WO1997041995A2 - Procede d'usinage de pieces au laser - Google Patents

Procede d'usinage de pieces au laser Download PDF

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Publication number
WO1997041995A2
WO1997041995A2 PCT/DE1997/000808 DE9700808W WO9741995A2 WO 1997041995 A2 WO1997041995 A2 WO 1997041995A2 DE 9700808 W DE9700808 W DE 9700808W WO 9741995 A2 WO9741995 A2 WO 9741995A2
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WO
WIPO (PCT)
Prior art keywords
excitation frequency
response signals
frequency
signals
measurement
Prior art date
Application number
PCT/DE1997/000808
Other languages
German (de)
English (en)
Other versions
WO1997041995A3 (fr
Inventor
Hartmut Zefferer
Frank Schneider
Kai-Uwe Preissig
Wolfgang Schulz
Dirk Petring
Original Assignee
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. filed Critical Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Publication of WO1997041995A2 publication Critical patent/WO1997041995A2/fr
Publication of WO1997041995A3 publication Critical patent/WO1997041995A3/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/034—Observing the temperature of the workpiece
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/06—Surface hardening
    • C21D1/09—Surface hardening by direct application of electrical or wave energy; by particle radiation
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D11/00—Process control or regulation for heat treatments

Definitions

  • the invention relates to a method for machining workpieces with laser radiation, in which a measurement-technical monitoring of the irradiated processing area takes place, correspondingly response signals are determined, and in which a method parameter is modulated with an excitation frequency, in which the overwrite - Process state beyond a predetermined limit is avoided.
  • a method with the aforementioned processing steps is known from DE 39 26 540 C2.
  • the irradiated processing area is covered with a radiation-absorbing layer.
  • the modulation of the process parameter, namely the laser radiation power leads to a change in the surface temperature of the coating of the workpiece, but not to a change in the temperature of the workpiece to be determined.
  • the latter can be determined by subtracting a temperature value from the measured surface temperature of the layer, which temperature value is calculated from the laser radiation power absorbed by the workpiece and the heat replacement circuit diagram of the respective workpiece.
  • the invention has for its object to improve a method with the method steps mentioned in such a way that the monitoring of the irradiated processing area even with uncoated workpieces and can be carried out without using heat substitute circuit diagrams of the workpieces to be machined.
  • a method is to be shown in which monitoring and / or regulation is carried out taking into account a predetermined, possibly critical method limit, the approximation of a process state to this predetermined limit being monitored, so that the required quality characteristics of the Processing will not be affected.
  • This object is achieved in that the alternating components of measurement signals of at least one excitation frequency are used to determine the response signals, that the processing-specific dependence of the response signals on the process parameters for the excitation frequency is pre-determined, and that the response signals are based on the aforementioned dependency be used for monitoring and / or for regulating the process state.
  • the generally known metrological monitoring of a processing area irradiated with laser radiation must result in interpretable measuring signals.
  • the measurement signals must be a measure of the process state to be monitored or controlled and its characteristic changes.
  • the measurement signals must not be excessively disturbed or noisy, so that the process state can be correctly assessed with high statistical probability. Fluctuations in the measurement signals become greater the closer the process state approaches a critical limit.
  • a critical limit is determined, for example, by the formation of a beard when cutting.
  • the setpoint to which control is to take place must be relatively far from the critical limit or limit speed. That slows down the process.
  • the process described above has the advantage that the workpiece can be machined close to the process boundary and the process can be controlled. There is no risk that the limit is exceeded unintentionally because the modulation of the process parameter does not affect the process state to be controlled.
  • At least one selected excitation frequency at which a disturbance of the process state to be controlled is therefore excluded, only rapid processes are detected, for example the change in temperature on an absorption front.
  • the alternating components are used in such a way that they serve as the basis for determining the process parameter by normalizing them to the value of the excitation amplitude. The normalization takes place in connection with a previously determined processing-specific dependency of the response signals on the process parameter for the excitation frequency.
  • the maximum permissible limit value of the process parameter can be noted in a corresponding diagram, and thus the maximum permissible manipulated variable can be limited.
  • the modulation of the method parameter is carried out using a special excitation frequency in such a way that special information is impressed on the measurement signals, which information can be evaluated by utilizing the alternating components of the measurement signals for the specific excitation frequency.
  • the measurement signals now also contain information about the time-dependent response behavior. This information about the time-dependent response behavior is processed into characteristic response signals which are to be used for evaluating the current process status.
  • the known response behavior namely the dependency of the response signals on the process parameter for the specific excitation frequency
  • the process can be approximated to a predetermined limit value without actually having to exceed this critical limit and without the risk of unintentionally crossing the border.
  • the control or regulation of the process state can be carried out using the known methods of control engineering.
  • the method described above can be used if quality features change continuously with the method parameter or with several method parameters. However, it is particularly advantageous to use the method if the predetermined limit of the process state to be controlled is determined by a swelling behavior.
  • Process states or quality features mentioned, for example, which have a clear swelling behavior include the formation of beards and burnout or scouring out during cutting, the depth of welding, pore formation and spattering during welding, and the coating damage of surface processing.
