WO1998012799A1 - Excitateur electrostatique et dispositif d'assistance dans lequel il est utilise - Google Patents

Excitateur electrostatique et dispositif d'assistance dans lequel il est utilise Download PDF

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Publication number
WO1998012799A1
WO1998012799A1 PCT/JP1996/002714 JP9602714W WO9812799A1 WO 1998012799 A1 WO1998012799 A1 WO 1998012799A1 JP 9602714 W JP9602714 W JP 9602714W WO 9812799 A1 WO9812799 A1 WO 9812799A1
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WO
WIPO (PCT)
Prior art keywords
transformer
switch
switch means
power supply
voltage
Prior art date
Application number
PCT/JP1996/002714
Other languages
English (en)
Japanese (ja)
Inventor
Saku Egawa
Original Assignee
Hitachi, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi, Ltd. filed Critical Hitachi, Ltd.
Priority to JP51447498A priority Critical patent/JP3722446B2/ja
Priority to PCT/JP1996/002714 priority patent/WO1998012799A1/fr
Publication of WO1998012799A1 publication Critical patent/WO1998012799A1/fr

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/004—Electrostatic motors in which a body is moved along a path due to interaction with an electric field travelling along the path

Definitions

  • the present invention relates to an electrostatic actuator driving device and an assisting device using the same.
  • Japanese Patent Application Laid-Open No. 6-785666 discloses an electrostatic actuator in which the voltage of an AC power supply is increased by a transformer, and the efficiency is increased by applying the voltage to an electrode. ing.
  • a device is generally inconvenient to mount on a moving device or equipment because the size and weight of the transformer are large and an AC power supply is required.
  • a first object of the present invention is to provide an electrostatic actuator that is driven by using a DC power supply and is capable of returning the energy stored in the operating portion of the electrostatic actuator to the DC power supply side. It is in.
  • a second object of the present invention is to provide an assistance device that can be used for a long time without being supplied with external power and that can move freely, and can generate a strong force. And there.
  • a DC power supply and a working part, that is, an electrode of the electrostatic actuator, which is a capacitive load, are connected to the inductive circuit element. Electrically connected alternately.
  • a coil or a transformer can be considered as the inductive circuit element.
  • a supporting unit a unit for detecting a user's force acting on the supporting unit, and a driving unit for driving the supporting unit based on the detected force
  • an assisting device having the above-mentioned electrostatic actuator and driving the supporting portion.
  • the inductive circuit element that is, the coil or the transformer can be miniaturized.
  • the DC power supply and the operating part are separated by a time interval of 50 jus or less, It is preferred that they are alternately connected to the low and high voltage windings of the transformer, respectively.
  • the above-mentioned inductive circuit element stores electric energy from the DC power supply and then transfers the electric energy to the operating part of the electrostatic actuator, or after storing electric energy from the operating part of the electrostatic actuator. It acts to transfer that energy to the DC power supply.
  • the operation of returning the electric energy from the working part of the electrostatic actuator to the DC power in this way is called a regenerative operation.
  • a DC switch (b) a DC switch, a transformer, an operating portion serving as a capacitive load, and first switch means for connecting a terminal of the DC power supply and a low-voltage side winding of the transformer by selecting a polarity.
  • Second switch means for selecting the polarity of the actuating portion serving as the capacitive load and the high-voltage side winding of the transformer and connecting them, and switch control means.
  • the switch control means selects the polarity of the first switch means and the second switch means and turns them on alternately.
  • a DC power supply a transformer, an operating part serving as a capacitive load, first switch means for connecting a terminal of the DC power supply and a low-voltage side winding of the transformer, Connects the working part to be a load to the high-voltage side winding of the transformer
  • a second switch means a switch control means, and a transformer provided with a magnetic sensor.
  • the switch control means controls the DC power supply based on an output of the magnetic sensor.
  • the first switch means and the second switch means for alternately and selectively selecting a polarity to connect the operating portion to a low-voltage side winding of the transformer and a high-voltage winding of the transformer;
  • a static actuator that controls the switch means of the switch.
