JP2024039334A - Dynamic characteristic measurement apparatus - Google Patents

Abstract

To accurately measure horizontal motion characteristics of a work-piece when a vertical load is applied to the work-piece.SOLUTION: A dynamic characteristic measurement apparatus 1 includes: an upper-side holding part 8 and a lower-side holding part 7 that clamp and hold a work-piece W in a vertical direction V; a preload generation mechanism 9 that applies a preload P to the work-piece in the vertical direction through the upper-side holding part; an excitation device 3 that applies vibration U in a horizontal direction H to the work-piece; a load cell 10 that detects a load F applied to the work-piece by the excitation device; and a controller 12 that measures dynamic characteristics K in the horizontal direction of the work-piece on the basis of the load detected by the load cell. The upper-side holding part holds the work-piece in a non-contact manner through an air bearing 20.SELECTED DRAWING: Figure 1

Description

The present disclosure relates to a dynamic characteristic measuring device.

Dynamic characteristic measuring devices for measuring dynamic characteristics of a workpiece are known. The dynamic characteristic measuring device according to Patent Document 1 includes a base, a support placed on the upper part of the base so as to be in a floating state via an air spring, and a base mounted between the base and the support. It includes an electrodynamic vibrator that is provided on the base side of the workpiece and applies vibration in the vertical direction to the workpiece, and a load washer that is provided on the support side of the workpiece and measures the dynamic load applied to the workpiece. Further, the electrodynamic vibrator applies preload in the vertical direction to the workpiece.

JP2020-085528A

The dynamic characteristic measuring device according to Patent Document 1 applies vertical vibration to the workpiece while applying a vertical preload to the workpiece, thereby measuring the vertical movement of the workpiece when a vertical static load is applied to the workpiece. Characteristics can be measured.

Incidentally, there are cases in which it is desired to measure the horizontal dynamic characteristics of a workpiece in a state where a vertical static load is applied to the workpiece. In this case, a preload is applied to the workpiece in the vertical direction while the workpiece is held between the pair of holding parts in the vertical direction, and a vibration in the horizontal direction is applied to the workpiece by the vibrator.

However, with the above configuration, when a horizontal vibration is applied to the workpiece while applying a preload in the vertical direction to the workpiece, the workpiece is restrained by the upper and lower holding parts and cannot be freely displaced in the horizontal direction. . If the workpiece cannot be freely displaced in the horizontal direction, it will cause errors when measuring the horizontal dynamic characteristics of the workpiece.

For this reason, there is a problem in that it is not possible to accurately measure the horizontal dynamic characteristics of the workpiece when a vertical static load is applied to the workpiece.

The present disclosure has been made in view of this point, and its purpose is to accurately measure the horizontal dynamic characteristics of a workpiece in a state where a vertical static load is applied to the workpiece. .

The dynamic characteristic measuring device according to the present disclosure includes an upper holding part and a lower holding part that sandwich and hold a workpiece in the vertical direction, and applies a preload in the vertical direction to the workpiece through the upper holding part or the lower holding part. a preload generation unit that applies vibrations in a horizontal direction to the workpiece; a load sensor that detects a load that is applied to the workpiece by the vibration unit; a control section that measures horizontal dynamic characteristics of the workpiece based on the load, and at least one of the upper holding section and the lower holding section holds the workpiece in a non-contact manner.

According to this configuration, the dynamic characteristic measuring device applies a preload to the workpiece in the vertical direction by the preload generation section while holding the workpiece vertically between the upper holding part and the lower holding part. The vibrating section applies horizontal vibration to the object. Then, the load on the workpiece due to the vibrating section is detected by the load sensor, and the horizontal dynamic characteristics of the workpiece are measured by the control section based on the load.

Here, since at least one of the upper holding part and the lower holding part does not contact the workpiece, even if a horizontal vibration is applied to the workpiece while applying a preload in the vertical direction to the workpiece, the workpiece will not move. , can be freely displaced in the horizontal direction between the upper holding part and the lower holding part. Since the workpiece can be freely displaced in the horizontal direction, errors are less likely to occur when measuring the horizontal dynamic characteristics of the workpiece.

Thereby, it is possible to accurately measure the horizontal dynamic characteristics of the workpiece in a state where a vertical static load is applied to the workpiece.

In one embodiment, at least one of the upper holding part and the lower holding part is provided with an air bearing that supports the workpiece in a non-contact manner.