  • the excitation frequency for the modulation of the method parameters must be matched to the respective machining method. It is therefore advantageous to carry out the method in such a way that the excitation frequency is adapted on-line and the dependencies of response signals on the method parameter for the adapted excitation frequencies are adapted accordingly. Due to the on-line adaptation of the excitation frequency etc., controlled changes in process parameters can be taken into account, e.g. on the changes in the laser radiation power during contour cutting.
  • modulation parameters can also be changed, so that it is advantageous if the signal shape and / or the signal amplitude are adapted on-line as further modulation parameters.
  • the method can be carried out in such a way that the response signals are obtained from alternating components of measurement signals by means of their amplitudes and / or phases or by means of quantities derived from the measurement signals. This makes it possible to appropriately modify the method. If the response signals of measurement signals cannot be obtained from their amplitudes and / or phases, they are derived Used variables that then deliver the actual response signal. Such derived variables result from simultaneous measurement of the frequency responses at several excitation frequencies and comparison of these responses, by measuring rise times or relaxation times, by measuring extreme values, by measuring time periods of the positive or negative deviation from the mean of the measurement signal, by measuring the non-linearity of the measurement signal response, for example the distortion factor, etc.
  • the method can also be carried out in such a way that the alternating components of the measurement signals are used at intervals. With certain processing methods, it is not necessary to continuously monitor the measurement. The use of details is possible, e.g. in the case of a measurement with a fixed phase relationship to a test signal or to a modulation of the method parameter and in a fixed time interval.
  • the above-described methods can all be carried out as monitoring methods in which the process state to be influenced does not necessarily have to be regulated in accordance with the monitoring result. In the sense of automating production processes, however, it is advantageous to proceed in such a way that the response signals are used to determine manipulated variables of a controller used in a control circuit for the process parameters.
  • the method can also be used to adapt the controller.
  • the method is carried out in such a way that the response signals are used to adjust the setpoint and / or setting parameters of the controller influencing the method parameter, which uses the measurement signals.
  • Both of the above-mentioned methods can be used together to implement an adaptive controller. In principle, this can take place during the regulation of the method parameter, but also when such a regulation is not used or is interrupted.
  • a method is expedient in which the control circuit having the controller for the method parameter is interrupted at predetermined time intervals for the purpose of adjusting the setpoint and / or setting parameters and, if necessary, at least during this time a signaling and / or process interrupting monitoring takes place.
  • the signaling and / or process interrupting monitoring takes place at least during these interruption times of the machining control.
  • the intermittent setpoint and / or adjustment parameter adjustments simplify the method and improve the time behavior of the system.
  • consequential damage can be averted, for example by interrupting the process.
  • the machining process can be controlled or regulated so that a predetermined limit, which is determined, for example, by a threshold value, is not exceeded.
  • a convenient determination of the excitation frequency for the method takes place in that the excitation frequency is selected from a frequency interval that extends at most so low that a disturbance of the process state to be monitored and / or to be controlled is excluded, and that at most is so high that Processes predeterminable time behavior can still be detected.
  • excitation frequencies lying within the frequency interval it is ensured that disruptions in the process state are avoided by the modulation of the process parameter, but on the other hand even faster process changes can be detected by measurement technology.
  • the method can be carried out to approximate the cut-off limit when cutting so that when cutting workpieces the laser radiation power is modulated by an average value with an excitation frequency that is greater than the groove frequency, but if necessary smaller than that Time constants for the change in the surface temperature of the
  • heat radiation signals from the cutting front are used as measurement signals, which are applied to a detector with a beam splitter or scraper mirror arranged coaxially to the laser beam.
  • the response signal is determined from the alternating components of the amplitudes of the measurement signals.
  • the method is carried out in such a way that, when welding workpieces, the laser radiation power is modulated by an average value with an excitation frequency that is greater than the welding depth frequency, but if necessary less than the time constant for changing the luminance of the corresponds to laser-induced plasma.
  • the welding depth frequency is the typical frequency of the welding depth change.
  • a plasma radiation signal is sent from the welding capillary to the detector using a beam splitter or a hole mirror.
  • Time constants are a slow time constant from the welding depth variation in comparable process parameters and a fast time constant, namely the typical time constant for the change in the luminance of the plasma during welding.
  • the process parameter to be modulated is the laser radiation power, which is modulated by an average value of, for example, 95% P L- iax with an amplitude of, for example, 5% of P L max.
  • the excitation frequency is twice as high as the welding depth frequency. Even with this procedure the response signal corresponds to the alternating components of the measurement signal amplitude.
  • the procedure is such that when the workpieces are hardened, the laser radiation power is modulated by an average value with an excitation frequency that is greater than the hardening depth frequency, but if necessary smaller than the time constant for the change in the surface temperature of a cover layer of the workpiece.
  • the hardening depth frequency is the typical frequency of the change in the hardening depth.
  • the heat radiation signal of the absorption front is determined with a detector.
  • a slow time constant results from the hardening depth variation with comparable process parameters.
  • the laser power is modulated as described above, the excitation frequency being, for example, five times the hardening depth frequency.