  • the magnetic sensor includes means and a sensor for detecting the magnitude of the magnetic field by detecting the current flowing through the winding of the transformer.
  • a power supply a transformer, an operating section having electrodes configured to have a plurality of phases, and a polarity of a terminal of the DC power supply and a low voltage side winding of the transformer.
  • First switch means for connecting second switch means for selecting and connecting the operating part and the high-voltage side winding of the transformer by selecting a polarity, and each phase from the voltage of each phase of the electrode.
  • the second switch means passes a current from the high-voltage side winding of the transformer toward the phase having the minimum value, and the high-voltage of the transformer starts from the phase having the maximum value.
  • An electrostatic actuator which is a switch means that operates so as to flow a current toward the voltage side winding.
  • switch control means comprises: An electrostatic actuator for selectively applying a polarity to the first switch means and the second switch means alternately.
  • a DC power supply (g) a DC power supply, a coil, an operation unit serving as a capacitive load, a first switch means for connecting the terminal of the S-current power supply to the coil, and an operation serving as the capacitive load
  • a second switch unit for connecting the unit and the coil, a switch control unit, and a magnetic sensor in the vicinity of the coil.
  • An electrostatic switch for controlling the first switch means and the second switch means to connect either the DC power supply or the operating section to the coil based on the output by selecting a polarity. Actors.
  • an AC power supply a coil, an operating part having an electrode configured to have a plurality of phases, and a first switch for connecting a terminal of the DC power supply and the coil by selecting a polarity.
  • Switch means second switch means for connecting the operating section and the coil by selecting the polarity, and obtaining a value obtained by subtracting a voltage command value given to each phase from a voltage of each phase of the electrode.
  • the means is a switch means operable to flow a current from the coil toward the phase having the minimum value and to flow a current from the phase having the maximum value toward the coil.
  • the DC power supply and the working part are alternately connected to the low voltage side winding and the high voltage side winding of the transformer at time intervals of 50 / is or less, respectively.
  • the DC power supply or the operation unit is connected to the transformer at a time interval of 100 ⁇ s or less.
  • DC power supply and working part to transformer If they are connected for the same time, the DC power supply and the working part will be connected to the transformer alternately at a time interval of 50 ⁇ S or less.
  • an assisting device comprising: a support portion; means for detecting a user's force acting on the support portion; and drive means for driving the support portion based on the detected force.
  • An assistance device comprising the electrostatic actuator according to any one of claims 1 to 8.
  • An assisting device comprising: a support portion; means for detecting a user's force acting on the support portion; and drive means for driving the support portion based on the detected force.
  • the above-described electrostatic actuator according to the present invention can be driven by a low-voltage battery by using the electrostatic actuator as an assisting device because it can save power, achieve high efficiency, and obtain a large output.
  • FIG. 1 is a circuit diagram showing a first embodiment of the electrostatic actuator driving device of the present invention.
  • FIG. 2 is a cross-sectional view illustrating the structure and operation principle of the static actuator.
  • FIG. 3 is a perspective view for explaining the structure of a laminated electrostatic actuator.
  • FIG. 4 is a circuit diagram illustrating the operation of the electrostatic actuator driving device in the case of two phases.
  • FIG. 5 is an operation flow chart of the electrostatic actuator driving device in the case of two phases.
  • FIG. 6 is a graph showing an example of a change in current, voltage, and energy stored in a transformer.
  • FIG. 7 is a circuit diagram illustrating the operation of the electrostatic actuator driving device in the case of three or more phases.
  • FIG. 8 is an operation flow diagram of the electrostatic actuator driving device in the case of three or more phases.
  • FIG. 9 is a diagram showing an example of the assistance device of the present invention.
  • FIG. 10 is a cross-sectional view illustrating a structure that enhances safety against electric shock.
  • FIG. 11 is a block diagram showing a configuration of an electrostatic actuator equipped with a power smoothing device.
