CN1013515B - contact sensing probe - Google Patents
contact sensing probeInfo
- Publication number
- CN1013515B CN1013515B CN 86105617 CN86105617A CN1013515B CN 1013515 B CN1013515 B CN 1013515B CN 86105617 CN86105617 CN 86105617 CN 86105617 A CN86105617 A CN 86105617A CN 1013515 B CN1013515 B CN 1013515B
- Authority
- CN
- China
- Prior art keywords
- movable part
- contact
- workpiece
- sensing
- sensing probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000523 sample Substances 0.000 title claims abstract description 18
- 238000006073 displacement reaction Methods 0.000 claims abstract description 20
- 230000000694 effects Effects 0.000 claims abstract description 11
- 230000008093 supporting effect Effects 0.000 claims description 16
- 230000001133 acceleration Effects 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims 1
- 241001422033 Thestylus Species 0.000 abstract description 13
- 230000035939 shock Effects 0.000 abstract 1
- 239000013078 crystal Substances 0.000 description 3
- 238000009527 percussion Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 235000012771 pancakes Nutrition 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The invention discloses a contact sensing probe for a measuring machine or machine tool for measuring the dimensions of a workpiece.
Referring to figure 1, the probe comprises a housing 11 in which a stylus holder (15) is mounted on a moving support 18, the stylus holder being held in a rest position on the support 18 by a spring 21, the spring 21 providing a yield resistance to prevent the stylus holder from tilting or lifting from the support when the stylus 16 contacts the workpiece, an accelerometer-type sensing device being supported on the stylus holder in the housing for sensing one of the effects of the stylus contacting the workpiece and for generating a signal which is used to stop the machine and to read the coordinates of the instantaneous stylus position.
In various embodiments of the invention the effect of the sensing is that the stylus holder is lifted suddenly or an impact is generated when the stylus is in contact with the workpiece due to the actual displacement of the stylus. In the preferred embodiment, a piezoelectric pressure transducer is used as a sensitive accelerometer for measuring the shock wave.
Description
The present invention relates to the contact-sensing probe that a kind of equipment for the measuring workpieces size uses.
Various contact-sensing probes all have first fixed part that is connected with measuring machine usually, and measuring machine supports this fixed part and is used for moving relative to measured workpiece; Also have a movable member, contact pilotage is housed on this movable member is used for touching the survey workpiece; Also have supporting device to be used for supporting movable member and make it be in rest position on fixed part, when contact pilotage touched the survey workpiece, movable member then departed from its rest position; Also having sensing device to be used for experiencing above-mentioned touching surveys and produces a signal and deliver to and be used for measuring in the system of fixed part position.
In various known contact-sensing probes, contact pilotage contacts by a plurality of piezo-electric device impressions with workpiece.As described in british patent specification No. 1586052 and No. 2049198.
Above-mentioned known gauge head has higher sensitivity compared with some gauge head of experiencing the contact pilotage actual displacement, and this is because the cause of the signal of instantaneous trigger that they can contact with workpiece at contact pilotage.
Yet above-mentioned known gauge head is complicated comparatively speaking, the parts that its contact pilotage itself or stylus holder are made up of a plurality of sensing devices.In addition, in above-mentioned two kinds of known gauge heads, sensing device all is a piezoelectric element, and they are clamped between two parts of said parts rigidly.
Though do not wish to relatively move between the part of these parts, make piezoelectric element be out of shape needed power in order to produce the pressure that response affacts on the contact pilotage, must produce some again and relatively move.With after workpiece contacts, with regard to the accurate position of contact pilotage, this will produce some labile factors at each contact pilotage.For example, may have the permanent strain of one or more sensing devices, or the vibration of measuring machine may produce snap-in force these parts and shell are combined easily.
Purpose of the present invention will provide a kind of gauge head exactly, and this gauge head has been avoided above-mentioned instability, and compares with above-mentioned gauge head, and structure is more simple.
The present invention realizes these purposes by following proposal.It provides a sensing device to be used to experience the contact pilotage of gauge head and contacting of workpiece, this sensing device is a kind of accelerometer formula sensor, it has the part of face-to-face configuration, one of them part is bearing on the face of movable member, move with it, another part of accelerometer is free movable, or is connected with the device that resistance is surrendered in above-mentioned mobile generation.