  • the response signal results as the value of the alternating components of measurement signal amplitudes at excitation frequencies.
  • the speed at which the workpiece is moved relative to the processing optics is used as the manipulated variable, for example.
  • the mean laser beam power can be used as process parameters at the same time or instead.
  • Fig.l amounts of the alternating components of measurement signals as a function of excitation frequencies for different processing speeds
  • Fig.2 the course of test signals and measurement signals as a function of time, at high (-) and low ( • • • • ) values of the modulation frequency
  • a workpiece 10 is cut with laser radiation 11.
  • a relative movement takes place between the two at the speed v (t).
  • the workpiece 10 is displaced in the direction of the arrow 19, so that the vertically dashed regions of the workpiece 10 have already been severed.
  • Optical radiation namely thermal radiation or reflected laser radiation, emanates from the processing region 12 irradiated with the laser radiation 11, and noises are emitted.
  • thermal radiation 20 arrives at a scraper mirror 21, which allows the laser radiation 11 to pass unimpeded in the hole area, but fades out the heat radiation 20, so that it can be focused on a detector 23 with a lens 22 (not shown).
  • the power of the laser radiation 11 is therefore modulated in time.
  • the time course of the laser power P (t) is illustrated schematically in block 25. Po corresponds, for example, to 95% of P L max and the alternating component P ⁇ sin ( ⁇ t) is shown schematically.
  • the modulation of the laser power is a test signal, to which the process reacts with a measurement signal 14 contained in the heat radiation 20.
  • a response signal 26 is determined, which is fed to a controller 18, for example a PID controller.
  • the controller 18 uses this response signal 26 to determine a manipulated variable 13, namely a manipulated variable for the feed rate v (t).
  • Actuating variable 13 is labeled vi (t) in FIGS. 6, 7.
  • FIG. 1 In which the dependence of the amounts 15 on alternating components of measurement signals 14 on the excitation frequency 0) is shown.
  • the bottom curve of FIG. 1 results for a predetermined processing speed vi. With increasing processing speed, the amounts 15 are definitely larger, the highest at the speed v max . However, it is not the case that any excitation frequency ⁇ > could be selected in order to obtain the largest possible amounts 15 of the alternating components of measurement signals. This is explained with reference to Fig.2.
  • This demonstrates the effect of fast test signals (solid lines) and slow test signals (dotted lines) on the measurement signals when cutting a workpiece 10.
  • the test signal is a square-wave pulse that is alternately positive and negative.
  • the selected processing speed is v ⁇ vk r it, corresponding time-limited measurement signals result, even if the test signals are comparatively low-frequency.
  • the modulation is carried out at a processing speed v ⁇ vkrit, test signals with a higher excitation frequency ⁇ still result in usable measurement signals, but with a lower excitation frequency ⁇ the separation limit is exceeded during cutting. It is therefore important to select sufficiently fast test signals, that is to say to carry out the modulation of the process parameter with a sufficiently high frequency so that the machining process is not disturbed in such a way that the critical limit is exceeded. If the machining process is undisturbed, the quality characteristics required for the machining process are not impaired.
  • 3 shows, for a specific, not explained in more detail, how the practical evaluation of the representation in FIG. 1 can be carried out to determine the manipulated variables 13 for the process parameter.
  • 3 shows the dependence of the amount 15 of the alternating components on measurement signals 14 as a function of the process parameter 16, here the processing speed. This dependence basically applies to all process parameters, for example also for the laser radiation power PL.
  • the frequency of the test signal that is to say for ⁇ i, the amounts 15 of alternating components of the measurement signals are combined to form a new characteristic curve 28.
  • a manipulated variable can be determined by referring to the determined amount 15 'for the selected processing speed vi, which is indicated in the adder 29 by ei ⁇ a setpoint U ⁇ lsoH i TM is compared for the purpose of forming a difference, the resulting difference acting on the controller 18.
  • UMlsoll corresponds to the predetermined limit 17 of the process state to be controlled and has the value 15 ′′. It is therefore possible to increase the process parameter 16 or the processing speed v until the amount 15 of the alternating components of the measurement signals 14 has reached or almost reached the value 15 ′′.
  • FIG. 4 shows the control to be carried out in this way in a simplified manner, namely with block 30 for the process, for example a cutting process, and with block 31 for obtaining the response signal from the measurement signal 14.
  • the broken line explains the use of a controller 18 'in the conventional method using the measurement signal directly to obtain the manipulated variable by the controller 18'.
  • FIG. 5 shows that the alternating components of measurement signals 14 can also be used in a manner different from that described above.
  • process 30 can be controlled in a conventional manner with measurement signal 14 in control loop 32.
  • the above-described method for Fig.l to 3 is used to implement an adaptive controller 18.
  • the response signals are not used directly to regulate the process, but rather to adapt the setpoint of the controller 18, which uses the measurement signal 14, or to adapt controller parameters or setting parameters of the controller, which uses the measurement signal 14.
  • the blocks 33 for the adaptation of the setpoint and 34 for the adaptation of the controller parameters are shown in FIG. These adjustments can be made at intervals.
  • there is a process-interrupt monitoring system not shown, which can interrupt the process immediately in order to avoid consequential damage.
  • the setpoint URS is corrected, for example, which determines the input variable of the controller 18 via an adder 35 by forming the difference with the measurement signal 14.
  • the alternating components of measurement signals 14 can, at the same time or in addition to the setpoint adjustment, change setting parameters of the controller, for example its integral behavior.
  • FIGS. 6, 7 illustrate the acquisition of the response signal 26 from the measurement signal 14.
  • UMI SO 11 UMI (t) applies.
  • Block 36 shown as in Fig.6 A bandpass filter 38 is used to gain the alternating components U M1 (t) sin ( ⁇ t + ⁇ ) nen. Their course is shown in block 39. 40 denotes a square element with which the temporal dependency shown in block 41 is determined according to the relationship

