WO1995025940A3 - Metrological stylus assembly - Google Patents

Metrological stylus assembly Download PDF

Info

Publication number
WO1995025940A3
WO1995025940A3 PCT/GB1995/000559 GB9500559W WO9525940A3 WO 1995025940 A3 WO1995025940 A3 WO 1995025940A3 GB 9500559 W GB9500559 W GB 9500559W WO 9525940 A3 WO9525940 A3 WO 9525940A3
Authority
WO
WIPO (PCT)
Prior art keywords
stylus
force
assembly
metrological
dimensional
Prior art date
Application number
PCT/GB1995/000559
Other languages
French (fr)
Other versions
WO1995025940A2 (en
Inventor
Euan Morrison
Original Assignee
Rank Taylor Hobson Ltd
Euan Morrison
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB9405419A external-priority patent/GB9405419D0/en
Application filed by Rank Taylor Hobson Ltd, Euan Morrison filed Critical Rank Taylor Hobson Ltd
Priority to EP95911392A priority Critical patent/EP0759148A1/en
Priority to JP7524453A priority patent/JPH09511331A/en
Publication of WO1995025940A2 publication Critical patent/WO1995025940A2/en
Publication of WO1995025940A3 publication Critical patent/WO1995025940A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

A metrological instrument usable for scanning a small area (for example 0.5 mm x 0.5 mm) of the surface of a workpiece to detect roughness features has a stylus assembly in which a short (10 mm) lightweight (5 mg) stylus arm (9) is loaded with a hairspring (17) which provides most of the static stylus force (100 mg force). This construction provides a high acceleration for the stylus tip (13), allowing the stylus to track features of an amplitude over 0.1 νm with data points 1 νm apart and a stylus traverse speed of at least 5 mm s-1. The stylus assembly (7) is supported and driven by a two dimensional traverse unit (5) having two one dimensional stages. Each stage has a balanced compound rectilinear spring mounting using flexure springs arranged to resist gravity through their resistance to bending within the plane of the spring.
PCT/GB1995/000559 1994-03-18 1995-03-15 Metrological stylus assembly WO1995025940A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP95911392A EP0759148A1 (en) 1994-03-18 1995-03-15 Metrological stylus assembly
JP7524453A JPH09511331A (en) 1994-03-18 1995-03-15 Measuring probe assembly

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GB9405419A GB9405419D0 (en) 1994-03-18 1994-03-18 A prototype scanning stylus profilometer for rapid measurement of small surface areas
GB9405419.4 1994-03-18
GB9406709.7 1994-04-05
GB9406709A GB2287790A (en) 1994-03-18 1994-04-05 Contour measuring instrument

Publications (2)

Publication Number Publication Date
WO1995025940A2 WO1995025940A2 (en) 1995-09-28
WO1995025940A3 true WO1995025940A3 (en) 1996-02-22

Family

ID=26304536

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB1995/000559 WO1995025940A2 (en) 1994-03-18 1995-03-15 Metrological stylus assembly

Country Status (4)

Country Link
EP (1) EP0759148A1 (en)
JP (1) JPH09511331A (en)
CN (1) CN1157653A (en)
WO (1) WO1995025940A2 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2306654A (en) 1995-10-31 1997-05-07 Rank Taylor Hobson Ltd Surface measuring apparatus
DE19740141C1 (en) * 1997-09-12 1999-04-29 Daimler Chrysler Ag Method for determining a swirl structure in the surface roughness of a finely machined shaft journal
GB0221255D0 (en) * 2002-09-13 2004-02-25 Renishaw Plc Touch Probe
JP3967274B2 (en) * 2003-02-27 2007-08-29 株式会社ミツトヨ measuring device
GB0625260D0 (en) 2006-12-19 2007-01-24 Renishaw Plc A method for measuring a workpiece using a machine tool
JP5782863B2 (en) * 2011-06-24 2015-09-24 株式会社アルバック Method for improving the performance of a stylus profilometer for surface shape measurement, and stylus profilometer for surface shape measurement using the method
JP6093506B2 (en) * 2012-03-19 2017-03-08 株式会社ミツトヨ Surface texture measuring machine and surface texture measuring method
JP6189153B2 (en) * 2013-09-18 2017-08-30 株式会社ミツトヨ Insulator type measuring instrument
EP3279615B1 (en) * 2016-08-02 2018-10-17 Dr. Johannes Heidenhain GmbH Length measuring device
EP3842731B1 (en) * 2018-08-23 2024-03-06 Big Daishowa Co., Ltd. Misalignment determining device
CN110174038B (en) * 2019-06-28 2020-03-10 温州顺创智能科技有限公司 Annular block radius measuring device
CN114508983B (en) * 2022-02-16 2023-09-01 浙江省工程物探勘察设计院有限公司 Flatness detection device for high-efficiency engineering survey

