WO1996041080A1 - Systeme de micropompe a engrenages monte dans un tube - Google Patents

Systeme de micropompe a engrenages monte dans un tube Download PDF

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Publication number
WO1996041080A1
WO1996041080A1 PCT/US1996/009608 US9609608W WO9641080A1 WO 1996041080 A1 WO1996041080 A1 WO 1996041080A1 US 9609608 W US9609608 W US 9609608W WO 9641080 A1 WO9641080 A1 WO 9641080A1
Authority
WO
WIPO (PCT)
Prior art keywords
pump body
cavity
tube
pump
aperture
Prior art date
Application number
PCT/US1996/009608
Other languages
English (en)
Inventor
Darren C. Ritter
Andrew S. Dewa
Christophe J. P. Sevrain
Keren Deng
Original Assignee
Concis, L.L.C.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Concis, L.L.C. filed Critical Concis, L.L.C.
Priority to EP96918363A priority Critical patent/EP0830510A1/fr
Publication of WO1996041080A1 publication Critical patent/WO1996041080A1/fr

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C13/00Adaptations of machines or pumps for special use, e.g. for extremely high pressures
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/0057Driving elements, brakes, couplings, transmission specially adapted for machines or pumps
    • F04C15/0061Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F04C15/0069Magnetic couplings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00Rotary-piston machines or pumps
    • F04C2/08Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C2/12Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C2/14Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00Rotary-piston machines or pumps
    • F04C2/30Rotary-piston machines or pumps having the characteristics covered by two or more groups F04C2/02, F04C2/08, F04C2/22, F04C2/24 or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C2/34Rotary-piston machines or pumps having the characteristics covered by two or more groups F04C2/02, F04C2/08, F04C2/22, F04C2/24 or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in groups F04C2/08 or F04C2/22 and relative reciprocation between the co-operating members
    • F04C2/344Rotary-piston machines or pumps having the characteristics covered by two or more groups F04C2/02, F04C2/08, F04C2/22, F04C2/24 or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in groups F04C2/08 or F04C2/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C2/3441Rotary-piston machines or pumps having the characteristics covered by two or more groups F04C2/02, F04C2/08, F04C2/22, F04C2/24 or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in groups F04C2/08 or F04C2/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • F04C2/3442Rotary-piston machines or pumps having the characteristics covered by two or more groups F04C2/02, F04C2/08, F04C2/22, F04C2/24 or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in groups F04C2/08 or F04C2/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation the surfaces of the inner and outer member, forming the working space, being surfaces of revolution