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)

Abstract

Selon ce procédé d'usinage de pièces (10) au laser (12), la zone d'usinage irradiée (12) est soumise à un contrôle métrologique qui permet de déterminer des signaux de réponse (26), et un paramètre (16) du procédé est modulé à une fréquence d'excitation (φ). Afin d'éviter qu'un état du processus ne dépasse une limite prédéterminée, cet état du processus est contrôlé lorsqu'il s'approche de cette limite prédéterminée. Afin de pouvoir mettre en oeuvre ce procédé même avec des pièces non revêtues, notamment sans qu'il soit nécessaire d'utiliser des diagrammes thermiques équivalents des pièces à usiner, on utilise les composantes alternatives (UM1(t)sin(φt+Υ)) des signaux de mesure (14) d'au moins une fréquence d'excitation (φ), la relation, spécifique de l'usinage, entre les signaux de réponse et le paramètre (16) du processus à la fréquence d'excitation (φ) est prédéterminée et les signaux de réponse (26) sont utilisés pour contrôler et/ou réguler l'état du processus en fonction de ladite relation spécifique.
PCT/DE1997/000808 1996-05-06 1997-04-23 Procede d'usinage de pieces au laser WO1997041995A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE1996118045 DE19618045C2 (de) 1996-05-06 1996-05-06 Verfahren zum Bearbeiten von Werkstücken mit Laserstrahlung
DE19618045.7 1996-05-06