According to this configuration, an air layer is formed between the surface of the air bearing and the workpiece, thereby allowing the workpiece to freely displace on the surface of the air bearing in the horizontal direction, while the air layer allows the workpiece to move freely in the horizontal direction on the surface of the air bearing. Workpieces can be held vertically.

In one embodiment, the air bearing is swingable by a joint.

According to this configuration, the ability of the air bearing to follow the displacement of the workpiece is improved.

In one embodiment, the workpiece is placed on the lower holding part, and the upper holding part holds the workpiece from above in a non-contact manner.

According to this configuration, the workpiece can be easily held by the upper holding part and the lower holding part.

In one embodiment, the control unit includes a displacement sensor that detects a displacement of the workpiece caused by the vibrating unit, and the control unit is configured to perform the control unit based on the load detected by the load sensor and the displacement detected by the displacement sensor. A dynamic spring constant as the dynamic characteristic in the horizontal direction of the workpiece is measured.

According to this configuration, it is possible to accurately measure the horizontal dynamic spring constant of the workpiece, which is a typical index representing the horizontal dynamic characteristics of the workpiece.

In one embodiment, the upper mass part and the lower mass part include an upper mass part that holds the upper holding part, a lower mass part that holds the lower holding part, and a frame that is placed on a foundation. Each of the side mass parts is supported by the frame via an elastic body.

According to this configuration, it is possible to suppress the resonance of the frame from being transmitted to the upper mass part and the lower mass part (the upper holding part and the lower holding part), thereby improving the horizontal dynamic characteristics of the workpiece. can be measured with greater precision.

According to the present disclosure, it is possible to accurately measure the horizontal dynamic characteristics of a workpiece in a state where a vertical static load is applied to the workpiece.

FIG. 1 shows a dynamic characteristic measuring device in a front view. FIG. 2 shows an enlarged front view of the vicinity of the workpiece in FIG. 1. FIG. 3 shows the air bearing in a front sectional view.

Hereinafter, embodiments of the present disclosure will be described in detail based on the drawings. The following description of preferred embodiments is merely exemplary in nature and is in no way intended to limit the present disclosure, its applications, or its uses.

FIG. 1 shows a dynamic characteristic measuring device 1 in a front view. The dynamic characteristic measuring device 1 measures the dynamic spring constant K as the dynamic characteristic of the workpiece W in the vertical direction (indicated by V) and in the horizontal direction (indicated by H). The up-down direction is the vertical direction. The horizontal direction is a direction perpendicular to the up-down direction, and is the left-right direction and/or the front-back direction.

As shown in FIG. 1, the dynamic characteristic measuring device 1 includes a base section 2, an excitation device 3 as an excitation section, a frame 4 for horizontal measurement, a lower mass section 5 for horizontal measurement, and a lower mass section 5 for horizontal measurement. An upper mass part 6, a lower holding part 7 for horizontal measurement, an upper holding part 8 for horizontal measurement, a preload generation mechanism 9 as a preload generation part, a load cell 10 as a load sensor, a displacement sensor 11, and a control A controller 12 as a part, a frame 13 for vertical measurement, a mass part 14 for vertical measurement, a lower holding part 15 for vertical measurement, and an upper holding part 16 for vertical measurement.

Hereinafter, for the sake of simplicity, the frame 4 for horizontal measurement, the lower mass part 5 for horizontal measurement, the upper mass part 6 for horizontal measurement, the lower holding part 7 for horizontal measurement, and the upper holding part 8 for horizontal measurement are simply referred to as the frame. 4, lower mass part 5, upper mass part 6, lower holding part 7, and upper holding part 8.

The base part 2 is placed on the foundation B. The foundation B is, for example, the floor surface of a floor. The base portion 2 is made of metal, for example. The base portion 2 extends horizontally.

The vibration device 3 is mounted on a mounting plate 13b (described later) of the vertical measurement frame 13 via an air spring (not shown). The vibration device 3 includes an attachment 3a that contacts the vibration target. The vibration device 3 can change the posture of the attachment 3a between a vertically facing posture (not shown) and a horizontally facing posture (see FIG. 1). Thereby, the vibration device 3 can vibrate the vibration target in the vertical direction and the horizontal direction.

The frame 4 is placed on the base portion 2 via a slide rail 17. That is, the frame 4 is placed on the foundation B via the slide rail 17 and the base portion 2. The frame 4 is made of metal, for example.