Definitions

  • the present invention relates to a pump that is contained within a conduit through which flows the fluid to be pumped.
  • the mechanism for driving the pump is located outside of the conduit.
  • peristaltic-type pumps have been used in conjunction with a deformable conduit for the purpose of pumping the fluid without having the fluid contact any parts of the pump.
  • Such peristaltic pumps are inadequate inasmuch that it is difficult to control the flow rate of fluid, especially where very low flow rates are desired.
  • a preferred embodiment of this invention is directed to a pump of the gear-type that is placed in line with the conduit or tube through which flows the fluid to be pumped.
  • the pump body is secured within the tube and the mechanism for driving the pump body to pump the fluid is mounted completely outside of the tube.
  • the tube with internal pump body may be discarded, and the drive mechanism reused to operate another pump body inside of another tube.
  • the pump body is constructed using microfabrication techniques, thereby availing the pump body for use in tubes having very small internal diameters, and for pumping very low flow rates.
  • the pump construction generates sufficient suction to be self- priming.
  • a substantially constant torque is delivered by the pump, even though, in one embodiment, the gear that is driven by the drive mechanism is eccentrically located. This provides steady operation of the pump.
  • FIG. 1 is a cross section view of an in-line gear pump system in accordance with the present invention.
  • Fig. 2 is a cross-sectional view taken along line 2-2 of Fig. 1.
  • Fig. 3 is an exploded pictorial view of the pump body portion of the present system.
  • Fig. 4a illustrates one of the steps in fabricating a driving gear of the pump of the present invention, whereby a magnetic bar is centered in the gear.
  • Fig. 4b is a diagram of another step employed in fabricating the driving gear, whereby the teeth of the gear are formed.
  • Fig. 5 is a cross-sectional view of the system showing a preferred motor arrangement for operating the pump.
  • Fig. 6 is a cross section view of an alternative motor arrangement for driving the pump.
  • Fig. 7 is a cross-sectional view taken along line 7-7 of Fig. 6.
  • Figs. 8a-8c are end views of three components that comprise an alternative embodiment of a pump body portion.
  • Fig. 9 is an exploded pictorial view of an alternative embodiment of the pump body portion.
  • Figs. lOa-c are end views of three components that comprise another alternative embodiment of a pump body portion.
  • Fig. 11 is an exploded pictorial view of another alternative embodiment of the pump body.
  • the pump system 10 of the present invention generally comprises a pump body 12 that is mounted within a tube 14. Fluid within the tube enters an inlet aperture 16 (Fig. 3), which is in fluid communication with an inlet part 28 of a cavity 18 that is defined in the center of the pump body.
  • a drive gear 20 and engaged driven gear 22 are rotatably mounted within the cavity 18.
  • the drive gear 20 is driven by an actuator 24, described more fully below, for rotating both gears 20, 22, thereby to move fluid received in the inlet part 28 of the cavity 18 to an outlet part 26 of the cavity 18, from which outlet part fluid exits the pump via an outlet aperture 30 formed in the pump body.
  • the pump body 12 is preferably formed using microfabrication techniques.
  • the pump body 12 includes a central disc 32 (Fig. 3) that is generally cylindrical, and has defined within it the cavity 18.
  • the disc 32 is fabricated using a sacrificial
  • LIGA LIGA process
  • the disc 32 is constructed by first growing on a silicon wafer a 700 nm silicon dioxide film for dielectric isolation. Next, a sacrificial layer of a polyimide film, such as is available from Brewer Science of Rolla, Missouri and designated as PiRL(III), is spun onto the silicon dioxide film. Preferably, the sacrificial layer thickness is about 1-2 ⁇ m . The sacrificial layer is heated to about 240 degrees for about one minute to partially cure the layer for mechanical and thermal stability.
  • PMMA polymethyl methacrylate
  • KTI 496K polymethyl methacrylate
  • a film of polymethyl methacrylate (PMMA) photoresist such as that available from OCG Microelectronic Materials, Inc. of West Patterson, New Jersey, and designated as KTI 496K, is spun-coated over the sacrificial layer to form a film approximately 2 ⁇ m thick.