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4667415A (en) * 1985-11-29 1987-05-26 Gca Corporation Microlithographic reticle positioning system
US4776212A (en) * 1987-06-19 1988-10-11 Federal Products Corporation Pocket surface roughness gage
US5051594A (en) * 1988-02-29 1991-09-24 Japan Ministry Of International Trade And Industry Fine positioning device, as for the stage of a scanning tunneling microscope
EP0509675A2 (en) * 1991-04-13 1992-10-21 T&N TECHNOLOGY LIMITED Measurement of surface roughness
WO1994008204A1 (en) * 1992-10-02 1994-04-14 Tencor Instruments Profilometer stylus assembly insensitive to vibration
EP0594362A1 (en) * 1992-10-20 1994-04-27 International Business Machines Corporation Carriage assembly and positioning device for a scanning probe

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4667415A (en) * 1985-11-29 1987-05-26 Gca Corporation Microlithographic reticle positioning system
US4776212A (en) * 1987-06-19 1988-10-11 Federal Products Corporation Pocket surface roughness gage
US5051594A (en) * 1988-02-29 1991-09-24 Japan Ministry Of International Trade And Industry Fine positioning device, as for the stage of a scanning tunneling microscope
EP0509675A2 (en) * 1991-04-13 1992-10-21 T&N TECHNOLOGY LIMITED Measurement of surface roughness
WO1994008204A1 (en) * 1992-10-02 1994-04-14 Tencor Instruments Profilometer stylus assembly insensitive to vibration
EP0594362A1 (en) * 1992-10-20 1994-04-27 International Business Machines Corporation Carriage assembly and positioning device for a scanning probe

Non-Patent Citations (10)

* Cited by examiner, † Cited by third party
Title
A.JUNG: "Zusammenhänge zwischen Tastergeometrie,Profilgeometrie und Berührkraft bei Oberflächenmessgeräten", FEINWERKTECHNIK + MESSTECHNIK, vol. 94, no. 6, DE, pages 383 - 385 *
D.J.WHITEHOUSE: "A revised philosophy of surface measuring systems", PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS, vol. 202, no. c3, pages 169 - 185 *
F.V.HUNT: "the rational design of phonograph pickups", JOURNAL OF THE AUDIO ENGINEERING SOCIETY, vol. 10, no. 4, USA, pages 274 - 289 *
GEORGE H E ET AL: "A STYLUS/COMPUTER SYSTEM DESCRIBING THREE-DIMENSIONAL ENGINEERING SURFACES", COMPUTERS IN INDUSTRY, vol. 13, no. 4, 1 March 1990 (1990-03-01), pages 295 - 304, XP000137478 *
L.P.HOWARD ; S.T.SMITH: "LONG RANGE CONSTANT FORCE PROFILING FOR MEASUREMENT OF ENGINEERING SURFACES", REVIEW OF SCIENTIFIC INSTRUMENTS PART I, vol. 63, no. 10, NEW YORK US, pages 4289 - 4295 *
R.W.NOSKER ; D.L.MATTHIES: "Basics of videodisc stylus dynamics and interaction with surface imperfections", RCA REVIEW, vol. 43, no. 1, PRINCETON US, pages 179 - 193 *
S.AJIOKA: "The dynamic response of stylus", BULLETIN OF THE JAPANESE SOCIETY OF PRECISION ENGINEERING, vol. 1, no. 4, JAPAN, pages 228 - 233 *
S.OBATA ET AL: "A hi-fi moving-magnet cartridge using tecent technology", JOURNAL OF THE AUDIO ENGINEERING SOCIETY, vol. 32, no. 3, NEW YORK US, pages 123 - 131 *
S.T.SMITH & D.G.CHETWYND: "Foundations of ultraprecision mechanism design", GORDON & BREACH, UK *
ZHANG H -C ET AL: "SURFACE ROUGHNESS OBSERVATION BY SCANNING TUNNELING MICROSCOPY USING A MONOLITHIC PARALLEL SPRING", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B, vol. 12, no. 3, 1 May 1994 (1994-05-01), pages 1669 - 1672, XP000464734 *

Also Published As

Publication number Publication date
CN1157653A (en) 1997-08-20
JPH09511331A (en) 1997-11-11
EP0759148A1 (en) 1997-02-26
WO1995025940A2 (en) 1995-09-28

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