  • FIG. 12 is a block diagram showing a first configuration of an electrostatic actuator having a plurality of operating parts.
  • FIG. 13 is a partial circuit diagram showing a second embodiment of the electrostatic actuator driving apparatus of the present invention.
  • FIG. 1 is a circuit diagram showing a first embodiment of an electrostatic actuator driving apparatus according to the present invention.
  • the electrostatic actuator driving device 1 receives the supply of energy from the voltage source 3 and supplies a driving voltage to the n phases P 1 to P n of the electrostatic actuator operating section 2.
  • the low voltage winding 5 of the transformer 4 is connected to the voltage source 3 via a first switch group 7, and the high voltage winding 6 is connected via a second switch group 8 It is connected to the n phases P 1 to P n of the actuator actuator 2.
  • the number of turns of the high voltage winding 6 is larger than the number of turns of the low voltage winding 5.
  • the first switch group 7 includes bridge-connected electrically controllable switching elements A 1, A 2, B l, and B 2, and selectively turns on and off the switching elements. You As a result, the voltage source 3 can be connected to the low-voltage winding 5 with an arbitrary polarity, or can be disconnected.
  • the second switch group 8 includes 2 ⁇ n switching elements C 1 to C n and D l to D n .By selectively turning on and off the switching elements, Any two of the phases Pl to Pn can be selected and connected to the high-voltage winding 6 with any desired polarity, or all phases can be disconnected.
  • the voltage comparison device 11 compares the voltages of the phases P1 to Pn obtained by the voltage detector 12 with the voltage command 10 to determine the phase and direction in which the current is applied.
  • the switch control device 9 performs switching based on the stored energy of the transformer 4 detected by the stored energy detector 16 and the phase to which the current determined by the voltage comparison device 11 is applied. Determine the timing for conducting or blocking the elements A l, A 2, B l, B 2, C l to C n, and D l to D n.
  • Switching elements ⁇ 1, A2, B1 to B2, C1 to Cn, and D1 to Dn are, for example, transistors, thyristors, MOS-FETs, IGBTs, and other semiconductors. Switching elements can be used.
  • an intelligent power module in which a switching element and a switching element drive circuit are integrated.
  • a protection circuit including a coil, a capacitor, a diode and the like may be inserted in series or in parallel with the switching element.
  • a piezoelectric transformer (piezoelectric transformer) can be used instead of a transformer using a coil.
  • a method of realizing the stored energy detector 16 there are a method of measuring the magnetic field in the transformer using a magnetic sensor such as a Hall element, and a method of obtaining the value from the winding current of the transformer.
  • FIG. 2 is a cross-sectional view for explaining the structure and operation principle of the electrostatic actuator.
  • the electrostatic actuator unit 2 includes a stator 201 and a mover 202.
  • the stator 201 has multiple electrodes 2 on an insulative base 203.
  • an AC voltage is generated by the electrostatic actuator driving device 1 and supplied to the phases Pl to Pn, an electrostatic attractive force or a repulsive force is generated between the electrodes 205 and 204.
  • a thrust 208 is generated between the stator 201 and the mover 202. The mover 202 moves relative to the stator 201 by the thrust 208.
  • FIG. 3 is a perspective view for explaining the structure of the operation part of the laminated electrostatic actuator.
  • the electrostatic actuator operating section 2 includes a plurality of stators 201 and a plurality of movers 202 which are alternately stacked, and the stator 201 has a connecting section 210 and a mover. 2 0 2 is fixed to the connecting portion 2 1 1.
  • the plurality of electrodes 205 and 206 provided on the plurality of stators 201 and the mover 202 are electrically connected to n phases P1 to Pn.
  • a thrust is generated between the adjacent stator 201 and the movable member 202.
  • a large thrust 208 is generated between the joints 210 and 211.
  • phase connected to the stator electrode 205 and the phase connected to the mover electrode 205 are connected in reverse order to the common output terminal of the driving device 1 so that the driving is performed.