  • a commercially available PMMA sheet approximately 1 mm thick, is solvent bonded to the just- described substrate.
  • a precision mill with a diamond fly cutter, such as manufactured by Leica, A.G., of Heiberg, Switzerland is used to thin the sheet to the desired thickness of the disc.
  • the finished thickness of the disc 32 is 0.250 mm.
  • the photoresist assembly is exposed to x-rays through a mask.
  • the mask defines the shape of the cavity 18, which cavity extends completely through the thickness of the released disc 32.
  • the cavity shape results from the formation of two pair of intersecting, circular holes.
  • the cavity shape also includes all of the space between the two, parallel tangent lines that are common to both of the larger holes.
  • One of the larger holes rotatably houses the drive gear 20, the outer diameter of which drive gear is slightly less than 1.508 mm, preferably about 1.507 mm.
  • the other of the relatively large holes contains the driven gear 22, which has the same diameter as the drive gear 20.
  • the other pair of relatively smaller holes, having diameters of 0.696 mm are centered on a diameter of the disc 32 that is perpendicular to the diameter with which the larger holes are aligned.
  • the smaller holes are spaced 1.508 mm apart, symmetrically about the center of the disc.
  • one of the smaller holes defines the cavity inlet part 28, and the other defines the cavity outlet part 26.
  • the disc 32 is released by dissolving the sacrificial layer in a weak aqueous base, such as ammonium hydroxide.
  • a cylindrical inlet plate 42 and cylindrical outlet plate 44 are constructed using the SLIGA process just defined. Each such plate is preferably 0.250 mm thick, having a 3.175 mm outside diameter.
  • the inlet aperture 16 in the inlet plate 42 and the outlet aperture 30 in the outlet plate 44 are preferably formed to be 0.696 mm in diameter.
  • the driven gear 22 is also formed in accordance with the SLIGA process described above and shaped so that its outer diameter is slightly less than 1.508 mm, preferably about 1.507 mm. In a preferred embodiment, the driven gear 22 has twenty-four teeth, and a pitch diameter of 1.392 mm.
  • the drive gear 20 includes a PMMA base 46, in which is embedded a 78/22 Ni/Fe permalloy bar 48.
  • the bar may be any suitable magnetic material, such as nickel.
  • the drive gear base 46, including its magnetic bar 48, are preferably slightly less than 0.250 mm thick and constructed as described next.
  • a 700 nm silicon dioxide film (not shown) is grown on a silicon wafer 50 (see Fig. 4a) .
  • a sacrificial layer of a polyimide film such as is available from Brewer Science of Rolla, Missouri and designated PiRL (III) , is spun onto the silicon dioxide film.
  • the sacrificial layer thickness is about 1 ⁇ m.
  • the sacrificial layer is heated to about 240 degrees for about one minute to partially cure the layer.
  • a multi-layer metallic film is sputtered onto the release layer to provide an electroplating base.
  • the thickness of each of the three films is 20 nm.
  • the films are applied so that a layer of copper is sandwiched between two layers of titanium.
  • a film of PMMA KTI 4966 is spun onto the sacrificial layer 52 to a thickness of about 2 ⁇ m.
  • a 1 mm thick PMMA sheet is then solvent bonded to the substrate and milled to a thickness of about 150 percent of that of the final, 0.250 mm thickness.
  • a first x-ray mask (not shown) , which defines the area into which will be deposited the magnetic bar 48 (in addition to marks pn the periphery of the PMMA layer used for alignment of a second mask described below) , is positioned between the PMMA and an x-ray source so that the magnetic bar volume and alignment marks are exposed and developed.
  • the magnetic bar 48 may be slightly less than 0.25 mm deep, and 0.3 mm wide, and 1.0 mm long.
  • the bar may be manufactured to that shape and then press-fit into a correspondingly shaped volume defined in the PMMA by the process just mentioned.
  • the bar 48 is produced by electroplating the permalloy to fill the volume in the PMMA layer 54.
  • the permalloy is overplated by about 150 percent of the finished thickness of the drive gear.
  • a second x-ray mask 55 that defines the area 1 shape (teeth, etc.) of the drive gear 20 is aligned with the PMMA layer 54 for exposing and developing the layer.
  • the drive gear is released from the silicon by dissolving the sacrificial layer in the aqueous base.
  • the driven gear 22 and drive gear 20 are fit within the cavity 18 so that their teeth engage or mesh in the space between the cavity inlet part 28 and outlet part 26.
