WO1997008595A1 - Dispositif pour compenser les tolerances de guidage dans des positionneurs multiaxes - Google Patents

Dispositif pour compenser les tolerances de guidage dans des positionneurs multiaxes Download PDF

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Publication number
WO1997008595A1
WO1997008595A1 PCT/DE1996/001149 DE9601149W WO9708595A1 WO 1997008595 A1 WO1997008595 A1 WO 1997008595A1 DE 9601149 W DE9601149 W DE 9601149W WO 9708595 A1 WO9708595 A1 WO 9708595A1
Authority
WO
WIPO (PCT)
Prior art keywords
measuring
deviation
guide
axis
inclination
Prior art date
Application number
PCT/DE1996/001149
Other languages
German (de)
English (en)
Inventor
Hans-Jürgen HESSE
Original Assignee
Hesse Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hesse Gmbh filed Critical Hesse Gmbh
Priority to EP96922733A priority Critical patent/EP0847548A1/fr
Priority to AU63526/96A priority patent/AU6352696A/en
Publication of WO1997008595A1 publication Critical patent/WO1997008595A1/fr

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves

Definitions

  • the invention relates to a device for guiding tolerance compensation on multi-axis positioners, a second guiding bracket being displaceably or pivotably mounted on a first guiding bracket with respect to a first axis by means of an associated positioning drive, and a further guiding bracket or on the second guide bracket with respect to a second axis an object is mounted displaceably or pivotably by an associated positioning drive and the respective displacement on the guide supports is continuously determined by an associated coordinate measuring device.
  • the object-side positioning device for example a so-called cross support
  • the latter works in its direction of positioning, ie towards the cross support, just as precisely as its direct or indirect, ie spindle-related, scale and the associated measuring device are designed.
  • the object-side positioning device works in the same direction in relation to the movable object as the associated scale and the measuring system cooperates with it.
  • the position of the object in the two directions based on a fixed basis, differs from the specifications of the two measuring systems, which are each transverse to the positioning directions in the associated guides.
  • the same problem occurs twice with three-axis positioning, since the respective position measurement value indicates the position between the object and the base, each with guide deviations lying in two different guides.
  • Such a multi-axis positioning device has become known from DE 43 12 255 AI.
  • This publication describes an x, y coordinate table in which a y guide plate is arranged on a y base plate with the interposition of actuators and on which there is an x base plate which can be moved in the y direction.
  • the movement of the x-base plate is realized by a nut-spindle gear, whereby a y-guide rod with an associated y-guide bearing is additionally provided.
  • On the x-base plate there is also an x-guide plate, on which a table element is mounted displaceably in the x direction via a further nut-spindle gear.
  • any adjustment of the coordinate table in the x or y direction leads to a slight change in position in the z direction.
  • These changes in position are corrected with the aid of measuring devices which actuate the actuators, so that they can carry out an opposite change in position to compensate for the changes in z-position.
  • Such a coordinate table is therefore technically very complex to implement.
  • the solution is that at least one measuring radiator with a narrow aperture is arranged parallel to the guide on each of the guide carriers and a deviation measuring device is arranged on each of the guided parts of the individual measuring beams so that their deviation measuring signal each transverses at least one position deviation signaled to the direction of the incident measuring beam.
  • narrowly focused beams e.g. Laser beams
  • receivers measuring the tolerance ranges of the respective guides, the measured values of which are output in each case the transverse deviation state the position of the guided part in at least one of the other axial directions.
  • the base-related object position for the individual axis directions thus results in each case as a sum of the position measurement value in the relevant axis and the position deviation measurement value (s) lying in the same direction and measured by the further position device (s) .
  • the respective sums relating to the corresponding coordinate direction are supplied to the associated position controllers as actual coordinate values.
  • the measuring beam is preferably sent coaxially to the axis of rotation, for example through a hollow axis, and directed onto a two-dimensionally operating offset measuring device on the part which is mounted in a rotatable manner.