  • the number of output phases of device 1 can also be reduced. That is, in the example of FIG. 2, by connecting the phases P1 to P3 and the phases P6 to P4, the number of phases of the driving device 1 can be set to three.
  • FIG. 4 is an explanatory diagram of the driving device in the case of two phases
  • FIG. 5 is an operation flow diagram of the switch control device 9. Since the electrodes of the electrostatic actuator operating section connected to a plurality of phases act as a capacitive load on the driving device, a capacitor having a capacitance C is used here. Represented by load 20.
  • the number of turns of the low-voltage winding 5 of the transformer 4 is n1
  • the self-inductance is Ll
  • the number of turns of the high-voltage winding is ⁇ 2
  • the ⁇ -inductance is L2.
  • VL is detected by the voltage detector 12 and the difference calculator 21.
  • the force for explaining the case of VL 0 is VL.
  • VL is read as 1 VL
  • 1 L is read as 1 IL
  • VR is read as 1 VR
  • the switching element C 1.2 is read as 0 1 ′ D
  • This drive operates as follows.
  • the regenerative accumulated energy detector 16 detects the accumulated energy UT of the transformer 4 and compares it with a reference value UT0 of the place (step 100).
  • the predetermined reference value U T0 may be set to, for example, about 50% of the energy amount at this time because the amount of energy that can be stored in the transformer is determined by the magnitude of the transformer.
  • step 101 turn on the switching elements A1 and B2 and turn off the other elements (step 101) to cut off the current of the high voltage winding 6 and turn off the low voltage winding.
  • the current I 1 flows due to the energy stored in the low-voltage winding 5, but the voltage source 2 is connected in a direction to increase the current I 1, so that I 1 increases.
  • UT increases according to the increase of I 1 and approaches UT 0. That is, energy is stored from the voltage source 3 to the transformer 4.
  • the allowable deviation f is appropriately determined, but may be set to 10% or less.
  • This waiting time varies depending on the initial value of U and can be calculated from the initial value of UT.
  • ⁇ can be determined by sequentially detecting UT and comparing it with UT0.
  • the switching elements Al-B1 are turned on and the others are turned off (step 104), and the low-voltage winding 5 is short-circuited. As a result, the current in the low-voltage winding 5 is preserved, and the stored energy UT of the transformer 4 is maintained at a value close to UT0.
  • step 105 it waits for a predetermined time t1 for a time (t1- ⁇ ) (step 105). That is, when a predetermined time t1 has elapsed from the start of the operation in (1), the operation proceeds to the next operation.
  • the predetermined time t 1 is determined from a time constant determined by the inductance of the transformer and the capacitance of the capacitive load. It should be set to a shorter time.
  • the switching elements C 2 ⁇ I) 1 are turned off and the others are turned off (step 109), so that the current of the low-voltage winding 5 is cut off and the high-voltage winding 6 is turned off.
  • the current 12 increases and the stored energy UT of the transformer 4 increases. The energy is regenerated from the load 20 to the transformer 4.
  • t 2 is The resonance period T of the self-inductance L 2 of the high-voltage winding 6 and the capacitance C of the load 20 is sufficiently shorter.
  • FIG. 6 shows, by way of example, a graph of a change in UT, VL, and a change in the state of the switching element when a triangular wave is applied to the voltage command VR.
  • 12 is drawn by enlarging the scale by n 2 Z n l times more than 11.
  • the pairs of switching elements C 1 -D 2 and A 1 ⁇ 2 are turned on alternately to transfer energy from the voltage source to the load via the transformer. ing.
  • V L since V L> V R, the pairs C 2 .D 1 and A 2 ⁇ ⁇ 1 are turned on alternately, and energy is transferred from the voltage source to the load via the transformer.
  • VL is controlled to follow VR.
  • I 1 and I 2 are excited alternately, and UT changes continuously.
  • switching operation is performed only for four periods for one period of the triangular wave.However, in practice, switching operation is performed sufficiently fast for voltage command changes, Obtain a proper output waveform.
