WO1997023425A3 - Verfahren zur herstellung wärmereflektierender schichtsysteme auf transparenten substraten - Google Patents

Verfahren zur herstellung wärmereflektierender schichtsysteme auf transparenten substraten Download PDF

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Publication number
WO1997023425A3
WO1997023425A3 PCT/DE1996/002429 DE9602429W WO9723425A3 WO 1997023425 A3 WO1997023425 A3 WO 1997023425A3 DE 9602429 W DE9602429 W DE 9602429W WO 9723425 A3 WO9723425 A3 WO 9723425A3
Authority
WO
WIPO (PCT)
Prior art keywords
layers
metal oxide
laminated systems
silver
metal
Prior art date
Application number
PCT/DE1996/002429
Other languages
English (en)
French (fr)
Other versions
WO1997023425A2 (de
Inventor
Volker Kirchhoff
Ullrich Hartung
Bernhard Soeder
Emil Groeninger
Original Assignee
Fraunhofer Ges Forschung
Arcon Flachglas Veredlung Gmbh
Volker Kirchhoff
Ullrich Hartung
Bernhard Soeder
Emil Groeninger
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7781209&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO1997023425(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Fraunhofer Ges Forschung, Arcon Flachglas Veredlung Gmbh, Volker Kirchhoff, Ullrich Hartung, Bernhard Soeder, Emil Groeninger filed Critical Fraunhofer Ges Forschung
Priority to EP96946204A priority Critical patent/EP0868405B1/de
Publication of WO1997023425A2 publication Critical patent/WO1997023425A2/de
Publication of WO1997023425A3 publication Critical patent/WO1997023425A3/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3613—Coatings of type glass/inorganic compound/metal/inorganic compound/metal/other
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3639—Multilayers containing at least two functional metal layers
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3652—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366—Low-emissivity or solar control coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3681—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used in glazing, e.g. windows or windscreens
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/281—Interference filters designed for the infrared light
    • G02B5/282—Interference filters designed for the infrared light reflecting for infrared and transparent for visible light, e.g. heat reflectors, laser protection

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Die bekannten Schichtsysteme bestehen aus wechselweise aufgebrachten Silber- und Metalloxidschichten. Durch das reaktive Aufstäuben der Metalloxidschicht wird die darunter liegende Silberschicht von Sauerstoff zerstört und verliert dadurch an Wirkung. Zur Verhinderung dieser Anoxidation wird zwischen beiden Schichten eine Blockerschicht aus Metall aufgebracht. Das erhöht den Aufwand. Erfindungsgemäß werden die Metalloxidschichten aus zwei metallischen Zerstäubungselektroden, die wechselweise mit unterschiedlicher Polarität betrieben werden, aufgestäubt. Die Silberschichten werden in bekannter Weise im Vakuum aufgebracht. Die Frequenz für den Polwechsel beträgt 30 bis 80 kHz. Die Schichtsysteme sind vorzugsweise auf Glas aufgebracht und dienen zur Verglasung von Fenstern.
PCT/DE1996/002429 1995-12-22 1996-12-13 Verfahren zur herstellung wärmereflektierender schichtsysteme auf transparenten substraten WO1997023425A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP96946204A EP0868405B1 (de) 1995-12-22 1996-12-13 Verfahren zur herstellung wärmereflektierender schichtsysteme auf transparenten substraten

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19548430A DE19548430C1 (de) 1995-12-22 1995-12-22 Verfahren zur Herstellung wärmereflektierender Schichtsysteme auf transparenten Substraten
DE19548430.4 1995-12-22

Publications (2)

Publication Number Publication Date
WO1997023425A2 WO1997023425A2 (de) 1997-07-03
WO1997023425A3 true WO1997023425A3 (de) 1997-08-28

Family

ID=7781209

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE1996/002429 WO1997023425A2 (de) 1995-12-22 1996-12-13 Verfahren zur herstellung wärmereflektierender schichtsysteme auf transparenten substraten

Country Status (4)