Like this, this accelerometer can be made by a kind of strain sensor, and this element can produce extremely sensitive pressurized or flexural deformation, to experience moving suddenly of movable member, the vibration that the percussion wave that produces when for example contacting with workpiece owing to contact pilotage causes, or the unexpected displacement of contact pilotage.This accelerometer can be bearing on the face of a movable member side relative with contact pilotage, so that make this accelerometer not be subjected to the influence of stylus position.
The term accelerometer that this instructions uses from start to finish comprises arbitrary power or strain sensor, because power equals the mathematical product of quality and acceleration, device like this is response acceleration inherently also according to being for it.
According to the embodiment of gauge head of the present invention, described with reference to each accompanying drawing, wherein:
Fig. 1 is the partial sectional view of gauge head;
Fig. 2 is the cut-open view along II-II line of Fig. 1;
Fig. 3 is the zoomed-in view of sensitive element among Fig. 1;
Fig. 4 is the view of another alternative forms of sensitive element in the gauge head shown in Figure 1;
Fig. 5 is the partial sectional view of a kind of modification of gauge head;
Fig. 6 is the zoomed-in view of a kind of alternative sensitive element in the gauge head shown in Figure 5;
Fig. 7 is another the alternative form according to gauge head of the present invention.
See figures.1.and.2, have first parts usually or be referred to as shell 11 with numeral 10 gauge heads of representing, it is known that it is fixed on measuring machine carriage 12(itself), gauge head can move relative to measured workpiece 13.
This gauge head also has parts that constitute first movable part 14, and it comprises a stylus holder 15, has the contact pilotage 16 of a free end 17 to be fixed on this stylus holder, when measuring, the free end of contact pilotage is contacted with workpiece.Known motion supporting 18 is made of relative bearing element 19,20, and they are contained in shell 11 respectively and on stylus holder 15 three positions uniform around the contact pilotage axis.The appearance more specifically of motion supporting as shown in Figure 2, bearing element 19 comprises many to ball, bearing element 20 comprises from stylus holder 15 radially-protruding a plurality of cylinders and matching with ball 19.Spring 21 is housed between parts 11 and 14, and it forces parts 14 to be in rest position, promptly illustrated position.When the contact pilotage contact workpiece, parts 14 can depart from the amount of a qualification from rest position, thereby avoid between gauge head and workpiece collision and damage.
When gauge head left workpiece, biasing force no longer existed, and spring 21 restores, and parts 14 are got back on the rest position.Such supporting is characterized in that making stylus holder depart from its rest position and the power that need be added on the contact pilotage is different in different directions, Here it is known touch dynamometry each to non-uniform phenomenon (Lobing).
Spring 21 affacts on the parts 14 through second movable part 22 of a pressure pad form, and this is lined with a tapering point, is bearing on the corresponding recess 14A of middle body of parts 14.This recess 14A can take arbitrary suitable shape, and for example it can be the conical seat of a round nest or a big cone angle.Pad 22 comprises a sensitive element 22A, and the effect (will be described below) that this element can impression generation when contact pilotage and workpiece come in contact also provides an output signal 23.
Carriage 12 can move on the guide rail 24 of measuring machine, and an electro-optical system 25 is measured the instantaneous position of this carriage along guide rail movement.It is known that signal 23 sends storer 26(itself to by system 25) measure this bracket locations when sending signal 23.Measuring operation comprises movable support bracket so that contact pilotage is contacted with workpiece like this, and reads the content on the storer.
Obviously this guide rail 24 can be installed on another guide rail so that provide the three-D displacement of gauge head, or workpiece is installed on the movably worktable of measuring machine, and these all are not draw among the prior art figure.
Relevant with the type of the sensing device of selecting for use, the gauge head that connects sensing device needs a power supply, also needs the electrical equipment of a processing signals to make output signal be suitable for the measuring system use of measuring machine.The feature of such power supply and signal Processing electrical equipment is known, needn't describe in detail.It can be contained in the gauge head and also can be contained on the measuring machine.