  • FIG. 7 is an explanatory diagram of the drive device in the case of three or more phases
  • FIG. 8 is a flow diagram of the operation of the switch control device 9.
  • Load 20 has multiple phases P 1 ⁇ P n.
  • the operation (1) steps 100 to 105 in the case where the number of phases is 2 is performed in the same manner.
  • the above operation (2) (steps 106 to 110) is extended as in the following (2 ').
  • VE is compared with a predetermined tolerance ⁇ (Step 120), and if IV ⁇ I> ⁇ , the switching element Cj'Dk is turned on and the other elements are turned off (Step 122). ), Cut off the current in the low voltage winding 5 and connect the high voltage winding 6 to the phases P j and P k of the load 20. As a result, a current 12 is excited in the high-voltage winding 6, and a current 12 is supplied from the phase Pj of the load 20 to the phase Pk. The potential difference VL increases, and VL approaches the potential difference VR of the voltage command of the phase Pj with respect to the phase Pk.
  • each hook may be grounded via a high resistance in order to make the average ground potential close to zero.
  • the switching elements which are the minimum necessary to allow a desired current to flow through the circuit, are turned on and the others are turned off.However, when the current flowing through the circuit is not affected, the switching elements are turned off. In order to allow time for operation, the switching element may be turned on earlier than required or delayed after being turned off.
  • a pair of upper and lower switching elements of A 1 -B 1 was turned on and the low-voltage winding 5 was short-circuited.
  • the switching element may be turned on, or the high-voltage winding 6 may be short-circuited.
  • the switching element is controlled so that the current always flows through only one of the two windings of the transformer, so that the winding is equivalent to the inductance and acts as a current source. No large inrush current to voltage source and capacitive load. Also, since the current in both windings of the transformer is not interrupted, no large surge voltage is generated. Since the switching element is ON or OFF and there is no large inrush current and surge voltage, loss in the circuit is small and large power can be generated without using a large heat sink. In addition, since the energy is moved little by little by operating the switch repeatedly at high speed, the energy stored in the transformer can be smaller than the maximum energy stored in the load, and it is small and lightweight. A large amount of power can be generated using this transformer.
  • the transformer since the transformer has a boost function, a high voltage can be generated using a low voltage source. Since one transformer has both an energy conversion function from a voltage source to a current source and a voltage conversion function from a low voltage to a high voltage, the circuit configuration is simple, and it can be configured small, lightweight and inexpensive.
  • the reactive power generated when driving a capacitive load and the power generated when an actuator is driven by an external force are regenerated to a voltage source through a transformer.
  • the energy consumption of the voltage source can be reduced. Since a regenerative resistor and a heat sink that consumes excess power are not required, the device can be reduced in size and weight.
  • the potential difference of each phase is applied to any voltage command. It can quickly follow the potential difference of the command.
  • the electrostatic actuator driving device of the present invention is small and lightweight, has high efficiency, has a large output, can use a low-voltage power supply, and can generate a high-voltage arbitrary waveform voltage.
  • High efficiency and use of low-voltage power supply enable long-time operation with small batteries. Also, since high power and large output can be generated, large thrust and large output can be generated in the electrostatic actuator operating section.
  • the repetition cycle tc be 1 ⁇ ⁇ ⁇ s or less, and more preferably 20 ⁇ s to l / s. .
  • VLmax is in the range of 300 V to 300 V in order to generate a sufficient thrust in the actuator unit of the electrostatic actuator. Hope that there is. Therefore, it is desirable that the switching element has a switching time of 2 ⁇ s or less and a withstand voltage of 300 V to 300 V.
  • the winding ratio n 2 Z nl of the transformer is close to VL max ZVS, and more preferably, the (n 2 nl) / (VL max / VS) force SO.2 to 5 It is desirable that Under this condition, the time ⁇ required for energy storage and regeneration in the transformer in (1) above is close to the current application time tl to the load in (2), and the second switch group and the second switch Since the operating speed required for the switching elements of the switch group is close, the repetition cycle tc can be shortened by maximizing the performance of the switching elements, contributing to the downsizing and weight reduction of the transformer.