  • the facing, peripheral edges of the inlet plate 42 and outlet plate 44 are solvent bonded to the radially peripheral facing edges 56 of the disc 32, ensuring that the solvent does not reach the movable gears 20, 22, so that those gears remain free to rotate.
  • rotational center 60 of the drive gear 20 is eccentric to the centerline 40 of the pump body by about 0.696 mm. As explained below, however, this eccentricity has little effect on the ability of the pump to provide a substantially uniform torque when actuated.
  • the assembled pump body 20 is inserted into a tube 14, which may be a glass, or a flexible, surgical- grade polyethylene tube having a 3.175 mm inside diameter and a 4.763 mm outside diameter.
  • a glass tube may have a relatively short length, and be connectable at each end to flexible tubing.
  • the curved peripheral side of the pump body is attached to the interior wall 64 of the tube 14 (Fig. 2) by any suitable adhesive selected to be nonreactive with the fluid that is to be pumped through the tube 14.
  • the actuator 24 includes a magnetic coupling 70, comprising two diametrically opposed permanent magnets 72, bonded to internal flats defined on a ring 76 of magnetically- permeable material, such as carbon steel.
  • a magnetic coupling 70 comprising two diametrically opposed permanent magnets 72, bonded to internal flats defined on a ring 76 of magnetically- permeable material, such as carbon steel.
  • One magnet 72 is bonded to ring 76 with its magnetic north pole adjacent to the ring, while the other magnet 72 is bonded with its south pole adjacent to the ring 76.
  • the drive magnet 72 may be, for example, NdFeB32.
  • One side edge of the steel ring 76 is fixed to a flanged bearing 78, through the center of which bearing extends -li ⁇
  • the bearing preferably is removably clamped to the tube 14.
  • the drive magnets 72 are spaced about 0.794 mm from the exterior surface of the tube 14. Nevertheless, the magnetic bar 48 embedded within the drive gear 20 is magnetically coupled to those magnets 72 so that rotation of the coupling 70 (hence, an attendant change in the magnetic field between those drive magnets 72) generates a torque in the magnetic bar 48, thereby rotating the drive gear 20 and engaged driven gear 22. As best shown in Fig. 3, counterclockwise rotation of the drive gear 20 and associated clockwise rotation of the driven gear 22 urges fluid in the inlet part 28 of the cavity to the outlet part 26 of the cavity and out of the pump through the outlet aperture 30.
  • the minute amount of clearance between the drive and driven gears and the holes within which those gears reside permits the volumetric displacement of air or gas in the inlet part 28 as the gears are rotated.
  • a suction about 44 mm of water
  • This self-priming feature occurs, for example, when the drive gear 20 is rotated at about 3500 rpm.
  • the attendant liquid flow rate is about 70 ⁇ l/min.
  • the construction and materials described above permit a substantially uniform magnetic field throughout the pump body, so that the torque developed in the drive gear is generally invariable with respect to the position of the coupling 70 relative to the drive gear 20 in the tube for a given angle between the magnetic field and the magnetic bar 48.
  • the permanent magnets of the coupling provide a constant magnetic flux across the rotating, high- permeability bar 48, a nearly constant torque is applied to the driving gear.
  • the uniform magnetic field attributable to the above-described orientation of the drive magnets 72 is augmented by shaping the magnet surfaces 73 that face the pump body to have a generally concave configuration.
  • the minute, micromachined pump body is actuated by a relatively large coupling, so that a relatively large gap is present between the coupling and the drive gear.
  • a relatively large gap is substantially larger than that found in conventional micromachined devices.
  • the large gap accommodates the wall thickness of the tube within which the pump body is located.
  • the above-described coupling mechanism can be applied to any rotary pumping mechanism.
  • the pumping mechanism need not be limited to those having eccentrically located drive members.
  • Such pumps include, but are not limited to, three-gear pumps, internal gear pumps, rotary vane pumps, lobe pumps and centrifugal pumps.
  • Such pumping mechanisms may be constructed, such as by microfabrication, to be small enough to fit within a tube as described above.