  • the assignment of the light transmitter, for example the laser, and the measuring receiver to the two mutually positionable parts is arbitrary, but the pivoting of the guided part that occurs in the guide has a much smaller effect on the accuracy of the measurements of the deviation when the receiver on the ge ⁇ led part is arranged.
  • An arrangement with a beam and with a two-dimensional receiver e.g. a two-dimensional CCD array.
  • the center of the beam can be determined from the image data of the beam thus obtained and its coordinates can be obtained as the two dimensions of the deviations.
  • the coordinates are expediently measured with reference to those initial coordinates which are recorded in a basic positioning position used for calibration.
  • pure relative position measurements and relative positioning can also be carried out without prior calibration to a specific starting position.
  • linear arrays of photosensitive cells can also be used, whereby optical means and / or suitable evaluation must ensure that deviations in only one direction affect the measurement in this direction of deviation and the deviation in the other direction does not cause the beam to leave the linear array feed area.
  • the length of a conventional CCD array with, for example, 256 or 512 positions is greater than the length of the deviation range to be recorded. For this reason, the beam path is expanded in this direction towards the end positions in such a way that there is roughly a match between the two lengths.
  • a cylindrical scattering optics or also a collecting optics can be used if the array is arranged behind the focal point.
  • the simplest way to adapt the deviation range to the length of the linear array is to arrange the array at an angle.
  • a collection of the beam paths in this area is made focusing on the array by placing a correspondingly cylindrical converging lens in this direction or a cylindrical concave mirror in the beam path.
  • a collecting and a scattering optical element In general, one will cross a collecting and a scattering optical element, so that extensive use of the beam always occurs in the entire array area.
  • the array output signals are each evaluated by determining a center of gravity with respect to the beam component that is incident in each case, that is to say on its central position.
  • the radiation source When using the method it is a prerequisite for achieving usable deviation measurement values that the beam is always in a defined position in space.
  • the radiation source must advantageously be arranged on the guide or so that the measuring beam is always parallel to this.
  • the radiation source is attached particularly simply to the end of the guide or the guide support and if the latter are subject to a noticeably changing deflection when the load changes, then accordingly a different inclination of the support ends and thus the radiation source mounted there also usually occurs.
  • a resulting beam inclination to the guideway leads to a change in the deviation measurement depending on the distance from the radiation source to the Sensor array.
  • This change can advantageously be determined and corrected by pointing a part of the beam or a parallel beam over the preferably entire length of the guide track to an inclination measuring array.
  • an inclination correction value is formed in relation to the travel distance to the length of the inclination measurement beam, which value must be added to the position deviation measurement value in order to relate the position of the positioned part to an original basis even in the case of a load-dependent change in beam inclination.
  • Such inclination changes will usually occur in the load direction, that is to say in particular in the vertical direction, and therefore i.a. the inclination sensor should also be provided there.
  • a beam split by a beam splitter can be passed on partly to the deviation sensor and partly to the inclination sensor.
  • the sensor preferably consists of a linear array with a beam spread by suitable inclination of the sensor. Since i.a. in the event of a load a change in inclination occurs only in one direction, the Z direction, the measuring beam need not be focused in the transverse direction.
  • Fig. 1 shows a section of a two-axis positioning device
  • Fig. 3 shows a tilt measuring device schematically.
  • FIG. 1 shows a two-axis positioning device in an XY plane with two deviation measuring devices AMX, AMZ1 per positioning device; AMY, AMZ2, each with a laser beam light source S1-S4 and with one positioning device, one axis position measuring device APX, APY, which consists of a measuring ruler LX, LY and an associated coordinate sensor exist.
  • the two coordinate drives consist of motors MX, MY, which are controlled by a position control device ST.
  • Setpoint values Xsoll, Ysoll are fed to this positioning device, which are continuously compared with the actual position values Xist, Yist for a controlled position control, so that the differences between the setpoint and actual values are used as the controller control variable of the motors MX, MY serve.