Country Link
EP (1) EP0868405B1 (de)
AT (1) ATE185131T1 (de)
DE (1) DE19548430C1 (de)
WO (1) WO1997023425A2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19726966C1 (de) * 1997-06-25 1999-01-28 Flachglas Ag Verfahren zur Herstellung einer transparenten Silberschicht mit hoher spezifischer elektrischer Leitfähigkeit , Glasscheibe mit einem Dünnschichtsystem mit einer solchen Silberschicht und deren Verwendung
DE19751711A1 (de) * 1997-11-21 1999-05-27 Leybold Systems Gmbh Beschichtung
DE19850023A1 (de) * 1998-10-30 2000-05-04 Leybold Systems Gmbh Wärmedämmendes Schichtsystem
DE10120383B4 (de) * 2001-04-25 2007-07-26 X-Fab Semiconductor Foundries Ag Verfahren zur Metallisierung von Siliziumscheiben durch Aufsputtern
EP3686634B1 (de) * 2019-01-28 2023-03-01 INTERPANE Entwicklungs-und Beratungsgesellschaft mbH Einseitig spiegelndes bauelement

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD232513A1 (de) * 1984-07-19 1986-01-29 Hochvakuum Dresden Veb Verdampfer fuer plasmagegestuetzte vakuum-beschichtungsverfahren
DE3906374A1 (de) * 1989-03-01 1990-09-06 Leybold Ag Verfahren zum herstellen von scheiben mit hohem transmissionsverhalten im sichtbaren spektralbereich und mit hohem reflexionsverhalten fuer waermestrahlung
US5103766A (en) * 1988-12-21 1992-04-14 Kabushiki Kaisha Kobe Seiko Sho Vacuum arc vapor deposition device having electrode switching means
EP0589699A1 (de) * 1992-09-29 1994-03-30 The Boc Group, Inc. Vorrichtung und Verfahren zum Ablagern von Metalloxydschichten
DE19506515C1 (de) * 1995-02-24 1996-03-07 Fraunhofer Ges Forschung Verfahren zur reaktiven Beschichtung

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3682528A (en) * 1970-09-10 1972-08-08 Optical Coating Laboratory Inc Infra-red interference filter
DE2830723A1 (de) * 1978-07-13 1980-02-14 Leybold Heraeus Gmbh & Co Kg Verfahren zur herstellung von infrarotreflektierenden scheiben durch katodenzerstaeubung
US4336119A (en) * 1981-01-29 1982-06-22 Ppg Industries, Inc. Method of and apparatus for control of reactive sputtering deposition
NO157212C (no) * 1982-09-21 1988-02-10 Pilkington Brothers Plc Fremgangsmaate for fremstilling av belegg med lav emisjonsevne.
DD226018A1 (de) * 1984-05-07 1985-08-14 Ardenne Manfred Verfahren zum aufbringen von tio tief 2 -schichten durch reaktives hochratezerstaeuben
US4965121A (en) * 1988-09-01 1990-10-23 The Boc Group, Inc. Solar control layered coating for glass windows
DE4006804A1 (de) * 1990-03-03 1991-09-05 Renker Gmbh & Co Kg Zweigniede Mehrschichtsystem mit hohem reflexionsvermoegen im infrarot-spektralbereich und mit hohem transmissionsvermoegen im sichtbaren bereich

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD232513A1 (de) * 1984-07-19 1986-01-29 Hochvakuum Dresden Veb Verdampfer fuer plasmagegestuetzte vakuum-beschichtungsverfahren
US5103766A (en) * 1988-12-21 1992-04-14 Kabushiki Kaisha Kobe Seiko Sho Vacuum arc vapor deposition device having electrode switching means
DE3906374A1 (de) * 1989-03-01 1990-09-06 Leybold Ag Verfahren zum herstellen von scheiben mit hohem transmissionsverhalten im sichtbaren spektralbereich und mit hohem reflexionsverhalten fuer waermestrahlung
EP0589699A1 (de) * 1992-09-29 1994-03-30 The Boc Group, Inc. Vorrichtung und Verfahren zum Ablagern von Metalloxydschichten
DE19506515C1 (de) * 1995-02-24 1996-03-07 Fraunhofer Ges Forschung Verfahren zur reaktiven Beschichtung

Also Published As

Publication number Publication date
ATE185131T1 (de) 1999-10-15
WO1997023425A2 (de) 1997-07-03
EP0868405B1 (de) 1999-09-29
DE19548430C1 (de) 1996-12-19
EP0868405A2 (de) 1998-10-07

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