  • the resonance period T of the high-voltage winding and the load capacitance must be equal to the current application time t1. It is desirable to set the self-inductance L 2 of the high-voltage winding so as to be in the range of 4 to 40 times. In addition, it is desirable that the reference value U T0 of the energy stored in the transformer is 1 to 10 times the maximum energy transferred during the time t2 in (2).
  • FIG. 13 shows a second embodiment of the electrostatic actuator driving device of the present invention.
  • a high-voltage power supply 60 is provided in place of the voltage source 3 of the first embodiment shown in FIG. 1, and a coil 61 is provided in place of the transformer 4, and a low-voltage winding is provided.
  • a common coil 61 is connected to the circuit.
  • the switch control device 9, the voltage comparison device 11 and the voltage detector 12 are similarly provided, and the present driving device operates in the same manner as the first embodiment.
  • the current flowing through the switching cables # 1, # 2, Bl, and # 2 is reduced, so that the size of the switching element can be reduced.
  • the high-voltage power supply 60 can be made small, lightweight, and highly efficient.
  • the high voltage power supply 60 can be used in common, so that the entire apparatus is reduced in size and weight.
  • FIG. 9 (a) is a configuration diagram showing an embodiment of the assistance device of the present invention using the electrostatic actuator driving device of the present invention.
  • the assistance device 30 includes a support portion 32 provided on the arm 31, a linear electrostatic actuator operating portion 2 for driving the arm 31, and the electrostatic actuator of the present invention.
  • a driving device 1 is provided, and a battery is mounted as a voltage source 3.
  • the arm 31 is rotatably mounted on a fulcrum 33 provided on a column 34.
  • the electrostatic actuator operating portion 2 has one end on the column 34 and the other end on the arm 3. It is rotatably mounted on 1 by fulcrums 35 and 36.
  • the assisting device 30 includes an acting force detector 38 that detects an acting force 41 acting on the user 37 from the support portion 32 and an assisting control that generates a voltage command to be given to the electrostatic actuator driving device 1.
  • a device 39 is provided so that a part of the weight can be supported in response to the impaired leg strength of the user 37.
  • FIG. 9 (b) is a control block diagram of the assistance device 30.
  • the acting force 41 acting on the user 37 from the support part 32 is detected by the acting force detector 38.
  • the upward acting force is positive.
  • the assistance control device 39 the difference between the acting force 41 and the acting force target value 42 is obtained by the subtractor 45, and the difference is multiplied by the gain KV by the multiplier 46, and the electrostatic actuator operating section is obtained.
  • the sign of the gain KV is set so that the support portion 32 is moved upward when the acting force 41 is smaller than the acting force target value 42.
  • the multiplier 47 multiplies the speed instruction 43 by a constant KF determined by the arrangement of the electrodes of the electrostatic actuator operating section 2 to operate the electrostatic actuator operating section 2 in accordance with the speed instruction 43.
  • the AC generator 48 generates an AC waveform according to the frequency command 44 and supplies it to the electrostatic actuator driving device 1 as a voltage command 10.
  • the electrostatic actuator operating section 2 operates according to the speed command 43, and the arm 31 and the support section 32 move in conjunction therewith.
  • the target force 42 is determined so that a part of the weight is supported according to the degree of the leg weakness of the user 37. As a result, the burden on the leg of the user 37 can be reduced, and the user can easily walk, and at the same time, a decrease in leg strength can be prevented.
  • the electrostatic actuator operating section 2 As the electrostatic actuator operating section 2, a laminated type configuration shown in Fig. 3 that is small and lightweight and can generate a large output is used. User 3 weighing up to 100 kg In order to cope with the assistance of 7, an assistance force of up to 1 kN is required, but in order to configure the mechanism compactly, the leverage ratio of the arm is 0.5 force> 10 Therefore, it is desirable that the maximum thrust generated by the actuator of the electrostatic actuator be 500 N to 1 O N or less.