Sensitive element 22A is a location accelerometer, when the free end contact workpiece of contact pilotage, is used for experiencing in the various effects of generation.A kind of effect is when contact pilotage contacts with workpiece because contact pilotage tilts or lifts and cause stylus holder to move up.Another kind of effect is a pressure wave, and it is to be passed on the stylus holder by contact pilotage.Though the accelerometer of number of different types can be installed to stylus holder 15 or fill up on 20, be used for experiencing moving up of this stylus holder, in the present embodiment, preferably use a kind of accelerometer of very sensitive pattern so that on contact pilotage, can experience pressure wave.
With reference to Fig. 3, accelerometer is that a flat partially garden shape piezoelectric element 22A is clipped between the upper parts 22B and base element 22C of pad 22.Piezoelectric effect is known, can be described as when pressure affacts on the crystal, and this crystal will produce the performance of voltage.Upper parts 22B is equivalent to flange, is used for mounting spring 21.So spring 21 also will provide a kind of surrender resistance to moving up of piezo-electric device except that producing elastic force is pressed onto stylus holder 15 in its supporting 19, make the pressure wave energy produce pressure in piezo-electric device, thereby generate signal 23.Being electrically connected 32 links to each other with 22C so that signal 23 is delivered in the signal Processing electrical equipment (not shown) with part 22B respectively with 33.The efficient of this pressure converter is improved by adopting a central pressure pad 34 and an annular pressure pad 35.In a kind of alternative plan (not shown), accelerometer 22A can directly be contained on the end face of stylus holder 15.The power of spring 21 acts directly on the part 22C for the awl end of flange 22B, and at this moment this part 22C makes pancake, places on the end face of accelerometer.
With reference to Fig. 4, wherein each element substantially with Fig. 3 in each element be the same, just in this case, piezoelectric element 22A only is bearing in the middle body between pad part 22B and the 22C, so, and under the effect of pressure wave, because their inertia, its periphery then can be crooked.In this case, the surrender resistance is the inertia of this crystal itself.
Obviously, select suitable pressure, just can make piezoelectric sensor before any effective displacement takes place contact pilotage, produce signal 23 by spring 21.When the contact pilotage contact workpiece, on all directions, all requires the same and eliminate respectively in the power that needs on the contact pilotage to touching the inconsistent problem of dynamometry for producing signal.In addition, after the stylus holder displacement, sensing device should not influence it and reset on supporting base.Because there is not any potential inaccuracy in the relative displacement of contact pilotage part and stylus holder as the prior art structure.The invention provides a kind of simple structure, it only uses a single sensing device, and allows that this sensing device moves freely the constraint that is not subjected to contact pilotage and stylus holder.That is to say that though stylus holder can tilt, sensor device then is vertical up-or-down movement.
With being electrically connected of sensing device, with regard to relative simple of the present invention.In another embodiment, spring itself promptly can be used as a kind of being electrically connected, and piezoelectric element must insulate with a side of pad 22 in this case.Also have an embodiment can use the bicrystal assembly that is called " bimorph " (" bi-morph ").
In addition,, when rest position is accurately located, make it to produce signal, so just can determine stylus holder resetting again after departing from stylus holder if expectation realizes being electrically connected with known manner with bearing.
With reference to Fig. 5, a kind of as shown in the figure gauge head 110, have first parts or be referred to as shell 111, it comprises second parts 114 of stylus holder 115 and contact pilotage 116 by means of motion supporting 18 supportings, all these identical with in Fig. 1 and Fig. 2, different then is that parts 114 comprise an intermediary element or be referred to as plate 130 that stylus holder 115 is coupled by a flexible sheet 131.
Parts 111 have an axis 111A.Supporting 118 and spring 119 combinations make plate 130 press to rest position, and promptly in the xsect of axis 111A, is supporting on 118 position as shown in the figure, and plate 130 is subjected to its constraint that straight-line displacement and angular displacement can not be arranged.The configuration of diaphragm 131 is for stoping the straight line and the rotary displacement of supporting base 115, and contact pilotage 116 is with respect to straight line and the rotary displacement of plate 130 in the xsect of axis 111A, but allow that contact pilotage 116 is comprising the angular displacement in the plane of this axis at straight-line displacement on the direction of axis 111A and contact pilotage 116.The power of diaphragm opposing angular displacement all is uniformity all around going up of axis 111A, this just contact pilotage touch survey workpiece desirable can not occur touching dynamometry each to non-uniform phenomenon.