The frame 4 includes a bottom plate 4a, a middle plate 4b, a top plate 4c, and a support column 4d. The bottom plate 4a is placed on the base portion 2 via the slide rail 17. The middle plate 4b is arranged above the bottom plate 4a. The top plate 4c is arranged above the middle plate 4b. The bottom plate 4a, the middle plate 4b, and the top plate 4c have, for example, a rectangular shape and extend in the horizontal direction. The support column 4d extends in the vertical direction and connects the bottom plate 4a, the middle plate 4b, and the top plate 4c to each other at their outer peripheries.

The lower mass portion 5 is supported on the bottom plate 4a of the frame 4 via a first air spring 18 as an elastic body. The upper mass portion 6 is supported on the middle plate 4b of the frame 4 via a second air spring 19 as an elastic body. The lower mass part 5 and the upper mass part 6 are each block-shaped weights made of metal, for example. The weight, size, shape, etc. of each of the lower mass part 5 and the upper mass part 6 are appropriately set in order to avoid resonance. The lower mass part 5 and the upper mass part 6 are also called floating masses.

The lower holding part 7 is located above the lower mass part 5. The lower mass part 5 holds the lower holding part 7. Specifically, the lower holding part 7 is fixed to the upper part of the lower mass part 5. The lower holding part 7 is, for example, in the shape of a metal block, and extends in the vertical direction. The lower holding portion 7 may be formed integrally with the lower mass portion 5 or may be constituted by a separate member. A plate-shaped mounting table 23 extending in the horizontal direction is fixed to the upper part of the lower holding part 7 (see FIG. 2). Note that, although details will be described later, a load cell 10 is arranged between the lower holding part 7 and the mounting table 23.

The upper holding part 8 is located below the upper mass part 6. The upper mass part 6 holds the upper holding part 8. Specifically, the upper holding part 8 is fixed to the lower part of the upper mass part 6. The upper holding part 8 is, for example, shaped like a metal block and extends in the vertical direction. The upper holding portion 8 penetrates the middle plate 4b of the frame 4 and extends below the middle plate 4b. The upper holding part 8 may be formed integrally with the upper mass part 6 or may be constituted by a separate member.

FIG. 2 shows an enlarged front view of the vicinity of the workpiece W in FIG. 1. As shown in FIG. 2, the workpiece W is placed between the lower holding part 7 and the upper holding part 8. A workpiece W is placed on the upper surface of a mounting table 23 fixed to the upper side of the lower holding part 7. The workpiece W is an elastic body, such as vibration-proof rubber. A metal support plate 24 extending in the horizontal direction is fixed to the upper surface of the workpiece W.

Here, the upper holding part 8 is provided with an air bearing 20. The air bearing 20 is located below the upper holding part 8 and above the workpiece W. Air bearing 20 extends horizontally. The lower surface (front surface) of the air bearing 20 faces the upper surface of the workpiece W via the support plate 24. There is a slight gap A (for example, about several μm) between the lower surface of the air bearing 20 and the upper surface of the support plate 24. The air bearing 20 is made of metal, for example.

FIG. 3 shows the air bearing 20 in a front sectional view. As shown in FIG. 3, the air bearing 20 is connected to the upper holding part 8 via a ball joint 21. The ball joint 21 is a rod-shaped body that extends in the vertical direction. The upper end of the ball joint 21 is fixed to the lower surface of the upper holding part 8. A spherical portion 21a is formed at the lower end of the ball joint 21. The air bearing 20 is connected to the spherical portion 21a of the ball joint 21, and is able to swing vertically and horizontally (back-and-forth and left-right directions) from the spherical portion 21a of the ball joint 21 as a starting point. The air bearing 20 can swing vertically and horizontally with respect to the upper holding part 8 by the spherical part 21a of the ball joint 21.

A nozzle 20a is formed on the lower surface of the air bearing 20. The nozzle 20a communicates with an external compressor (not shown) via a communication path 20b extending inside the air bearing 20. Air is ejected downward from the nozzle 20a. As a result, an air layer is formed in the gap A between the lower surface of the air bearing 20 and the upper surface of the support plate 24 (fixed to the upper side of the workpiece W) (hereinafter sometimes referred to as "air layer A"). The air bearing 20 supports the work W from above in a non-contact manner via the air layer A. The upper holding part 8 holds the workpiece W from above without contact via the air bearing 20 (air layer A).

Returning to FIG. 2, the upper holding part 8 and the lower holding part 7 hold the work W by sandwiching it in the vertical direction. The upper holding part 8 holds the workpiece W in a non-contact manner via the air bearing 20 (air layer A).