  • a battery that can be charged and discharged with a high energy density as the battery used for the voltage source 3, such as a lead storage battery, a nickel-powered dome battery, a nickel hydrogen battery, Lithium batteries can be used.
  • the actuator of the assisting device uses the static tg actuator, the power weight ratio (output with respect to the equipment weight) is large, and it is small and lightweight.
  • the arm is rotationally driven by using a linear electrostatic actuator operating portion, the mechanism is compact.
  • the electrostatic actuator driving device g uses the electrostatic actuator driving device of the present invention, the electrostatic actuator driving device g is small, lightweight, power saving, and high output.
  • rising and standing T-gags and walking motions include reciprocating movements in the vertical direction, but when moving downward, power is regenerated, further reducing power consumption.
  • the electrostatic actuator driving device of the present invention has a boosting function, it operates with a low-voltage power supply. Efficiency, low power consumption, and low power supply voltage make it possible to use a small and lightweight battery for power supply for a long time.
  • FIG. Lo is a cross-sectional view illustrating a structure that enhances safety against electric shock.
  • the stacked electrostatic actuator operating section 2 having a plurality of stators 203 and movable elements 204 and the electrostatic actuator driving device 1 are housed in a common insulating case 50, and are connected to the voltage source 3. Have been.
  • the electrostatic actuator driving device 1 is supplied with power from the voltage source 3 and applies a high voltage for driving to the electrostatic actuator operating unit 2.
  • the electrostatic actuator driving device has a boosting function, the voltage of the voltage source 3 can be set to a low voltage, and the high voltage application portion is minimized in the insulating case. Because it is within the range, high safety against electric shock is obtained. Since the electrostatic actuator driving device of the present invention is small and lightweight, the compact and lightweight nature of the electrostatic actuator is not impaired even in this configuration.
  • the voltage of the voltage source 3 be less than or equal to DC 60 V, which is a safety extra-low voltage specified in JIS-T1001, and limit the current consumption. Therefore, it is desirable that the voltage be 12 V or more.
  • FIG. 11 is a block diagram of an electrostatic actuator equipped with a power smoothing device.
  • An electric power smoothing device 51 having a smoothing capacitor 52 and a charge / discharge control device 53 is inserted between the electrostatic actuator driving device 1 connected to the electrostatic actuator operating portion 2 and the voltage source 3. Have been.
  • the charge / discharge control device 53 supplies the power from the voltage source 3 to the smoothing capacitor 52 or the power from the smoothing capacitor 52 to the voltage source 3 so that the voltage of the smoothing capacitor 52 falls within a predetermined range. Regenerate.
  • the electrostatic actuator driving device 1 receives power supply from the smoothing capacitor 52 instead of the power source, and regenerates surplus power to the smoothing capacitor 52.
  • the charge / discharge control device 53 uses, for example, the same circuit configuration as the two-phase electrostatic actuator drive device shown in FIG. 4 and uses a smoothing capacitor as the load 20. It is realized by connecting 52. As the smoothing capacitor 52, it is desirable to use an electrolytic capacitor having a large capacity and an electric double layer capacitor.
  • FIG. 12 is an explanatory diagram of two types of configurations of an electrostatic actuator having a plurality of operating sections.
  • the plurality of electrostatic actuator driving devices 1 connected to the plurality of electrostatic actuator operating sections 2 are connected to the plurality of power smoothing devices 51, respectively.
  • a common power smoothing device 51 is provided, and a plurality of electrostatic actuator driving devices 1 respectively connected to the plurality of electrostatic actuator operating units 2 are connected to the common power smoothing device 51. You may do it. With such a configuration, since only one power smoothing device 51 is required, the load on the voltage source 3 can be reduced by a small and low-cost device.
  • the electrostatic actuator driving device is connected to a capacitive load such as a piezoelectric element or an ultrasonic motor instead of the electrostatic actuator operating section, and is applied to drive them. Can also. Further, the configuration of the assisting device of the present invention can be applied to a mechanical device such as a robot and a manipulator.