The hole of stylus holder 115 on plate 130 extends axially, and 115 of hole 132 and stylus holders have certain clearance 133.In addition, on the stylus holder 115, in the face of plate 130 has a convex shoulder 134,130 of convex shoulder 134 and plates leave gap 135.Gap 133 and 135 allows that contact pilotage had an initial displacement before stylus holder 115 and plate 130 mesh, and after this, plate moves from the rest position skew and with contact pilotage.This structure make the zero-time that under the control of diaphragm 131, can experience contact pilotage displacement and can not occur touching dynamometry each to non-uniform phenomenon.And can under the supporting 18 and the control of spring 119, experience the continuous dislocation of contact pilotage.
Stylus holder 115 has an extension 136, and the opposite side that it extends to diaphragm 131 is relative with contact pilotage 116, and a free end is arranged, and the counterweight 137 of balance contact pilotage weight is housed above, the gauge head location when being used in the relative perpendicular line inclination of axis 111A or being in horizontal line.
This counterweight 137 comprises the sensitive element 121 of an accelerometer formula, the processing of its output signal 123 with at Fig. 1, the processing mode of the signal 23 described in 2 is the same.
In the present embodiment, the installation of this accelerometer should make touches when surveying workpiece at contact pilotage, can experience because the stylus holder bias motion that lifts or tilt the to cause supporting of contact pilotage mobile; Or the moving of the stylus holder that causes of the percussion wave that produces can experience owing to the contact pilotage contact workpiece time.
Quite similar shown in a kind of accelerometer and Fig. 2 arranged, and the sensor of this form is in stock at the Keller AG of the BBN of U.S. company and Germany.
This accelerometer comprises the flat garden dish of being made by piezoelectric 139, it is connected with a plane 140 of stylus holder by post 141, and itself then is stretched over another end face of this post, so that freely move with stylus holder, and when the motion that stands to make progress suddenly because its its own inertial and crooked and send signal 123.
In a kind of alternative embodiment shown in Figure 6, accelerometer comprises a piezoelectric element 142, and it places in the middle of the free end of counterweight 137 and stylus holder 115.In this scheme, provide the surrender resistance with the also free-moving counterweight 137 of stylus holder, it causes the pressure of the piezoelectric element that caused by pressure wave.
Obviously, gauge head 110 and gauge head 10 measuring workpieces in an identical manner.Carriage 12 and the 25(of system see Fig. 1) constitute the part of following equipment.For example, the lathe handled of the computing machine that need measure when a kind of coordinate measuring machine of measuring workpieces or a kind of processing work.In fact, these equipment all are known.
With reference to Fig. 7, shown in this figure is another embodiment of the present invention.Wherein, gauge head comprises fixed part or is referred to as shell 210 and the movable part 215 that comprises stylus holder 215 and contact pilotage 216.A kind of sensing device 222A that is made up of piezoelectric element is connected an end of stylus holder, and counterweight is connected on the other end.So because the contacting of contact pilotage and workpiece, any moving all of contact pilotage will be experienced by the crooked of piezoelectric element, and the surrender resistance that counterweight 237 provides the inertia owing to piezoelectric element that contact pilotage is moved, and strengthen the effect of this element like this.The signal 223 that is produced by this element is removed through being electrically connected to measuring machine.
Counterweight 237 has the effect that changes piezoelectric element sensitivity, but it is not necessary, if piezoelectric element itself has enough inertia the displacement energy by the suitable signal of its generation is produced enough surrender resistances, also can not use counterweight.
This embodiment is specially adapted to experience the percussion wave that produces when the contact pilotage contact workpiece.
Be used to produce the piezoelectric accelerometer that transducing signal uses though described specially, as long as can using of can on the electrical property of this sensor, changing of any accelerometer, for example pressure-active element or strainometer.
Claims (11)
1, a kind of contact-sensing probe that uses in the equipment of measuring workpieces size comprises:
Fixed part (11) can be fixed on the equipment;
First movable part (14), it comprises contact pilotage (16), when measuring operation, is used for contacting with above-mentioned workpiece;
Fulcrum arrangement (18) is bearing in first movable part on the rest position of fixed part;
Elastic device (21), be contained between the fixed part and first movable part, with the first movable part backup to above-mentioned rest position, the effect that first movable part is subjected to being in reverse to the displacement force of elastic device can be shifted from rest position, when displacement force was cancelled, this elastic device acted on first movable part and makes it return rest position;
Sensing device (22A) carries out sensing when the contact pilotage contact workpiece, this sensing device initially contacts the acceleration sensitive that produced owing to contact pilotage with workpiece for first movable part;
The invention is characterized in:
Be provided with second movable part (22), it can move freely with respect to first movable part, but it is supported to participate in the above-mentioned acceleration of first movable part;
Sensing device (22A) is positioned on second movable part.