  • the actual position signal of the X positioning Xactual results from the sum of the X coordinate measurement value SPX and the deviation measurement signal SMX lying in the X direction; The same applies to the actual position signal Yact in the Y direction.
  • the corresponding reference characters contain the letter Y.
  • the two deviation values SMZ1, SMZ2 in the Z direction are also summed and used as a Z coordinate deviation DZ. Depending on the application, these can be omitted. If there is also a Z positioning device, this is provided with further X or Y coordinate deviation measuring devices, and their measured values are also added to the rectified sums.
  • the various deviation measuring devices AMX, AMZ1; AMY, AMZ2 are designed as linear CCD arrays and connected to the control device ST via a multiplexer MPX, so that the signal sequences from the arrays are read out and evaluated one after the other and then fed to the sum formation.
  • the switching elements shown are preferably implemented by a program in the control device ST equipped with a microprocessor.
  • the two linear sensor arrays of each axis positioner can also be replaced by a two-dimensional array. Then only a single measuring source S1, S3 is required for this.
  • the measuring radiators S1, S2; S3, S4 are each mounted on the head on the guides FX, FY and the deviation measuring device AMX, AMZ1; AMY, AMZ2 are each arranged on the slides mounted thereon, the cross slide K or the object slide 0.
  • FIG. 2 shows a first sensor arrangement with a measuring emitter S1, the laser beam of which strikes the deviation measuring device AMY, which is mounted on the cross slide K, parallel to the X axis and to the guide FX.
  • beam scattering is provided via a cylindrical arched mirror WS.
  • a concave curvature can be superimposed on the convex cylinder rotated by 90 °, so that in the event of positional deviations perpendicular to the image plane, the measuring beam always falls on the linear array LSA and does not migrate laterally beyond it.
  • the sensor array LSA is preceded by a cylinder lens ZL whose cylinder axis is parallel to the array LSA and whose focal line lies on it.
  • FIG. 3 shows an arrangement of a long guide support FX with a cross slide K.
  • the measuring source S1 is mounted at the end of the support FX and on the slide K the deviation sensor AMZ1, which in particular determines the load deflection of the support FX. Since the ends of the carrier F incline towards an unloaded starting position during load deflection, the beam path S1 'also inclines to the same extent, whereby the deviation sensor AMZ1 measures the deviation with respect to the inclined measuring beam S1 and not to the output beam path.
  • a parallel beam S1 is therefore advantageously guided to an inclination sensor NZ at the other end of the carrier FX.
  • Its inclination measurement value SNZ is proportional to the length LS 'of the first measurement section of the first measurement beam S1", which is known as the X-displacement measurement signal SPX, and fed in reverse proportion to the length LS "of the second measuring beam S1" to the Z coordinate summer, as are the Z deviation values SMZ1, SMZ2 and possibly a Z coordinate measurement value SPZ, so that a Z actual value Zi ⁇ t is available as the summation result and can be used in the control device ST with a Z coordinate setpoint Zsetpoint to control the controlled actuation of a Z positioning motor.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un dispositif pour compenser les tolérances de guidage dans des positionneurs multiaxes, dans lequel un deuxième support de guidage (FY) peut se déplacer ou pivoter sur un premier support de guidage (FX) par rapport à un premier axe (X), et un autre support de guidage ou un objet (O) peut se déplacer ou pivoter, par l'intermédiaire d'un système d'entraînement de positionneur approprié (MY) sur le deuxième support de guidage (FY) par rapport à un deuxième axe (Y). Le mouvement sur les supports de guidage (FX, FY) est détecté en continu par un dispositif de mesure de coordonnées approprié (APX, APY), au moins un émetteur de faisceaux de mesure (S1-S4) doté d'une ouverture étroite étant monté sur les supports de guidage (FX, FY), avec une orientation parallèle par rapport au guide. Un dispositif de mesure d'écart (AMX, AMY, AMZ1, AMZ2) est disposé sur la pièce guidée (FY, O) recevant les différents faisceaux de mesure, de telle manière que son signal de mesure d'écart (SMX, SMY, SMZ1, SMZ2) indique au moins un écart de position transversalement par rapport au sens du faisceau de mesure incident.
PCT/DE1996/001149 1995-08-29 1996-06-28 Dispositif pour compenser les tolerances de guidage dans des positionneurs multiaxes WO1997008595A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP96922733A EP0847548A1 (fr) 1995-08-29 1996-06-28 Dispositif pour compenser les tolerances de guidage dans des positionneurs multiaxes
AU63526/96A AU6352696A (en) 1995-08-29 1996-06-28 Device for compensating guide tolerance in multi-axis positioners