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Publication Number Publication Date
WO1997041995A2 true WO1997041995A2 (fr) 1997-11-13
WO1997041995A3 WO1997041995A3 (fr) 1997-12-11

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19908715C1 (de) * 1999-02-27 2000-06-15 Saechsische Elektronenstrahl G Verfahren zum Rekristallisationsglühen von dünnwandigen Rohren
CN105385839A (zh) * 2014-09-09 2016-03-09 中国科学院沈阳自动化研究所 一种激光冲击强化自动化控制系统和方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59907044D1 (de) * 1998-10-07 2003-10-23 Fraunhofer Ges Forschung Verfahren zur materialbearbeitung mit plasma induzierender hochenergiestrahlung
DE102004052323B4 (de) * 2004-10-27 2008-01-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Trennen von Werkstoffen mit einem Laserstrahl
DE102018209929A1 (de) * 2018-06-20 2019-12-24 Bayerische Motoren Werke Aktiengesellschaft Verfahren zum Bearbeiten eines Bauteils eines Kraftfahrzeugs

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US4121087A (en) * 1977-11-18 1978-10-17 Rockwell International Corporation Method and apparatus for controlling laser welding
EP0143450A2 (fr) * 1983-11-28 1985-06-05 Elpatronic Ag Méthode et appareil pour le soudage pulsé à haute densité d'énergie
US4825035A (en) * 1986-09-20 1989-04-25 Mitsubishi Denki Kabushiki Kaisha Control apparatus for energy beam hardening
DE3926540A1 (de) * 1989-08-11 1991-02-14 Fraunhofer Ges Forschung Verfahren einer laserbestrahlung beschichteter werkstuecke und vorrichtug zur durchfuehrung des verfahrens
EP0698800A1 (fr) * 1994-08-25 1996-02-28 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Procédé de la répartition de l'intensité du rayonnement laser pour le traitement de surfaces d'éléments
US5506386A (en) * 1993-11-30 1996-04-09 Elpatronic Ag Simultaneous temperature measurements on laser welded seams with at least two pyrometers in relation to monitoring process parameters and weld quality

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Publication number Priority date Publication date Assignee Title
US4579463A (en) * 1984-05-21 1986-04-01 Therma-Wave Partners Detecting thermal waves to evaluate thermal parameters

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4121087A (en) * 1977-11-18 1978-10-17 Rockwell International Corporation Method and apparatus for controlling laser welding
EP0143450A2 (fr) * 1983-11-28 1985-06-05 Elpatronic Ag Méthode et appareil pour le soudage pulsé à haute densité d'énergie
US4825035A (en) * 1986-09-20 1989-04-25 Mitsubishi Denki Kabushiki Kaisha Control apparatus for energy beam hardening
DE3926540A1 (de) * 1989-08-11 1991-02-14 Fraunhofer Ges Forschung Verfahren einer laserbestrahlung beschichteter werkstuecke und vorrichtug zur durchfuehrung des verfahrens
US5506386A (en) * 1993-11-30 1996-04-09 Elpatronic Ag Simultaneous temperature measurements on laser welded seams with at least two pyrometers in relation to monitoring process parameters and weld quality
EP0698800A1 (fr) * 1994-08-25 1996-02-28 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Procédé de la répartition de l'intensité du rayonnement laser pour le traitement de surfaces d'éléments

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19908715C1 (de) * 1999-02-27 2000-06-15 Saechsische Elektronenstrahl G Verfahren zum Rekristallisationsglühen von dünnwandigen Rohren
CN105385839A (zh) * 2014-09-09 2016-03-09 中国科学院沈阳自动化研究所 一种激光冲击强化自动化控制系统和方法

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DE19618045C2 (de) 1998-03-26
DE19618045A1 (de) 1997-11-13
WO1997041995A3 (fr) 1997-12-11

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