2, according to the contact-sensing probe of claim 1, it is characterized in that fixed part comprises a shell (11), and first movable part comprises a stylus holder (15), above-mentioned contact pilotage (16), can be connected with stylus holder, stylus holder stretches out this shell so that contact pilotage is contacted with workpiece from the one side, and second movable part is bearing on the surface of the opposite side with contact pilotage of stylus holder.
3,, it is characterized in that sensing device (22A) contacts the acceleration sensitive of caused pressure wave pattern with workpiece to contact pilotage according to the contact-sensing probe of claim 1 or 2.
4,, it is characterized in that sensing device (22A) contacts with workpiece and during displacement, to the initial motion acceleration sensitive of first movable part at first movable part according to the contact-sensing probe of claim 1 or 2.
5, according to the contact-sensing probe of claim 1 or 2, it is characterized in that second movable part (22) with single point supporting on first movable part (14).
6, according to the contact-sensing probe of claim 5, it is characterized in that second movable part (22) has a point, it is bearing in the recess (14A) of first movable part (14).
7,, it is characterized in that sensing device comprises a piezoelectric element (22A) according to the contact-sensing probe of claim 1 or 2.
8,, it is characterized in that the thrust of above-mentioned elastic device (21) is passed to first movable part (14) through second movable part (22) according to the contact-sensing probe of claim 1 or 2.
9, according to the contact-sensing probe of claim 7, the thrust that it is characterized in that above-mentioned elastic device (21) is through the piezoelectric element transmission.
10, according to the contact-sensing probe of claim 7, (22B, 22C), and piezoelectric element (22A) is clipped between above-mentioned two members to it is characterized in that comprising two members by second movable part (22).
11,, it is characterized in that fulcrum arrangement (18) is a kind of moving supporting according to the contact-sensing probe of claim 1 or 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 86105617 CN1013515B (en) | 1986-06-19 | 1986-06-19 | contact sensing probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 86105617 CN1013515B (en) | 1986-06-19 | 1986-06-19 | contact sensing probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN86105617A CN86105617A (en) | 1988-03-16 |
| CN1013515B true CN1013515B (en) | 1991-08-14 |
Family
ID=4802902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 86105617 Expired CN1013515B (en) | 1986-06-19 | 1986-06-19 | contact sensing probe |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1013515B (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5470038B2 (en) * | 2007-07-13 | 2014-04-16 | 日新産業株式会社 | Contact detector |
| EP2824420B1 (en) * | 2013-07-08 | 2019-03-06 | Hexagon Technology Center GmbH | Device for determining position with an inertial measuring unit |
| CN103398805B (en) * | 2013-07-19 | 2015-06-10 | 安徽理工大学 | Three-dimensional nanometer measurement head elastically supported by spiral leaf spring |
| EP2889573B1 (en) * | 2013-12-24 | 2016-06-15 | Tesa Sa | Motorized inclinable measuring head |
| DE102015219332A1 (en) | 2015-10-07 | 2017-04-13 | Robert Bosch Gmbh | Sensor device and robot assembly with the sensor device |
| CN108534651B (en) * | 2018-04-09 | 2020-03-24 | 浙江大学 | Multipoint-triggered straightness error detection device |
| IT201900020272A1 (en) * | 2019-11-04 | 2021-05-04 | Roboze Spa | CALIBRATION SYSTEM FOR AUTOMATIC ZEROING OF THE ACTUAL VERTICAL COORDINATE Z CORRESPONDING TO THE TIP OF A 3D PRINTER EXTRUDER. |
| CN113635995A (en) * | 2021-08-19 | 2021-11-12 | 厦门大学 | Building transfer robot |
-
1986
- 1986-06-19 CN CN 86105617 patent/CN1013515B/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CN86105617A (en) | 1988-03-16 |
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