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19531676.2 1995-08-29
DE1995131676 DE19531676C1 (de) 1995-08-29 1995-08-29 Vorrichtung zum Führungstoleranzausgleich bei Mehrachsenpositionierern

Publications (1)

Publication Number Publication Date
WO1997008595A1 true WO1997008595A1 (fr) 1997-03-06

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Application Number Title Priority Date Filing Date
PCT/DE1996/001149 WO1997008595A1 (fr) 1995-08-29 1996-06-28 Dispositif pour compenser les tolerances de guidage dans des positionneurs multiaxes

Country Status (4)

Country Link
EP (1) EP0847548A1 (fr)
AU (1) AU6352696A (fr)
DE (1) DE19531676C1 (fr)
WO (1) WO1997008595A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106767558A (zh) * 2017-03-27 2017-05-31 华中科技大学 一种导轨基面直线度误差的解耦辨识方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19757957C2 (de) * 1997-12-24 2000-07-27 Bauer Spezialtiefbau Motorisiertes Nivelliergerät
DE19857132A1 (de) * 1998-12-11 2000-06-15 Heidenhain Gmbh Dr Johannes Verfahren und Anordnung zur Verringerung temperaturbedingter Maßabweichungen bei parallel angeordneten Meßsystemen

Citations (7)

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Publication number Priority date Publication date Assignee Title
US3668501A (en) * 1969-06-02 1972-06-06 Opt Omechanisms Inc Means for generating compensating control means
EP0126388A1 (fr) * 1983-05-13 1984-11-28 Hitachi, Ltd. Méthode pour commander une machine-outil à commande numérique
EP0225588A2 (fr) * 1985-12-05 1987-06-16 Odetics, Inc. Appareil de micropositionnement pour le bras d'un robot
US4676649A (en) * 1985-11-27 1987-06-30 Compact Spindle Bearing Corp. Multi-axis gas bearing stage assembly
EP0304307A2 (fr) * 1987-08-20 1989-02-22 Cincinnati Milacron Inc. Appareil et méthode d'asservissement pour capter l'erreur dans la position
US4928019A (en) * 1986-03-12 1990-05-22 Toshiba Kikai Kabushiki Kaisha System for compensatively correcting for displacements due to heat in machine tools
EP0437741A2 (fr) * 1990-01-16 1991-07-24 International Business Machines Corporation Dispositif de positionnement selon deux-dimensions

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JPS55134414A (en) * 1979-04-06 1980-10-20 Hitachi Ltd Precise moving unit
US4516029A (en) * 1983-04-28 1985-05-07 Control Data Corporation E beam stage with below-stage X-Y drive
DD261866A1 (de) * 1987-07-02 1988-11-09 Zeiss Jena Veb Carl Anordnung zur positionierung ebener objekte
US5164602A (en) * 1991-08-23 1992-11-17 Westinghouse Electric Corp. Machine guidance system utilizing fiber optics
DE4312255C2 (de) * 1993-04-15 1995-07-20 Focus Mestechnik Gmbh & Co Kg Koordinatentisch

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3668501A (en) * 1969-06-02 1972-06-06 Opt Omechanisms Inc Means for generating compensating control means
EP0126388A1 (fr) * 1983-05-13 1984-11-28 Hitachi, Ltd. Méthode pour commander une machine-outil à commande numérique
US4676649A (en) * 1985-11-27 1987-06-30 Compact Spindle Bearing Corp. Multi-axis gas bearing stage assembly
EP0225588A2 (fr) * 1985-12-05 1987-06-16 Odetics, Inc. Appareil de micropositionnement pour le bras d'un robot
US4928019A (en) * 1986-03-12 1990-05-22 Toshiba Kikai Kabushiki Kaisha System for compensatively correcting for displacements due to heat in machine tools
EP0304307A2 (fr) * 1987-08-20 1989-02-22 Cincinnati Milacron Inc. Appareil et méthode d'asservissement pour capter l'erreur dans la position
EP0437741A2 (fr) * 1990-01-16 1991-07-24 International Business Machines Corporation Dispositif de positionnement selon deux-dimensions

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106767558A (zh) * 2017-03-27 2017-05-31 华中科技大学 一种导轨基面直线度误差的解耦辨识方法

Also Published As

Publication number Publication date
EP0847548A1 (fr) 1998-06-17
AU6352696A (en) 1997-03-19
DE19531676C1 (de) 1996-11-14

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