 12 can be drilled at any point on the mount. It is also possible to make a further threaded bore 13 through the casing 4, which extends into one of the fastening elements 7.
  • Fig. 2f shows a sectional view of the functional element as a detail.
  • the functional element has a structure that is formed from tooth teeth K and tooth gaps J T.
  • Pole tooth gaps 8 ⁇ are expediently filled with a filling compound> 4, for example an epoxy resin, as a result of which undesired deposits in the pole tooth gaps are avoided and the magnetic properties of the structuring formed are improved.
  • a filling compound> 4 for example an epoxy resin
  • the passive unit X is shown in a view from below.
  • the enclosure 4 simultaneously forms part of the mold into which the mineral casting material is introduced during the casting process.
  • the fastening elements 7 are introduced at the desired positions.
  • the shape formed by the border 4 is closed on the upper side either by the already applied functional element Z. or a not yet structured raw element, whereby a direct connection between the mineral casting material 5 and this element can be achieved with a suitable choice of material. If necessary, an adhesion promoter can also be used at this connection point.
  • it is also possible to use corresponding auxiliary mold elements which are removed after the mineral casting material S has hardened, so that the mineral casting material is also freely accessible at the top. This is necessary if the t functional element 2 should not extend over the entire base area of the passive unit to be manufactured.
  • the bezel 4 can be completely dispensed with if removable molds are used in the manufacture of the passive unit and the frame functions of the bezel are not required. Any forms of the passive unit can thus be produced, which are adapted in detail to the respective application.
  • the Fig.n rf and j? show a modified embodiment of the passive unit, which is used in a linear drive.
  • the base body 2 consists entirely of the mineral casting material 5.
  • individual fastening elements 7 are cast in the mineral casting material.
  • Functional elements tZ are attached to two side surfaces of the base body 2r and at least partially have the described structuring.
  • areas are provided in the mold in which a magnetic field is built up, which positions the raw elements or the functional elements in the mold and fixes the duration of the curing time for 5. This makes it possible to achieve high flatness of the structured running surfaces to be generated in the 1 result.
  • the elements to be fixed are placed on the designated areas.
  • a relatively strong magnetic field is then built up, for example by means of 10 electromagnets, as a result of which attractive forces are exerted on the inserted magnetizable materials, with which they are aligned and fixed in the desired position.
  • FIG. 16 shows a basic body in connection with fitting modules, such as can also be used, for example, for planer movements.
  • the y-drive ⁇ bsmodul ⁇ and the x-drive module shown are elastically connected,

Abstract

L'invention concerne un système d'entraînement direct de construction modulaire, comprenant une unité active (1), qui présente des éléments servant à générer un flux magnétique variable, une unité passive (2) présentant des modules passifs (4) qui conduisent le flux magnétique et sont pourvus d'une structure dentée, une unité de guidage (3) et une unité de commande qui fournit les courants électriques d'alimentation. L'invention concerne également les dispositifs dans lesquels les unités passives (2) sont constituées de modules passifs (4) qui sont fixés à des structures de base, ainsi que les procédés et les dispositifs permettant leur production.
PCT/DE1997/002434 1996-10-22 1997-10-22 Systeme d'entrainement direct, procede de production d'une unite passive d'un systeme d'entrainement direct, et dispositif pour la mise en oeuvre de ce procede WO1998018192A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP97944742A EP0878049A1 (fr) 1996-10-22 1997-10-22 Systeme d'entrainement direct, procede de production d'une unite passive d'un systeme d'entrainement direct, et dispositif pour la mise en oeuvre de ce procede

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE19643518A DE19643518A1 (de) 1996-07-08 1996-10-22 Linearantrieb und Verfahren zur Herstellung einer Passiveinheit eines Linearantriebs, sowie Vorrichtung zur Durchführung des Verfahrens
DE19643518.8 1996-10-22
DE1996149357 DE19649357A1 (de) 1996-11-28 1996-11-28 Passiveinheit aus Mineralgußmaterial
DE19649357.9 1996-11-28

Publications (1)

Publication Number Publication Date
WO1998018192A1 true WO1998018192A1 (fr) 1998-04-30

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Application Number Title Priority Date Filing Date
PCT/DE1997/002434 WO1998018192A1 (fr) 1996-10-22 1997-10-22 Systeme d'entrainement direct, procede de production d'une unite passive d'un systeme d'entrainement direct, et dispositif pour la mise en oeuvre de ce procede

Country Status (2)

Country Link
EP (1) EP0878049A1 (fr)
WO (1) WO1998018192A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1282219A1 (fr) * 2000-05-12 2003-02-05 Shinano Electronics Co., Ltd. Platine pour moteur lineaire plat

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0371661A2 (fr) * 1988-11-28 1990-06-06 AT&T Corp. Servo-moteurs à courant continu sans balai commutés capacitivement
US5126648A (en) * 1990-03-22 1992-06-30 Megamation Incorporated High resolution piggyback linear motor design for placement systems and the like
US5196745A (en) * 1991-08-16 1993-03-23 Massachusetts Institute Of Technology Magnetic positioning device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0371661A2 (fr) * 1988-11-28 1990-06-06 AT&T Corp. Servo-moteurs à courant continu sans balai commutés capacitivement
US5126648A (en) * 1990-03-22 1992-06-30 Megamation Incorporated High resolution piggyback linear motor design for placement systems and the like
US5196745A (en) * 1991-08-16 1993-03-23 Massachusetts Institute Of Technology Magnetic positioning device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1282219A1 (fr) * 2000-05-12 2003-02-05 Shinano Electronics Co., Ltd. Platine pour moteur lineaire plat
EP1282219A4 (fr) * 2000-05-12 2004-05-19 Shinano Electronics Co Ltd Platine pour moteur lineaire plat

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