  • the inlet plate 132 (Fig. 8a) and the outlet plate 133 (Fig. 8c) have two apertures for the fluid to pass through.
  • the cavity plate 134 (Fig. 8b) is modified to accommodate three pump gears.
  • the outer two gears 135 are the driven gears 135, and the center one is the drive gear 136.
  • the cavity shape is such to span at least two gear teeth on the top and bottom of the drive gear 136.
  • the drive gear is fabricated in the same manner as the drive gear in the two-gear pump embodiment.
  • the pump is built up and assembled in the same manner as the two-gear pump.
  • the three-gear pump can be driven with the same drive mechanism as the two-gear pump, the flow rate through the pump, however, is double that of the two-gear pump.
  • FIG. 10a Another example of a pump embodiment using the principles of this invention is a vane pump, which is depicted in Figs. 9 and 10.
  • the vane pump is built up in generally the same manner as the gear pump.
  • a shaft 140 extends through the center of all three plates, inlet plate 141 (Fig. 10a) , outlet plate 142 (Fig. 10b) , cavity disc 143 (Fig. 10b) and the rotor 144 (Fig. 10b) .
  • the rotor 144 has vanes 145 assembled into it.
  • the vanes are loaded with springs 149.
  • the springs 149 can be fabricated as part of the vane or as separate pieces that are assembled along with the vanes 145 into the rotor 144.
  • the inlet aperture 146 in the inlet plate 141 is aligned with the region of maximum expansion between the rotor 144 and the cavity disc walls 146.
  • the outlet aperture 147 in the outlet plate 142 is aligned with the region of maximum compression between the rotor 144 and the cavity disc walls.
  • a magnetic bar 148 is fabricated in the rotor so that the vane pump can be driven in the same manner as the two-gear pump.
  • the rotor is magnetically driven in the same manner as the gear pump, except that the rotational center of the magnetic bar in the rotor may be aligned with the rotation center of the magnetic coupling.
  • the coupling may be connected with any rotating mechanism through gears, belts or chains.
  • the coupling rotation may be imparted by an electric, pneumatic or hydraulic motor.
  • Fig. 5 depicts in cross-section one preferred embodiment of an electric motor 80 for rotating the coupling 70.
  • Such a motor 80 includes an internal stator 82.
  • the external rotor 84 of the motor is connected to a T-flanged bearing 86.
  • the bearing is constructed of electrically insulating, non-magnetic material, thereby to magnetically and electrically shield the magnetic field established by the drive magnets 72 from the magnetic field of the electric motor.
  • Figs. 6 and 7 depict an alternative embodiment of an actuator 94 whereby an electric motor having an external stator 96 and internal rotor 98 is mounted to the tube 14 to substantially surround the coupling 70.
  • the coupling 70 fits within a central recess in an annular spacer 100 that surrounds the coupling and is made of electrically insulating non-magnetic material for providing the shielding mentioned above. It is contemplated that an actuator having an external stator could be modified to extend the stator to surround the drive gear and, therefore, provide a magnetic field sufficient to drive the pump without the need for a separate coupling.
  • the stacked version of the pump would comprise an inlet plate 242, a cavity disc 232, an outlet plate 244, another cavity disc 332, an inlet plate 342, etc.
  • the drive gears 220 in each disc are simultaneously rotated by a coupling that has a depth (as measured along the length of the tube) sufficiently large to span all of the connected cavity discs.
  • the cavity discs would be assembled so that the relative positions of the drive and driven gears 222 are alternated in each successive cavity disc, thereby to alternate the rotational direction of the gears in each successive cavity disc for moving the pumped fluid through the entire stack of components.
  • an induetion-type stator could be arranged to actuate the drive gear, hence obviating the need for moving parts in the actuator.
  • the stator, with its associated windings, could be assembled to surround the pump body so that the field induced by the stator generates the torque in the magnetic gear or other rotary member in the pump body. Accordingly, the claimed invention should include all such modifications as come within the scope and spirit of the following claims and equivalents thereto.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