Returning to FIG. 1, the preload generation mechanism 9 is comprised of a known electric screw jack mechanism. The preload generation mechanism 9 includes a threaded rod 9a, a pedestal 9b, and a motor 9c. The threaded rod 9a extends in the vertical direction from the base portion 2 to the middle plate 4b of the frame 4. The cradle 9b is engaged with the threaded rod 9a, and receives the middle plate 4b of the frame 4 from below. The motor 9c moves the pedestal 9b in the vertical direction by rotating the threaded rod 9a.

When the pedestal 9b moves in the vertical direction, the middle plate 4b of the frame 4, the upper mass part 6, and the upper holding part 8 also move in the vertical direction in conjunction. By moving the pedestal 9b of the preload generation mechanism 9 downward, the upper holding part 8 presses the workpiece W from above to below via the air bearing 20 (air layer A). The preload generation mechanism 9 applies a vertical preload P to the workpiece W through the upper holding part 8 (air bearing 20). The preload P in the vertical direction on the workpiece W corresponds to a static load on the workpiece W in the vertical direction, and corresponds to, for example, the weight of an engine in a vehicle. The preload P is, for example, about several hundred [N] to several thousand [N].

As shown in FIG. 2, the attachment 3a of the vibration device 3 faces the side surface of the support plate 24 arranged above the workpiece W, and comes into contact with the support plate 24. The vibration device 3 applies a horizontal vibration U to the workpiece W via the support plate 24 by horizontally vibrating the attachment 3a.

The load cell 10 is arranged between a mounting table 23 arranged below the workpiece W and the lower holding part 7. Various known methods can be applied as the load cell 10.

The load cell 10 detects the horizontal load F applied to the work W by the vibration device 3. A plurality of load cells 10 may be prepared so as to correspond to the front-rear direction and the left-right direction. Further, although not shown, a load sensor for detecting the preload P in the vertical direction on the workpiece W may be separately provided. The placement location of the load cell 10 varies depending on the method. For example, the load cell 10 may be attached to the side surface of the mounting table 23 on the opposite side from the vibration device 3.

The displacement sensor 11 detects the horizontal displacement δ of the workpiece W caused by the vibration device 3 . The displacement δ of the workpiece W is mainly caused by elastic deformation of the workpiece W. Various known methods can be applied as the displacement sensor 11. Alternatively, the displacement δ may be calculated by employing an acceleration sensor instead of the displacement sensor 11 and integrating the obtained acceleration by the controller 12, which will be described later. The acceleration sensor in this case functions as the displacement sensor 11. Various known methods can be applied as the acceleration sensor.

A plurality of displacement sensors 11 may be provided so as to correspond to the front-rear direction and the left-right direction. The displacement sensor 11 is arranged on the side surface of the support plate 24 arranged above the workpiece W on the opposite side from the vibration device 3. Note that the placement location of the displacement sensor 11 varies depending on the method.

The controller 12 is composed of a microcomputer and a program. The controller 12 is connected to the vibration device 3, the preload generation mechanism 9, the load cell 10, and the displacement sensor 11. The controller 12 measures (calculates) the horizontal dynamic spring constant (dynamic characteristic) K of the work W based on the horizontal load F detected by the load cell 10 and the horizontal displacement δ detected by the displacement sensor 11. )do. The dynamic spring constant K [N/mm] is obtained by load F [N]/displacement δ [mm]. When the detected values of the load F and the displacement δ include vertical components, the controller 12 may convert them to horizontal components.

As described above, the vibration device 3 can vibrate the vibration target in the vertical direction by positioning the attachment 3a in a vertically facing posture (not shown). Therefore, the dynamic characteristic measuring device 1 has the following configuration in order to measure the dynamic spring constant (dynamic characteristic) K of the workpiece W in the vertical direction.

The upper and lower measuring frame 13 is placed on the base portion 2 . The vertical measurement frame 13 includes a top plate 13a, a column 13b extending in the vertical direction and supporting the top plate 13a, and a mounting plate 13c disposed below the top plate 13a and supported by the column 13b. include. The vertical measuring mass section 14 is supported on the top plate 13a of the vertical measuring frame 13 via a third air spring 22. The vibration device 3 is supported on the mounting plate 13c via an air spring (not shown). The lower holding part 15 for vertical measurement is connected to the attachment 3a (not shown) when the attachment 3a of the vibration device 3 is in a posture facing the vertical direction. The upper holding part 16 for vertical measurement is held at the lower part of the mass part 14 for vertical measurement.