  • An electrostatic actuator controls a switch group to control a low-voltage winding and a voltage source of a transformer or a high-voltage winding and an electrostatic actuator. Since the actuators are electrically connected alternately, the electrostatic actuator, which is a capacitive load, can be driven with high efficiency, and at the same time, the voltage can be increased to generate a high voltage. In addition, the surplus energy generated in the electrostatic actuator operating section can be regenerated to the voltage source, which saves power. Since the switching means is switched at high speed, large power can be generated using a small transformer. Since the transformer is small and a large heat sink is not required, it is small and lightweight.

Abstract

L'invention concerne un excitateur électrostatique qui présente une petite taille, un faible poids, une puissance de sortie élevée et qui permet d'économiser l'énergie, et un dispositif d'assistance de sécurité dans lequel ce type de dispositif de commande se déplace librement. Un premier et un second moyen de commutation sont commandés de sorte qu'ils connectent en alternance l'enroulement de tension inférieure d'un transformateur à la source de tension CC ou l'enroulement haute tension du transformateur à la section d'excitation de l'excitateur électrostatique et que l'énergie électrique soit transférée de manière répétée dans un sens arbitraire entre une source de tension CC et une section d'excitation de l'excitateur électrostatique.
PCT/JP1996/002714 1996-09-20 1996-09-20 Excitateur electrostatique et dispositif d'assistance dans lequel il est utilise WO1998012799A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP51447498A JP3722446B2 (ja) 1996-09-20 1996-09-20 静電アクチュエータ及びそれを利用した介助装置
PCT/JP1996/002714 WO1998012799A1 (fr) 1996-09-20 1996-09-20 Excitateur electrostatique et dispositif d'assistance dans lequel il est utilise

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1996/002714 WO1998012799A1 (fr) 1996-09-20 1996-09-20 Excitateur electrostatique et dispositif d'assistance dans lequel il est utilise

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JP2012135112A (ja) * 2010-12-21 2012-07-12 Tohoku Ricoh Co Ltd 高電圧インバータ装置及びその出力電圧調整方法
JP2012186984A (ja) * 2010-03-26 2012-09-27 Tohoku Ricoh Co Ltd 高電圧インバータ装置

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JPH0576187A (ja) * 1991-09-12 1993-03-26 Fuji Electric Co Ltd 静電アクチユエータ
JPH05260766A (ja) * 1991-06-05 1993-10-08 Matsushita Electric Works Ltd 静電アクチュエータ
JPH06121549A (ja) * 1992-10-05 1994-04-28 Mitsubishi Electric Corp 静電アクチュエータ
JPH07184377A (ja) * 1993-10-21 1995-07-21 Mitsubishi Chem Corp 静電アクチュエータ
JPH07298647A (ja) * 1994-04-22 1995-11-10 Kanagawa Kagaku Gijutsu Akad 静電アクチュエータ駆動装置

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JPH05260766A (ja) * 1991-06-05 1993-10-08 Matsushita Electric Works Ltd 静電アクチュエータ
JPH0576187A (ja) * 1991-09-12 1993-03-26 Fuji Electric Co Ltd 静電アクチユエータ
JPH06121549A (ja) * 1992-10-05 1994-04-28 Mitsubishi Electric Corp 静電アクチュエータ
JPH07184377A (ja) * 1993-10-21 1995-07-21 Mitsubishi Chem Corp 静電アクチュエータ
JPH07298647A (ja) * 1994-04-22 1995-11-10 Kanagawa Kagaku Gijutsu Akad 静電アクチュエータ駆動装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012186984A (ja) * 2010-03-26 2012-09-27 Tohoku Ricoh Co Ltd 高電圧インバータ装置
US8971081B2 (en) 2010-03-26 2015-03-03 Ricoh Company, Ltd. High voltage inverter device for delivering a high-power AC high voltage
JP2012135112A (ja) * 2010-12-21 2012-07-12 Tohoku Ricoh Co Ltd 高電圧インバータ装置及びその出力電圧調整方法

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