Pompe à engrenages montée en ligne sur le conduit ou le tube (14) transportant le fluide à pomper. Le corps de pompe (12), de préférence fabriqué à l'aide des techniques de microfabrication, est monté à l'intérieur du tube. Le mécanisme (24) d'entraînement du corps de pompe destiné au pompage du fluide est entièrement placé à l'extérieur du tube.
PCT/US1996/009608 1995-06-07 1996-06-06 Systeme de micropompe a engrenages monte dans un tube WO1996041080A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP96918363A EP0830510A1 (fr) 1995-06-07 1996-06-06 Systeme de micropompe a engrenages monte dans un tube

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US47881695A 1995-06-07 1995-06-07
US08/478,816 1995-06-07

Publications (1)

Publication Number Publication Date
WO1996041080A1 true WO1996041080A1 (fr) 1996-12-19

Family

ID=23901472

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1996/009608 WO1996041080A1 (fr) 1995-06-07 1996-06-06 Systeme de micropompe a engrenages monte dans un tube

Country Status (2)

Country Link
EP (1) EP0830510A1 (fr)
WO (1) WO1996041080A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008020272A1 (fr) * 2006-08-18 2008-02-21 Ecole Polytechnique Federale De Lausanne (Epfl) Dispositif implantable de distribution de médicament
WO2009069064A1 (fr) * 2007-11-27 2009-06-04 Koninklijke Philips Electronics N.V. Dispositif implantable de distribution d'une substance thérapeutique
FR2967713A1 (fr) * 2010-11-22 2012-05-25 Commissariat Energie Atomique Microsystemes de compression ou de transformation d'une difference de pressions en deplacement
WO2013037535A1 (fr) * 2011-09-13 2013-03-21 Robert Bosch Gmbh Pompe à engrenages et procédé de fabrication d'une pompe à engrenages
US10610843B2 (en) 2017-11-28 2020-04-07 Talis Biomedical Corporation Magnetic mixing apparatus
US10820847B1 (en) 2019-08-15 2020-11-03 Talis Biomedical Corporation Diagnostic system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3647314A (en) * 1970-04-08 1972-03-07 Gen Electric Centrifugal pump
JPS57143185A (en) * 1981-02-27 1982-09-04 Mitsubishi Electric Corp Rotary compressor
JPH04116287A (ja) * 1990-09-07 1992-04-16 Toshiba Corp 電動圧縮機
US5505594A (en) * 1995-04-12 1996-04-09 Sheehan; Kevin Pump with co-axial magnetic coupling

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3647314A (en) * 1970-04-08 1972-03-07 Gen Electric Centrifugal pump
JPS57143185A (en) * 1981-02-27 1982-09-04 Mitsubishi Electric Corp Rotary compressor
JPH04116287A (ja) * 1990-09-07 1992-04-16 Toshiba Corp 電動圧縮機
US5505594A (en) * 1995-04-12 1996-04-09 Sheehan; Kevin Pump with co-axial magnetic coupling

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8080002B2 (en) 2006-08-18 2011-12-20 Ecole Polytechnique Federale De Lausanne (Epfl) Implantable drug delivery device
CN101541358B (zh) * 2006-08-18 2012-08-15 洛桑联邦理工学院 可植入药物输送装置
WO2008020272A1 (fr) * 2006-08-18 2008-02-21 Ecole Polytechnique Federale De Lausanne (Epfl) Dispositif implantable de distribution de médicament
WO2009069064A1 (fr) * 2007-11-27 2009-06-04 Koninklijke Philips Electronics N.V. Dispositif implantable de distribution d'une substance thérapeutique
US9200624B2 (en) 2010-11-22 2015-12-01 Commissariat A L'energie Atomique Et Aux Energies Alternatives Microsystems for compressing or for converting a pressure difference into a displacement
FR2967713A1 (fr) * 2010-11-22 2012-05-25 Commissariat Energie Atomique Microsystemes de compression ou de transformation d'une difference de pressions en deplacement
WO2012069347A2 (fr) 2010-11-22 2012-05-31 Commissariat à l'énergie atomique et aux énergies alternatives Microsystemes de compression ou de transformation d'une difference de pressions en deplacement
WO2012069347A3 (fr) * 2010-11-22 2013-05-30 Commissariat à l'énergie atomique et aux énergies alternatives Microsystemes de compression ou de transformation d'une difference de pressions en deplacement
WO2013037535A1 (fr) * 2011-09-13 2013-03-21 Robert Bosch Gmbh Pompe à engrenages et procédé de fabrication d'une pompe à engrenages
US10610843B2 (en) 2017-11-28 2020-04-07 Talis Biomedical Corporation Magnetic mixing apparatus
US11998883B2 (en) 2017-11-28 2024-06-04 Talis Biomedical Corporation Magnetic mixing apparatus
US10820847B1 (en) 2019-08-15 2020-11-03 Talis Biomedical Corporation Diagnostic system
US11008627B2 (en) 2019-08-15 2021-05-18 Talis Biomedical Corporation Diagnostic system
US11986299B2 (en) 2019-08-15 2024-05-21 Talis Biomedical Corporation Diagnostic system

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Publication number Publication date
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