The lower holding part 15 for vertical measurement and the upper holding part 16 for vertical measurement hold the work W by sandwiching it in the vertical direction. The lower holding part 15 for vertical measurement and the upper holding part 16 for vertical measurement apply a preload in the vertical direction to the work W through the upper holding part 16 for vertical measurement by an electric screw jack mechanism (not shown). The vibration device 3 vibrates the attachment 3a in the vertical direction, thereby applying vibration in the vertical direction to the workpiece W via the lower holding part 15 for vertical measurement. Although not shown, there is a vertical load cell for detecting the vertical load applied to the workpiece W by the vibration device 3. Further, there is a vertical displacement sensor for detecting vertical displacement of the workpiece W caused by the vibration device 3. The vertical load cell and the vertical displacement sensor are connected to the controller 12.

(effect)
According to the present embodiment, the dynamic characteristic measuring device 1 is configured such that the workpiece W is held between the upper holding part 8 and the lower holding part 7 in the vertical direction, and the preload generation mechanism 9 is applied to the workpiece W in the vertical direction. While applying a preload P of , horizontal vibration U is applied to the workpiece W by the vibration excitation device 3. Then, the horizontal load F on the work W caused by the vibration device 3 and the horizontal displacement δ of the work W caused by the vibration device 3 are detected by the load cell 10 and the displacement sensor 11, and the horizontal movement spring of the work W is detected by the load cell 10 and the displacement sensor 11. A constant (dynamic characteristic) K is measured by the controller 12 based on the load F and the displacement δ.

Here, since the upper holding part 8 (air bearing 20) does not contact the workpiece W, even if a horizontal vibration U is applied to the workpiece W while applying a preload P in the vertical direction to the workpiece W, the workpiece W can be freely displaced in the horizontal direction between the upper holding part 8 (air bearing 20) and the lower holding part 7. Since the work W can be freely displaced in the horizontal direction, errors are unlikely to occur when measuring the horizontal dynamic spring constant (dynamic characteristic) K of the work W.

Thereby, it is possible to accurately measure the horizontal dynamic spring constant (dynamic characteristic) K of the workpiece W in a state where a vertical static load is applied to the workpiece W.

The dynamic characteristic measuring device 1 according to the present embodiment is particularly advantageous in accurately measuring the dynamic spring constant (dynamic characteristic) K of anti-vibration rubber applied to an engine mount that supports an engine relative to a vehicle body, for example. It is. In addition, the dynamic characteristic measuring device 1 is capable of accurately measuring the horizontal dynamic spring constant (dynamic characteristic) K of the workpiece W when a high frequency (for example, 3 kHz or higher) vibration U is applied to the workpiece W. This is particularly advantageous.

An air layer A is formed in the gap A between the surface (lower surface) of the air bearing 20 and the upper surface of the support plate 24 (disposed above the workpiece W), so that the workpiece W can move onto the surface of the air bearing 20 ( The workpiece W can be held in the vertical direction by the air layer A while being allowed to move freely in the horizontal direction on the lower surface.

Since the air bearing 20 is swingable by the ball joint 21, the ability of the air bearing 20 to follow the displacement of the workpiece W is improved.

When the workpiece W is placed on the lower holding part 7 and the upper holding part 8 (air bearing 20) presses the workpiece W from above without contact, the upper holding part 8 (air bearing 20) and the lower holding part 7 The workpiece W can be held easily.

Since the dynamic characteristic measuring device 1 includes not only the load cell 10 but also the displacement sensor 11, it is possible to accurately measure the horizontal dynamic spring constant K of the workpiece W, which is a typical index representing the horizontal dynamic characteristic of the workpiece W. can do.

The upper mass part 6 and the lower mass part 5 are supported by the frame 4 via a second air spring 19 and a first air spring 18. Therefore, transmission of the resonance of the frame 4 to the upper mass part 6 and the lower mass part 5 (the upper holding part 8 and the lower holding part 7) can be suppressed. Furthermore, transmission of the resonance of the frame 4 to the load cell 10 and the displacement sensor 11 can be suppressed. Thereby, the horizontal dynamic spring constant (dynamic characteristic) K of the workpiece W can be measured with higher accuracy.

The dynamic characteristic measuring device 1 according to the present embodiment is effective in achieving Goal 9 of the SDGs, "Let's create a foundation for industry and technological innovation."

(Other embodiments)
Although the present disclosure has been described above using preferred embodiments, such descriptions are not limiting, and of course, various modifications are possible.

Although the air bearing 20 is configured separately from the upper holding part 8 and is connected to the upper holding part 8 by the ball joint 21, the present invention is not limited thereto. The type of joint is not limited to the ball joint 21. The joint may be a highly rigid universal joint (universal joint that does not affect high frequency characteristics), a joint having a curved surface other than a spherical surface, or the like. The joint absorbs vibration vibration in the vertical direction during horizontal vibration. Preferably, the joint has rigidity. The joint may be omitted. The air bearing 20 may be formed integrally with the upper holding part 8.

The air bearing 20 may be provided in the lower holding part 7 instead of the upper holding part 8. Further, the air bearing 20 may be provided in both the upper holding part 8 and the lower holding part 7. That is, the air bearing 20 may be provided in at least one of the upper holding part 8 and the lower holding part 7. At least one of the upper holding part 8 and the lower holding part 7 may hold the work W in a non-contact manner via the air bearing 20.

A magnetic bearing may be used instead of the air bearing 20. Further, as long as at least one of the upper holding part 8 and the lower holding part 7 holds the workpiece W in a non-contact manner, other holding methods may be adopted.

The mounting table 23 and the support plate 24 may be omitted.

The preload generation mechanism 9 may apply a preload P in the vertical direction to the work W through the lower holding part 7 instead of the upper holding part 8. In this case, the preload generation mechanism 9 preferably moves the bottom plate 4a, the lower mass part 5, and the lower holding part 7 of the frame 4 upward. The preload generation mechanism 9 may be hydraulic rather than electric. The preload generation mechanism 9 may apply a vertical preload P to the workpiece W through both the upper holding part 8 and the lower holding part 7.

The dynamic characteristic K is not limited to the dynamic spring constant, but may include various other indicators representing the dynamic properties of the workpiece W. The workpiece W is not limited to vibration-proof rubber, and may be a coil spring or the like, for example. The vertical direction may include some horizontal component with respect to the vertical direction. The horizontal direction may not be completely perpendicular to the vertical direction, but may be diagonal to the vertical direction.

The displacement sensor 11 may be omitted. The controller 12 may measure the horizontal dynamic characteristic K of the work W based on at least the load F detected by the load cell 10.

INDUSTRIAL APPLICABILITY The present disclosure can be applied to a dynamic characteristic measuring device, so it is extremely useful and has high industrial applicability.

W Work V Vertical direction H Horizontal direction K Dynamic spring constant (dynamic characteristics)
B Foundation A Air layer (gap)
P Preload U Vibration F Load δ Displacement 1 Dynamic characteristic measuring device 3 Vibration device (vibration section)
4 Frame for horizontal measurement 5 Lower mass part for horizontal measurement 6 Upper mass part for horizontal measurement 7 Lower holding part for horizontal measurement 8 Upper holding part for horizontal measurement 9 Preload generation mechanism (preload generation part)
10 Load cell (load sensor)
11 Displacement sensor 12 Controller (control unit)
18 First air spring (elastic body)
19 Second air spring (elastic body)
20 Air bearing 21 Ball joint (joint)

Claims (6)

an upper holding part and a lower holding part that sandwich and hold the workpiece in the vertical direction;
a preload generation unit that applies a vertical preload to the workpiece through the upper holding part or the lower holding part;
a vibrator that applies horizontal vibration to the work;
a load sensor that detects a load applied to the workpiece by the vibrator;
a control unit that measures horizontal dynamic characteristics of the workpiece based on at least the load detected by the load sensor,
At least one of the upper holding part and the lower holding part holds the workpiece in a non-contact manner. The dynamic characteristic measuring device according to claim 1,
The dynamic characteristic measuring device, wherein at least one of the upper holding part and the lower holding part is provided with an air bearing that supports the workpiece in a non-contact manner. The dynamic characteristic measuring device according to claim 2,
The air bearing is a dynamic characteristic measuring device in which the air bearing can be swung by a joint. The dynamic characteristic measuring device according to claim 1,
The workpiece is placed on the lower holding part,
The upper holding section is a dynamic characteristic measuring device that holds the workpiece from above in a non-contact manner. The dynamic characteristic measuring device according to claim 1,
comprising a displacement sensor that detects displacement of the workpiece by the vibrator,
The control unit measures a dynamic spring constant as the horizontal dynamic characteristic of the workpiece based on the load detected by the load sensor and the displacement detected by the displacement sensor. The dynamic characteristic measuring device according to claim 1,
an upper mass part that holds the upper holding part;
a lower mass part that holds the lower holding part;
a frame resting on the foundation;
The upper mass part and the lower mass part are each supported by the frame via an elastic body.